TW201219157A - capable of reliably and safely grinding the end face of the thin plate workpiece - Google Patents

Abstract

The objective of the present invention provides a grinding device capable of reliably and safely grinding an end face of a thin plate workpiece. The grinding device of this invention includes: a grindstone (61), a moving means, a plurality of injection nozzles (112) and a control means, wherein the grindstone (61) has a rotatable grinding surface at the outer periphery capable of grinding the end face of the workpiece (W); the moving means enables the grindstone (61) and the workpiece (W) to move relatively in order to grind the end face of the workpiece (W) with the grinding surface; the plural injection nozzles (112) are arranged around the grindstone (61) at substantially equiangular intervals and inject atomized liquid to the grinding surface; and the control means controls the injection of the plural injection nozzles (112) so that the liquid is injected toward the rear side of the rotating direction of the grindstone (61) on the basis of the grinding position of the grindstone (61) in contact with the workpiece (W).

Description

201219157 VI. Description of the Invention: TECHNICAL FIELD The present invention relates to a boring apparatus, a boring method, and a method of manufacturing a thin plate member. [Prior Art] The boring device is a thin plate-shaped workpiece to be used for a substantially square shape (substantially polygonal shape). For example, the end face of the fragile thin glass used in a portable terminal such as a mobile phone is boring. . Most of the screens of the portable terminal use a substantially square thin plate glass plate. Such a thin plate glass is generally formed by cutting a large workpiece shape from a large glass plate, and the cut end face of the glass plate is accurately honed by a grinding stone of a boring device to form a predetermined shape. In particular, when the boring is performed, the chamfering is also performed at the same time, thereby preventing the end surface of the thin glass plate from being damaged. When boring is performed by the grindstone of the above-described boring device, the grindstone is sprayed from the spray nozzle to the grindstone heated during the machining to cool the grindstone. In the case of boring the outer shape of the glass plate as described above, the grinding stone is relatively moved along the periphery of the glass plate, so that the boring processing position where the grinding stone is in contact with the glass plate is 360 degrees as viewed from the direction of the rotating shaft of the grinding stone. Change in any direction. That is, for example, when boring one long side of a substantially square glass plate is assumed, the boring processing position is located at 12 o'clock direction from the direction of the rotation axis, and the short side adjacent to the long side is honed. The cutting position is shifted to the 3 o'clock direction. When the other long sides are honed, the direction is shifted to the 6 o'clock direction. When the other short sides are honed, the direction is shifted to the 9 o'clock direction. Moreover, as described above, the boring plus -5 - 201219157 working position is changed sequentially during the boring operation, and the boring liquid supply means for supplying the appropriate boring liquid for the boring is rotated from the grinding stone. The observation must also be in the direction of 360 degrees. One of the means for supplying the boring liquid to the periphery of the grindstone. (1) A ring-shaped supply pipe centered on a grindstone, continuously supplied from the supply pipe toward the grindstone. The technique of boring fluid has been developed (refer to 曰本2006-3 46 8 03). However, in the case of the supply shape of the boring fluid, a large amount of boring fluid must be consumed. The grindstone rotates the air around it in a state of being rotated, and the supply of the blasting liquid to the grindstone for the air layer must supply the boring fluid at a sufficient pressure and charge. Therefore, from the above-mentioned annular supply pipe In the case of the supply of bismuth, it is necessary to continuously supply the pressure at a nearly double flow rate of the boring fluid required at the boring position to supply a sufficient boring fluid for the boring process. Morphology In the flow rate of the supply, a large amount of boring liquid is sprayed toward the grindstone, and as a result, water is accumulated in the surrounding water, and the grindstone is rotated in the accumulated water. In this case, the water film generated by the rotation of the grindstone will Blocking the jet from the boring fluid may cause the required boring fluid to be stably supplied to the boring position, and may cause the boring fluid to fail. In addition, as a means of supplying other boring fluid, (2) A plurality of injection nozzles are arranged around the square glass plate of the workpiece, and the technique of jetting the boring liquid from the injection nozzle at the cutting position has been developed to set the center axis state. Breaking through the shunting liquid about 10 positions should be filled with the grindstone state should be fixed to the ground and its work is added to the 硏 (refer to 8 -6-201219157 according to Japanese Patent Laid-Open No. 5 - 1 6205 5). However, in the case where the injection nozzle is provided in this way, a large number of injection nozzles must be provided depending on the size of the glass plate, and not only the problem of the cost of the manufacturing apparatus itself becoming high, but also the place where the injection nozzle is installed must be secured. Further, as another means for supplying the boring liquid, (3) a structure in which one of the injection nozzles follows the boring position of the grindstone to change the movement and the ejection direction is also conceivable. However, with this configuration, the following mechanism causes the device to be re-integrated, resulting in an increase in the cost of the honing device itself, and it is necessary to secure the installation space of the above-described follow-up mechanism. [Patent Document 1] Japanese Laid-Open Patent Publication No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. A boring device, a boring method, and a method of manufacturing a thin plate member that perform boring safely. The boring apparatus of the present invention includes: a stage on which a workpiece of a thin plate shape is placed; and a grinding stone having a boring surface that can boring an end surface of the workpiece on the outer circumference and rotatable, for boring by the boring surface a moving means for moving the grindstone and the workpiece relative to the end surface of the workpiece, a plurality of jet nozzles that are disposed around the grindstone at substantially equal angular intervals, and that eject the micronized liquid to the boring surface, and 201219157 The injection of the plurality of injection nozzles is controlled so as to control the liquid toward the rear of the grinding stone in the rotation direction of the grinding stone based on the boring position of the grindstone contacting the workpiece. In the boring device, the workpiece is placed on the stage, and the workpiece and the grindstone are relatively moved by the moving means, whereby the end surface of the workpiece can be honed by the grindstone. Further, in the boring operation, since the spray nozzle sprays the finely divided liquid toward the grindstone, the micronized liquid easily breaks through the air layer which is rotated by the rotation of the grindstone on the surface of the grindstone (the boring surface), which is easy. In addition, since the spray nozzle is used to spray the liquid in the direction of the rotation in comparison with the boring position, the liquid reaching the boring surface of the grindstone easily reaches the boring position with the rotation of the grindstone. . In particular, in the boring device, even if the relative position of the boring processing position and the grinding stone rotation axis is changed as the end face boring progresses, the injection of the injection nozzle can be controlled by the control means, and the boring of the grinding stone can be compared. The position ejects the liquid further in the direction of the rotation, so that it is not necessary to supply a large amount of liquid which is not necessary. Therefore, according to the boring device, it is possible to reduce the cost required for the liquid, and it is possible to prevent the occurrence of water accumulation around the grindstone. Further, since the ejection of the liquid is performed by the spray nozzles disposed around the grindstone, a plurality of spray nozzles are not required to be provided over the entire end portion of the workpiece. Therefore, compared with the case where the injection nozzle is provided over the entire end portion of the workpiece, the apparatus can reduce the number of injection nozzles, can reduce the cost of the manufacturing apparatus itself, and can easily ensure the installation place of the injection nozzle.

-8-201219157 In addition, the boring method of the present invention is a boring method in which an end surface of a thin plate-shaped workpiece is honed by a grindstone in a state in which a liquid is ejected to a grindstone by a spray nozzle. a boring step and a liquid ejecting step; the boring step is such that the grindstone rotates around a rotation axis substantially perpendicular to a plane of the workpiece, and the grindstone and the spray nozzle are opposed to each other with respect to the workpiece Moving, and boring the end surface of the workpiece; the liquid ejecting step is based on the boring position of the grindstone in contact with the workpiece when the boring step is performed, and When the relative position of the rotating shaft is changed, the pulverizing processing position of the grindstone is further sprayed with the micronized liquid behind the rotating direction. In the method, in the liquid ejecting step, the micronized liquid is ejected toward the grindstone from the spray nozzle, and the micronized liquid easily breaks through the air layer which is rotated by the rotation of the grindstone on the surface of the grindstone (the boring surface). It is easy to supply to the boring surface of the grindstone. Further, since the liquid is ejected from the injection nozzle toward the rear side in the rotational direction than the boring processing position, the liquid reaching the boring surface of the grindstone easily reaches the boring position with the rotation of the grindstone. In particular, in the boring method, when the relative position of the boring processing position and the rotating shaft of the grindstone is changed in the liquid ejecting step, the boring processing position of the grindstone can be injected more toward the rear of the rotating direction, so that it is not necessary According to the boring method, it is possible to reduce the cost required for the liquid, and it is possible to prevent the occurrence of water accumulation around the grindstone. Further, in the boring method, in the boring step, the jet nozzle and the grindstone -9 - 201219157 are relatively moved relative to the workpiece, so that it is not necessary to provide a plurality of spray nozzles over the entire end portion of the workpiece. . Therefore, the number of the injection nozzles can be reduced as compared with the case where the injection nozzles are provided over the entire end portions of the workpiece, and the cost of the apparatus for performing the boring method can be reduced, and the installation place of the injection nozzles can be easily secured. In the invention, it is preferable to use a two-fluid nozzle which sprays a liquid and a gas as the injection nozzle. In this way, the sprayed micronized liquid can surely break through the air layer around the grindstone generated by the rotation of the grindstone. In the invention, the injection center axis of the spray nozzle can also be set along the outer periphery of the grindstone. The tangential direction can also be set to substantially intersect the rotation axis of the grindstone. Further, in the invention, the control means may adopt a configuration in which, when the boring operation is performed, when the relative position of the boring processing position and the grinding stone rotating shaft is changed, the injection nozzle for performing the ejection is switched. In this way, when the relative position of the boring processing position and the grinding stone rotation axis is changed, the control means switches the injection nozzles that are ejected among the plurality of injection nozzles, so that the boring processing position of the grindstone can be surely injected further in the backward direction of the rotation direction. Further, in the above configuration, the liquid may further include: a grindstone bearing member that rotatably supports the rotating shaft of the grindstone, and a nozzle holder fixed to the grindstone bearing member, and the plurality of jets The nozzle is mounted to the nozzle holder. Thus, a plurality of injection nozzles can be easily and surely mounted on the nozzle holder fixed to the stone bearing member, and the arrangement of the injection nozzle can be made easy.

Further, in the case of the above configuration, it is preferable to control the injection nozzles to be simultaneously ejected to be two or less, so that the effect of performing a reliable boring operation with a small amount of liquid can be exerted. Further, in the case of employing the above configuration, the control means preferably performs the control of ejecting liquid from an injection nozzle when the grindstone is relatively moved in a direction with respect to the workpiece, after which the grindstone is relatively opposed When the workpiece is moved in the other direction crossing the one direction, the liquid is ejected from the other ejection nozzles, and the relative movement from the one direction to the relative movement in the other direction is performed from the one ejection nozzle and Both of the other injection nozzles eject liquid. In this way, the end surface in one direction of the workpiece is ejected from the one jet nozzle, and the end surface in the other direction of the workpiece is ejected from the other jet nozzle, so that the boring operation can be surely performed. Between the end surface in one direction of the workpiece and the end surface in the other direction (for example, a corner portion), since the liquid is ejected from both the ejection nozzle and the other ejection nozzles, the liquid can be surely supplied while the liquid is supplied. Boring of the workpiece. Further, in addition to the above-described boring apparatus and boring method, the object of the present invention further includes a method of manufacturing a thin plate-shaped member including the above-described boring method. As described above, according to the present invention, since the jet nozzle can reliably cause the liquid to reach the boring position of the grindstone and perform the boring of the workpiece, the end surface of the thin plate-shaped workpiece can be reliably and safely Boring Process [Embodiment] -11 - 201219157 Hereinafter, embodiments of the present invention will be described in detail based on the drawings. First, the overall structure of the boring device will be described with reference to Figs. 1 to 3 . Further, in each of the drawings, the boring device is also known as a well-known device, and a protective plate is provided around the inside in order to secure the safety of the operator. As shown in Figs. 2 and 3, the boring device has a substantially rectangular lattice-shaped base 1 at the lower portion, and various units for performing boring processing are provided on the boring. In the base 1, the known steel square members 11, 12, and 13 are combined in the left-right direction, the front-rear direction, and the up-and-down direction, and the upper units are strongly supported. A flat iron material 14 made of iron is placed on the upper surface of the base 1. The square plates 11, 12, 13 of the base 1 are shielded by the flat plate 14, and the units can be placed on the base 1. Further, an electronic control unit 15 (control means) is provided in the base 1 to control various units for boring processing. Further, although not described in detail, the electronic control unit 15 is provided with storage means for storing processing information and the like. Further, although not shown, a control panel for allowing the operator to input information to the electronic control unit 15 is also provided. As shown in Fig. 1, the unit provided on the upper portion (on the base 1) of the boring device 包含 includes: a transport robot 2 installed at the center, and four processing units 3Α, 3Β, 3C installed around the center. 3D. The loading/unloading table 4 provided in front of the transport robot 2 and the illumination moving unit 5 extending in the front-rear direction at the left and right sides of the transport robot 2 are provided. The transport robot 2 is composed of a horizontal joint type (SCAR A) robot that is called a three-way -12-201219157 section that moves in the horizontal direction. Fig. 1 to Fig. 3 show a reference state in which the transport robot 2 does not operate, and the operation state will be described later with reference to Figs. 4 to 6 . The upper and lower slide shafts 20 are provided at the front end of the transport robot 2. At the lower end of the upper and lower slide shafts 20, a suction hand 2 1 for sucking and holding a substantially square (substantially polygonal) thin plate glass W of a workpiece (workpiece) is provided. Further, at the upper end of the vertical slide shaft 20, a camera 23 for image acquisition is attached through the mounting bracket. In the transport robot 2, the thin plate glass W (Wo, Wi) is transported from the loading/unloading table 4 to the respective processing units 3A, 3B, 3C, and 3D, and is fed to the take-out table from each of the processing units 3A, 3B, 3C, and 3D. 4 handling. The conveyance operation of the workpiece W is performed by the suction hand 21. Further, the transport robot 2' can image the mounted workpiece W from above the processing units 3A, 3B, 3C, and 3D by the camera 23. The four processing units are respectively disposed in the first processing unit 3A, the second processing unit 3B, the third processing unit 3C, and the fourth processing unit 3A, 3B, 3C of the front, rear, left, and right of the transport robot 2, The components of 3D are set to be identical ', and the same boring operation can be performed. For example, as shown in the first processing unit 3 A, the constituent elements include a processing table 30 that adsorbs and holds the workpiece W in a boring state, and a boring spindle 31 ′ adjacent to the boring of the workpiece W from above the processing table 30 The tool table 32 for holding a plurality of boring tools (grinding stones), and the spray nozzle unit 1 1 朝向 for grinding the blasting liquid attached to the honing spindle 31. In the processing table 30, a left and right slide mechanism 34 (moving means) for sliding the center processing stage 33 in the left and right directions is provided. A resin telescopic cover 35 is provided on the left and right sides of the processing stage 33 (the telescopic cover on the right side of the processing stage 33 is covered by a boring spindle or the like and is not shown). The telescopic cover 35 prevents the blasting liquid from intruding into the left and right sliding mechanism 34. Further, a baffle plate 36 having a rectangular box shape and having an upper opening is provided on the upper surface of the processing stage 33, and the baffle is prevented from splashing by the baffle 36. Further, the boring main shaft 31 is provided with a rear slide mechanism 38 (moving means) which is slidably movable in the front-rear direction. Further, between the boring spindle 31 and the front and rear slide mechanisms 38, the upper and lower guide mechanisms 39 are movable in the up and down direction. In this way, the boring spindle 31 is freely movable not only in the front-rear direction but also in the up-and-down direction. Further, as shown in Fig. 2, the front and rear slide mechanism 38 is a side seat 16 that is strongly fixed to a large square material extending in the front-rear direction. In this way, the support rigidity of the boring spindle 31 can be improved and the boring precision can be improved. The tool 匣32 can hold up to five boring tools (grinding stones) 6, ... (refer to Fig. 2 and Fig. 3). A plurality of boring tools 6 such as grindstones having different diameters and grindstones having different honing materials are held in the tool cymbal 32. The plurality of boring tools 6 are selectively attached to the boring spindle 3 1 in accordance with the processing contents. The input/unloading table 4 includes an opening and closing door 40 for opening and closing the operator, and interlocking with the opening and closing door 40. The moving rectangular cymbal mounting table 4 1 and the workpiece 匣 42 detachably provided to the cymbal mounting table 41 are provided. The opening and closing door 40 is formed of a rectangular steel plate having a long lateral length of a hinge shaft 14-8 201219157 43 (see FIG. 3) extending in the horizontal direction at the lower end, and a handle having a substantially U-shaped shape in plan view is provided on the upper outer surface. Part 44. The operator 握 holds the handle portion 44 to rotate the opening and closing door 40 toward the front side around the hinge shaft 43 to open the loading/unloading table 4, and takes out the workpiece W into the boring device. Both side ends of the cymbal mounting table 41 are coupled to a coupling mechanism 45 connected to the upper portion of the opening and closing door 40. Further, the lower portion of the crucible setting table 41 is slidably placed on the slide rail 46 extending in the front-rear direction (see Fig. 3). Therefore, when the operator performs the opening operation of the opening and closing door 40, the transmission connecting mechanism 45 can slidably move the cymbal mounting base 41 connected to the opening and closing door 40 to the outer side of the boring device 。. When the operator 关闭 performs the closing operation of the opening and closing door 40, the sill setting table 41 can be slidably moved toward the inner side of the boring device 。. The workpiece 匣 42 is provided with four laminated portions 48 partitioned by a resin wall 47, and four workpiece W laminates can be arranged in the left-right direction. In this case, the unprocessed workpiece Wi is laminated on the right two laminated portions 48, and the processed workpiece Wo is laminated on the left two laminated portions 48. The workpiece 42 is provided at both ends with a grip portion 49 for conveyance so that the operator can remove the workpiece W from the crucible setting table. The operator mounts (places) the unprocessed workpiece W on the workpiece crucible 42. The workpiece 匣 42 on which the workpiece W is placed is placed on the cymbal mounting table 41, and the opening and closing door 40 is closed to complete preparation before processing. The illumination moving unit 5 includes a moving rail 5 that extends in the front-rear direction on both sides of the transport robot 2, and a substantially square-shaped illumination frame 52 that is supported by the moving rail 50 by the vertical movement mechanism 51. The front end and the rear end of the moving rail 50 are transmitted through the support brackets 50a, 50a, -15-201219157, and are disposed on the metal flat plate 14»the rear end of the moving rail 5 延伸 extends to the processing unit on the rear side (second The tool 匣3 2 position of the machining unit 3Β, the fourth machining unit 3D). Therefore, the illumination frame 52 can be largely moved to the rear side of the boring device ,, and the standby point when the illumination frame 52 is not used (at the time of boring processing in each of the processing units 3Α, 3Β, 3C, and 3D) allows The illumination frame 52 is retracted to the position on the rear side. The illumination frame 52 is in each frame portion 52a. . . A plurality of LEDs (not shown) are embedded in the inner peripheral surface to illuminate the inside of the frame. The illumination frame 52 can be moved to the shutter 36 of the processing table 30 when the camera 23 captures the workpiece W, and the workpiece W can be illuminated from the side by the LED to make the shape (profile) of the workpiece W appear, and the workpiece can be easily performed. W shooting. Next, the transport robot 2 will be described with reference to Figs. 4 to 6 . Fig. 4 is a three-side view of the transport robot, (a) is a front view, (b) is a side view, and (c) is a plan view. Fig. 5 and Fig. 6 are explanatory views of the operation when the transport robot performs the transport, and Fig. 5 (a) shows the state from the reference state to the workpiece hold start state. The fifth (b) diagram shows the progress from the workpiece holding start state to The workpiece conveyance state of the processing table, Fig. 6(c) shows the workpiece conveyance state to the processing table to the camera shooting state, and Fig. 6(d) shows the state from the camera shooting state to the next workpiece holding state. The transport robot 2 is composed of a horizontal joint type robot that moves in the horizontal direction as described above, and is movable in the horizontal direction. Specifically, as shown in Fig. 4(b), the transport robot 2 is provided to be rotatable in the first joint 2Ja, the second joint 2Jb, and the third joint 2JC, and is movable in the left-right direction. Thus, the vertical sliding shaft 20 at the front end of the front side arm 24 can be moved in the horizontal direction from 8 -16 to 201219157. The vertical sliding shaft 20 penetrates the front end of the front arm 24 in the vertical direction, and is also slidable in the vertical direction. The suction hand 21 is provided at the lower end of the upper and lower slide shafts 20. The suction hand 21 is provided with four suction cups 26 facing the lower side on a rectangular flat bottom plate 25. . . . The negative pressure is applied to the suction cup 26 to generate an adsorption force, whereby the sheet glass W of the workpiece is adsorbed and held. These four suction cups 26, ..., as shown in Fig. 4 (c), are provided with two on the left and right sides. The two workpieces W are adsorbed and held by the two suction cups 26. Therefore, one suction hand 21 can carry two pieces of workpiece W one time. Further, in the suction hand 21, pins 72 projecting downward are provided at both ends of the bottom plate 25. The pins 27 and 27 are abutting members that abut against the workpiece W. That is, before the workpiece W is transported, the workpiece W is pushed into the workpiece 匣42 by the pin 27 via the movement of the transport robot 2, and the workpiece W is aligned in the workpiece 匣42. The camera 23 described above is provided at the upper end of the vertical slide shaft 20. The camera 23 holds a position (the protruding portion of the bottom plate 25) with respect to the workpiece W of the suction hand 21, and is disposed at a position shifted by about 90°. This is because when the camera 23 performs photographing, it is prevented from being blocked by the bottom plate 25. The camera 23 is constituted by a general CCD camera and can acquire two-dimensional image data. Further, the camera 23 is attached to the vertical slide shaft 20 via a mounting bracket 22. The mounting bracket 22 includes a wrist portion 22a that is slightly curved downward, a camera mounting portion 22b that can adjust the position in the vertical direction, and a cylindrical shaft fixing portion 22c that is fixed to the vertical sliding shaft 20. Since the camera 23 is fixed to the upper and lower slide shafts 20 through the wrist portion 22a, it is located at a position separated from the vertical slide shaft 20, and the front arm 24 can be prevented from being reflected during shooting. Next, the operation when the transport robot 2 performs the transport will be described with reference to Figs. 5 and 6 . As shown in Fig. 5(a), the transport robot 2 first slightly rotates the joints in the counterclockwise direction from the reference state, and adsorbs the unprocessed workpiece Wi stacked on the workpiece 匣 42 by the suction hand 2 1 . At this time, the upper and lower slide shafts 20 are largely rotated counterclockwise to rotate the bottom plate 25 of the suction hand 21, and the unprocessed workpiece Wi is sucked by the suction cup 26 on the left side. Then, as shown in Fig. 5(b), the transport robot 2 rotates the joints in a counterclockwise direction to convey the workpiece Wi to the processing table 30 of the first processing unit. At this time, the workpiece Wi is transported to the position of the large cymbal and placed on the processing table 30. That is, the strict position confirmation is not performed, and the workpiece Wi is transported to the processing table 30 and placed at the position of the raft. Next, as shown in Fig. 6(c), the transport robot 2 rotates the front side arm 24 further in the counterclockwise direction, and rotates the up and down slide shaft 20 in the clockwise direction, so that the camera 23 is surely positioned on the workpiece Wi. Above (just above). In this way, the transport robot 2 can photograph the workpiece Wi carried and placed by the camera 23. Further, the order of photographing of the workpiece W and the like are described later. Finally, as shown in Fig. 6 (d), after the photographing of the workpiece Wi is completed, the transport robot 2 resets the joints in the clockwise direction in order to carry the next unprocessed workpiece W, by the left side of the bottom plate 25. The suction cup 26 sucks the next workpiece W. 8 -18- 201219157 Then, the transport robot 2 repeats the operation of Fig. 5(b), and the unprocessed workpiece W is transported from the workpiece 匣42 to the next processing stage. In this way, the unprocessed workpiece W can be continuously transported on the processing table of the empty processing unit. Further, although not specifically shown, the transport robot 2 transports the processed workpiece W after the machining is completed by the suction cup 26 on the right side, and transports it from the processing table 30 to the workpiece 匣42. The transport robot 2 receives the processed workpiece Wo from the processing table 30 before performing the operation of Fig. 5(b), and simultaneously transports the unprocessed workpiece Wi and transports the processed workpiece Wo. Next, the processing unit will be described. Fig. 7 is a plan view of the machining unit, Fig. 8 is a front view of a part of the machining unit, and Fig. 9 is a side view of the machining unit including a part of the section. The machining unit 3B (described as a second machining unit for convenience) has a processing table 30 for holding the workpiece W, a boring spindle 31 for boring the workpiece W, and holding 硏 as shown in Fig. 7 The tool 匣32° of the cutting tool 6 includes the rectangular processing stage 33 (stage), the left and right sliding mechanism 34 for moving the processing stage 33 to the left and right, and the telescopic cover 35 covering the left and right sliding mechanism 34. The baffle plate 36 disposed on the upper surface of the processing stage 33 and the jet nozzle unit 1 1 硏 for jetting the blasting liquid. Further, as shown in Fig. 8, the processing table 30 further includes various components. First, on the upper surface of the processing stage 33, a suction stage 70 for adsorbing and holding the workpiece W in the center of the inner side of the baffle 36 is provided. The suction stage 70' is composed of a block-shaped pedestal having a substantially T-shape -19-201219157 in which the upper surface (the receiving surface) 7a is rectangular (see Fig. 7). In the upper surface 70a' of the adsorption stage 70, a plurality of suction ports 7〇b are provided in order to impart a negative pressure (see Fig. 10 and Fig. 11 in addition, in order to avoid damage on the surface of the workpiece W of the thin glass, it is adsorption. The upper surface 70a of the stage 70 is subjected to smoothing processing. ^ Two reference pins 71 for calculating the mechanical origin at the time of boring processing are vertically disposed around the suction stage 70 so as to face the camera 23 side (upper side). 71. The reference pins 71, 71 are arranged to be imaged by the camera 23 in a state in which the workpiece W is placed (held) on the adsorption stage 70, and are disposed at positions that do not overlap the workpiece W. The reference pins 71, 71 are disposed at diagonal positions with respect to the workpiece W. Further, when the workpiece W is completely transparent, the position of the reference pin is set to overlap with the workpiece W. Further, the front end portion 71 of the reference pin 71 is provided. a, as shown in Fig. 8, the height hp is set to be the same as the height hs of the upper surface 70a of the adsorption stage 70. With such setting, when the camera 23 performs photographing, no occurrence occurs between the workpiece W and the reference pin 71. Focus shift, and can be faithfully Further, in the interior of the baffle 36, a background plate 72 having a high bottom and a substantially square shape inclined at 1. The background plate 72 is completely matted to prevent reflections reflected in the camera 23, thereby causing the workpiece The reflection of the W and the reference pin 71 is more prominent. Further, by setting the background plate 72 obliquely, the boring liquid can be immediately moved downward. Further, the background plate 72 is formed with the reference pin 71 and the suction stage 70. A through hole (not specifically shown) is provided. At a position adjacent to the baffle 36, a drain pipe 73 and a drain pipe 74 for discharging the cutting fluid flowing downward from the baffle 36 are provided. By providing the drain pipe 73 and the drain duct 74 prevent the boring liquid from remaining in the baffle 36. 8 -20- 201219157 The left and right slide mechanism 34 allows the processing stage 33 to freely slide in the left-right direction by a well-known LM guide. The left and right slide mechanism 34 controls the amount of slip by the stepping motor 34M. That is, the left and right slide mechanism 34 controls the position of the machining stage 33 in the left-right direction. Thus, when the boring processing described later is performed, the left and right slides are performed. Agency 34 may specify a boring road The left and right positions of the diameter of the telescopic cover 35 are expandable in the left-right direction like the so-called accordion. Therefore, even if the processing stage 33 is moved left and right by the left and right sliding mechanism 34, between the processing stage 33 and the telescopic cover 35 The gap does not occur, and the boring liquid can be prevented from flowing into the left and right sliding mechanism 34. The baffle 3 6, as described above, is formed in a rectangular box shape with an upper opening to prevent the blasting liquid from leaking to the outside. Specifically, As shown in Fig. 8, the side wall 36a of the baffle 36 extends to a position higher than the reference pin 71 (hp) and the suction stage 70 (hs) to prevent leakage of the boring liquid. The boring spindle 31 has: The electric motor 31a that performs the rotational driving force during boring, and the chuck 3 lb that fixes the boring tool 6 (grinding stone) to the main shaft of the electric motor 31a. The boring main shaft 31 has the front and rear sliding mechanism 38 as described above. The front and rear sliding mechanism 38 includes: a sliding rail 38 8 a extending in the front-rear direction, and a sliding member 38b on the sliding rail 38a. The front and rear sliding mechanism 38 also controls the sliding amount of the sliding member 38b by the stepping motor 38M. The front and rear positions of the boring spindle 31 are controlled by the front and rear slide mechanism 38. Thus, the front and rear slide mechanism 38 can define the position in the front-rear direction of the boring path during the boring process. Further, between the boring main shaft 3 1 and the front and rear slide mechanism 38, the upper and lower guide mechanisms 39 are provided as in the above -21 - 201219157. The vertical guide mechanism 39 also includes a rail 39a extending in the vertical direction and a moving member 39b moving on the rail. Further, the up-and-down guide mechanism 39 controls the amount of vertical movement of the moving member 39b by the stepping motor 39M. The vertical position of the boring spindle 31 is controlled by the vertical guide mechanism 39. Thus, when the boring tool 6 is aligned with the workpiece W, the vertical guide mechanism 39 is used to adjust the position. Further, the nozzle holder 111 of the injection nozzle unit 110 to be described later is attached to the grindstone bearing member 100 fixed to the moving member 39b (rotatably axially supporting the above-described boring spindle 31). The tool 匣 32 can hold up to five boring tools 6 as described above. . .  . Specifically, as shown in Figure 9, it will be used to maintain the boring tool 6, . . . The five tool holding parts 32a,. . . The boring tool 6 is automatically transferred between the tool holding portion 32a and the boring spindle 31 in a row in the front-rear direction. Therefore, in the boring device, a plurality of boring tools 6 can be used according to the boring portion. . . Automatic replacement, which increases the freedom of boring. The boring tool 6 of the boring spindle 31 will be described using Figs. 10 and 11 . Figure 10 shows a detailed side view of a large-diameter boring tool. Figure 1 shows a detailed side view of a boring tool with a small diameter. As described above, the boring spindle 31 can be attached or detached by the boring tool 6 by the chuck 31b, and the large-diameter boring tool 6A shown in Fig. 1 or the first embodiment shown in Fig. 1 can be switched. Small diameter boring tool 6B. The large-diameter boring tool 6A' shown in Fig. 10 is provided with a large-diameter cylindrical processing portion 61 (grinding stone) to which the diamond particles 60 are adhered on the surface (the boring surface), and is fixed to the chuck 31b in the vertical direction. The extended shaft portion 62' is provided with an outwardly enlarged flange portion 63 on the upper side of the processing 8-22-201219157 portion 61. Further, three recessed portions 64 which are strip-shaped recessed are formed in the lower portion of the processed portion 6 1 . The large-diameter boring tool 6A is rotated by the boring main shaft 31, and the concave portion 64 is brought into contact with the outer edge (outer shape) Wa of the workpiece W, whereby the external shape boring and chamfering of the workpiece W are performed. Another 70 represents the adsorption stage. In this way, the workpiece W is boring by the large-diameter boring tool 6A, and the boring tool 6A can be boring stably during the boring process, so that the machining accuracy can be improved. Further, since the boring tool 6A is a large diameter. The tool life of the tool can be extended, and the workpiece W can be continuously boring in large quantities. The boring tool 6B having a small diameter shown in Fig. 1 is provided with a small-diameter cylindrical processing portion 1 6 1 (grinding stone) for attaching the diamond particles 1 60 to the surface (the boring surface), and is fixed to the chuck 31b. The shaft portion 162 is provided with a flange portion 163 on the upper side of the processed portion 161. Further, in the lower portion of the processed portion 161, three recessed portions 164 which are recessed in a strip shape are formed. The small-diameter boring tool 6B has a small diameter, and the boring tool 6 is inserted into the hole portion Wb of the workpiece W and the concave portion 164 abuts against the inner edge Wc of the hole portion Wb, whereby the hole portion Wb of the workpiece W can be Perform internal shape boring and chamfering. As described above, the hole portion Wb of the workpiece W is internally boring by the boring tool 6B having a small diameter, and the boring process can be surely performed even if the hole portion Wb has a small diameter and is not easily processed. The spray nozzle unit 110 will be described using FIG. Fig. 15 is a schematic plan view showing the spray nozzle unit. The jet nozzle unit 110 includes a nozzle holder 111 that is attached to the grindstone bearing member 100 as described above, and a plurality of jets -23-201219157 that are attached to the nozzle holder 111. The injection nozzle U2 is disposed around the grindstone 61 (processed portion) at equal angular intervals. In the present embodiment, the injection nozzles 1 1 2 are disposed so as to surround the outer circumference of the grindstone 61, and the four injection nozzles M2 are disposed at intervals of 90 degrees from each other. In the present embodiment, the injection nozzles 1 1 2 are disposed such that the imaginary line connecting the pair of opposed injection nozzles 1 1 2 forms an angle of about 45 degrees with the side (long side) of the workpiece W. Further, as shown in Fig. 17, the injection nozzle 112 is disposed such that the imaginary line is parallel to the side of the workpiece W. Further, in the present embodiment, the injection nozzle 1 1 2 sprays the blasting liquid toward the rotation axis of the grindstone 61, and fixes the injection nozzle 1 1 2 so that the injection center axis of the injection nozzle 1 1 2 and the grinding stone 61 rotate. The axes intersect. Further, the injection nozzle 112 can be fixed such that its injection center axis is along the tangential direction of the outer circumference of the grindstone. Further, the injection nozzle 1 1 2 can be set to be rotatable in order to change the direction (ejection direction) of the injection center axis, and the direction of the injection center axis is controlled by the above-described electronic control unit 15. Each of the injection nozzles 112 is controlled to be ejected and stopped by the above-described electronic control unit. The specific control method is explained later. Further, in the present embodiment, each of the injection nozzles 1 1 2 is a two-fluid nozzle that mixes a liquid and a gas. The two-fluid nozzle pulverizes and pulverizes a liquid supplied in a high-pressure state by a high-speed air stream composed of compressed air, and then ejects the liquid together with the gas. In addition, the spray nozzle unit 110 is provided with a liquid connection port 113 and a gas connection port 114 for supplying liquid (crushing liquid) and gas (air) to each of the injection nozzles II2, and the liquid connection port 113 and the gas connection port 114 are respectively Connected to the boring fluid. • 8 -24- 201219157 Capacity (not shown) and compressor (not shown). Further, various boring solutions can be used for the blasting liquid sprayed from the injection nozzle 112. As the boring liquid, it may have any function of cooling the cooling stone, cleaning function for removing swarf, lubricating function for reducing boring resistance, and rust preventing function for preventing rusting of the stone, or both A variety of functions. Further, a water-soluble boring liquid (water-soluble type) which is transparent or translucent and soluble in water, which is composed of a surfactant, an emulsifier, or the like, a monomer such as kerosene or a mixture of sulfur, chlorine or the like may be used. An oil-based boring liquid (mineral oil type) composed of an extremely high-pressure additive, a synthetic oil other than mineral oil or an emulsifier, and the like, and belongs to the water-soluble boring liquid and the oil-based boring liquid. The emulsion in the middle is a boring solution or the like. In the case of such a plurality of boring solutions, appropriate ones may be employed in accordance with the boring conditions. Next, the control method for the boring device , is first described with reference to FIGS. 2 to 14 in the control method for the workpiece W boring path calculation. Fig. 1 is a flow chart showing the control method of the boring device, and Fig. 3 is a side view showing the state of the camera processing table, and Fig. 14 is an explanatory view showing the processing and calculation method of the captured data. . As shown in the flowchart of Fig. 12, after starting, first, the model data (shape, hole, etc.) of the workpiece w is input to the electronic control unit 15 at si. In the input operation, for example, the design information (CAD data) of the processed workpiece Wo is converted into a boring data such as a boring path using another software, and then the electronic control unit 15 is input. After the above-described input operation is completed, the actual workpiece Wi (hereinafter referred to as an actual workpiece) is placed (loaded) on the processing table 30 at S2. This mounting operation -25 - 201219157 is performed by the transport robot 2 described above. By this mounting operation, the unprocessed actual workpiece wi is placed on the suction stage 70 of the processing table 30. Then, at S3, the image of the actual workpiece Wi and the reference pins 71, 71 is obtained by the camera 23. Figure 13 shows the shooting status of the camera. As shown in Fig. 1, the boring device M' is photographed by the camera 23 attached to the upper portion of the transport robot 2 that transports the workpiece wi, and the workpiece Wi and the reference pins 71, 71 of the processing table 30 are taken. By photographing the processing table 30 from the upper position as described above, it is possible to minimize the variation of the image data of the obtained workpiece Wi and the reference pins 17 and 17. An example of the image data thus obtained is shown in Figure 14 (a). The workpiece Wi and the two reference pins 71, 71 are acquired as image data to calculate position data, respectively. Next, at S4, the machine origin C of the processing table 30 is calculated based on the positions of the reference pins 71, 71. Here, the machine origin C' is a reference for the mechanical coordinate of the boring process, and by correcting the machine origin c, the correct boring process can be performed. The mechanical origin C is determined by the midpoint of the connecting line L of the two reference pins 7 1, 7 1 as shown in Fig. 14(b). As another example, as shown by a broken line, two reference pins 7 1 ' 7K' may be further added to the intersection of the connecting lines N of the two reference pins 71', 71' as the machine origin C. Next, at S5, the gravity center position P of the outer shape Wa of the actual workpiece Wi and the gravity center position Q of the hole portion Wb are calculated based on the data of the actual workpiece Wi. Here, the center of gravity position refers to the position of the center of gravity of the figure, which is determined according to the outer shape of the workpiece W and the shape of the hole. First. The black 圏 P and Q which are not shown in Fig. 14(b) are the position of the center of gravity of the outer shape Wa of the actual workpiece W and the position of the center of gravity of the hole portion wb. -26- 201219157 Then, at S6, the position of the center of gravity of the actual workpiece Wi (the center of gravity P of the outer shape and the position of the center of gravity Q of the hole) and the position of the center of gravity of the model wm (the position of the center of gravity P m of the outer shape and the position of the center of gravity of the hole portion Q) m)--- By making the center-of-gravity positions P, Q of the actual workpiece W and the centroid positions p m and q m of the model W m uniform, the difference between the actual workpiece Wi and the model Wm (difference in positional data) can be made clear. The state shown in Figure 1 4 (c) is to let the actual workpiece Wi and the model Wm (a little chain line. The position of the center of gravity p, Q, Pm, Q m is the state after the change. As a result, the difference between the actual workpiece Wi and the model Wm can be made clear by making the center-of-gravity positions P, Q, Pm, and Qm uniform. Next, at S7, the machine origin C of the machining table 30 and the center of gravity P of the actual workpiece W i are compared, and the offset amount of the center of gravity C of the machine origin C and the actual workpiece Wi is calculated (the amount of shift X in the lateral direction, The amount of shift Y in the longitudinal direction and the amount of shift in the direction of rotation Θ). In addition, the actual workpiece Wi and the model Wm are also compared, and the amount of shaving Δ% is calculated based on the difference in the shape. In this way, the amount of squeezing of the actual workpiece Wi can be clarified. Figure 14(d) shows the various offsets and amounts of cut. The offset amount of the center of gravity P of the actual workpiece Wi with respect to the mechanical origin C of the processing table is exemplified as shown in the figure, and is shifted to the left side by shifting from the left side to the left side by Y', and is tilted to the right side. Further, regarding the amount of shaving, the amount of Δνν1 ' in the width direction is calculated by subtracting the width dimension Τ1 of the model from the width dimension rl of the actual workpiece Wi and dividing by 2, and the amount of cutting Aw2' in the longitudinal direction is from the actual workpiece. The length dimension r2 of Wi is subtracted from the length dimension T2 of the model and divided by 2. When the amount of cut in the width direction and the length direction Δλν1, Aw2 -27-201219157 is obtained in this way, the larger one is used as the final amount of cut Aw. The reason for this determination is that, in the boring process, since the workpiece is cut by a certain amount of cutting in the entire circumference of the workpiece in a trajectory similar to the shape of the model, it is possible to select a larger number of ridges. The ground enters the sharpening and is slashed closer to the shape of the model. Next, at S8, the boring path of the workpiece Wi is calculated in accordance with the X, Y, Θ offset, and the amount of cut Aw. Since the boring path changes depending on the shape of the actual workpiece Wi and the position at which the actual workpiece Wi is placed, it varies depending on the workpiece W. Then, at S9, the actual workpiece Wi is boring based on the calculated boring path. This boring operation is performed by moving the boring spindle 3 1 and the machining table 30 (machining stage 33) separately. The boring operation of the workpiece W is performed by using the above-described large-diameter boring tool 6A and the small-diameter boring tool 6 B in accordance with the boring portion. Next, an injection control method of the squeegee from the injection nozzle at the time of the boring operation will be described using Fig. 16. Figure 16 shows a schematic top view of the workpiece boring state. Further, in Fig. 16, in order to distinguish four injection nozzles, 1 12a to 1 1 2d are used as the symbols of the injection nozzles. As shown in Fig. 16(a), when the end face of one of the long sides of the workpiece W is boring, it is more than the grindstone 6 1 from the boring position (the contact point between the end face of the workpiece W and the grindstone 6 1). The first injection nozzle 1 1 2a on the rear side in the direction of rotation sprays the boring fluid. At this time, the dicing fluid is not ejected from the other three injection nozzles 1 12b, .... Next, as shown in Fig. 16(b), when the corner portion between the long side of the -28-8201219157 and the short side adjacent to the long side of the workpiece W is boring, not only the first jet nozzle but also 112a, the blasting liquid is also injected from the second injection nozzle 112b (the injection nozzle on the rear side in the rotation direction of the grindstone 61 from the first injection nozzle 112b). At this time, the dicing liquid is not ejected from the other two injection nozzles 112c, 112d. Then, as shown in Fig. 16(c), when the short side of the workpiece W is to be boring, 'the ejection of the boring liquid from the first injection nozzle 112a is stopped, and the grinding stone is made more than the boring position. The second injection nozzle 1 1 2b on the rear side in the rotation direction of the 61 jets the blasting liquid. At this time, the dicing fluid is not ejected from the other two injection nozzles 1 12c, 1 1 2d. As shown in Fig. 16(d), when the end faces of the other long sides of the workpiece W are to be boring, the nip is sprayed from the third injection nozzle 112c on the rear side in the rotational direction of the grindstone 6 1 than the boring processing position. liquid. At this time, the dicing fluid is not ejected from the other three injection nozzles U2a, .... Further, in the corner portion between the sixteenth (c) and (d), the same as the above-described corner portion (Fig. 16(b)), not only from the second injection nozzle 11 2b but also from the third injection nozzle 1 12c Spray the boring fluid. In the above description, only the case where the workpiece W is boring is performed using the boring tool 6A having a large diameter, and the hole portion of the workpiece W is internally boring using the boring tool 6B having a small diameter. The boring operation is also performed by controlling the injection and stopping the injection by the same control method as described above. That is, the boring operation can be performed by injecting the blasting liquid from one of the injection nozzles on the rear side in the rotation direction of the grindstone than the boring processing position. Further, at the corner portion, the boring operation can be performed by jetting the blasting liquid from the next predetermined injection nozzle and the injection jet -29-201219157 which is currently being sprayed. Finally, at S10, the actual workpiece Wi is taken out (moved out) from the processing table 30. The take-out operation is also performed by the transport robot 2, and the processed workpiece Wo is taken out from the processing table 30. Next, in S1 1, it is judged whether or not the job is completed, and if the job is to be continued (NO), the process proceeds to S2 in order to perform the machining of the next workpiece W. On the other hand, if the job is to be ended (judgment YES: the power is turned off), it is directly moved to the end. The boring device 本 of the present embodiment is controlled by the above steps. In the present embodiment, in the boring step, since the jetting nozzle 1 1 2 composed of the two-fluid nozzle sprays the fine-grained blasting liquid toward the grindstone 61, the micronized dicing liquid easily breaks over the surface of the grindstone 61 ( The boring surface) is easily supplied to the boring surface of the grindstone 61 by the rotation of the grindstone 61 in conjunction with the rotating air layer. In addition, the boring is further injected from the jet nozzle 1 1 2 in the direction of the rotation relative to the boring position. The liquid reaches the liquid of the grinding surface of the grindstone 61, and it is easy to reach the boring processing position as the grindstone 61 rotates. Further, the squeegee sprayed from the two-fluid nozzle 112 is less likely to interfere with the liquid droplets generated when the liquid granules of the previously obtained blasting liquid are discharged by the centrifugal force generated by the grindstone 61. The boring surface of the grindstone 6 1 is sequentially reached, and the boring surface of the grindstone 61 and the boring chip are repeatedly collided. This collision has a different effect on the gas existing in the space between the abrasive grains of the boring surface of the grindstone 61 in the case of the general liquid supply form (in the case where the liquid is supplied in a state where the gas is completely shielded). That is, the gas granules which are used for the respective liquid particles in the respective spaces can push out the gas from the space between the abrasive grains, and the effect of replacing the gas remaining in the space with the liquid is generated by the flow of 8 -30 to 201219157. Further, the squeegee between the abrasive grains is retained in the space by the surface tension of the periphery. Therefore, it is possible to stably maintain an appropriate amount of the boring liquid between the abrasive grains, and to maintain the space of the boring liquid to reach the boring processing position with the rotation of the grinding stone 61, and to stabilize the boring liquid in the space stably and efficiently. supply. Further, as long as the boring liquid has a cooling function, the cooling state of the abrasive grains at the boring processing position can be stabilized, and the boring heat is removed from the periphery of the boring processing position, thereby preventing the abrasive grains from being overheated and reduced. Its wear. Further, since the cooling effect is provided, the heating of the swarf chip can be reduced, and the phenomenon that the swarf chip is welded to the space between the abrasive grains or the abrasive grains can be prevented, and the processing state has good thermal stability. Therefore, stable processing quality can be achieved when processing materials with thermal fragility or heat sensitivity. In addition, when the boring liquid has a lubricating function or the like, the boring liquid can be sufficiently supplied to the space between the grindstone 61, the abrasive grains and the abrasive grains, and the boring can be obtained by exerting non-adhesive action and lubricating action. The effect of reducing the adhesion of the chips and the heating effect of the abrasive grains. Further, according to the boring device, the washing effect can be exhibited by intermittent collision and collision force of the liquid particles. This is an effect of further sweeping out the swarf shavings which are alleviated by the above-described effect of the phenomenon of adhesion between the abrasive grains. After the above-mentioned adhesion phenomenon is alleviated, the smashing debris in the space between the abrasive grains and the abrasive grain surface which are retained and adhered is still generated, and the smashing debris is directly collided by the liquid particles, and the swarf swarf is hit and fixed. The part is peeled off and is efficiently swept out together with the boring liquid. Further, by the effect of the boring liquid having the above-described lubricating function, the adhesion state of the attached matter can be reduced, and the multiplication effect of the adhesion of the swarf to the swarf can be generated. Further, according to the boring device, when the relative position of the boring processing position and the rotating shaft of the grindstone 61 is changed in the boring operation, the injection of the injection nozzle 1 12 is controlled by the control means 15, and the grinding can be surely compared The boring position of the stone 6 1 is further sprayed with the boring fluid in the direction of the rotation, without the need to supply the unnecessary boring fluid. Therefore, according to the boring device, the cost required for the boring fluid can be reduced, and the water accumulation state around the grindstone 61 can be prevented. Further, according to the boring device, the jetting nozzle 112 and the grindstone 61 are moved together during the boring operation, so that it is not necessary to integrally provide the jetting nozzle 112 over the end portion of the workpiece. Therefore, compared with the case where the injection nozzle is provided over the entire end portion of the workpiece, the injection nozzle can be reduced to reduce the apparatus cost, and it is easier to secure the installation place of the injection nozzle. Further, the boring device is provided with four injection nozzles 112 so as to surround the outer circumference of the grindstone 61. Since each of the injection nozzles 112 is disposed at a position opposite to the rotation axis of the grindstone 61, the structure is simple and can be reduced. The cost of the device is easy to ensure the installation place of the spray nozzle. Further, according to the boring device, the boring liquid can be ejected from the appropriate injection nozzle 1 1 2 in accordance with the long side and the short side of the workpiece W, so that the boring operation can be surely performed, and since the corner portion of the workpiece W is The two injection nozzles 112 spray the blasting liquid, and the liquid can be surely supplied and boring the workpiece in this portion. Further, since the injection nozzles 1 1 2 that simultaneously perform the injection are controlled by the control means 15 Within a range, the boring operation can be performed reliably using a small amount of liquid. In addition, the fluid supply ratio/pressure ratio of the individual fluids (crushing liquid and air) of each two-fluid nozzle, the supply ratio of the mixed fluid, the supply pressure, etc., correspond to the number of revolutions of the grindstone, The conditions of the grindstone type, the abrasive grain size, and the like are appropriately set, and the boring method according to the present embodiment is 0. 2mm~3. In the boring of 0 mm thin plate glass, high-efficiency boring can be performed with an end face grinding amount of 2 Ομηη or less. Compared with the case of using a general boring method, a boring speed improvement effect of about 5 times to 10 times can be obtained. Further, the boring device 本 of the present embodiment is a boring device that performs boring of the end face of the thin plate glass (W), and the data (S1) of the thin glass model Wm is attached (stored) in advance, and the reference obtained by the camera 23 is used. The photographing data of the pins 71, 71 calculates the machine origin C of the processing table 30 (S4). Then, based on the photographing data of the thin plate glass (actual workpiece Wi) obtained by the camera 23, the center of gravity position P (S5) of the thin plate glass (actual workpiece Wi) is obtained, and the machine origin C of the processing table 30 and the thin plate glass (W) are obtained. When the center of gravity P is compared, the offset amount of the thin glass (the offset amount X in the vertical direction, the shift amount Y in the lateral direction, and the shift amount 旋转 in the rotational direction) is calculated (S7), and the offset is calculated. The amount of the boring path (S8) causes the boring spindle 31 to operate based on the calculated boring path (S9). Therefore, even if the "marked mark (mark)" or the like is not formed in the thin plate glass (W) itself, the "machine origin C" can be obtained by the reference pins 71, 71 provided on the processing table 30, and the thin plate glass can be grasped ( The offset amount (X, Y ' Θ ) of W) can be accurately boring even with a thin plate glass (W) in which no mark (mark) is formed by the offset amount. In the boring device for the end face grinding of the sheet glass (W) for the display screen of the portable terminal such as a mobile phone, the boring processing is performed by using the photographing data of the camera 23 of -33-201219157. High-precision machining is performed, and boring can be performed even if no mark or the like is provided on the surface of the thin glass (W). Further, in the present embodiment, the machine origin is obtained by using a plurality of reference pins 71 and 71. In addition, the machine origin can be obtained by using the locally protruding reference protrusion, and the local coloring reference can also be used. The department finds the mechanical origin. Further, in the present embodiment, the center of gravity P of the thin plate glass (W) and the center of gravity Pm of the model Wm are compared, and the thin plate glass (W) and the model Wm are compared to calculate the cutting of the boring spindle 3 1 . The amount Δνν. In other words, it is determined how much the sheet glass (W) is larger than the model Wm (for example, the difference between the length direction and the width direction is measured, and the magnitude of the "difference"), and the amount of cut Aw is changed in accordance with the size. Therefore, the amount of cut-in Δχν of the thin plate glass (W) can be changed depending on the workpiece, and the thin plate glass (W) can be processed in a more correct shape and size. In this way, the amount of cutting Aw of the thin glass which is changed depending on the workpiece can be more accurately grasped to perform the boring operation, so that the processing of the plurality of thin glass can be performed with high precision. Further, in the present embodiment, the gravity center position P of the outer shape Wa of the thin glass and the gravity center position Q of the shape of the hole portion Wb are obtained, and the center of gravity of the workpiece Wi is calculated. By calculating the gravity center position P of the outer shape Wa of the thin plate glass (W) and the gravity center position Q of the shape of the hole portion Wb of the thin plate glass, even the thin glass having the hole portion can be surely shaped according to the shape of the model Wm. In the case of the thin glass (W) having a complicated shape of the hole portion Wb, the boring path can be accurately calculated and the boring with high precision can be performed. Further, in the present embodiment, the reference pins 7 1, 7 1 are provided on both sides of the thin glass (W). Thus, the mechanical origin C formed on the connecting line L of the at least two reference pins 71, 7 1 can be formed at a position close to the center of gravity P of the thin plate glass (W). Therefore, the offset amount of the thin glass (W) can be calculated more accurately. In other words, by making the machine origin C close to the center of gravity position p' of the thin plate glass (W), the error at the time of calculation of the offset amount can be reduced, and the correct offset amount can be calculated. Therefore, it is possible to perform boring processing with higher precision. Further, in the present embodiment, the tip end portion 71a of the reference pin 71 is set to be the same as the height of the upper surface 70a of the suction stage 70 (hp = hs) 'to the distance from the camera 23, and the thin plate glass (W) is The distance of the camera 23 is substantially the same. As described above, since the position of the photographed point (front end portion 71a) of the reference pin 71 and the position of the sheet glass (W) in the height direction substantially coincide, the focus of the camera 23 can be surely aligned. Thus, the reference pin 7 1 and the thin plate glass (W) can be photographed at the same time, and the offset amount of the thin plate glass (W) can be more accurately calculated. The present invention is not limited to the above embodiment, but includes an embodiment that can be applied to all boring devices. The boring device of the present embodiment is a thin plate glass used for a mobile phone-35-201219157 as a workpiece W, and may be, for example, a thin plate glass for a portable audio device, or a portable game machine. Sheet glass. Furthermore, thin glass for portable navigation machines, thin glass for portable televisions, and the like can also be used. Further, in the above-described embodiment, since the four injection nozzles 112 are provided, the end portions of the substantially square sides can be surely supplied with liquid and boring by the respective injection nozzles 112, and the number of nozzles is sprayed in the present invention. Not limited to four. For example, as shown in Fig. 18, eight injection nozzles 1 2 can be provided. In the boring apparatus shown in Fig. 18, eight injection nozzles 112 are disposed at equal angular intervals, specifically, at positions spaced apart from each other by 45 degrees. Further, the six injection nozzles may be disposed at positions spaced apart from each other by 60 degrees (equal angular interval). In the boring apparatus shown in Fig. 18, the boring of the long side and the short side of the workpiece W is performed by jetting the blasting liquid from one injection nozzle 1 1 2 in the same manner as in the above embodiment. In the boring of the portion, the blasting liquid can be sprayed only from the injection nozzles 1 1 2 disposed between the injection nozzles 1 1 2 used for the boring of the long side and the short side. Further, even in the case where four injection nozzles 11 2 are provided, it is not limited to those shown in the above-described embodiments (Fig. 16) and 17th. For example, as shown in Fig. 9, the injection nozzle can be used. 1 1 2 is disposed at a position where the imaginary line connecting the pair of opposing spray nozzles 1 1 2 and the side (long side) of the workpiece W are at a predetermined angle. Here, the predetermined angle means that the position at which the boring of the workpiece w can be surely supplied to the boring liquid is, for example, 3 〇. Further, the method of controlling the plurality of injection nozzles 1 1 2 is not limited to the above embodiment, and an appropriate design change of '8 - 36 - 201219157 can be performed within the scope of the present invention. For example, it is also possible to control the squeegee attached to the surface from the injection nozzle 1 1 2 located on the front side in the direction of rotation of the boring machine to nip the injection nozzle 1 1 2 on the front side in the rotation direction. . In this case, the blasting liquid of the injection nozzle 1 1 2 on the rotary side and the injection nozzle 1 1 2 on the rear side with respect to the boring processing position (for example, the blasting liquid injection nozzle having the cooling function is sprayed, The boring fluid with the cleaning function is sprayed from the front nozzle). However, when the diameter of the grindstone is small, the two kinds of 硏 interfere with each other to affect the function, so it is preferable to use only the above two kinds of boring solutions in the diameter of the grindstone. Further, in the above embodiment, a description will be given of a two-fluid nozzle of the injection nozzle. For example, a supersonic wave, which is a liquid in which ultrasonic vibration is superimposed and superimposed by an ultrasonic oscillator, can be used. By using an ultrasonic superimposed nozzle, the jetted water flow from the boring surface of the nozzle grindstone and the workpiece is used as a supersonic energy to impart the force of the ultrasonic vibration acceleration transmitted by the boring fluid to the attachment of the grindstone boring surface. Therefore, according to the ultrasonic superimposed nozzle, the air layer of the attached object is vibrated, and the wedge point effect is generated by the effective contact point of the boring liquid by the vibration, and the replacement effect is obtained by the wedge effect. . Set the grinding stone, so, by grinding stone. In the case of the front side of the boring and turning direction, the jetting liquid from the side of the spray side on the rear side may be different from each other, and the liquid is sprayed toward the object using the wave-overlapping nozzle. , the air layer between the strong vibrations generated and the space between the abrasive grains permeated to the periphery for sweeping out -37- 201219157 Therefore, an ultrasonic oscillator must be provided near the nozzle, and the water from the nozzle flows to the object Since there is no interruption between the installation method (the storage volume of the ultrasonic oscillator, the distance from the object, etc.) and the operation, there is a limit, and the burden of the device including the ultrasonic oscillation device increases, and these disadvantages exist. Further, in the above-described embodiment, only the end surface processing of the outer shape of the workpiece and the end surface processing of the inner shape of the hole portion of the workpiece will be described. However, the apparatus of the above-described embodiment is used as a boring tool for drilling a drill using a drill. Machining is also possible. In the case of drilling, the boring position where the boring fluid is required is located inside the workpiece. Although the direct effect of the two-fluid nozzle cannot be obtained in the boring process, it can be used to remove the clogging of the drill after drilling, and the cleaning effect of the two-fluid nozzle can be exhibited. The shavings may adhere to the surface of the workpiece to cause a decrease in quality. By always supplying the boring liquid having the effect of the two-fluid nozzle to the surface near the processing, the swarf cuttings can be quickly removed, and the surface quality can be maintained. In addition, the impact force of the two fluids can cause the main body of the drill to generate minute vibrations. Although the amount of vibration and the number of vibrations are not very high, the same effects as those of the supersonic overlapping nozzles can be obtained, and a certain effect can be expected. In the above-described embodiment, the boring operation is described in the case where the grinding stone 61 is moved in the longitudinal direction of the workpiece W and the workpiece W is moved in the short-side direction of the workpiece W. And the boring method, as long as the workpiece w and the grindstone 61 are relatively moved in the plane direction of the workpiece W, for example, the grindstone is not only in the longitudinal direction of the workpiece In addition, the entire structure of the boring device is also limited to the present embodiment. For example, it can be applied to only one of the processing units, or it can be set. There are five or six more processing units. Further, the boring tool 6 is not limited to those described in the embodiment, and may be, for example, a ball type boring tool or a disk type. The boring tool or the conical boring tool. The grinding stone material is not limited to the diamond. As described above, the boring device, the boring method, and the method of manufacturing the thin plate member of the present invention, Since the jet nozzle can reliably cause the liquid to reach the boring position of the grindstone and perform the boring of the workpiece, the end surface of the thin plate-shaped workpiece can be boring reliably and safely. Fig. 1 is a plan view showing an embodiment of a boring device of the present invention. Figure 2 is a front view of the boring device of Figure 1. Figure 3 is a side view of the boring apparatus of Figure 1. Fig. 4 is a three-side view of the transport robot of the boring apparatus of Fig. 1, (a) is a front view, (b) is a side view, and (c) is a plan view. Fig. 5 is an explanatory view showing an operation when the transport robot of the boring apparatus of Fig. 1 performs the conveyance, (a) shows the state from the reference state to the workpiece holding start state, and (b) shows the state from the workpiece holding start state to the processing table. The workpiece handling state. -39- 201219157 Fig. 6 is an explanatory view showing the operation of the transport robot of the boring apparatus of Fig. 1 when the transport robot performs the transport, and (c) shows the transport state from the workpiece to the processing table to the camera photographing state, and (d) shows the display from The photographing state of the camera to the start holding state of the next workpiece" Fig. 7 is a plan view of the second processing unit of the boring device of Fig. 1. Fig. 8 is a front cross-sectional view showing a second processing unit of the boring apparatus of Fig. 1; Fig. 9 is a side elevational view, partly in section, of the second processing unit of the boring apparatus of Fig. 1. Fig. 10 is a detailed side view showing a part of the cross section when the large-diameter boring tool is used in the boring apparatus of Fig. 1. Fig. 1 is a detailed side view showing a part of the cross section when the boring apparatus of Fig. 1 uses a small-diameter boring tool. Fig. 12 is a flow chart showing the control method of the boring device of Fig. 1. Fig. 13 is a side view showing a state in which the processing table is photographed by the camera of the boring device of Fig. 1. Fig. 14 (a) to (d) are explanatory views for explaining processing and calculation methods of data captured by the boring device of Fig. 1. Fig. 15 is a schematic plan view showing the injection nozzle unit of the boring device of Fig. 1. Fig. 16 (a) to (d) are schematic plan views showing the workpiece boring state of the boring device of Fig. 1. Fig. 17 (a) to (d) are schematic plan views showing the state of the workpiece boring in the other embodiment of the boring device of the present invention. 8 - 40 - 201219157 The first 8 (a) to (c) are schematic plan views showing the workpiece boring state of the other embodiment of the boring device of the present invention. The nineteenth (a) to (d) drawings show schematic plan views of the workpiece boring state of the other embodiment of the boring device of the present invention. [Description of main component symbols] Μ : boring device W : Workpiece (thin plate glass, workpiece)

Wi : Unmachined workpiece Wo: Machined workpiece Wm : Workpiece model 1 5 : Electronic control unit (control means) 23 : Camera 3 0 : Processing table 3 1 : Boring spindle 3 3 : Processing stage (stage) 6 1,1 6 1 :Machining section (grinding stone) 71 : Reference pin 1〇〇: Grindstone bearing member 1 1 0 : Injection nozzle unit 112 (112a to 112d): Injection nozzle C: Mechanical origin P = Workpiece profile Center of gravity position Q: Center of gravity position of the hole shape -41 -

Claims (1)

201219157 VII. Patent application scope: 1. A boring device comprising: a stage on which a sheet-like workpiece is placed, and a honing surface on the outer circumference which can boring the end surface of the workpiece and which can be rotated, In order to boring the end surface of the workpiece by the boring surface, a moving means for relatively moving the grindstone and the workpiece is disposed at approximately equiangular intervals around the grindstone to eject the micronized liquid to the boring surface. The plurality of injection nozzles and the control means for controlling the injection of the plurality of injection nozzles to inject the liquid toward the rear side in the rotation direction of the grindstone based on the boring processing position of the grindstone contacting the workpiece. 2. The boring device according to claim 1, wherein the blasting nozzle is a two-fluid nozzle that mixes a liquid and a gas, and the boring device according to claim 1, wherein The injection center axis of the injection nozzle is disposed along a tangential direction of the outer circumference of the grindstone. 4. The boring apparatus according to claim 1, wherein the injection center axis of the injection nozzle is disposed to substantially intersect the rotation axis of the grindstone. 5. The boring apparatus according to claim 1, wherein the control means is controlled to switch between the boring processing position and the relative position of the grinding stone rotating shaft during the boring operation. injection -42- 201219157 spray nozzle. 6. The boring apparatus according to claim 5, further comprising: a grindstone bearing member that rotatably supports a rotating shaft of the grindstone, and a nozzle fixed to the grindstone bearing member The rack J is mounted to the nozzle holder by the plurality of spray nozzles. The boring apparatus according to claim 5, wherein the control means is controlled such that the injection nozzles simultaneously ejected are within two. 8. The boring apparatus according to claim 5, wherein the control means is controlled to eject a liquid from an injection nozzle when the grindstone relatively moves in a direction with respect to the workpiece, after the jetting When the grindstone moves relative to the workpiece in the other direction intersecting with the one direction, the liquid is ejected from the other jet nozzles, and the relative movement from the one direction to the relative movement in the other direction is from the above. A jet nozzle and other spray nozzles eject liquid. 9- A boring method is a boring method in which an end face of a thin plate-shaped workpiece is honed by a grindstone in a state in which a liquid is ejected by a spray nozzle, and has a boring step and a liquid jet The boring step is such that the grindstone rotates around a rotation axis substantially perpendicular to a plane of the workpiece, and the grindstone and the spray nozzle are relatively moved with respect to the workpiece, and are processed. The end face of the object is boring; the liquid ejecting step is based on the boring position of the grindstone in contact with the workpiece described in the above-mentioned -43-201219157 when the boring step is performed, and the rotation with the grindstone When the relative position of the shaft is changed, the boring processing position of the grindstone is further injected with the micronized liquid behind the rotating direction. A method of producing a thin plate-like member, characterized in that the step of boring the end face by the boring method as described in claim 9 of the patent application is provided. 8 -44-