KR20120003820A - Grinding device, grinding method, and manufacturing method of thin-plate like member - Google Patents

Abstract

PURPOSE: The liquid is accurately sprayed with the injection nozzle to the grinding position of a grindstone, the section of a thin film-type of the workpiece of thin film-type is accurately ground. CONSTITUTION: A grinding device comprises a table, a grindstone(61), a moving unit, a plurality of injection nozzles(112), and a control means. A workpiece(W) of the thin film-type is loaded in the table. The grinding plane grinding the cross section of the workpiece is formed in the outer periphery of the grindstone. In order that the cross section of the workpiece is ground in the polishing surface, the moving unit relatively transfers the grindstone and the workpiece. A plurality of injection nozzles is installed in the around the grindstone at intervals of equal angles. It makes something as a atomizing the liquid and the injection nozzle dies of resentment the liquid on the grinding plane. The liquid is rearwards sprayed based on the grinding work location sprayed to the rear side in a rotational direction of the grindstone. The control means controls the injection of a plurality of injection nozzles.

Description

Grinding device and grinding method and manufacturing method of thin member {GRINDING DEVICE, GRINDING METHOD, AND MANUFACTURING METHOD OF THIN-PLATE LIKE MEMBER}

The present invention relates to a grinding apparatus, a grinding method, and a manufacturing method of a thin plate-shaped member.

The grinding device is used to perform cross-sectional grinding of highly fragile thin glass used in portable terminals such as mobile phones, for example, thin rectangular shaped workpieces. The monitor of this mobile terminal is often used with a thin rectangular glass plate. Such thin plate-shaped glass is generally formed in a predetermined shape by cut | disconnecting from a large sized glass plate to substantially workpiece shape, and grinding the cross section of the cut glass plate correctly by the grinding wheel of a grinding apparatus. In particular, at the time of this grinding | polishing, the chamfered process is also performed simultaneously, and preventing the defect of the cross section of a thin glass plate is performed. At the time of grinding by the grindstone of the said grinding apparatus, it is performed to inject grinding liquid from the injection nozzle with respect to the grindstone heated at the time of processing, and to cool the grindstone.

As described above, in the case of grinding the outer shape of the glass plate, the grinding wheel is moved relatively along the circumference of the glass plate, so that the grinding processing position at which the grindstone and the glass plate contact is 360 ° in any direction as viewed from the rotation axis direction of the grinding wheel. To change. That is, for example, when grinding one long side of a substantially rectangular glass plate, assuming that the grinding processing position is located at 12 o'clock as viewed from the rotation axis direction, the short side adjacent to this long side The grinding position is shifted to 3 o'clock when grinding, 6 o'clock when grinding other long sides, and 9 o'clock when grinding other short sides. And as mentioned above, when a grinding process position changes sequentially at the time of a grinding operation, in order to supply grinding liquid to a grinding process position appropriately, the supply means of grinding liquid is also needed in the 360 degree direction seen from the rotation axis direction of a grindstone. It is thought to be.

As one of the means for supplying such grinding liquid around the grindstone,

(1) A technique has been developed in which a ring-shaped supply pipe centered on a whetstone is provided and a grinding liquid is supplied from the supply pipe without a break in the direction of the whetstone center (see JP-A-2006-346803). However, in the case of the supply form of such grinding liquid, there arises a problem of requiring a large amount of grinding liquid. When this point is explained in detail, a grindstone rotates in the state which rotates with the surrounding air, and breaks through this air layer, In order to supply the grinding liquid to the grindstone, it is necessary to supply the grinding liquid at a sufficient pressure and a sufficient flow rate. Therefore, in the case of supplying the grinding liquid from the ring-shaped supply pipe as described above, the grinding process is performed at a flow rate approximately 10 times that of the grinding liquid required at the grinding processing position and is not continuously supplied while maintaining the corresponding pressure. Not enough grinding fluid can be supplied to the location.

In addition, if a sufficient flow rate is supplied to the grinding processing position in such a supply form, a large amount of grinding liquid is injected toward the grindstone, and as a result, a situation such as water staying around the grindstone arises. The grindstone turns to water. In this case, since the jetting flow of the grinding liquid from the supply pipe is blocked by the water film created by the rotation of the grindstone, there is a fear that the grinding liquid necessary for the grinding processing position may not be stably supplied, and the grinding is performed. There exists a possibility that the function aimed at the sum may not be completed.

Moreover, as another grinding liquid supply means,

(2) A technique has been developed in which a plurality of spray nozzles are provided along a circumference of a rectangular glass plate as a work piece, and the grinding liquid is sprayed from a spray nozzle close to the grinding position (Japanese Patent Laid-Open No. 1993-162055). Publication). However, in the case where the spray nozzles are provided in this way, since a large number of spray nozzles are required depending on the size of the glass plate, the manufacturing apparatus itself has a problem of high cost, and also a problem in that it is necessary to secure an installation place for the spray nozzles. have.

Moreover, as another grinding liquid supply means,

(3) It is also conceivable that one injection nozzle is configured to follow the cutting position of the grindstone and change the movement and the injection direction. However, if it is comprised in this way, a device will be compounded because of this following mechanism, and the cost of the polishing apparatus itself will become high, and there also exists a problem of the need to secure the installation space of the following mechanism.

Japanese Laid-Open Patent Publication No. 2006-346803 Japanese Laid-Open Patent Publication No. 1993-162055

Then, an object of this invention is to provide the grinding apparatus, the grinding method, and the manufacturing method of a thin plate member which can grind the cross section of a thin-shaped workpiece exactly and safely.

The grinding device of the present invention,

A table for mounting a thin workpiece;

Whetstone which has the grinding surface which can grind the end surface of a workpiece to an outer periphery, and is rotatably comprised;

Moving means for relatively moving the grinding wheel and the workpiece to grind the end face of the workpiece on the grinding surface;

A plurality of injection nozzles provided around the whetstone at approximately equiangular intervals and for atomizing and injecting liquid into the grinding surface;

Control means for controlling the injection of the plurality of injection nozzles so that liquid is injected in the rearward direction of the grinding wheel on the basis of the grinding processing position of the grindstone in contact with the workpiece

It includes.

The said grinding apparatus mounts a to-be-processed object to a table, can move a to-be-processed object and a grindstone relatively by a moving means, and can grind the end surface of a workpiece with a grindstone. During the grinding operation, the injection nozzle injects the granulated liquid toward the grindstone, so that the granulated liquid can easily penetrate through the air layer turning together by the rotation of the grindstone on the surface (grinding surface) of the grindstone. And the grinding surface of the grindstone can be supplied accurately and easily. Further, since the liquid is injected from the injection nozzle in the rotational direction rearward from the grinding processing position, the liquid that reaches the grinding surface of the grindstone can be easily reached to the grinding processing position by the rotation of the grinding wheel.

In particular, in the above grinding device, even if a change is made in the relative position between the grinding position and the rotary shaft of the grindstone in accordance with the grinding of the cross section, the spraying direction of the spray nozzle is controlled by the control means, so that the rotational direction is more than the grinding position of the grindstone. The liquid can be jetted backwards, and there is no need to supply a large amount of liquid unnecessarily. Therefore, according to the said grinding apparatus, the cost required for a liquid can be reduced, and it can prevent that the situation like water staying around a grindstone arises.

In addition, since the injection of the liquid is performed by the injection nozzles provided around the grindstone, it is not necessary to provide a plurality of injection nozzles all over the ends of the workpiece. Therefore, compared with the case where a spray nozzle is provided over the both ends of a to-be-processed object, the said apparatus has few injection nozzles, the cost reduction of the manufacturing apparatus itself can be aimed at, and securing of the installation place of a spray nozzle is also comparatively easy. .

In addition, the grinding method of the present invention,

As a grinding | polishing method which grinds the cross section of a thin-shaped workpiece by a grindstone, spraying liquid to a grindstone by an injection nozzle,

A grinding step of grinding the cross section of the workpiece by rotating the grindstone relative to the workpiece with the spray nozzle while rotating the grindstone about an axis of rotation approximately perpendicular to the plane of the workpiece;

When performing the grinding step, the grinding process of the grinding wheel in contact with the workpiece is referred to, and when the relative position of the grinding wheel with the rotation axis is changed, the liquid is finely divided in the rotational direction behind the grinding processing position of the grinding wheel. Spraying liquid spraying process

Grinding method comprising a.

In the above method, by the liquid spraying step, the spray nozzle ejects the granulated liquid toward the grindstone, so that the granulated liquid easily turns the air layer that turns together by the rotation of the grindstone on the surface (grinding surface) of the grindstone. Through it, the grinding surface of the grindstone can be supplied accurately and easily. Further, since the liquid is injected from the injection nozzle in the rotational direction rearward from the grinding processing position, the liquid that reaches the grinding surface of the grindstone can be easily reached to the grinding processing position by the rotation of the grinding wheel.

Particularly, in the above grinding method, when the relative position between the grinding processing position and the rotary shaft of the grindstone is changed in the liquid spraying step, the liquid can be injected rearward in the rotational direction from the grinding processing position of the grindstone, so that a large amount of liquid is unnecessary. There is no need to supply it. Therefore, by the above grinding method, it is possible to reduce the cost required for the liquid and to prevent the occurrence of a situation such as water remaining around the grindstone.

In the grinding method, since the spray nozzle moves relatively with the workpiece in the grinding process with respect to the workpiece, it is not necessary to provide the spray nozzles over all the ends of the workpiece. Therefore, as compared with the case where a spray nozzle is provided over all the edges of a workpiece, since the spray nozzle becomes small, the cost reduction of the apparatus which implements the said grinding method is aimed at, and also securing the installation place of a spray nozzle is comparatively easy. Do.

In the said invention, it is preferable to employ | adopt two fluid nozzle which mixes and injects a liquid and gas as an injection nozzle. As a result, the granulated and injected liquid can reliably penetrate the air layer around the grindstone caused by the rotation of the grindstone.

And in the said invention, it is also possible to provide the injection center axis | shaft of an injection nozzle so that it may follow the tangential direction of the outer periphery of a grindstone, and it can also be provided so that it may substantially cross | intersect the rotating shaft of a grindstone.

Moreover, in the said invention, the structure which controls so that a control means may switch the injection nozzle which injects when the relative position of the said grinding process position and the rotating shaft of a grindstone changes at the time of grinding operation can be employ | adopted. Thereby, when a cutting position changes with respect to the rotating shaft of a grindstone, a control means can switch a spray nozzle which injects among a plurality of spray nozzles, and can spray a liquid back to the rotation direction more correctly than the grinding process position of a grindstone.

And when employ | adopting the said structure, it further contains the grindstone bearing member by which the rotating shaft of the grindstone is rotatably supported, and the nozzle frame fixed with respect to this grindstone bearing member, The said several injection nozzle is attached to a nozzle frame. The attached structure can be employ | adopted. As a result, a plurality of injection nozzles can be easily and reliably attached to the nozzle frame fixed to the whetstone bearing member, and the installation of the injection nozzles is easy.

In addition, in the case of employing the above-described configuration, it is preferable that the spray nozzles to be sprayed at the same time are controlled to be within two, so that an effect of performing an accurate grinding operation with a small amount of liquid can be obtained.

In addition, in the case of adopting the above configuration, the control means injects liquid from one spray nozzle when the grindstone is relatively moved in one direction with respect to the workpiece, and after the spraying, the one direction with respect to the grindstone workpiece. Dispensing liquid from another spray nozzle when moving relatively in another direction intersecting with and discharging liquid from both the one spray nozzle and the other spray nozzle while switching from the relative movement in one direction to the relative movement in the other direction. It is preferable to employ | adopt the structure which controls to spray. Thereby, the said one injection nozzle is sprayed in the cross section of the to-be-processed object, and the said other spray nozzle is sprayed in the cross section of the other direction of a to-be-processed object, and grinding operation can be performed correctly, and also the cross section of the one direction of a workpiece Between the end face and the end face in the other direction (for example, the corner part), in order to inject the liquid from both the one injection nozzle and the other injection nozzle, the workpiece may be ground while the liquid is supplied accurately. Can be.

In addition, this invention does not only target the said grinding apparatus and the grinding method, but also the manufacturing method of the thin plate-shaped member provided with the said grinding method.

As described above, in the present invention, it is possible to grind the workpiece by precisely reaching the grinding position of the grindstone by the spray nozzle, so that the end surface of the thin workpiece can be ground accurately and safely. I can do it.

1 is a top view showing an embodiment of a grinding apparatus according to the present invention.
FIG. 2 is a front view of the grinding apparatus of FIG. 1. FIG.
3 is a side view of the grinding apparatus of FIG. 1.
Fig. 4 is a three side view of the transfer robot of the grinding apparatus of Fig. 1, wherein (a) is a front view, (b) is a side view, and (c) is a top view.
FIG. 5 is a view illustrating an operation during transfer of the transfer robot of the grinding apparatus of FIG. 1, wherein (a) shows the work holding start state from the reference state, and (b) shows from the work holding start state to the machining stage. It is a figure which shows the workpiece conveyance state.
FIG. 6 is a diagram illustrating an operation during conveyance of the transfer robot of the grinding apparatus of FIG. 1, wherein (c) shows a camera photographing state from a workpiece conveyance state to a machining stage, and (d) shows a next from the camera photographing state. It is a figure which shows the holding start state of the workpiece | work.
7 is a top view of a second processing unit of the grinding apparatus of FIG. 1.
FIG. 8 is a front view including a partial cross section of the second machining unit of the grinding apparatus of FIG. 1.
FIG. 9 is a side view including a partial cross section of a second processing unit of the grinding apparatus of FIG. 1. FIG.
FIG. 10 is a detailed side view including a partial cross section when a large diameter grinding tool is used in the grinding apparatus of FIG. 1. FIG.
It is a detailed side view containing a partial cross section at the time of using the grinding tool of a small diameter in the grinding apparatus of FIG.
12 is a flowchart illustrating a control method of the grinding apparatus of FIG. 1.
It is a side view which shows the state which image | photographs the processing stage with the camera of the grinding apparatus of FIG.
It is explanatory drawing explaining the processing and calculation method of the data image | photographed in the grinding apparatus of FIG.
It is a typical top view for demonstrating the injection nozzle unit of the grinding apparatus of FIG.
It is a typical top view which shows the state which is grinding the workpiece | work of the grinding apparatus of FIG.
It is a typical top view which shows the state in which the workpiece is grinding in the other Example of the grinding apparatus which concerns on this invention.
It is a typical top view which shows the state in which the workpiece is grinding in the other Example of the grinding apparatus which concerns on this invention.
It is a typical top view which shows the state in which the workpiece is grinding in the other Example of the grinding apparatus which concerns on this invention.

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

First, the whole structure of a grinding apparatus is demonstrated, referring FIGS. In addition, although not shown specifically in each figure, even if this grinding apparatus is well known, in order to ensure safety of an operator, the guard plate is provided in the circumference | surroundings.

2 and 3, the grinding device M is provided with a frame 1 assembled in a lattice shape in a substantially rectangular shape at the bottom, and is used for grinding the upper surface. The unit is installed.

The base frame 1 is structured so as to firmly support the upper units by assembling the respective members 11, 12, 13 of known steel in the left-right direction, the front-back direction, and the up-down direction. have.

On the upper surface of the base frame 1, a flat plate material 14 made of iron is mounted and fixed. By this flat plate material 14, each member 11, 12, 13 of the base frame 1 can be concealed, and each unit can be provided on the base frame 1 further.

And in the base frame 1, the electronic control unit 15 (control means) is provided, and it is made to control the various units which grind. Although not described in detail, the electronic control unit 15 includes storage means for storing processing information and the like. Moreover, although not shown in figure, the control panel for the operator H to input information with respect to this electronic control unit 15 is also provided.

As shown in FIG. 1, the unit provided in the upper part (on the base frame 1) of the grinding apparatus M is the transfer robot 2 provided in the center, and the four processing units 3A provided around it, 3B, 3C, and 3D, the input and output stage 4 provided in front of the transfer robot 2, and the illumination movement unit 5 installed so as to extend in the front-rear direction at both the left and right positions of the transfer robot 2. Consists of.

The above-mentioned conveyance robot 2 is comprised from the so-called three-scalar robot which moves so-called in a horizontal direction. In FIGS. 1-3, although the conveyance robot 2 is shown by the reference state which is not moving, an operation state is demonstrated with reference to FIGS.

The upper and lower slide shafts 20 are provided in the front end of the transfer robot 2. At the lower end of the upper and lower slide shafts 20, a suction hand 21 for adsorbing and supporting the thin glass W of a substantially rectangular shape (approximately polygonal shape), which is a workpiece (workpiece), is provided. Moreover, the camera 23 for image acquisition is attached to the upper end of the up-and-down slide shaft 20 via a mounting bracket.

The transfer robot 2 transfers the thin glass W (Wo, Wi) from the feed-out stage 4 to the respective processing units 3A, 3B, 3C, and 3D, and to each processing unit 3A, 3B, 3C, and 3D are conveyed to the feed-out stage 4, respectively. The conveyance operation | work of this workpiece | work W is performed using the above-mentioned suction hand 21. As shown in FIG. Moreover, in this conveyance robot 2, the mounted workpiece | work W can be image | photographed from the upper side of the processing unit 3A, 3B, 3C, 3D by the camera 23 mentioned above.

The four processing units mentioned above are provided in front, back, left, and right of the transfer robot 2, respectively, and the 1st processing unit 3A, the 2nd processing unit 3B, the 3rd processing unit 3C, and the 1st processing unit It is provided as 4 processing unit 3D.

The components of each of the processing units 3A, 3B, 3C, and 3D are all set to the same one, so that the same grinding operation can all be performed. For example, as shown by 3 A of 1st processing units, the component has the processing stage 30 which adsorbs and supports the workpiece | work W in the grinding state, and the workpiece | work W from the upper side of the processing stage 30. Grinding fluid is sprayed toward the grinding spindle 31 for grinding the grinding wheel, the tool magazine 32 for holding a plurality of grinding tools (grindstone) adjacent to the machining stage 30, and the grinding wheel mounted on the grinding spindle 31. The injection nozzle unit 110 is provided.

In addition, among these, the processing stage 30 is provided with the left-right slide mechanism 34 (moving means) which slides the center processing table 33 to the left-right direction. Resin bellows covers 35 are provided on the left and right sides of the processing table 33 (the bellows cover on the right side of the processing table 33 is not shown hidden by a grinding spindle or the like). The bellows cover 35 prevents the grinding liquid from infiltrating into the left and right slide mechanisms 34. In addition, a catch pan 36 is provided on the upper surface of the work table 33 in a rectangular box shape, and the catch pan 36 prevents the grinding liquid from scattering. Doing.

Moreover, the grinding spindle 31 is equipped with the front-back slide mechanism 38 (moving means) which slides forward and backward. And the vertical guide mechanism 39 which moves to an up-down direction between the grinding spindle 31 and the front-back slide mechanism 38 is provided. In this way, the grinding spindle 31 is comprised so that it may move freely not only in a front-back direction but a vertical direction.

And the front and rear slide mechanism 38 is firmly fixed to the side frame 16 of the large square material extended in the front-back direction, as shown in FIG. Thereby, the support rigidity of the grinding spindle 31 can be improved and grinding precision can be improved.

The tool magazine 32 is comprised so that up to five grinding tools (grindstone) 6, ... (refer FIG. 2, FIG. 3) can hold | maintain. The tool magazine 32 holds a plurality of grinding tools 6 such as whetstones having different diameters and whetstones having different abrasives. The plurality of grinding tools 6 are selected according to the processing contents and mounted on the grinding spindle 31.

The above-mentioned draw-out stage 4 is connected to the opening / closing door 40 which the worker H opens and closes, the rectangular cartridge mounting stand 41 which moves in cooperation with the opening / closing door 40, and the cartridge mounting stand 41. FIG. The work cartridge 42 is detachably provided.

The opening / closing door 40 is comprised by the horizontally long rectangular steel plate which provided the hinge axis 43 (refer FIG. 3) extended in the horizontal direction at the lower end, and has an upper outer surface in roughly planar view. The U-shaped handle part 44 is provided. By opening and closing this opening / closing door 40 by the worker H with the handle part 44 to the front centering around the hinge axis 43, the feed-out stage 4 can be opened and grinding The work W in the apparatus M can be moved in and out.

Both ends of the cartridge mounting table 41 are connected to a link mechanism 45 connected to the upper portion of the opening / closing door 40. The cartridge mounting table 41 is slidably mounted on a slide rail 46 (see FIG. 3) whose lower portion extends in the front-rear direction. Therefore, when the operator H opens and closes the opening / closing door 40, the cartridge mounting table 41 connected to the opening / closing door 40 via the link mechanism 45 slides in the outward direction of the grinding apparatus M. In addition, when the operator H closes the opening / closing door 40, the cartridge mounting table 41 slides in the inward direction of the grinding apparatus M.

The work cartridge 42 includes four resin walls 47 and four partition stacking portions 48 so that the stacks of the work W are arranged in four rows in the left and right directions. Among these, the unprocessed workpiece | work Wi is laminated | stacked on the right two laminated parts 48, and the processed workpiece | work Wo is laminated | stacked on the left two laminated parts 48. FIG. This work cartridge 42 is provided at both ends with a holding portion 49 at the time of transport so that the worker H can be easily separated from the cartridge mounting table 41.

The worker H sets (mounts) the work W that has not been processed to the work cartridge 42, and opens and closes the work cartridge 42 in which the work W is set in the cartridge mounting table 41. By closing the door 40, preparation before processing can be provided.

The above-mentioned illumination movement unit 5 is supported by the movement slide rail 50 extended in the front-back direction at the both sides positions of the conveyance robot 2, and this movement slide rail 50 via the vertical movement mechanism 51. A substantially rectangular illumination frame 52 is provided.

The movable slide rail 50 is provided with the front end and the rear end fixed to the metal flat member 14 through the support brackets 50a and 50a. The rear end of the movable slide rail 50 extends to the position of the tool magazine 32 of the rear processing unit (second processing unit 3B, fourth processing unit 3D). Therefore, the illumination frame 52 is largely moved to the rear of the grinding apparatus M, so that the standby timing (grinding processing with the respective machining units 3A, 3B, 3C, 3D) that do not use the illumination frame 52 is performed. Timing being performed], the illumination frame 52 can be retracted to the rear position.

The illumination frame 52 is comprised so that the inside of a frame may be irradiated by embedding several LED which is not shown in the inner peripheral surface of each frame part 52a, .... When the illumination frame 52 photographs the workpiece W with the camera 23, the illumination frame 52 moves to the catch pan 36 of the machining stage 30, and irradiates the workpiece W from the side with an LED to thereby obtain the workpiece ( The external shape (outline) of W) is floated, and the imaging | photography of the workpiece | work W is performed easily.

Next, the transfer robot 2 will be described with reference to FIGS. 4 to 6. 4 is a three-side view of the transfer robot, (a) is a front view, (b) is a side view, and (c) is a top view. Fig. 5 and Fig. 6 are diagrams for explaining the operation during the transfer of the transfer robot, and Fig. 5 (a) shows the work holding start state from the reference state, and Fig. 5 (b) processes from the work holding start state. Fig. 6 (c) is a view showing the workpiece conveyance state to the stage, and Fig. 6 (c) shows the camera photographing state from the workpiece conveyance state to the machining stage, and Fig. 6 (d) shows the holding start state of the next workpiece from the camera photographing state. It is shown in the drawings respectively.

As described above, the transfer robot 2 is constituted by three joint scalar robots moving in the horizontal direction, and is configured to be movable in the horizontal direction. Specifically, as shown in FIG. 4B, the transfer robot 2 is rotatably provided in the first joint 2Ja, the second joint 2Jb, and the third joint 2Jc, It is installed to be movable in the left-right direction. As a result, the vertical slide shaft 20 at the front end of the front arm 24 can move in the horizontal direction.

The vertical slide shaft 20 penetrates the front end of the front arm 24 in the vertical direction and slides in the vertical direction.

The adsorption hand 21 mentioned above is provided in the lower end of the up-and-down slide shaft 20. The suction hand 21 is provided with four suction disks 26,... Facing downward on a rectangular flat plate base plate 25. A negative pressure is applied to the suction plate 26 to generate a suction force and to support the thin glass W as a work.

These four adsorption boards 26, ... are provided in two left and right positions, respectively, as shown in Fig. 4C. Each of the two suction disks 26 allows one workpiece W to be supported by suction. Therefore, two workpieces W can be conveyed at one time by one suction hand 21.

In this suction hand 21, pins 27 protruding downward are provided at both ends of the base plate 25. These pins 27 and 27 are contact members which abut the work W. FIG. That is, before conveying the workpiece | work W, the workpiece | work W is once pushed into the workpiece cartridge 42 with this pin 27 according to the movement of the transfer robot 2, and the workpiece | work W is pushed by the workpiece cartridge 42 ) Is sorting within.

The camera 23 is provided in the upper end of the up-and-down slide shaft 20 as mentioned above. This camera 23 is provided in the position which shifted about 90 degrees from the holding position (protrusion part of the base plate 25) of the workpiece | work W of the suction hand 21. As shown in FIG. This is to prevent the base plate 25 from being disturbed when shooting with the camera 23. This camera 23 is comprised with the general CCD camera, and is made to input two-dimensional image data.

Moreover, this camera 23 is attached to the up-and-down slide shaft 20 via the mounting bracket 22. As shown in FIG. The mounting bracket 22 includes a female portion 22a bent slightly downward, a camera mounting portion 22b that can adjust the vertical position, and a shaft fixing portion 22c that is cylindrically fixed to the upper and lower slide shafts 20. Consists of. Since the camera 23 is fixed to the upper and lower slide shafts 20 through the arm portion 22a, the camera 23 is positioned away from the upper and lower slide shafts 20 to prevent the front arm 24 from being photographed at the time of shooting. .

Next, the operation | movement at the time of the conveyance robot 2 is demonstrated with reference to FIG. 5 and FIG.

As shown in FIG. 5A, the transfer robot 2 first rotates each joint slightly counterclockwise from a reference state, thereby unprocessing the workpiece Wi stacked on the workpiece cartridge 42. Suction is carried out by the suction hand 21. At this time, by rotating the upper and lower slide shafts 20 counterclockwise, the base plate 25 of the suction hand 21 is rotated and the workpiece Wi which has not been processed by the suction plate 26 on the left is sucked. do.

Subsequently, as shown in FIG. 5B, the transfer robot 2 rotates each joint largely in a counterclockwise direction, and conveys the workpiece Wi to the machining stage 30 of the first machining unit. do. At this time, the workpiece W1 is conveyed to the approximate position and mounted on the machining stage 30. That is, the workpiece Wi is conveyed to the machining stage 30 and mounted at an approximate position without performing precise positioning.

And as shown in FIG.6 (c), the conveyance robot 2 rotates the front arm 24 counterclockwise again, and also rotates the up-and-down slide axis 20 clockwise, so that a camera ( 23) is reliably positioned above (right above) workpiece W1. In this manner, the transfer robot 2 is configured to photograph the workpiece Wi carried by itself and mounted with the camera 23. In addition, the imaging procedure of the workpiece | work W is mentioned later.

And finally, as shown to Fig.6 (d), the conveyance robot 2 rotates each joint clockwise, in order to convey the next unprocessed workpiece W after completion | finish of imaging of the workpiece | work Wi. Returning to this, the next work W is adsorbed by the adsorption board 26 on the left side of the base plate 25.

Then, the conveyance robot 2 repeats the operation | movement of FIG.5 (b), and conveys the workpiece | work W which was not processed from the workpiece cartridge 42 to the next process stage. In this way, the workpiece W which has not been subsequently processed is conveyed to the machining stage of the empty machining unit.

And although not specifically shown in figure, the conveyance robot 2 adsorb | sucks the finished workpiece Wo which the process was complete | finished by the suction board 26 of the right side, and the workpiece cartridge 42 from the processing stage 30 is carried out. Return to). The transfer robot 2 processes the unprocessed workpiece Wi while picking up the finished workpiece Wo from the machining stage 30 before the operation of FIG. 5B. This finished work Wo is also conveyed at the same time.

Next, the processing unit will be described. FIG. 7 is a top view of the machining unit, FIG. 8 is a front view including a partial cross section of the machining unit, and FIG. 9 is a side view including a partial cross section of the machining unit.

As illustrated in FIG. 7, the machining unit 3B (described as a second machining unit for convenience) includes a machining stage 30 holding the above-described work W and a grinding spindle for grinding the work W. FIG. 31 and a tool magazine 32 for holding the grinding tool 6 are provided.

Among these, the machining stage 30 includes, as described above, a rectangular machining table 33 (table), a left and right slide mechanism 34 for moving the machining table 33 from side to side, and a left and right slide mechanism ( It is provided with the bellows cover 35 which covers 34, the catch pan 36 provided in the upper surface of the process table 33, and the injection nozzle unit 110 which injects grinding liquid.

Moreover, this machining stage 30 is equipped with the various components further as shown in FIG.

First, an adsorption table 70 for adsorbing and supporting the work W is provided on the upper surface of the machining table 33 at the inner center of the catch pan 36. This adsorption table 70 is comprised from the substantially T-shaped block-shaped sheet | seat whose upper surface (receiving surface) 70a becomes a rectangle (refer FIG. 7). On the upper surface 70a of the suction table 70, a plurality of inlet ports 70b (see Figs. 10 and 11) are provided to give a negative pressure. In addition, in order to prevent a scar from occurring on the surface of the workpiece | work W which is thin glass, the upper surface 70a of the adsorption | suction stand 70 is smoothed.

In the periphery of the said adsorption | suction stand 70, the two reference pins 71 and 71 for calculating the machine origin at the time of grinding process are installed so that it may face the camera 23 side (upper side). The reference pins 71 and 71 are arranged at positions where the workpieces W do not overlap so that the workpiece W can be taken from the camera 23 while the workpiece W is mounted (maintained) on the suction table 70. have. In addition, the two reference pins 7l and 71 are arrange | positioned so that it may be located diagonally with respect to the workpiece | work W. As shown in FIG. And when the workpiece | work W is completely transparent, you may set so that the position of the reference pin may overlap with the workpiece | work W. As shown in FIG.

As shown in FIG. 8, the tip portion 71a of the reference pin 71 is set such that the height hp is equal to the height hs of the upper surface 70a of the suction table 70. By setting in this way, since the shift of focus does not occur between the workpiece | work W and the reference pin 71 at the time of imaging with the camera 23, image data can be obtained reliably.

Moreover, the inside of the catch pan 36 is provided with the substantially square background board 72 inclined from the bottom. The background plate 72 is coated with a black color, the entire surface of which is not shiny, prevents reflection when the camera 23 is photographed, and the photographing of the work W and the reference pin 71 is taken out to make it stand out. I am trying to lose it. In addition, by installing the background plate 72 to be inclined, the grinding liquid flows immediately. In addition, an insertion hole (specifically, not shown) is formed in the background plate 72 for inserting the reference pin 71 and the suction table 70.

In the adjoining position of the catch pan 36, the drain pipe 73 and the drain container 74 which drain the grinding liquid which flows into the catch pan 36 are provided. By providing this drain pipe 73 and the drain container 74, grinding liquid is prevented from remaining in the catch pan 36. As shown in FIG.

The left and right slide mechanism 34 slides the processing table 33 freely in the left and right directions by a known LM guide. And this left and right slide mechanism 34 is comprised so that the slide amount may be controlled by 34M of stepping motors. That is, the position of the left-right direction of the process table 33 is controlled by the left-right slide mechanism 34. FIG. Thereby, at the time of the grinding process mentioned later, the left-right slide mechanism 34 defines the left-right position of a grinding path.

The bellows cover 35 is configured to expand and contract in the horizontal direction as in the so-called accordion. Therefore, even if the work table 33 is moved left and right by the left and right slide mechanism 34, a gap does not occur between the work table 33 and the bellows cover 35, so that the grinding liquid is in the left and right slide mechanism 34. This can be prevented from flowing out.

As mentioned above, the catch pan 36 is comprised in the rectangular box shape of which the upper side was liberated, and is set so that grinding liquid may not leak out. Specifically, as shown in FIG. 8, the side wall 36a of the catch pan 36 extends to a position hc higher than the reference pin 71 (hp) and the suction table 70 (hs), and the grinding liquid To prevent leakage.

The grinding spindle 31 is an electric motor 31a that generates a rotational driving force when grinding, and a chuck 31b that fixes the grinding tool 6 (grindstone) to the spindle shaft of the electric motor 31a. ).

The grinding spindle 31 is equipped with the front-back slide mechanism 38 as mentioned above. This front and rear slide mechanism 38 is provided with the slide rail 38a extended in the front-back direction, and the slider 38b which moves on the slide rail 38a. The front and rear slide mechanism 38 is also configured to control the slide amount of the slider 38b by the stepping motor 38M, and the front and rear positions of the grinding spindle 31 are controlled by the front and rear slide mechanism 38. have. Therefore, at the time of grinding, this back and forth slide mechanism 38 defines the front-back direction position of a grinding path.

In addition, the upper and lower guide mechanisms 39 are provided between the grinding spindle 31 and the front and rear slide mechanisms 38 as described above. The vertical guide mechanism 39 also includes a rail 39a extending in the vertical direction and a moving member 39b that moves on the rail. Moreover, this vertical guide mechanism 39 is also comprised so that the vertical movement amount of the moving member 39b may be controlled by the stepping motor 39M. The vertical guide mechanism 39 controls the vertical position of the grinding spindle 31. Thereby, when positioning the grinding tool 6 to the workpiece | work W, the position adjustment is performed using this up-down guide mechanism 39. As shown in FIG.

Further, the grinding wheel 31 is rotatably axially supported, and the nozzle frame 111 of the spray nozzle unit 110 described later is attached to the whetstone bearing member 100 secured to the moving member 39b. have.

As described above, the tool magazine 32 is configured to hold up to five grinding tools 6... Specifically, as shown in FIG. 9, five tool holding parts 32a, ... holding the grinding tools 6, ... are arranged in a line in the front-rear direction, so that the tool holding part 32a and the grinding spindle are arranged. It is comprised so that the grinding tool 6 may be changed automatically between 31 and.

Therefore, in this grinding apparatus M, the some grinding tools 6 and ... can be replaced automatically according to a grinding location, and grinding degree of freedom can be improved.

The grinding tool 6 of the grinding spindle 31 is demonstrated with reference to FIG. 10, FIG. FIG. 10 is a detailed side view when a large diameter grinding tool is used, and FIG. 11 is a detailed side view when a small diameter grinding tool is used.

As described above, the grinding spindle 31 can be attached to and detached from the grinding tool 6 by the chuck 31b, and the grinding tool 6A of large diameter as shown in FIG. 10 and the one shown in FIG. The same small diameter grinding tool 6B can be switched and mounted.

The large diameter grinding tool 6A shown in FIG. 10 is fixed to the large diameter cylindrical processing part 61 (grindstone) which attached the diamond particle 60 to the surface (grinding surface), and is fixed to the chuck 31b. A shaft portion 62 extending in the vertical direction is provided, and a collar portion 63 that extends outward is provided above the processing portion 61. In the lower portion of the processing portion 61, three sets of concave portions concave in the form of strings are formed.

6A of large diameter grinding tools are rotated with the grinding spindle 31, and the recessed part 64 is made to contact the outer edge (outside Wa) of the workpiece | work W, and external grinding and chamfering of the workpiece | work W are carried out. I can do it. Reference numeral 70 denotes a suction zone.

In this manner, by grinding the workpiece W by the large-diameter grinding tool 6A, the grinding tool 6A is stably cut at the time of grinding, so the machining accuracy can be improved. In addition, since the grinding tool 6A has a large diameter, the tool life of the tool can be lengthened, and the workpiece W can be continuously ground in large quantities.

The small-diameter grinding tool 6B shown in FIG. 11 is a small-cylindrical cylindrical processing part 161 (grindstone) in which diamond particles 160 are attached to a surface (grinding surface), and a shaft fixed to the chuck 31b. The part 162 is provided and the collar part 163 is provided above the process part 161. As shown in FIG. In the lower portion of the processing portion 161, three concave recesses 164 are formed.

In this small diameter grinding tool 6B, since the diameter is small, the grinding tool 6 is inserted into the hole portion Wb of the work W, and the recess 164 is formed in the inner edge Wc of the hole portion Wb. ), The inner mold grinding and the chamfering of the hole portion Wb of the work W can be performed.

Thus, by grinding the internal shape of the hole part Wb of the workpiece | work W with the small diameter grinding tool 6B, even if the diameter of the hole part Wb is small and it is difficult to process, grinding can be reliably performed. have.

The injection nozzle unit 110 will be described with reference to FIG. 15. It is a typical top view for demonstrating an injection nozzle unit.

The injection nozzle unit 110 is provided with the nozzle frame 111 attached to the whetstone bearing member 100 and the some injection nozzle 112 attached to this nozzle frame 111 as mentioned above. The said injection nozzle 112 is provided in equiangular intervals around the grindstone 61 (processing part). In this embodiment, four injection nozzles 112 are provided so as to surround the outer periphery of the grindstone 61, and these four injection nozzles 112 are provided at intervals of 90 degrees to each other. In this embodiment, the injection nozzle 112 is provided in the position where the imaginary line which connects a pair of opposing injection nozzles 112 forms an angle of about 45 degrees with the side (long side) of the workpiece | work W. have. And as shown in FIG. 17, the injection nozzle 112 can also be provided so that the said virtual line may become in parallel with the side of the workpiece | work W. As shown in FIG.

In addition, in this embodiment, the injection nozzle 112 injects a grinding liquid toward the rotating shaft of the grindstone 61, and the injection center axis of the injection nozzle 112 intersects with the rotating shaft of the grindstone 61. As shown in FIG. The spray nozzle 112 is fixed. And it is also possible to fix the injection nozzle 112 so that an injection center axis may follow the tangential direction of the outer periphery of a grindstone. It is also possible to install the spray nozzle 112 so as to be rotatable in order to change the direction (injection direction) of the spray central axis, and to install the spray nozzle 112 so that the direction of the spray central axis is changed and controlled by the electronic control unit 15. .

Each injection nozzle 112 is controlled by the said electronic control unit, and the injection and stop of it respectively. A specific control method will be described later.

In addition, in this embodiment, each injection nozzle 112 uses the two-fluid nozzle which mixes and injects a liquid and gas. These two fluid nozzles grind | pulverize the liquid supplied in the high pressure state by the high speed air stream which consists of compressed air, and inject | pour this liquid with gas. Moreover, the injection nozzle unit 110 is equipped with the liquid connection port 113 and the gas connection port 114 for supplying liquid (grinding liquid) and gas (air) to each injection nozzle 112, and this liquid connection port ( 113 and the gas connection port 114 are respectively connected to a grinding liquid container (not shown) and a compressor (not shown).

In addition, as the grinding liquid injected from the injection nozzle 112, various kinds can be adopted. The grinding liquid may have one of a cooling function for cooling the grindstone, a cleaning function for removing the grinding powder, a lubrication function for reducing the grinding resistance, and a rust prevention function for preventing the grinding of the grindstone, or a plurality of functions simultaneously. It is also composed of surfactants, emulsifiers, etc. and is soluble in water in transparent or translucent Oil-based grinding fluids such as soluble grinding fluids (water-soluble type), simple substances such as kerosene, or mixtures of extreme pressure additives such as sulfur and chlorine with these (Mineral oil type), mineral oil, emulsifier, etc., and an emulsion grinding fluid intermediate between the solable grinding fluid and the oil base grinding fluid. Among these various grinding liquids, a preferable one can be appropriately adopted depending on the grinding conditions and the like.

Next, the control method at the time of calculating the grinding path of the workpiece | work W about the control method of the grinding apparatus M is demonstrated with reference to FIGS. 12-14. FIG. 12 is a flowchart showing a control method of the grinding apparatus, FIG. 13 is a side view showing a state of photographing a machining stage with a camera, and FIG. 14 is an explanatory diagram for explaining a processing and calculation method for photographed data.

As shown in the flowchart of FIG. 12, after the start, first, in S1, model data (outer shape, hole portion, etc.) of the workpiece W are input (installed) into the electronic control unit 15. In this input operation, for example, the design data (CAD data) of the finished workpiece (Wo) is once obtained in separate software and converted into grinding data such as a grinding path, and then the electronic control unit 15. Input (install) to.

After this input work is finished, the actual work W1 (hereinafter, referred to as a real work) is mounted (loaded in) on the machining stage 30 in S2. This mounting operation is performed by the transfer robot 2 mentioned above. The actual workpiece Wi not processed by this mounting operation is mounted on the suction stage 70 of the machining stage 30.

Then, in S3, the camera 23 acquires the image of the real workpiece Wi and the reference pins 71 and 71. FIG. 13 shows the photographing state by the camera. As shown in this FIG. 13, in the grinding apparatus M, the workpiece | work Wi of the machining stage 30 is carried out by the camera 23 mounted in the high position of the conveyance robot 2 which conveyed the workpiece | work Wi. And reference pins (71, 71).

By photographing the machining stage 30 from the above spaced position in this way, the nonuniformity of the image of the obtained work Wi and the reference pins 17 and 17 can be reduced as much as possible.

An example of the image data obtained in this manner is a diagram shown in FIG. 14A. The workpiece Wi and the two reference pins 71 and 71 are obtained as image data to calculate respective position data.

In S4, the machine origin C of the machining stage 30 is calculated from the positions of the reference pins 71 and 71. Machine origin C is a reference | standard of the machine coordinate for performing a grinding process here, and by defining this machine origin C, accurate grinding can be performed.

The machine origin C is set along the midpoint of the line L which connected the two reference pins 71 and 71, as shown to Fig.14 (b). As another example, as indicated by the broken line, two reference pins 71 'and 71' are added again, and an intersection with the line N connecting the two reference pins 71 'and 71' is connected. You may define as machine origin C.

And in S5, the center position P of the outline Wa of the real workpiece Wi and the center position Q of the hole part Wb are computed from the data of the real workpiece Wi. Here, a center position is a position of the center of a figure, and is determined along the external shape and hole part shape of the workpiece | work W. As shown in FIG. Black circles P and Q shown in FIG. 14B are center positions of the outline Wa of the actual workpiece W and center positions of the hole portion Wb.

Subsequently, in S6, the center position (center position P of the outline and the center position Q of the hole portion) of the actual workpiece Wi and the center position of the model Wm (center position Pm of the outline and the center position Qm of the hole portion) To match. By matching the center position P, Q of the real workpiece W with the center position Pm, Qm of the model Wm, the difference (difference of position data) between the real workpiece Wi and the model Wm is made clear. . The state shown in FIG.14 (c) is the state which matched the center position P, Q, Pm, and Qm of the real workpiece Wi and the model Wm (dashed line). Thus, by matching center position P, Q, Pm, and Qm, the difference between the real workpiece Wi and the model Wm can be made clear.

And in S7, the machine origin C of the machining stage 30 and the center position P of the real workpiece Wi are compared, and the shift | offset | difference amount (horizontal shift amount) of the machine origin C and the center position P of the real workpiece Wi is compared. X, the displacement amount Y in the vertical direction, and the displacement amount θ in the rotation direction are calculated. In addition, the actual workpiece Wi is compared with the model Wm, and the cutting amount Δw is also calculated according to the difference in appearance. In this manner, the amount of grinding of the real work Wi can be clarified.

Fig. 14 (d) shows the amount of shift and the amount of cutting, respectively. The shift amount of the center position P of the real workpiece Wi from the machine origin C of the machining stage is, for example, as shown in FIG. 14, X is shifted to the left, Y is shifted upward, and θ tilts to the right. Inclined to lose

The cutting amount is calculated by subtracting the width dimension T1 of the model from the width dimension r1 of the real workpiece Wi by dividing it by 2, and cutting the cutting amount Δw2 in the longitudinal direction by the length of the actual workpiece Wi. It is calculated by subtracting the length dimension T2 of the model from the dimension r2 and dividing by two.

In this manner, the cutting amounts Δw1 and Δw2 in the width direction and the longitudinal direction are obtained, and then a larger value is determined as the final cutting amount Δw. In this determination, when grinding, the cutting is surely made by determining a large value in order to cut the entire periphery of the workpiece with a constant cutting amount in a trajectory that is similar to the model shape. This is because grinding can be performed in a close fashion depending on the shape.

And in S8, the grinding path of the workpiece | work Wi is computed according to the shift | offset | difference amount of X, Y, ( theta) , and cutting amount (DELTA) w. This grinding path changes with the shape of the real work Wi and the mounting position of the real work Wi, and is different in each work W. As shown in FIG.

After that, in S9, the actual workpiece Wi is ground in the calculated grinding path. This grinding operation is performed by moving the grinding spindle 31 and the processing stage 30 (processing table 33), respectively. In the grinding | polishing work of this workpiece | work W, it performs along the grinding site | part using the above-mentioned large diameter grinding tool 6A and the small diameter grinding tool 6B.

Next, the control method of injection of the grinding liquid from the injection nozzle at the time of grinding operation is demonstrated with reference to FIG. It is a typical top view which shows the state which is grinding the workpiece | work. 16, "112a-112d" is used as a code | symbol of an injection nozzle in order to distinguish four injection nozzles.

As shown in FIG. 16A, when grinding the end surface of one long side of the workpiece | work W, the grindstone 61 rather than the grinding process position (contact point of the cross section of the workpiece | work W and the grindstone 61) Grinding liquid is sprayed from the 1st injection nozzle 112a of the rotation direction back side of the. At this time, the grinding liquid is not sprayed from the other three spray nozzles 112b,...

And as shown in FIG.16 (b), when grinding the corner part between the said one long side of the workpiece | work W and the short side adjacent to this long side, not only the said 1st injection nozzle 112a, Grinding liquid is also injected from the 2nd injection nozzle 112b (the injection nozzle of the rotation direction back side of the grindstone 61 rather than the 1st injection nozzle 112b). At this time, the grinding liquid is not jetted from the other two injection nozzles 112c and 112d.

And as shown in FIG.16 (c), when grinding the short side of the workpiece | work W, the injection of the grinding liquid from the said 1st injection nozzle 112a is stopped, and the grindstone 61 rather than a grinding process position. Grinding liquid is sprayed from the said 2nd injection nozzle 112b of the rotation direction back side of the. At this time, the grinding liquid is not jetted from the other two injection nozzles 112c and 112d.

As shown in FIG.16 (d), when grinding the cross section of the other long side of the workpiece | work W, grinding fluid is removed from the 3rd injection nozzle 112c of the rotation direction back side of the grindstone 61 rather than a grinding process position. Spray. At this time, the grinding liquid is not sprayed from the other three spray nozzles 112a,... And in the corner part between FIG.16 (c) and (d), similarly to the above-mentioned corner part (FIG. 16 (b)), not only the said 2nd injection nozzle 112b but the 3rd injection nozzle 112c. ), The grinding fluid is also injected.

In the above description, only the case where the external shape of the work W is ground using the large-diameter grinding tool 6A has been described. However, the internal shape of the hole of the work W is determined by using the small-diameter grinding tool 6B. The grinding operation can also be performed while controlling the spraying and stopping by the same control method as described above. That is, grinding operation can be performed by injecting grinding liquid from one injection nozzle of the grinding wheel back direction rather than a grinding process position. In addition, in a corner part, grinding liquid can be sprayed from both the injection nozzle which is going to be used next, and the injection nozzle which was inject | poured until then, and grinding can be performed.

Finally, in S10, the real work Wi is taken out from the machining stage 30 (export). This drawing operation is also performed by the above-mentioned transfer robot 2, and the processed workpiece Wo is taken out from the machining stage 30. FIG.

Next, a determination is made as to whether or not the work is to be finished in S11. When the work is continued (NO judgment), the process proceeds to S2 in order to process the next work W. On the other hand, when the job ends (YES determination: in the case of power off), the process shifts to the end as it is.

As mentioned above, the grinding apparatus M of this embodiment is controlled by such a step.

In the present embodiment, the grinding liquid, which is composed of two-fluid nozzles, sprays the grinding liquid into fine particles towards the grindstone 61 by the grinding step. It can easily penetrate through the air layer turning together by the rotation of the grindstone 61 on the surface (grinding surface), and can be supplied accurately and easily to the grinding surface of the grindstone 61. Further, since the grinding liquid is injected from the injection nozzle 112 in the rotational direction rearward from the grinding processing position, the liquid that reaches the grinding surface of the grindstone 61 is attracted by the rotation of the grinding wheel 61 to easily reach the grinding processing position. Can be reached.

In addition, the grinding liquid injected from the two-fluid nozzle 112 has less interference with the liquid droplets generated when the liquid particles of the grinding liquid reached earlier are discharged by the centrifugal force by the grindstone 61, which is efficient. The grinding surface of the grindstone 61 is sequentially reached, and the collision is repeated on both the grinding surface of the grindstone 61 and the grinding powder. This collision is the case of a general liquid supply form (in the case of a liquid supply form such that the gas is covered and covered up from the entire surface) with respect to the gas existing in the space between the abrasives of the grinding surface of the grinding wheel 61. And different action. That is, the liquid particles act on the gas agglomerates in the respective spaces, thereby acting to extrude the gas from the spaces between the abrasives, thereby producing an effect of substituting the gas stagnant in the space with the liquid. And the grinding liquid reached between these abrasive | polishing materials will remain in the space by surface tension with the periphery. Therefore, the grinding liquid is stably and appropriately maintained between the abrasives, and thus the space holding the grinding liquid reaches the grinding processing position in accordance with the rotation of the grindstone 61, whereby the grinding liquid in the space is stably and effectively supplied. Will be.

In addition, if the grinding liquid has a cooling function, it stabilizes the cooling state of the abrasive at the grinding work position, and greatly acts on the removal of the grinding heat from the periphery of the grinding work position, thereby preventing overheating of the abrasive. It has the effect of reducing its wear. In addition, the cooling effect of the grinding powder is reduced according to the cooling effect, and the effect of preventing the welding phenomenon of the grinding powder into the space between the abrasive and the abrasive is achieved, and the processing state is thermally induced. It is stable. Therefore, when processing thermally fragile and sensitive materials, the stability of the processing quality is realized.

In addition, when the grinding liquid has a lubricating function or the like, the grinding liquid is sufficiently supplied to the space between the grindstone 61, the abrasive and the abrasive, so that the non-adhesive action and the lubricating action function, thereby reducing the adhesion of the grinding powder. The effect and the heating prevention effect of an abrasive are obtained.

Moreover, according to the said grinding apparatus, the washing | cleaning effect by the intermittent collision and impact force of liquid particle can be exhibited. This is another sweeping effect on the grinding powder adhered between the abrasives alleviated by the above-described effect. As described above, although liquid particles collide directly against the spaces between the abrasives that are continuously generated and retained and adhered, and the grinding powders on the abrasive surface, the abrasive powders are impacted and fixed from the adhered portion. It is peeled off and effectively swept away with the grinding liquid. Further, the effect of the grinding liquid having the lubricating function described above is also reduced, and the effect on the adhesion of the grinding powder is synergistically produced.

Moreover, according to the said grinding apparatus, when the relative position of the grinding process position and the rotating shaft of the grindstone 61 changed in grinding operation, the injection of the injection nozzle 112 is controlled by the control means 15, and it is corrected. Grinding liquid can be injected in the rotational direction rearward than the grinding process position of the grindstone 61, and it is not necessary to supply grinding liquid unnecessarily. Therefore, according to the said grinding apparatus, the cost required for a grinding liquid can be reduced, and it can prevent that the situation like water staying around the grindstone 61 arises.

Moreover, according to the said grinding apparatus, since the injection nozzle 112 moves with the grindstone 61 at the time of grinding operation, it is not necessary to provide the injection nozzle 112 over all the edge parts of a to-be-processed object. Therefore, compared with the case where a spray nozzle is provided over all the edge parts of a to-be-processed object, there are few spray nozzles, the apparatus cost can be reduced, and securing of the installation place of a spray nozzle is also comparatively easy. In addition, the grinding device is provided so that four injection nozzles 112 are provided so as to surround the outer periphery of the grindstone 61, and the respective injection nozzles 112 are formed so as not to change their relative positions with the rotation axis of the grindstone 61. As a result, the structure is simplified, the cost of the apparatus can be reduced, and the place for installing the spray nozzle can be easily secured.

Moreover, according to the said grinding apparatus, grinding liquid can be injected from the appropriate injection nozzle 112 along the long side and short side of the workpiece | work W, grinding operation can be performed correctly, and also in the corner part of the workpiece | work W In order to inject the grinding liquid from the two injection nozzles 112, the workpiece can be ground while supplying the liquid even in such a portion. In addition, since the control means 15 is controlled so that the injection nozzles 112 which spray simultaneously are less than two, the said grinding apparatus can obtain the effect which can perform accurate grinding operation with a small amount of liquid. .

Then, the fluid supply ratio / pressure ratio of each of the fluids (grinding liquid and air) of each of the two fluid nozzles, the supply amount of the mixed fluid, the pressure, and the like are subjected to the respective conditions such as the number of revolutions of the grindstone, the type of the grindstone and the abrasive size. Therefore, by setting suitably, according to the grinding method of this Example, in the grinding process of the thin plate glass of plate thickness 0.2mm-3.0mm, efficient grinding in 20 micrometers of cross-sectional chippings is attained. This is about 5 times-10 times the grinding speed improvement effect compared with the case of performing by a normal grinding method.

Moreover, the grinding apparatus M of this Example is a grinding apparatus M which performs the cross-sectional grinding of the thin glass W, and installs (remembers) the data of the model Wm of thin glass beforehand (S1), and the camera From the imaging data of the reference pins 71 and 71 obtained by (23), the machine origin C of the machining stage 30 is calculated (S4). And the center position P of thin glass (real workpiece Wi) is calculated | required from the imaging data of the thin glass (real workpiece Wi) acquired by the camera 23 (S5), and the machine of the processing stage 30 is carried out. Comparing the origin C and the center position P of the thin glass W, the shift amount (deviation amount X of a vertical direction, the shift amount Y of a horizontal direction, and the shift amount θ of a rotation direction) of thin glass is computed (S7), The grinding path is calculated according to this shift amount (S8), and the grinding spindle 31 is operated in accordance with the calculated grinding path (S9).

Therefore, even if it does not form the "mark (mark) used as a reference | standard" etc. in thin glass W itself, the "machine origin C" is calculated | required by the reference pins 71 and 71 provided in the processing stage 30, and a thin sheet The amount of shift | offset | difference X, Y, ( theta) of glass W can be grasped | ascertained, and even this thin glass W which does not have a mark (display) etc. can be accurately ground by this amount of shift | offset | difference detected.

Therefore, in the grinding apparatus M which performs the cross-sectional grinding of the thin glass W used for the display screen of portable terminals, such as a mobile telephone, grinding is performed using the imaging data of the camera 23, and it is favorable precision. While processing in the furnace, grinding can be performed without providing a mark or the like on the surface of the thin glass W. FIG.

In this embodiment, the machine origin is determined by the plurality of reference pins 71 and 71. In addition, the machine origin may be obtained from the reference protrusion which protrudes a part, and the machine may be used by the reference portion that is partially colored. You may find the origin.

In this embodiment, the center position P of the thin glass W and the center position Pm of the model Wm are matched, and the cutting amount of the grinding spindle 31 is compared by comparing the thin glass W and the model Wm. Δw is calculated. That is, it determines how big the thin glass W is with respect to the model Wm (for example, it detects the difference of a longitudinal direction and the difference of the width direction, and determines the magnitude | size of this "difference"), and according to this magnitude | size The cutting amount Δw is changed.

Therefore, the cutting amount Δw of the thin glass W is changed for each work piece, and the thin glass W can be processed with a more accurate shape and dimension.

Therefore, since the grinding | polishing operation | work performs by grasping | cutting the cutting amount (DELTA) w of the thin glass which changes for every workpiece | work more accurately, a some thin glass can be processed with favorable precision.

In addition, in this Example, the center position P of the outline Wa of thin glass, and the center position Q of the shape of the hole part Wb are calculated | required, and the center position of the workpiece | work Wi is calculated.

Thereby, by calculating the center position P of the shape Wa of the thin glass W and the center position Q of the shape of the hole part Wb of the thin glass, even if it is a thin glass with a hole part, it is reliably made into the shape suitable for the model Wm. , Can be ground.

Therefore, even the thin glass W of the complicated shape with the hole part Wb can calculate a grinding path correctly, and can grind with favorable precision.

In addition, in this Example, the reference pins 71 and 71 are provided in the both side positions which pinched the thin glass W. As shown in FIG.

Thereby, the machine origin C formed on the line L which connected the at least 2 reference pins 71 and 71 can be formed in the position near the center position P of the thin plate glass W. As shown in FIG.

Therefore, the shift | offset | difference amount of thin glass W can be calculated more correctly. That is, since the machine origin C is close to the center position P of the thin glass W, since the error of a shift | offset | difference amount can be reduced, an accurate shift | offset amount can be calculated.

Therefore, a higher precision grinding process can be performed.

In this embodiment, the distance from the camera 23 is set by setting the tip portion 71a of the reference pin 71 to the same height (hp = hs) as the upper surface 70a of the suction table 70. It is made to substantially correspond with glass W.

Thereby, since the to-be-photographed point (tip part 71a) of the reference pin 71 substantially matches with the position of the height direction of the thin glass W, the focus of the camera 23 can be reliably focused on both.

Therefore, the reference pin 71 and the thin glass W can be image | photographed reliably simultaneously, and the shift | offset | difference amount of the thin glass W can be calculated more correctly.

As mentioned above, this invention is not limited to this Example, Comprising: The Example applied to various grinding apparatuses is included.

In the grinding apparatus of this embodiment, although the workpiece | work W is made into the thin glass for mobile phones, it may be thin glass for portable audio equipment, or thin glass for a portable game machine, for example. Moreover, the thin glass for portable navigation, the thin glass of a portable TV, etc. may be sufficient.

In the above embodiment, since the four spray nozzles 112 are provided, the advantages of being able to perform grinding operation while supplying the liquid accurately by the respective spray nozzles 112 at the edges of the sides of the substantially rectangular shape can be obtained. In the present invention, however, the number of injection nozzles is not limited to four. For example, as shown in FIG. 18, eight injection nozzles 112 can also be provided. In the grinding apparatus shown in FIG. 18, eight injection nozzles 112 are provided at equal angle intervals, and are specifically provided in the position of 45 degrees with each other. In addition, it is also possible to provide six injection nozzles in the position of 60 degrees (equal intervals) with each other.

And in the grinding apparatus shown in FIG. 18, about the grinding of the long side and short side of the workpiece | work W, the grinding liquid is sprayed from each injection nozzle 112 similarly to the said Example. Moreover, at the time of grinding of a corner part, it can be comprised so that grinding liquid may be injected from only the injection nozzle 112 provided between the injection nozzles 112 used respectively in the said long side and short side grinding.

In addition, even when four injection nozzles 112 are provided, it is not limited to the said Example (FIG. 16) and FIG. 17, For example, as shown in FIG. 19, a pair of opposing injection nozzles 112 is also shown. The injection nozzle 112 can be provided in the position which the virtual line which connects ()) makes the predetermined angle with the side (long side) of the workpiece | work W. Here, a predetermined angle can be made into the same position which can supply grinding liquid correctly also regarding grinding of the corner part of the workpiece | work W, for example, can be set to 30 degrees.

In addition, the control method of the control means of the some injection nozzle 112 is not limited to the thing of the said embodiment, It can design change suitably within the range which this invention intends.

For example, it is possible to control the injection nozzle 112 located on the front side in the rotational direction of the grinding wheel to inject the grinding liquid, so that the injection nozzle 112 on the front side in the rotational direction, The grinding powder adhering to the grinding surface of the grindstone 61 can be removed.

In this case, the jet nozzle 112 on the front side and the jet nozzle 112 on the rear side in the rotational direction from the cutting position use different grinding fluids (for example, rearward the grinding fluid having a cooling function). Spraying from the injection nozzle on the side, and spraying the grinding liquid having a cleaning function from the spray nozzle on the front side). However, when the diameter of the grindstone is small, there are cases where the function is deteriorated due to mutual interference of the two grinding fluids. Therefore, the use of the two kinds of grinding fluids described above should be adopted only when the diameter of the grindstone is large. desirable.

In the above embodiment, the use of a two-fluid nozzle as a spray nozzle has been described, but it is also possible to use an ultrasonic superimposition nozzle which injects the micronized liquid by superposing the ultrasonic vibration to the liquid by an ultrasonic vibrator, for example. Do.

By using the ultrasonic superposition nozzle in this way, the jetting water flow from the nozzle to the object (cut surface of the grindstone and the workpiece) is used as an ultrasonic transmission medium, and a strong vibration action force by the ultrasonic vibration acceleration propagated by the grinding liquid is obtained. It can be applied to the air layer in the space between the abrasive on the grinding surface of the grindstone and the abrasive. Therefore, the ultrasonic superimposition nozzle has the advantage of vibrating the air layer in the space between the deposit and the abrasive and sweeping it with the wedge effect by effectively infiltrating the grinding liquid to the contact point with the surroundings by the vibration, thereby obtaining a substitution effect. [By the way, the ultrasonic vibrator is indispensable near the nozzle and the flow of water from the nozzle is indispensable between the object. Therefore, the installation method of the apparatus (accommodating volume of the ultrasonic vibrator, distance from the object, etc.) There is a problem in that the operation is limited, and the cost of the device including the ultrasonic oscillation device increases.

In addition, in the said embodiment, although only the cross-sectional processing of the external shape of the workpiece | work and the internal processing of the internal shape of the hole part of a workpiece were demonstrated, it drills using the apparatus of the said Example, for example using a drill as a grinding tool. It is also possible to perform processing. In the case of punching, the cutting position requiring the grinding fluid is inside the workpiece, so the direct effect of the two-fluid nozzle cannot be obtained during grinding, but the purpose of eliminating the blockage of the drill after punching By applying to, the cleaning effect of the two-fluid nozzle is obtained. In addition, although the grinding powder discharged during grinding is concerned about the quality deterioration by adhering to the surface of the workpiece, the grinding powder having the effect of a two-fluid nozzle is always supplied to the surface near the processing, so the grinding powder is quickly removed. The effect is obtained in maintaining the surface quality. In addition, a slight vibration may occur in the drill body due to the impact force of the two fluids, and both the vibration amount and the vibration number may not be sufficient. A certain effect can be expected.

In the above embodiment, the grinding wheel 61 moves in the long side direction of the work W and the work W moves in the short side direction of the work W during the grinding operation. In the apparatus and the grinding method, the work W and the grindstone 61 move relatively in the planar direction of the work W, for example, the grindstone is configured to move not only in the long side direction but also in the short side direction of the work. It is also possible.

In addition, also about the whole structure of a grinding apparatus, it is not limited to this embodiment, For example, even if it applies to the case where only one processing unit is installed, and conversely and installs many processing units, such as five or six, do.

In addition, the grinding tool 6 is not limited to what was illustrated in this embodiment, for example, may be a spherical grinding tool, a disk grinding tool, or a conical grinding tool. Moreover, the grinding wheel material is not limited to diamond, either.

As described above, in the grinding apparatus and the grinding method of the present invention and the manufacturing method of the thin member, the workpiece can be precisely reached by the injection nozzle to the grinding processing position of the grindstone, thereby grinding the workpiece. Grinding can be performed accurately and safely.

M ': grinding device
W: Workpiece (Laminated Glass, Workpiece
Wi: raw workpiece
Wo: finished workpiece
Wm: workpiece model
15: electronic control unit (control means)
23: camera
30: machining stage
31: grinding spindle
33: Machining table (table)
61, 161: machining part (grindstone)
71: reference pin
100: whetstone bearing member
110: spray nozzle unit
112 (112a to 112d): spray nozzle
C: machine origin
P: center position of workpiece contour
Q: Center position of hole geometry

Claims (10)

A table on which a thin workpiece is mounted;
Whetstone which has the grinding surface which can grind the end surface of a to-be-processed object in an outer periphery, and is rotatable;
Moving means for relatively moving said grindstone and said workpiece to grind the end face of the workpiece on said grinding surface;
A plurality of injection nozzles disposed around the grindstone at substantially equiangular intervals and for atomizing and injecting liquid into the grinding surface;
Control means for controlling the injection of the plurality of injection nozzles so that the liquid is injected in the rearward direction of the grinding wheel on the basis of the grinding processing position of the grindstone in contact with the workpiece
Including, grinding device. The method of claim 1,
The said injection nozzle is a grinding | polishing apparatus which is two fluid nozzles which mix and inject liquid and gas. The method of claim 1,
The grinding center axis | shaft of the said injection nozzle is provided so that it may be along the tangential direction of the outer periphery of the said grindstone. The method of claim 1,
The grinding | polishing apparatus with which the injection center axis | shaft of the said injection nozzle is provided so that it may cross | intersect substantially the rotation axis of the said grindstone. The method of claim 1,
The said control means is a grinding apparatus which controls to switch the said injection nozzle which injects when the relative position of the said grinding process position and the rotating shaft of the grindstone is changed at the time of grinding operation. The method of claim 5,
And a whetstone bearing member in which the shaft of rotation of the whetstone is rotatably axially supported, and a nozzle frame fixed to the whetstone bearing member,
And said plurality of spray nozzles are mounted to a nozzle frame. The method of claim 5,
The said control means is a grinding apparatus which controls so that there may be two injection nozzles which spray simultaneously. The method of claim 5,
The control means injects liquid from one injection nozzle when the grinding wheel is moving in one direction relative to the workpiece, and after the injection, the grinding wheel is relative to the other direction crossing the one direction with respect to the workpiece. For spraying liquid from another spray nozzle when moving to, and controlling to spray liquid from both of the one spray nozzle and the other spray nozzle while switching from the relative movement in one direction to the relative movement in the other direction Device. As a grinding | polishing method which grinds the cross section of a thin-shaped workpiece by a grindstone, spraying liquid to a grindstone by an injection nozzle,
A grinding step of grinding the end face of the workpiece by rotating the whetstone relative to the workpiece with a spray nozzle while rotating the whetstone about an axis of rotation approximately perpendicular to the plane of the workpiece;
When the grinding step is performed, the liquid is based on the grinding position of the grindstone in contact with the workpiece, and when the relative position with the rotary shaft of the grindstone is changed, the liquid is rotated rearward from the grinding position of the grindstone. Spraying process of atomizing and spraying
Including, grinding method. The manufacturing method of a thin plate member including the process of grinding a cross section by the grinding method of Claim 9.

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