TW201246289A - Workholder - Google Patents

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Publication number
TW201246289A
TW201246289A TW100149334A TW100149334A TW201246289A TW 201246289 A TW201246289 A TW 201246289A TW 100149334 A TW100149334 A TW 100149334A TW 100149334 A TW100149334 A TW 100149334A TW 201246289 A TW201246289 A TW 201246289A
Authority
TW
Taiwan
Prior art keywords
substrate
wafer
step portion
film
jig
Prior art date
Application number
TW100149334A
Other languages
English (en)
Chinese (zh)
Inventor
Wataru Kinoshita
Original Assignee
Sharp Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sharp Kk filed Critical Sharp Kk
Publication of TW201246289A publication Critical patent/TW201246289A/zh

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  • Physical Vapour Deposition (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
TW100149334A 2010-12-28 2011-12-28 Workholder TW201246289A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010294315A JP2012140681A (ja) 2010-12-28 2010-12-28 ヤトイ治具

Publications (1)

Publication Number Publication Date
TW201246289A true TW201246289A (en) 2012-11-16

Family

ID=46414234

Family Applications (1)

Application Number Title Priority Date Filing Date
TW100149334A TW201246289A (en) 2010-12-28 2011-12-28 Workholder

Country Status (3)

Country Link
JP (1) JP2012140681A (ja)
CN (1) CN102569153A (ja)
TW (1) TW201246289A (ja)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6988358B2 (ja) * 2017-10-16 2022-01-05 Tdk株式会社 ワーク保持治具、電子部品処理装置および電子部品の製造方法
CN110042358B (zh) * 2019-04-15 2024-04-26 深圳菲比特光电科技有限公司 镀膜治具和镀膜设备
CN113211343A (zh) * 2021-04-27 2021-08-06 延康汽车零部件如皋有限公司 一种新型标盘装夹系统
CN117428737B (zh) * 2023-09-19 2024-04-16 井贝科技(浙江)有限公司 一种智能型多功能高速静音伺服机械手

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6275064U (ja) * 1985-10-28 1987-05-14
JPH0322064U (ja) * 1989-07-11 1991-03-06
JPH03191061A (ja) * 1989-12-20 1991-08-21 Mitsubishi Electric Corp 成膜用治具
JPH04105544U (ja) * 1991-02-21 1992-09-10 ソニー株式会社 ウエハクランパ
DE10232731A1 (de) * 2002-07-19 2004-02-05 Aixtron Ag Be- und Entladevorrichtung für eine Beschichtungseinrichtung
US8951351B2 (en) * 2006-09-15 2015-02-10 Applied Materials, Inc. Wafer processing hardware for epitaxial deposition with reduced backside deposition and defects
JP5214176B2 (ja) * 2007-06-08 2013-06-19 住友重機械工業株式会社 プラズマガン

Also Published As

Publication number Publication date
CN102569153A (zh) 2012-07-11
JP2012140681A (ja) 2012-07-26

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