TW201241236A - Process for etching a recessed structure filled with tin or a tin alloy - Google Patents

Process for etching a recessed structure filled with tin or a tin alloy Download PDF

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Publication number
TW201241236A
TW201241236A TW101106577A TW101106577A TW201241236A TW 201241236 A TW201241236 A TW 201241236A TW 101106577 A TW101106577 A TW 101106577A TW 101106577 A TW101106577 A TW 101106577A TW 201241236 A TW201241236 A TW 201241236A
Authority
TW
Taiwan
Prior art keywords
tin
substrate
tin alloy
aqueous
recessed structure
Prior art date
Application number
TW101106577A
Other languages
English (en)
Other versions
TWI575111B (zh
Inventor
Neal Wood
Dirk Tews
Original Assignee
Atotech Deutschland Gmbh
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Filing date
Publication date
Application filed by Atotech Deutschland Gmbh filed Critical Atotech Deutschland Gmbh
Publication of TW201241236A publication Critical patent/TW201241236A/zh
Application granted granted Critical
Publication of TWI575111B publication Critical patent/TWI575111B/zh

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    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/22—Secondary treatment of printed circuits
    • H05K3/26—Cleaning or polishing of the conductive pattern
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00—Etching metallic material by chemical means
    • C23F1/10—Etching compositions
    • C23F1/14—Aqueous compositions
    • C23F1/32—Alkaline compositions
    • C23F1/40—Alkaline compositions for etching other metallic material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00—Etching metallic material by chemical means
    • C23F1/44—Compositions for etching metallic material from a metallic material substrate of different composition
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
    • H01L21/3205—Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
    • H01L21/321—After treatment
    • H01L21/32115—Planarisation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
    • H01L21/3205—Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
    • H01L21/321—After treatment
    • H01L21/3213—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
    • H01L21/3205—Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
    • H01L21/321—After treatment
    • H01L21/3213—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer
    • H01L21/32133—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer by chemical means only
    • H01L21/32134—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer by chemical means only by liquid etching only
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/30—Assembling printed circuits with electric components, e.g. with resistor
    • H05K3/32—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
    • H05K3/34—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by soldering
    • H05K3/3457—Solder materials or compositions; Methods of application thereof
    • H05K3/3473—Plating of solder
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
    • H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
    • H01L21/7684—Smoothing; Planarisation
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/05—Patterning and lithography; Masks; Details of resist
    • H05K2203/0502—Patterning and lithography
    • H05K2203/054—Continuous temporary metal layer over resist, e.g. for selective electroplating
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/07—Treatments involving liquids, e.g. plating, rinsing
    • H05K2203/0779—Treatments involving liquids, e.g. plating, rinsing characterised by the specific liquids involved
    • H05K2203/0786—Using an aqueous solution, e.g. for cleaning or during drilling of holes
    • H05K2203/0793—Aqueous alkaline solution, e.g. for cleaning or etching

Description

201241236 六、發明說明： 【發明所屬之技術領域】 本發明係關於印刷電路板、ic基板及類似物之製造，更 特定言之錫及錫合金之蝕刻。 【先前技術】 長期以來，在諸如印刷電路板（PCB)與1C基板之電子設 備製造中’錫及錫合金作爲可焊性表面或焊劑材料。 近期之發展係錫及錫合金以焊劑材料藉由電錄至電子設 備之凹陷結構中之沉積物。錫或錫合金沉積可藉由圖形電 鍍或板面電鍍進行電鍍。 製造焊劑沉積之板面電鍵方法揭示於EP2180770A1中。 具诸如由銅製成之結合概塾之基板表面係錄有焊劑遮罩 材料’並且焊劑遮罩材料中形成開孔以曝露結合襯墊。該 等開孔在此處係指凹陷結構。其它類型的凹陷結構係貫穿 電子設備之介電基板至抗蝕材料或貫穿一層以上之該等層 體形成。 然後’將導電種晶層沉積於整個基板表面與凹陷結構表 面上。然後藉由電鑛將錫或錫合金沉積於導電種晶層上， 以填充該等凹陷結構。 然而，當以錫或錫合金完全填充凹陷結構時，同時將〆 定量的錫或錫合金沉積於未覆蓋凹陷結構的導電種晶層表 面上。為完全填充凹陷結構，始終需要此一過量的錫或錫 合金層。 然後，去除填充有錫或錫合金之凹陷結構之頂部之該過 16232l.doc 201241236 量錫或錫合金^ 此任務可藉由將抗蝕劑沉積於與該等凹陷結構對準的錫 或錫合金表面上，然後蝕刻掉未被抗蝕劑覆蓋的過量錫或 錫合金層來達成。此方法揭示於US 2006/0219567 Α1中。 此方法之弊端諸多：a)經錫或錫合金填充之所得凹陷結構 具有高於周圍焊劑遮罩材料之高度。此導致於隨後製程步 驟中藉由(網板·)印刷額外焊劑材料所沉積的焊劑材料未對 準及b)此方法需要更多製程步驟。 在EP 2180770 ~中揭示之用於製造焊劑沉積之板面電 鑛方法需要-種用於錫或錫合金㈣刻溶液，其可控制到 不需要抗飯劑之程度。當去除過量錫或錫合金層時，触刻 侵触必須相當均句，以使得經錫或錫合金填充之凹陷結構 之表面光滑與平整。 該項技術中 踢合金的水性蝕刻溶液 已知之用於錫及 (Jordan: The Electrodeposition of Tin and its All〇ys, 1995j 373-377頁）由於電鑛於凹陷結構中的錫或錫合金之去除速 度係高於焊劑遮罩材料頂部之過量錫或錫合金層而失敗。 此於經錫或錫合金填充之凹陷結構中產 免此等凹坑，因為隨後步驟中會導致不 生凹坑（圖1)。須避 穩定且不可靠焊接 因此本發明之目的係提供一種使經錫或錫合金填充之凹 陷結構平坦化之避免凹坑形成之方法。 本發明之第二目的係提供經平坦化錫或錫合金㈣沉積 填充之凹陷結構，以製造穩定可靠之焊點。 I6232I.doc 201241236 【發明内容】 該等目的係藉由蝕刻過量錫及錫合金沉積之方法達到， 其包括以下步驟： a.提供一基板，該基板具有經錫或錫合金填充之凹陷結構 與過量錫或錫合金層， b. 提供由氫氧根離子源與經硝基取代的芳族磺酸組成之pH 值大於7之水性蝕刻溶液， c. 使該基板與該水性蝕刻溶液接觸，以去除該等經錫或錫 合金填充之凹陷結構頂部之該過量錫或錫合金層。 【實施方式】 基板（101)包含諸如由銅製成之結合襯墊（1〇2)與具有曝 露結合襯墊（102)之開孔之焊劑遮罩材料（1〇3卜含銅之導 電種晶層（104)覆蓋焊劑遮罩材料（1〇3)表面與結合襯墊 (102)。該等開口係經錫或錫合金填充且類似於經錫或錫合 金填充之凹陷結構（l〇5a)及經填充之凹陷結構（ι〇5&)上方 與焊劑遮罩材料（1〇3)頂部的過量錫或錫合金層（ι〇6卜 使過量錫或錫合金層（1G6)與水性㈣溶液接觸，該水 性敍刻溶液係由氫氧根離切與經硝絲代的芳族續酸組 成且PH值大於7。PH值範圍為'M，更佳u_14。 虱氧根離子源選自由以下組成之群 —·ν A>iawn KOH、NH4〇H與諸如乙醇胺 衫κ &醇胺及二乙酵胺之有相 風乳源及其混合物。最佳氫氧根離子源係Na〇H。氫氧相 離子濃度為0.5-100M，變# Λη , 風乳相 一 g/i更佳〗0·4〇 g/丨及最佳20-30 g/卜 經硝基取代之芳族續酸較 平乂住選自由以下組成之群：鄰硝 I6232l.doc 201241236 基苯靖酸、間硝基苯續酸、對石肖基苯續酸及其等與納及卸 的對應鹽及其混合物。經硝基取代之芳族磺酸、其鹽及其 混合物的濃度為,·】00 g/卜更佳為2〇·8〇 g/1及最佳為：6〇 g/1。 該水性蝕刻溶液可進一步包含潤濕劑。車交佳之潤濕劑係 選自包括下列之群··院基化或芳基化環氧乙炫·環氧丙貌 共聚物、烷基硫酸酯、烷基磺酸酯、芳烷基磺酸酯與低發 泡非離子或陰離子表面活性劑。 進行步驟C時，水性蝕刻劑溫度係保持在20-90°C之間， 更佳 30-70°C。 進行步驟c時，使基板與水性蝕刻溶液接觸1〇_24〇秒， 更佳60·120秒。 可藉由將該基板浸於該水性蝕刻溶液中、藉由用該水性 溶液水平溢流加工該基板或藉由將該水性蝕刻溶液喷塗於 6亥基板上來使基板與水性蝕刻溶液接觸。使基板與水性蝕 刻溶液接觸之最佳方法係藉由利用喷塗或溢流施用來水平 加工。 當具有凹陷結構之基板經受電鍍時會顯現寬廣的電流密 X範圍’尤其係當將錫或錫合金電鑛於凹陷結構内及該基 板頂部上時。電鍍時寬廣的電流密度範圍導致所沉積錫或 錫合金具有非均質晶粒結構。凹陷結構内及該凹陷結構頂 之晶粒尺寸比焊劑遮罩材料頂部上之晶粒尺寸大很多。 該項技術中已知之水性蝕刻溶液侵蝕尺寸較大的錫或錫合 金晶粒之速度比侵蝕小尺寸晶粒快很多。該技術中已知之 162321.如, 201241236 用於錫及錫合金之蝕刻溶液之蝕刻步驟結果顯示於圖丄 中。由於作用於較大尺寸晶粒上之蝕刻侵蝕較快，因此經 具有較大晶粒尺寸的錫或錫合金填充之凹陷結構中會形成 凹坑。經錫或錫合金填充之凹陷結構中之該等凹坑係不可 接受，其會在後續製程步驟中導致不穩定且不可靠之焊接 點。 不依賴於晶粒尺寸，根據本發明之方法會產生作用於錫 與錫合金沉積之均勻蝕刻侵蝕。根據本發明之方法之結果 ” ’、頁不於圖2中。由於均勻蝕刻侵蝕，故在經錫或錫合金填 充之凹陷結構令未形成非所需之凹坑。 實例 本發明將參照以下非限制性實例進行闡明。 實例中所用基板包含直徑1〇〇 μιη及深度3〇㈣之圓柱形 凹陷結構》該等凹陷結構壁係由銅結合襯墊1〇2(底部）與焊 劑遮罩材料1〇3(側壁）組成。 、 將由銅製成之導電種晶層1G4沉積於凹陷結構中與焊劑 遮罩材料⑻頂部。然後藉由電鍵，€凹陷結構填^有踢 105a爲了元全填充凹陷結構，需電鑛過量錫或錫合金 】〇6(板面電鐘）。 過量錫層1G6係藉由下述不同水性#刻溶液去除。 利用光學顯微鏡觀察經不同蝕刻溶液處理之基板之 面將凹〜用作姓刻過量錫或錫合金層（106)之量度。藉由 測量凹陷結構頂部與凹陷結 的距離來量化凹……㉟H儿積頂部之間 几在凹陷結構中心處測量距離。凹坑即 162321.doc 201241236 為不合格，需避免》 實例ι(對比） 使用由50 gM硝酸與50 g/l九水合硝酸鐵組成的酸性水性 蝕刻溶液。在溫度3(TC下，將基板浸於該水性蝕刻溶液中 60s。將過量錫層1〇6完全去除。 經錫105b填充之凹陷結構具有20 μιη的凹坑。因此，不 能獲得穩定可靠之焊接點。 實例2(對比） 使用由50 g/Ι甲磺酸與5〇 g/Ι間硝基苯磺酸鈉鹽組成的酸 性水性触刻溶液。在溫度3〇»c下，將基板浸於該水性蝕刻 溶液中60 s »將過量錫層106完全去除。 經錫105b填充之凹陷結構具有2〇 μιη的凹坑。因此，不 能獲得穩定可靠之焊接點。 實例3(本發明） 使用由50 g/Ι氫氧化鈉與5〇 g/1間硝基笨磺酸鈉鹽組成的 酸性水性蝕刻溶液。在溫度5〇°C下，將基板浸於該水性蝕 刻溶液中60s。將過量錫層ι〇6完全去除。 ’”里錫1 0 5 b填充之凹陷結構未顯示凹坑。因此可獲得穩 定可靠之焊接點。 【圖式簡單說明】 圖h與lb顯示經錫填充之凹陷結構根據先前技術已知的 蝕刻方法進行的蝕刻^ 圖h與2b顯示經錫填充之凹陷結構根據本發明進行的姓 162321.doc 201241236 【主要元件符號說明】 101 基板 102 結合襯墊 103 焊劑遮罩材料 104 導電種晶層 l〇5a 凹陷結構 105b 錫 106 過量錫或錫合金層 I62321.doc

Claims (1)

  1. 201241236 七、申請專利範圍： 1. 一種用於蝕刻過量錫或錫合金沉積物之方沐， ^ 昇包括以 下步驟： a·提供基板（101)，該基板具有經錫或錫合金填充之凹陷 結構（105a)與過量錫或錫合金層（1〇6)， b·提供由氫氧根離子源與經硝基取代的芳族磺醆組成之 pH值大於7之水性蝕刻溶液， c·使該基板與該水性㈣溶液接觸，以去除經錫或錫人 金填充之該等凹陷結構（105&)頂部之該過量踢或錫: 金層（106)。 ° 2. 如請求们之方法’其中該氫氧根離子源係選自由 LiOH、NaOH、KOH與 NH4OH組成之群。 3. 如請求項2之方法，其中該氫氧根離子之濃度係2〇至 g/Ι。 ’其中該㈣基取代的芳族續酸係選 、間硝基苯磺酸、對硝基苯磺酸及其 p ’其中該經硝基取代的芳族磺酸之濃 4. 如請求項1之方法 自由鄰硝基苯磺酸 等混合物組成之群 5. 如請求項4之方法 度係30至60 g/l。 6. 如請求項1之方法，其中該PH值係U14。 7·如請求们之方法，#中該水性敍刻溶液進—步含有潤 8 ·如凊求項1之方法 其中在步驟c期間 溫度係保持在30至7〇t之間。 ’該水性蝕刻劑之 162321.doc 201241236 9.如請求項1之方法，其中在步驟c中，使該基板與該水性 蝕刻溶液接觸60至120秒。 1 0.如請求項1之方法，其中該基板係藉由利用喷塗或溢流 施用水平加工來與該水性蝕刻溶液接觸。 162321.doc
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