JP7416600B2 - cutting equipment - Google Patents

Description

The present invention relates to a cutting device.

2. Description of the Related Art A cutting device is known that cuts a plate-shaped workpiece such as a semiconductor wafer, a package substrate, ceramics, glass, etc. with a cutting blade (for example, see Patent Document 1). This type of cutting device supplies cutting water to the cutting blade and the workpiece, suppresses processing heat, and performs cutting while washing away generated cutting waste.

Japanese Patent Application Publication No. 2016-82083

In the above-mentioned cutting device, the cutting blade rotates at a high speed of 30,000 to 100,000 rpm, so the cutting water supplied to the cutting blade becomes a mist containing cutting waste and is sent to the rear (side) of the cutting blade at high speed. Scattered. For this reason, the machining chamber that covers the cutting blade and chuck table is likely to be filled with mist, and if the machining chamber is not sufficiently vented, the atmosphere containing mist may leak from the machining chamber, causing the shafts of electrical components and actuators to There is a risk of harmful effects such as the adhesion of cutting debris to these materials. Therefore, a blade cover was devised that separates the mist into gas and liquid by installing a sponge-like filter in the duct that guides the mist scattering at high speed in the direction of the rotating shaft.

However, with this blade cover, there was still a risk that the spongy filter would become clogged due to adhesion of cutting debris.

The present invention has been made in view of such problems, and an object thereof is to provide a cutting device that can suppress clogging of the blade cover while suppressing mist leakage from the processing chamber. .

In order to solve the above-mentioned problems and achieve the objects, a cutting device of the present invention includes a chuck table that holds a workpiece, and a cutting unit that cuts the workpiece held on the chuck table with a cutting blade. , a moving unit for relatively moving the chuck table and the cutting unit, and the cutting unit includes a spindle rotatably supported by a spindle housing and to which the cutting blade is attached, and a moving unit fixed to the spindle housing. A cutting device comprising: a blade cover that covers the cutting blade; and a nozzle that supplies cutting water to the cutting blade; It has a duct for receiving and guiding the mist to an outlet remote from the inlet, and a gas-liquid separation section provided in the duct for separating the mist into gas and liquid, and the gas-liquid separation section is configured to separate the mist into gas and liquid. The mist scattered by the rotation of the duct collides with a collision surface, and the water reservoir section stores the liquid that has fallen from the collision surface, and the water reservoir section extends to the outlet of the duct and the water surface of the water reservoir section. The duct extends from the side of the cutting blade attached to the tip of the spindle toward the rear end of the spindle, and the impingement surface is located at the first point intersecting the scattering direction of the mist. The mist guided to the rear of the spindle collides with a second collision surface .

In the cutting device, the water reservoir may be constituted by the inner surface of a flat bottom portion of the duct and a portion erected upward from an outer edge of the bottom portion .

The present invention has the effect of being able to suppress clogging of the blade cover while suppressing leakage of mist from the processing chamber.

FIG. 1 is a perspective view showing a configuration example of a cutting device according to a first embodiment. FIG. 2 is a front view of the cutting unit of the cutting device shown in FIG. 1. FIG. FIG. 3 is a plan view of the cutting unit shown in FIG. 2. FIG. 4 is a front view of the duct of the cutting unit shown in FIG. 2. FIG. 5 is a perspective view of the duct shown in FIG. 4. FIG. 6 is a cross-sectional view taken along line VI-VI in FIG. FIG. 7 is a front view of the cutting unit of the cutting device according to the second embodiment. FIG. 8 is a plan view of the cutting unit of the cutting device according to the third embodiment. FIG. 9 is a cross-sectional view of the duct of the cutting unit shown in FIG. 8.

DESCRIPTION OF THE PREFERRED EMBODIMENTS Modes (embodiments) for carrying out the present invention will be described in detail with reference to the drawings. The present invention is not limited to the contents described in the following embodiments. Further, the constituent elements described below include those that can be easily assumed by those skilled in the art and those that are substantially the same. Furthermore, the configurations described below can be combined as appropriate. Further, various omissions, substitutions, or changes in the configuration can be made without departing from the gist of the present invention.

[Embodiment 1]
A cutting device according to Embodiment 1 of the present invention will be explained based on the drawings. FIG. 1 is a perspective view showing a configuration example of a cutting device according to a first embodiment. FIG. 2 is a front view of the cutting unit of the cutting device shown in FIG. 1. FIG. FIG. 3 is a plan view of the cutting unit shown in FIG. 2.

(Cutting device)
The cutting device 1 shown in FIG. 1 according to the first embodiment is a device that cuts (processes) a workpiece 200. The cutting device 1 shown in FIG. In the first embodiment, the workpiece 200 is a wafer such as a disk-shaped semiconductor wafer or an optical device wafer that uses silicon, sapphire, gallium, or the like as a base material. Devices 203 are formed on the workpiece 200 in areas partitioned in a grid pattern by a plurality of dividing lines 202 formed in a grid pattern on the surface 201 .

Further, the workpiece 200 of the present invention may be a so-called TAIKO (registered trademark) wafer having a thinner central portion and a thicker portion on the outer periphery. A rectangular package substrate having a plurality of substrates, a ceramic substrate, a ferrite substrate, a substrate containing at least one of nickel and iron, a glass substrate, etc. may be used. In the first embodiment, the workpiece 200 is supported by the annular frame 205 with the back surface 204 attached to an adhesive tape 206 having an annular frame 205 attached to the outer periphery.

The cutting device 1 shown in FIG. 1 is a device that holds a workpiece 200 on a chuck table 10 and cuts (corresponds to machining) a workpiece 200 with a cutting blade 21 along a dividing line 202. As shown in FIG. 1, the cutting device 1 includes a chuck table 10 that suction-holds a workpiece 200 with a holding surface 11, and a cutting unit 20 that cuts the workpiece 200 held by the chuck table 10 with a cutting blade 21. , an imaging unit 30 that photographs a workpiece 200 held on a chuck table 10 , and a control unit 100 .

The cutting device 1 also includes a moving unit 40 that relatively moves the chuck table 10 and the cutting unit 20, as shown in FIG. The moving unit 40 includes an X-axis moving unit 41 that processes and feeds the chuck table 10 horizontally and in an The Y-axis moving unit 42 indexes and feeds in the Y-axis direction that is parallel and orthogonal to the X-axis direction, and the cutting unit 20 cuts in the Z-axis direction that is parallel to the vertical direction that is orthogonal to both the X-axis direction and the Y-axis direction. A Z-axis moving unit 43 for feeding, and a rotary moving unit 44 that rotates the chuck table 10 around an axis parallel to the Z-axis direction and is processed and fed in the X-axis direction together with the chuck table 10 by the X-axis moving unit 41. Be prepared. As shown in FIG. 1, the cutting device 1 is a so-called facing dual type cutting device that includes two cutting units 20, that is, a two-spindle dicer.

The X-axis moving unit 41 moves the chuck table 10 in the X-axis direction, which is the machining feed direction, to relatively feed the chuck table 10 and the cutting unit 20 along the X-axis direction. The X-axis moving unit 41 moves the chuck table 10 into a loading/unloading area 301 where the workpiece 200 is loaded/unloaded, and a processing area 302 where the workpiece 200 held on the chuck table 10 is cut by the cutting unit 20. and move it in the X-axis direction.

The Y-axis moving unit 42 moves the cutting unit 20 in the Y-axis direction, which is the indexing and feeding direction, to relatively index and feed the chuck table 10 and the cutting unit 20 along the Y-axis direction. The Z-axis moving unit 43 moves the cutting unit 20 in the Z-axis direction, which is the cutting-feeding direction, thereby relatively feeding the chuck table 10 and the cutting unit 20 along the Z-axis direction.

The X-axis moving unit 41, the Y-axis moving unit 42, and the Z-axis moving unit 43 include a known ball screw rotatably provided around the axis, a known motor that rotates the ball screw around the axis, and the chuck table 10. Alternatively, a well-known guide rail that supports the cutting unit 20 movably in the X-axis direction, Y-axis direction, or Z-axis direction is provided.

The chuck table 10 has a disk shape, and a holding surface 11 for holding a workpiece 200 is made of porous ceramic or the like. Further, the chuck table 10 is provided so as to be movable in the X-axis direction between the loading/unloading area 301 and the processing area 302 by the X-axis movement unit 41, and around the axis parallel to the Z-axis direction by the rotational movement unit 44. It is rotatably installed. The chuck table 10 is connected to a vacuum suction source (not shown), and sucks and holds the workpiece 200 placed on the holding surface 11 by suction from the vacuum suction source. In the first embodiment, the chuck table 10 attracts and holds the back surface 204 side of the workpiece 200 via the adhesive tape 206 . Further, around the chuck table 10, as shown in FIG. 1, a plurality of clamp parts 12 for clamping the annular frame 205 are provided.

The cutting unit 20 is a cutting means to which a cutting blade 21 for cutting a workpiece 200 held on the chuck table 10 is detachably attached. The cutting units 20 are each provided to be movable in the Y-axis direction by a Y-axis movement unit 42 with respect to a workpiece 200 held on the chuck table 10, and are movable in the Z-axis direction by a Z-axis movement unit 43. It is movable.

As shown in FIG. 1, one cutting unit 20 is installed on one pillar of a gate-shaped support frame 3 that stands up from the apparatus main body 2 via a Y-axis moving unit 42, a Z-axis moving unit 43, etc. It is being The other cutting unit 20 is provided on the other column portion of the support frame 3 via a Y-axis moving unit 42, a Z-axis moving unit 43, etc., as shown in FIG. Note that, in the support frame 3, the upper ends of the column parts are connected to each other by horizontal beams. The cutting unit 20 is capable of positioning the cutting blade 21 at any position on the holding surface 11 of the chuck table 10 using the Y-axis moving unit 42 and the Z-axis moving unit 43.

As shown in FIGS. 2 and 3, the cutting unit 20 includes a spindle housing 22 that is movably provided in the Y-axis direction and the Z-axis direction by a Y-axis movement unit 42 and a Z-axis movement unit 43, and a spindle housing 22 that is movable in the Y-axis direction and Z-axis direction. A spindle 23 that is rotatably provided around an axis and is rotated by a motor (not shown) and has a cutting blade 21 attached to its tip, a blade cover 24 fixed to a tip surface 221 of a spindle housing 22, and a cutting blade 21. and a nozzle 25 for supplying cutting water.

The cutting blade 21 is an extremely thin cutting whetstone having a substantially ring shape. In the first embodiment, the cutting blade 21 is a so-called hub blade that includes an annular circular base 211 and an annular cutting blade 212 that is disposed on the outer peripheral edge of the circular base 211 and cuts the workpiece 200. It is. The cutting blade 212 is made of abrasive grains such as diamond or CBN (Cubic Boron Nitride), and a bond material (binding material) such as metal or resin, and is formed to have a predetermined thickness. Note that, in the present invention, the cutting blade 21 may be a so-called washer blade composed of only the cutting blade 212.

The spindle 23 is rotated around its axis by a motor, thereby rotating the cutting blade 21 in the direction of an arrow 400 in FIG. 2 . In the first embodiment, the rotation speed of the spindle 23 is 30,000 rpm or more and 100,000 rpm or less. Note that hereinafter, in this specification, the direction indicated by arrow 400 will be referred to as the rotation direction of cutting blade 21. Since the cutting blade 21 is rotated by the spindle 23 around the axis in the rotation direction 400, at the lower end of the cutting blade 212 that cuts the workpiece 200, the lower end of the cutting blade 212 is rotated in the direction toward the rear in the rotation direction 400. At 401, cutting water is injected together with cutting waste generated by cutting the workpiece 200. In addition, since the rotational speed of the spindle 23 is high speed of 30,000 rpm or more and 100,000 rpm or less, the cutting water splashed in the direction 401 toward the rear side of the rotational direction 400 from the lower end of the cutting edge 212 of the cutting blade 21 is Scattered as a mist. In this way, the direction 401 toward the rear side is the direction in which the mist scatters from the lower end of the cutting edge 212 of the cutting blade 21, and is hereinafter referred to as the scattering direction.

The blade cover 24 covers the cutting blade 21. The blade cover 24 includes a cover main body 241 that is fixed to the distal end surface 221 of the spindle housing 22 and covers the upper side of the cutting blade 21, and a cover main body 241 that is fixed to the cover main body 241 and covers the front side of the cutting blade 21 on the loading/unloading area 301 side. A front cover 242 is provided. The cover body 241 includes a pair of nozzle support members 243 extending downward on the rear side of the processing area 302 side.

The nozzle 25 includes a shower nozzle 251 provided on the front cover 242 and a pair of cooler nozzles 252 supported by the nozzle support member 243 of the cover body 241. The shower nozzle 251 faces the cutting edge of the cutting blade 212 of the cutting blade 21 in the X-axis direction, and supplies cutting water to the cutting edge of the cutting blade 212 of the cutting blade 21 during cutting. The cooler nozzles 252 extend parallel to the X-axis direction and are spaced apart from each other in the Y-axis direction. The cooler nozzles 252 position the lower ends of the cutting blades 212 of the cutting blades 21 between them, and supply cutting water to the lower ends of the cutting blades 212 of the cutting blades 21 during cutting.

(duct)
Further, the blade cover 24 has a duct 26 fixed to the rear side of the cover body 241 on the processing area 302 side. FIG. 4 is a front view of the duct of the cutting unit shown in FIG. 2. FIG. 5 is a perspective view of the duct shown in FIG. 4. FIG. 6 is a cross-sectional view taken along line VI-VI in FIG.

The duct 26 receives from an inlet 261 the cutting water mist that is scattered along the scattering direction 401 from the lower end of the cutting edge 212 of the cutting blade 21 due to the rotation of the cutting blade 21 during cutting, and sends it to an outlet 262 distant from the inlet 261. It is meant to guide you. The duct 26 is formed in a hollow shape with a passage provided inside thereof that communicates an inlet 261 and an outlet 262.

As shown in FIGS. 4, 5, and 6, the duct 26 includes an inlet portion 263 provided with an inlet 261, an extending portion 264 continuous to the side of the inlet portion 263 in the Y-axis direction, and an extending portion 264. It is integrally equipped with an outlet part 265 that continues at the tip and has an outlet 262 provided therein. In the duct 26 according to the first embodiment, the inlet part 263 is aligned with the cutting blade 21 in the X-axis direction, the extending part 264 extends from the inlet part 263 in the Y-axis direction, and the extending part 264 and the outlet part 265 are arranged in the Y-axis direction.

The inlet portion 263 is fixed to the processing area 302 side of the cover body 241 and has a cylindrical shape with an inlet 261 facing the cover body 241 . A mist of cutting water splashed from the lower end of the cutting edge 212 of the cutting blade 21 enters the inlet portion 263 from the inlet 261 . Further, in the first embodiment, the inlet portion 263 includes a pair of side walls 266 extending in the X-axis direction and a connecting wall 267 connecting the lower ends of the pair of side walls 266, as shown in FIG. The side wall 266 and the connecting wall 267 are continuous with the inner edge of the inlet 261 . In the first embodiment, one side wall 266 overlaps the side surface of the cover body 241.

One end of the extending portion 264 is connected to the end of the inlet portion 263 on the side remote from the cover body 241. The extension part 264 is formed in a cylindrical shape with one end connected to the inlet part 263 and the other end extending toward the rear end side of the spindle housing 22 along the Y-axis direction. The upper wall of the extending portion 264 gradually slopes downward as it goes from one end to the other end. The outlet portion 265 is formed into a flat cylindrical shape that is connected to the lower end of the other end of the extension portion 264 and has an outlet 262 that is an opening at the top. The outlet portion 265 discharges gas among the cutting water mist to the outside of the duct 26 .

In this manner, the duct 26 integrally includes an inlet portion 263, an extension portion 264, and an outlet portion 265, and extends from the side of the cutting blade 21 attached to the tip of the spindle 23 to the rear end of the spindle 23. It extends towards.

Further, the duct 26 has a gas-liquid separation section 27 inside. The gas-liquid separation unit 27 separates the cutting water mist into gas and liquid cutting water. In the first embodiment, the gas-liquid separation section 27 includes a first collision surface 271 that is a collision surface, a second collision surface 272 that is a collision surface, and a water reservoir section 273 .

The mist scattered by the rotation of the cutting blade 21 collides with the first collision surface 271 and the second collision surface 272. The first collision surface 271 is used to collide with the mist of cutting water that has entered the duct 26 from the inlet 261 along the scattering direction 401 and separate the mist into gas and cutting water. This is the inner surface of the portion 263 facing the entrance 261 in the X-axis direction. The first collision surface 271 intersects with a scattering direction 401 in which cutting water mist is scattered from the lower end of the cutting edge 212 of the cutting blade 21 . The mist that collides with the first collision surface 271 and is not separated into gas and cutting water is transferred to the outlet section 265, that is, to the other end side of the extension section 264 which is the rear of the spindle 23, at the arrow 402 in FIGS. 3 and 6. You will be guided along the

The second collision surface 272 is used to collide the mist that was not separated into gas and cutting water even when it collided with the first collision surface 271 and separate the mist into gas and cutting water. , the inner surface of the upper wall of the extension portion 264. The mist guided from the first collision surface 271 to the other end side of the extension portion 264 collides with the second collision surface 272 . The water reservoir section 273 is for storing cutting water that collides with the first collision surface 271 and the second collision surface 272, is separated from the gas, and falls from the collision surfaces 271 and 272. In the first embodiment, the outlet section 265. Therefore, the water reservoir 273 extends to the outlet 262 of the duct 26.

As described above, the cutting device 1 according to the first embodiment does not include a sponge-like filter or the like having water absorption properties in the duct 26 of the blade cover 24.

The imaging unit 30 is fixed to the cutting unit 20 so as to move integrally with the cutting unit 20. The imaging unit 30 includes an imaging element that photographs the region to be divided of the workpiece 200 held on the chuck table 10 before cutting. The image sensor is, for example, a CCD (Charge-Coupled Device) image sensor or a CMOS (Complementary MOS) image sensor. The imaging unit 30 photographs the workpiece 200 held on the chuck table 10, obtains an image for performing alignment for aligning the workpiece 200 and the cutting blade 21, and uses the obtained image. Output to control unit 100.

The cutting device 1 also includes an X-axis position detection unit (not shown) for detecting the position of the chuck table 10 in the X-axis direction, and a Y-axis position detection unit (not shown) for detecting the position of the cutting unit 20 in the Y-axis direction. It includes a detection unit and a Z-axis position detection unit for detecting the position of the cutting unit 20 in the Z-axis direction. The X-axis direction position detection unit and the Y-axis direction position detection unit can be configured by a linear scale parallel to the X-axis direction or the Y-axis direction and a reading head. The Z-axis position detection unit detects the position of the cutting unit 20 in the Z-axis direction using motor pulses. The X-axis position detection unit, the Y-axis position detection unit, and the Z-axis position detection unit output the position of the chuck table 10 in the X-axis direction and the cutting unit 20 in the Y-axis direction or the Z-axis direction to the control unit 100. . In the first embodiment, the positions of each component of the cutting device 1 in the X-axis direction, Y-axis direction, and Z-axis direction are determined based on a predetermined reference position (not shown).

The cutting device 1 also includes a cassette elevator 60 on which a cassette 61 containing workpieces 200 before and after cutting is placed and for moving the cassette 61 in the Z-axis direction, and a cleaning unit for cleaning the workpiece 200 after cutting. 70, and a transport unit 80 for loading and unloading the workpiece 200 into and out of the cassette 61 and transporting the workpiece 200.

Further, as shown in FIG. 1, the cutting device 1 includes a machining chamber wall 6 that surrounds the outside of the machining area 302 and suppresses the diffusion of cutting water, and an exhaust duct 8 for the machining chamber. In the first embodiment, the machining chamber wall 6 forms a machining chamber 303 in the cutting device 1 that accommodates the chuck table 10 and the cutting unit 20 positioned in the machining area 302 . The exhaust duct 8 has one end connected to the machining chamber wall 6 and exhausts the atmosphere inside the machining chamber wall 6, that is, the machining chamber 303, to the outside of the cutting apparatus 1 using an exhaust fan (not shown) or the like.

The control unit 100 controls each of the above-mentioned units of the cutting device 1 to cause the cutting device 1 to perform a machining operation on the workpiece 200. Note that the control unit 100 includes an arithmetic processing device having a microprocessor such as a CPU (central processing unit), a storage device having a memory such as a ROM (read only memory) or a RAM (random access memory), and an input/output unit. A computer having an interface device. The arithmetic processing device of the control unit 100 executes arithmetic processing according to a computer program stored in a storage device, and sends control signals for controlling the cutting device 1 to the cutting device via an input/output interface device. 1 to the above-mentioned components.

Furthermore, the control unit 100 is connected to a display unit 102 configured with a liquid crystal display device or the like that displays the status of machining operations, images, etc., and an input unit used by an operator to register machining content information. . The input unit includes at least one of a touch panel provided on the display unit 102 and an external input device such as a keyboard.

In the cutting device 1 having the above-mentioned configuration, an operator registers machining content information in the control unit 100, places a cassette 61 containing a workpiece 200 on the cassette elevator 60, and controls a machining operation start instruction from the operator. When the unit 100 receives the request, it starts the machining operation. When the machining operation starts, the cutting device 1 rotates the spindle 23 around its axis, and the transport unit 80 takes out one workpiece 200 from the cassette 61 and attaches the adhesive tape 206 to the holding surface 11 of the chuck table 10. The back surface 204 side is placed through the.

The cutting device 1 suction-holds the workpiece 200 on the holding surface 11 via the adhesive tape 206, and clamps the annular frame 205 with the clamp portion 12. In the cutting device 1, the moving unit 40 moves the chuck table 10 below the imaging unit 30, and the imaging unit 30 images the workpiece 200 suctioned and held on the chuck table 10 to perform alignment.

The cutting device 1 supplies cutting water from the nozzles 251 and 252 while moving the cutting blade 21 and the workpiece 200 relatively along the dividing line 202 using the moving unit 40 based on the processing content information. At the same time, the cutting blade 21 is cut into the planned dividing line 202 of the workpiece 200 until it reaches the adhesive tape 206. When the cutting device 1 cuts all the scheduled dividing lines 202 of the workpiece 200, the workpiece 200 is transported to the cleaning unit 70 by the transport unit 80, and after being cleaned by the cleaning unit 70, the transport unit 80 transfers the workpiece 200 to the cassette 61. be brought inside.

The cutting device 1 sequentially cuts the workpieces 200 in the cassette 61. After cutting all the workpieces 200 in the cassette 61, the cutting device 1 ends the machining operation. Further, the cutting device 1 is configured so that the mist of cutting water scattered from the lower end of the cutting edge 212 of the cutting blade 21 during cutting is guided into the inlet portion 263 of the duct 26 along the scattering direction 401 through the inlet 261. A portion of the water collides with the collision surface 271 and is separated into gas and cutting water. In the cutting device 1, the mist enters the inlet portion 263 of the duct 26, collides with the first collision surface 271, and is separated into gas and cutting water.The mist collides with the second collision surface 272, and the mist is separated into gas and cutting water. separated from

In the cutting device 1, cutting water separated from the mist falls from the collision surfaces 271 and 272 and is collected in a water reservoir 273 provided at the outlet 265, and the cutting water that has exceeded the upper end of the water reservoir 273 is transferred to the outlet 262. The liquid is discharged through the duct 26 to the outside. In addition, the cutting device 1 passes the mist that could not be separated into gas and liquid onto the water surface of the cutting water stored in the water reservoir 273 of the duct 26, brings it into contact with the cutting water, and further separates the mist into gas and liquid. The gas and the mist that cannot be completely separated from the gas and liquid are exhausted to the outside of the duct 26 from the outlet 262. Further, the cutting apparatus 1 according to the first embodiment exhausts the atmosphere inside the processing chamber wall 6, that is, the processing chamber 303, to the outside of the cutting apparatus 1 from the exhaust duct 8 while performing the processing operation.

As described above, in the cutting device 1 according to the first embodiment, the duct 26 that receives mist from the inlet 261 of the blade cover 24 and guides it to the outlet 262 has collision surfaces 271 and 272 with which the mist containing cutting debris collides. , and a water reservoir section 273 for collecting the cutting fluid that has fallen from the collision surfaces 271, 272. Since the water reservoir section 273 is provided at the outlet section 265 of the duct 26, the cutting water separated into gas and liquid at the collision surfaces 271, 272 can be collected. is constantly supplied to the water reservoir 273, and the mist in the duct 26 that has not been separated into gas and liquid passes over the surface of the cutting water stored in the water reservoir 273 and is exhausted from the outlet 262. Therefore, in addition to separating the mist into gas and liquid at the collision surfaces 271 and 272, the cutting device 1 can also separate the mist into gas and liquid by passing the cutting water stored in the water reservoir 273 over the water surface. , there is a high gas-liquid separation effect, and filling of the processing chamber 303 with mist is suppressed. As a result, the cutting device 1 can suppress leakage of mist from inside the processing chamber 303.

Further, in the cutting device 1, since the duct 26 of the blade cover 24 is not equipped with a sponge-like filter, the inside of the duct 26 is not clogged with cutting debris, and the maintenance frequency of the duct 26 etc. is low. . As a result, the cutting device 1 according to the first embodiment has the effect of being able to suppress clogging in the duct 26 of the blade cover 24 while suppressing leakage of mist from the processing chamber 303.

Further, the cutting device 1 according to the first embodiment has a first collision surface 271 that intersects with the mist scattering direction 401 from the lower end of the cutting edge 212 of the cutting blade 21, and Since the second collision surface 272 is provided with which the mist guided to the rear of the spindle 23 along the axis 402 collides, the mist can reliably collide with each of the collision surfaces 271 and 272.

[Embodiment 2]
A cutting device according to Embodiment 2 of the present invention will be explained based on the drawings. FIG. 7 is a front view of the cutting unit of the cutting device according to the second embodiment. In addition, in FIG. 7, the same parts as those in Embodiment 1 are denoted by the same reference numerals, and the description thereof will be omitted.

The duct 26-2 of the cutting device 1-2 according to the second embodiment does not include the first collision surface 271, and as shown in FIG. This is the same as the first embodiment except that they are lined up in the direction. In the cutting device 1-2 according to the second embodiment, the mist of cutting water scattered from the lower end of the cutting edge 212 of the cutting blade 21 during cutting passes through the inlet 261 along the scattering direction 401 and reaches the inlet portion of the duct 26-2. 263 and collides with the second collision surface 272, part of which is separated into gas and cutting water.

In the cutting device 1-2, cutting water separated from the mist falls from the second collision surface 272 and is collected in a water reservoir 273 provided at the outlet 265, and the cutting water that exceeds the upper end of the water reservoir 273 is removed. It is discharged to the outside of duct 26-2 through outlet 262. Further, the cutting device 1 passes the mist that could not be separated into gas and liquid onto the surface of the cutting water stored in the water reservoir 273 of the duct 26-2, contacts the cutting water, and further separates the mist into gas and liquid. Then, the gas and the mist that cannot be completely separated from the gas and liquid are exhausted to the outside of the duct 26 from the outlet 262.

In the cutting device 1-2 according to the second embodiment, the duct 26-2 that receives mist from the inlet 261 of the blade cover 24 and guides it to the outlet 262 includes a second collision surface 272 and a water reservoir 273. 273 is provided at the outlet portion 265 of the duct 26-2, the cutting water separated into gas and liquid at the second collision surface 272 is always supplied to the water reservoir portion 273, as in the first embodiment. The mist that has not been separated into gas and liquid therein passes over the surface of the cutting water stored in the water reservoir 273 and is exhausted from the outlet 262. As a result, the cutting device 1-2 according to the second embodiment not only separates the mist into gas and liquid at the second collision surface 272, but also separates the mist by passing the cutting water stored in the water reservoir 273 over the surface of the water. Gas-liquid separation is possible, and a high gas-liquid separation effect is achieved, and since the duct 26-2 of the blade cover 24 is not equipped with a sponge-like filter, the mist from the processing chamber 303 can be separated as in the first embodiment. This has the effect of suppressing clogging in the duct 26-2 of the blade cover 24 while suppressing leakage.

[Embodiment 3]
A cutting device according to Embodiment 3 of the present invention will be explained based on the drawings. FIG. 8 is a plan view of the cutting unit of the cutting device according to the third embodiment. FIG. 9 is a cross-sectional view of the duct of the cutting unit shown in FIG. 8. In addition, in FIGS. 8 and 9, the same parts as those in Embodiment 1 are denoted by the same reference numerals, and the description thereof will be omitted.

As shown in FIGS. 8 and 9, the duct 26-3 of the cutting device 1-3 according to the third embodiment has the following features except that the gas-liquid separation section 27 includes a third collision surface 274 that is a collision surface. This is the same as form 1. The third collision surface 274 of the duct 26-3 of the cutting device 1-3 according to the third embodiment collides with the mist guided from the extension portion 264 to the outlet portion 265 to separate the mist into gas and liquid. In Embodiment 3, the third collision surface 274 is the inner surface of an upright wall 268 that is erected from the outer wall that is farthest from the extension part 264 and faces the extension part 264 in the Y-axis direction among the outer walls that constitute the outlet part 265. It is.

In the cutting device 1-3 according to the third embodiment, the duct 26-3 that receives mist from the inlet 261 of the blade cover 24 and guides it to the outlet 262 includes collision surfaces 271, 272, 274 and a water reservoir 273, Since the water reservoir portion 273 is provided at the outlet portion 265 of the duct 26-3, cutting water separated into gas and liquid at the collision surfaces 271, 272, and 274 is always supplied to the water reservoir portion 273, and the air inside the duct 26-3 is constantly supplied to the water reservoir portion 273. The mist that has not been separated passes over the surface of the cutting water stored in the water reservoir 273 and is exhausted from the outlet 262. As a result, the cutting device 1-3 according to the second embodiment not only separates the mist into gas and liquid at the collision surfaces 271, 272, and 274, but also allows the cutting water stored in the water reservoir 273 to pass over the water surface. The mist can be separated into gas and liquid, resulting in a high gas-liquid separation effect, and since the duct 26-3 of the blade cover 24 is not equipped with a sponge-like filter, similar to the first embodiment, the gas from the processing chamber 303 is This has the effect of suppressing clogging in the duct 26-3 of the blade cover 24 while suppressing mist leakage.

Further, since the duct 26-3 of the cutting device 1-3 according to the third embodiment includes a third collision surface 274 in addition to the first collision surface 271 and the second collision surface 272, the duct 26-3 according to the third embodiment This also results in a high gas-liquid separation effect.

Note that the present invention is not limited to the above embodiments and modifications. That is, various modifications can be made without departing from the gist of the invention.

1 Cutting device 10 Chuck table 20 Cutting unit 21 Cutting blade 22 Spindle housing 23 Spindle 24 Blade cover 25 Nozzle 26 Duct 27 Gas-liquid separation section 40 Movement unit 261 Inlet 262 Outlet 271 First collision surface (collision surface)
272 Second collision surface (collision surface)
273 Water reservoir 274 Third collision surface (collision surface)
200 Workpiece 401 Scattering direction

Claims (2)

A chuck table that holds a workpiece, a cutting unit that cuts the workpiece held on the chuck table with a cutting blade, and a movement unit that relatively moves the chuck table and the cutting unit,
The cutting unit includes a spindle that is rotatably supported by a spindle housing and to which the cutting blade is attached, a blade cover that is fixed to the spindle housing and covers the cutting blade, and a nozzle that supplies cutting water to the cutting blade. A cutting device comprising:
The blade cover includes:
A duct that receives the cutting water mist scattered by the rotation of the cutting blade from an inlet and guides it to an outlet remote from the inlet, and a gas-liquid separation section provided in the duct that separates the mist into gas and liquid. and,
The gas-liquid separation section is
comprising a collision surface on which the mist scattered by the rotation of the cutting blade collides, and a water reservoir for storing liquid that has fallen from the collision surface,
the water sump extends to an outlet of the duct, and is exhausted from the outlet through the water surface of the sump ;
The duct extends from the side of the cutting blade attached to the tip of the spindle toward the rear end of the spindle, and the collision surface includes a first collision surface that intersects with the scattering direction of the mist, and a first collision surface that intersects with the direction in which the mist is scattered; A cutting device comprising a second collision surface with which the mist guided rearward collides . 2. The cutting device according to claim 1, wherein the water reservoir is constituted by an inner surface of a flat bottom portion of the duct and a portion standing upwardly from an outer edge of the bottom portion.

Images