JP2017217754A - Liquid curtain formation device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a liquid curtain formation device which can reduce adhesion of chips to a workpiece surface compared to a conventional cutting device in a more effective manner and properly discharge cutting fluid (a sump solution) including the chips without using a suction device.SOLUTION: Induction liquid nozzles 68 and 70 are respectively disposed on front surface and rear surface sides of a blade 26. Induction liquids discharged from the induction liquid nozzles are collided with each other to form a water curtain 76 at the downstream side of the blade 26. In the structure, cutting fluid, which is supplied to the blade 26 to be scattered and includes chips, is captured by the water curtain 76 and discharged from a sump solution recovery port 90 of a sump solution recovery member 80 to the exterior with the induction liquid.SELECTED DRAWING: Figure 2

Description

  The present invention relates to a cutting apparatus, and more particularly to a cutting apparatus that cuts a workpiece (workpiece) such as a semiconductor wafer with a rotating blade.

  A dicing machine for cutting and grooving a workpiece such as a wafer on which a semiconductor device or an electronic component is formed is a thin grinding wheel called a cutting blade (hereinafter referred to simply as a blade) that is rotated at high speed by a spindle. Are provided, a work table for holding the work, and X, Y, Z, and θ movement axes for changing the relative positions of the work table and the blade.

  A blade cover that covers the blade is attached to the spindle, and a cutting fluid nozzle is provided on the blade cover, and the cutting fluid is supplied from the cutting fluid nozzle to the blade and the processing point. As a cutting fluid supply method, a cutting fluid nozzle disposed on the upstream side (front side) of the blade rotation direction from the machining point is used to supply the cutting fluid to the outer peripheral portion of the blade, or along both side surfaces of the blade. A method of supplying cutting fluid from both side surfaces of the blade to the blade and the processing point by a pair of arranged cutting fluid nozzles is generally known.

  In Patent Document 1, a drainage guide member for collecting cutting fluid (drainage) containing cutting waste is provided on the downstream side (rear side) in the rotation direction of the blade with respect to the machining point, and the drainage guide member and the workpiece It has been proposed to provide liquid ejecting means for preventing drainage from entering between the surface and the surface.

  According to this, the drainage guide member is connected to a drain line for collecting the drainage, and has an inclined guide surface that gradually descends toward the blade on the downstream side of the processing point. The inclined guide surface scoops up the drainage from the work surface and discharges it to the discharge pipe. Thereby, the situation where drainage flows on the work surface on the downstream side of the machining point and the cutting waste adheres to the work surface is reduced.

  The liquid ejecting means supplies a liquid such as water to a gap between the drainage guide member and the workpiece surface, and forms a liquid wall in the gap. As a result, the situation where the drainage liquid enters the gap between the drainage guide member and the workpiece surface and the cutting waste adheres to the workpiece surface is reduced.

JP 2007-69280 A

  However, in the liquid ejecting means described in Patent Document 1, since the flows of both the drained liquid and the liquid supplied from the liquid ejecting means collide with each other, the drained liquid stays on the collision surface of those liquids. Therefore, there is a possibility that a situation occurs in which cutting waste included in the accumulated drainage adheres to the workpiece surface.

  Further, the flow of drainage is mainly caused by the rotational force of the blade being applied to the cutting fluid, and the dynamic pressure (kinetic energy) is not large. Therefore, it is necessary to suck the discharge pipe with a suction device so that the drainage can appropriately flow through the discharge pipe.

  However, when the discharge pipe line is sucked by the suction device, there is a problem that the work surface is dried and the cutting waste is liable to dry and adhere to the work surface and is difficult to remove.

  In addition, there is a problem that the device configuration around the blade is complicated and the cost is increased.

  The present invention has been made in view of such circumstances, and can reduce the adhesion of cutting waste to the work surface more effectively than in the past, and without using a suction device, cutting can be performed. It aims at providing the cutting device which can discharge | emit appropriately the cutting fluid (drainage) containing waste.

  In order to achieve the above object, a cutting apparatus according to an aspect of the present invention includes a holding unit that holds a workpiece, a cutting blade that is attached to a tip of a spindle and cuts the workpiece, and the workpiece. A cutting fluid supply means for supplying a cutting fluid to a machining point of the workpiece, and a drainage fluid comprising a cutting fluid supplied from the cutting fluid supply means and containing cutting waste generated by cutting the workpiece by the cutting blade A liquid curtain generating means for generating a liquid curtain by a guiding liquid that rises from the surface of the workpiece toward the opposite side of the cutting blade on the side that is scattered due to the rotation of the cutting blade, and the liquid curtain generation A drainage collecting means disposed in a direction in which the induction liquid flows in the liquid curtain generated by the means, and collecting the drainage mixed in the liquid curtain together with the induction liquid. To have.

  According to the present invention, the drainage liquid composed of the cutting fluid containing cutting waste generated by cutting the workpiece is mixed in the liquid curtain rising from the workpiece surface, and does not stay on the workpiece surface. At the same time, it is discharged by the drainage collecting means. Therefore, the cutting waste contained in the drainage is reliably prevented from adhering to the workpiece surface.

  Further, the drainage can be discharged without using a suction device by the dynamic pressure (kinetic energy) of the induction liquid forming the liquid curtain.

  In the cutting device according to another aspect of the present invention, the liquid curtain generating means is configured to guide the head toward a collision point at a predetermined position on the downstream side in the rotation direction of the cutting blade with respect to the processing point of the workpiece. An aspect having two nozzles for discharging the guide liquid from different positions in the axial direction of the spindle from the upstream side to the downstream side in the rotation direction of the cutting blade; can do.

  According to this aspect, the liquid curtain rising from the surface of the workpiece is generated by the collision of the guide liquid discharged from the two nozzles at the collision point.

  The cutting apparatus according to still another aspect of the present invention may be configured such that the two nozzles are disposed at positions where the cutting blade is sandwiched between positions of the spindle in the axial direction.

  In the cutting device according to still another aspect of the present invention, the two nozzles may be configured to discharge the induction liquids having different flow rates.

  According to this aspect, since the direction of the liquid curtain (direction in which the guide liquid flows) can be adjusted, the degree of freedom of the installation position of the drainage collecting means is increased.

  The cutting device according to still another aspect of the present invention may be configured such that a curved surface is disposed at a position in contact with the liquid curtain and the direction in which the induction liquid flows in the liquid curtain is curved.

  According to this aspect, since the direction of the liquid curtain (direction in which the guide liquid flows) can be adjusted, the degree of freedom of the installation position of the drainage collecting means is increased.

  In the cutting device according to still another aspect of the present invention, the drainage recovery means is a recovery port communicating with a drainage pipe for discharging the drainage, and the cutting is performed with respect to a processing point of the workpiece. A recovery port disposed at a position downstream of the rotation direction of the blade, and the position of the surface of the workpiece between the processing point of the workpiece and the recovery port, and the position of the recovery port. And an upwardly inclined guide surface.

  According to this aspect, the adhesion of cutting waste to the workpiece surface can be reduced more effectively than in the past, and the cutting fluid (drainage) containing cutting waste can be removed without using a suction device. It can be discharged properly.

  ADVANTAGE OF THE INVENTION According to this invention, adhesion to the workpiece | work surface of cutting waste can be reduced more effectively compared with the past, and the cutting fluid (drainage liquid) containing cutting waste can be reduced, without using a suction device. It can be discharged properly.

The perspective view which shows the external appearance of the dicing apparatus to which this invention was applied The perspective view which expanded and showed the front-end | tip part periphery of the spindle unit in a process part. A diagram showing some components in the periphery of the spindle unit from the Y direction Schematic diagram showing the induction liquid nozzle and the drainage recovery member projected onto the XY plane Schematic diagram similar to FIG. 4 used to explain the method of adjusting the formation direction of the water curtain Schematic diagram similar to FIG. 4 used to explain another method for adjusting the formation direction of the water curtain The perspective view which showed the structure of FIG. 6 in three dimensions The figure which illustrated arrangement | positioning of the drainage collection | recovery member in a twin spindle type dicing apparatus

  Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

  FIG. 1 is a perspective view showing an appearance of a dicing apparatus (cutting apparatus) to which the present invention is applied.

  The dicing apparatus 10 includes a load port 12 for transferring a cassette in which a plurality of plate-like workpieces W (workpieces) are stored to and from an external device, and an adsorption unit 14, and conveys the workpiece W to each part of the apparatus. The conveyance means 16, the work table 30 which mounts the workpiece | work W, the process part 20 in which the workpiece | work W is processed, and the spinner 22 which wash | cleans and dries the workpiece | work W after a process are provided. The operation of each part of the dicing apparatus 10 is controlled by a controller 24 as control means.

  The processing unit 20 is provided with an imaging unit 18 that images the surface of the workpiece W in the vicinity, and is disposed so as to face each other inside. A thin disk-like blade 26 at the tip and a blade cover (not shown) that covers the blade 26 are provided. Mounted high-frequency motor built-in spindle units 28, 28 are provided.

  Both of the spindle units 28 rotate the blade 26 at a high speed of 30,000 rpm to 80,000 rpm, and perform index feed in the Y direction and cut feed in the Z direction independently of each other by a moving shaft (not shown). Further, the work table 30 which is a holding means for sucking and holding the work W is ground and fed in the X direction in the drawing by a moving shaft (not shown). By these operations, the outer peripheral portion of the blade 26 rotating at high speed comes into contact with the workpiece W, and the workpiece W is cut in the X direction.

  The work table 30 rotates around the θ axis along the Z direction. By rotating the work table 30 along the X direction by rotating around the θ axis, any direction of the work W can be obtained. The cutting line is cut.

  Further, as the dicing apparatus 10 to which the present invention is applied, only one of the pair of spindle units 28 may be provided, and in the following, the processing unit from the load port 12 side in FIG. Only the configuration related to the right spindle unit 28 when 20 is viewed in the X direction will be described.

  FIG. 2 is an enlarged perspective view showing the periphery of the tip of the spindle unit 28 in the processing unit 20.

  The spindle unit 28 shown in FIG. 1 includes a spindle housing 40 that covers substantially the whole, and a spindle 42 (rotating shaft member) that protrudes from the spindle housing 40.

  The spindle housing 40 is supported by a support member (not shown) that moves in the Y direction and the Z direction by driving the motor in the processing unit 20. The spindle housing 40 includes a motor that rotatably supports the spindle 42 and rotationally drives the spindle 42.

  The spindle 42 is formed in a columnar shape, and is arranged so that its axis is parallel to the Y direction, and a part of the spindle 42 is arranged so as to protrude toward the front end side of the spindle housing 40. A blade 26 whose detailed structure is omitted in the drawing is attached to the tip of the spindle 42 protruding from the spindle housing 40.

  The spindle 42 is rotated around an axis (rotation axis As) by the motor built in the spindle housing 40.

  As a result, the blade 26 rotates about the rotation axis As by the rotation of the spindle 42. Further, the blade 26 moves in the Y direction and the Z direction by the movement of the spindle unit 28 in the Y direction and the Z direction.

  The blade 26 has an annular shape and is formed in a thin plate shape, and has both annular side surfaces sf and sb (a front surface sf and a back surface sb), and a fitting hole 44 formed through the central portion. Although a detailed description of the configuration is omitted, the blade 26 is detachably fixed to the tip of the spindle 42 in a state where the spindle 42 is inserted through the fitting hole 44. Thus, the central axis of the blade 26 is arranged coaxially with the axis of the spindle 42, that is, the rotation axis As, and both side surfaces of the blade 26 are arranged along a direction orthogonal to the rotation axis As (Y direction). Is done.

  Of the two side surfaces sf and sb of the blade 26, the surface disposed on the front end side of the spindle 42 is defined as the front surface sf, and the surface disposed on the spindle housing 40 side is defined as the back surface.

  In addition, the blade 26 is an extremely thin film including abrasive grains such as diamond on the outer peripheral portion as shown in FIG. 3 in which some components in the peripheral portion of the spindle unit 28 are shown from the Y direction (surface side of the blade 26). It has a structure (so-called hub type blade) having a cutting grindstone 46 and an annular base 48 supporting the cutting grindstone 46. Therefore, when the blade 26 rotates about the rotation axis As by the rotation of the spindle 42, the cutting grindstone portion 46 rotates in a plane orthogonal to the rotation axis As. Then, when the blade 26 rotates, the outer peripheral portion of the blade 26 comes into contact with the workpiece W held on the workpiece table 30, so that the cutting grindstone portion 46 cuts the workpiece W. The blade 26 may have any structure such as one that does not have the base 48.

  Here, the rotation direction of the blade 26 at the time of cutting the workpiece W is a clockwise direction as viewed from the surface sf side of the blade 26 (clockwise direction in FIG. 3), and the blade 26 and the workpiece W are in contact with each other. The right side with respect to the point P0 is referred to as the front side or simply the upstream side with respect to the processing point P0, and the left side is referred to as the rear side or simply the downstream side.

  A blade cover 50 is provided around the blade 26 as shown in FIG. The blade cover 50 is fixed to the spindle housing 40 and is disposed so as to cover the outer periphery of the blade 26. As a result, as will be described later, it is possible to prevent the cutting fluid, cutting waste, and the like discharged to the blade 26 from being scattered outside the processing unit 20.

  A cutting fluid nozzle 52 serving as a cutting fluid supply means is installed at a position on the front side (upstream side) of the processing point P0 of the blade cover 50. The cutting fluid nozzle 52 is disposed at a position where a tip portion for discharging a cutting fluid such as water faces the outer periphery of the blade 26. A cutting fluid supply pipe (not shown) is connected to the cutting fluid nozzle 52.

  As a result, the cutting fluid supplied from the cutting fluid supply pipe to the cutting fluid nozzle 52 is discharged from the tip of the cutting fluid nozzle 52 toward the outer periphery of the blade 26 at a position upstream of the machining point P0. . Then, the cutting fluid flows to the processing point P0 along with the rotation of the blade 26, and the cutting fluid is supplied to the processing point P0. Therefore, the cutting waste generated at the machining point P0 is removed together with the cutting fluid, and the blade 26 and the machining point P0 are cooled by the cutting fluid.

  Below the blade cover 50, a pair of induction liquid nozzle units 60 and 62 as liquid curtain generating means are arranged. Each of the induction liquid nozzle units 60 and 62 is fixed to a position on the front side (upstream side) of the processing point P0 of the blade cover 50, and from the support parts 64 and 66 to the rear side (downstream side). The guide liquid nozzles 68 and 70 extend.

  The guide liquid nozzles 68 and 70 are disposed on the front surface sf side and the back surface sb side of the blade 26 with the blade 26 interposed therebetween. In FIG. 3, the guide liquid nozzles 68 and 70 are disposed on the front surface sf side of the blade 26. Only the induction liquid nozzle unit 60 composed of the liquid nozzle 68 and its support 64 is shown.

  The support portions 64 and 66 support the guide liquid nozzles 68 and 70 by holding the base ends of the guide liquid nozzles 68 and 70, respectively. Further, a supply pipe (not shown) for supplying a guide liquid (water or the like), which will be described in detail later, is connected to the support portions 64 and 66. Inside the support portions 64 and 66, pipe lines communicating from the supply pipe to the induction liquid nozzles 68 and 70 are formed. As a result, the guide liquid supplied from the supply pipe is supplied to the guide liquid nozzles 68 and 70 through the pipe lines of the support portions 64 and 66.

  The guide liquid nozzles 68 and 70 are arranged at positions where the longitudinal portions on the base end side excluding the tip end portions are extended from the support portions 64 and 66 in parallel with each other and the blade 26 is sandwiched therebetween. The axial centers of these longitudinal portions are arranged in a direction perpendicular to the rotation axis As of the spindle 42 and in the horizontal direction. That is, the longitudinal portions of the two induction liquid nozzles 68 and 70 extend along the X direction.

  In addition, one of the two guide liquid nozzles 68 and 70 is disposed on the front surface sf side of the blade 26, and the other guide liquid nozzle 70 is disposed on the back surface sb side of the blade 26. The tip is disposed near the processing point P0.

  FIG. 4 is a schematic view showing the guiding liquid nozzles 68 and 70 and a drainage collecting member 80 described later projected on the XY plane, and the processing point P0 (the position of the lowest point of the outer peripheral end of the blade 26) is represented by X. The rotation direction of the blade 26 (the direction orthogonal to the rotation axis As of the spindle 42) is indicated as the X direction, with the origin positions of the axis and the Y axis.

  As shown in FIGS. 3 and 4, discharge ports 68 </ b> A and 70 </ b> A (openings) for discharging the guide liquid are provided at the tips of the guide liquid nozzles 68 and 70. As a result, the induction liquid supplied to each of the induction liquid nozzles 68 and 70 is discharged from the tip of each of the induction liquid nozzles 68 and 70.

  In addition, curved portions 68B and 70B that set the direction of the discharge ports 68A and 70A in a direction different from the X direction are provided at the leading ends of the induction liquid nozzles 68 and 70, respectively. Thereby, the direction of the discharge ports 68A and 70A of the guide liquid nozzles 68 and 70 is set to a direction in which the guide liquids discharged from the discharge ports 68A and 70A intersect (collide) with each other.

  More specifically, the direction of each of the discharge ports 68A and 70A, that is, the axial direction of the guide liquid nozzles 68 and 70 in the vicinity of the discharge ports 68A and 70A is the direction from the X direction (rearward) toward the blade 26 side. In this way, it is set in a direction rotated around the Z axis by a predetermined angle (at least less than 90 degrees). Further, it is set in a direction rotated by a predetermined angle (at least less than 90 degrees) around the Y axis so as to face downward from the horizontal direction.

  In the present embodiment, the guide liquid nozzle 68 and the guide liquid nozzle 70 have a symmetrical shape and arrangement with respect to the X axis (XZ plane), and the guide liquids discharged from the discharge ports 68A and 70A are mutually connected. When the intersecting point is projected on the XY plane as a collision point P1, the collision point is located at a position on the X axis (on the XZ plane) downstream of the processing point P0 in the X direction and the Y direction as shown in FIG. P1 is set. Then, the bending angles of the bending portions 68B and 70B of the guiding liquid nozzles 68 and 70B in the X direction and the Y direction are set so that the guiding liquid is discharged toward the collision point P1, and the directions of the discharge ports 68A and 70A ( And position) are set. In the present embodiment, the flow rate (flow velocity) of the guide liquid discharged from each of the guide liquid nozzles 68 and 70 is equal.

  As for the Z direction, the collision point P1 is set at a position lower than the surface of the workpiece W as shown in FIG. 3, and the induction liquid is discharged so that the induction liquid is discharged toward the position of the collision point P1 in the Z direction. The bending angles in the Z direction of the curved portions 68B and 70B of the nozzles 68 and 70 are set, and the directions of the discharge ports 68A and 70A are set. However, the position of the collision point P1 in the Z direction may coincide with the surface of the workpiece W. Further, if the collision point P1 is set on the surface of the workpiece W and the bending angles in the X direction and the Y direction of the bending portions 68B and 70B are set as described above, the bending angles in the Z direction of the bending portions 68B and 70B, respectively. Is not necessarily set to an angle at which the guiding liquid is discharged toward the position of the collision point P1, but may be set to an angle at which the guiding liquid reaches the surface of the workpiece W before the collision point P1.

  According to the induction liquid nozzle units 60 and 62 described above, as shown in FIGS. 2 to 4, the induction liquids 72 and 74 discharged from the discharge ports 68A and 70A of the induction liquid nozzles 68 and 70 are caused to collide with the collision point P1. Immediately after reaching the surface of the workpiece W at points near the point (points P2 and P3 in FIG. 4) and flowing linearly on the surface of the workpiece W, they collide with each other at the projection position of the collision point P1 on the surface of the workpiece W. As a result of the collision, the guiding liquid rises (raises) from the surface of the workpiece W in the direction opposite to the blade 26, and a water curtain 76 (liquid curtain) substantially along the XZ plane is formed.

  As shown in FIG. 3, the water curtain 76 rises obliquely rearward at an angle such that the front end portion 76A does not contact the outer peripheral portion of the blade 26 and passes through the vicinity of the outer peripheral portion of the blade 26 as much as possible. Further, the bending angle in the Z direction (direction of the discharge ports 68A and 70A) of the bending portions 68B and 70B of the guide liquid nozzles 68 and 70 is adjusted.

  On the other hand, at the time of cutting the workpiece W, the cutting fluid (drainage) containing cutting waste scattered from the processing point P0 collides with the front end portion 76A of the water curtain 76, is mixed and captured by the water curtain 76, and the water curtain. It flows with the induction liquid in the vicinity of the surface of 76. And it discharges | emits from a discharge pipeline as mentioned later.

  As shown in FIG. 2 and FIG. 3, the position on the rear side (downstream side) of the processing point P0 of the blade cover 50, that is, the position on the side where the drainage is scattered from the processing point P0 by the rotating blade 26, A drainage recovery member 80 is installed as a drainage recovery means for guiding the drainage to the drain line.

  The drainage recovery member 80 includes a guide portion 82 disposed on the rear side of the processing point P0, and a recovery portion main body 84 provided continuously to the upper rear side of the guide portion 82.

  The guide portion 82 has a guide surface 86 that is inclined obliquely with respect to the horizontal direction, descends toward the front side (inclines upward toward the rear side), and a lower surface 88 along the horizontal direction. The front end of the guide surface 86 is disposed at a position where the guide liquid discharged from the guide liquid nozzles 68 and 70 collides, that is, behind the collision point P1. The lower surface 88 is a horizontal plane and is disposed at a position having a minute gap so as not to contact the surface of the workpiece W.

  The recovery unit main body 84 has a rectangular through hole penetrating in the front-rear direction (X direction) as the drainage recovery port 90. A drainage pipe (not shown) is connected to the rear side of the recovery unit main body 84, and the drainage recovery port 90 communicates with a pipe line (discharge pipe) of the drainage pipe.

  Further, the lower surface 92 of the drainage recovery port 90 is continuously formed without any step from the guide surface 86 of the guide portion 82.

  According to this drainage recovery member 80, the guide liquid that forms the water curtain 76 as described above is scooped up by the guide surface 86 and guided to the drainage recovery port 90. In particular, the guide liquid near the surface of the front end portion 76A of the water curtain 76 is reliably guided to the drainage recovery port 90 without entering the gap between the lower surface 88 of the guide portion 82 and the surface of the workpiece W. Then, the guide liquid guided to the drainage recovery port 90 flows through the drainage pipe (discharge pipe) and is discharged to the outside of the processing unit 20.

  On the other hand, when the workpiece W is being cut by the rotating blade 26, the cutting fluid containing cutting waste, that is, drainage, collides with the front end portion 76A of the water curtain 76 and is mixed into the induction liquid. The drainage flows near the surface of the front end portion 76 </ b> A of the water curtain 76 having a high flow velocity together with the guiding liquid, passes through a position away from the guide surface 86, and is guided to the drainage recovery port 90.

  Therefore, even if the guide liquid enters the gap between the lower surface 88 of the guide portion 82 and the surface of the workpiece W, the drainage liquid containing the cutting waste does not enter the gap and reliably reaches the drainage recovery port 90. It is guided, flows through the drainage pipe (discharge pipe), and is discharged to the outside.

  In addition, the flow of the guide liquid discharged from the guide liquid nozzles 68 and 70 is fast, and the dynamic pressure (kinetic energy) of the guide liquid and the drainage flowing through the discharge pipe is large. Therefore, the discharge pipe is not sucked by the suction device. However, the induction liquid and the drainage liquid can be discharged to the outside through the discharge pipe. Therefore, the apparatus configuration is simple and the cost can be reduced.

  In the above embodiment, as shown in FIG. 4, the central position in the Y direction of the drainage recovery port 90 of the drainage recovery member 80 is disposed at a position that substantially coincides with the X axis (position of the blade 26 in the Y direction). However, this is not necessarily the case.

  For example, as in FIG. 4, the pressure of the induction liquid supplied to the induction liquid nozzle 68 as shown in FIG. 5 is shown by projecting the induction liquid nozzles 68 and 70 and the drainage recovery member 80 onto the XY plane. The flow rate (flow velocity) of the induction liquid 72 discharged from the induction liquid nozzle 68 is made larger than the flow rate (flow velocity) of the induction liquid 74 discharged from the induction liquid nozzle 70 by making the pressure higher than the pressure of the induction liquid supplied to 70. To do.

  At this time, the direction in which the water curtain 76 is formed, that is, the flow direction of the guide liquid in the water curtain 76 in the X and Y directions is the direction bent toward the guide liquid nozzle 70 having a smaller flow rate than the X direction.

  Thus, the formation direction of the water curtain 76 can be adjusted by adjusting the flow rate (flow velocity) of the induction liquid discharged from the induction liquid nozzles 68 and 70. Accordingly, even when the center position in the Y direction of the drainage recovery port 90 of the drainage recovery member 80 is provided at a position shifted in the Y direction from the X axis, the water curtain 76 is directed toward the drainage recovery port 90. The guide liquid and the drainage liquid can be appropriately recovered by the drainage recovery member 80.

  Further, as a method for adjusting the formation direction of the water curtain 76, the positions and orientations of the discharge ports 68A and 70A of the guide liquid nozzles 68 and 70 are asymmetric with respect to the X axis (XZ plane), and the discharge ports 68A and 70A. There is also a direction for adjusting the flow direction of the induction liquid from the to the collision point P1.

  Further, as a method of adjusting the formation direction of the water curtain 76, the configuration of FIG. 6 and FIG. 6 in which the guide liquid nozzles 68 and 70 and the drainage recovery member 80 are projected onto the XY plane as in FIG. As shown in a three-dimensional view in FIG. 7, a method of arranging the columnar member 100 so as to be in contact with one side portion of the water curtain 76 can also be adopted.

  That is, the water curtain 76 can be bent along the peripheral surface of the cylindrical member 100 by the Coanda effect, and the flow direction of the induction liquid flowing in the water curtain 76 can be changed. The cylindrical member 100 can be fixed to an arbitrary member such as the blade cover 50 or the drainage collecting member 80.

  According to this, the amount of bending of the water curtain 76 is adjusted by adjusting the position and diameter of the cylindrical member 100 according to the position of the drainage recovery port 90 of the drainage recovery member 80, and the induction liquid and drainage liquid are adjusted. Can be appropriately recovered by the drainage recovery member 80. In addition, the effect similar to the above can be acquired by making the curved surface of the member which has not only a cylindrical member but a curved surface contact the water curtain 76. FIG.

  Further, by adjusting the formation direction of the water curtain 76 as described above, the degree of freedom of the position where the drainage recovery port 90 of the drainage recovery member 80 is provided is increased. For example, as shown in FIG. In the case of the twin spindle type dicing apparatus 10 in which the units 28 are opposed to each other, the drainage recovery members 80 provided for each of the two spindle units 28 can be provided at positions that do not interfere with each other.

  That is, in the case of the twin spindle type dicing apparatus 10, when the two blades 26, 26 are brought close to each other, there is a possibility that the two drainage recovery members 80 provided corresponding to the blades 26 and 26 interfere with each other.

  Therefore, as shown in FIG. 8, the central position in the Y direction of the drainage collection port 90 of the drainage collection member 80 of each spindle unit 28 is brought closer to the spindle housing 40 side than the Y direction position of the blade 26. Install in position. Thereby, the interference of the drainage recovery member 80 can be prevented. In this case, if the formation direction of the water curtain 76 is adjusted by the method as described above, the induction liquid and the drainage liquid can be properly collected in the drainage collection member 80.

  As described above, the configuration of the drainage recovery member 80 described in the above embodiment is an example, and the drainage recovery means is arranged in the direction in which the guide liquid in the water curtain flows to recover the waste liquid mixed in the guide liquid. Any configuration can be used.

  The present invention is not limited to a twin spindle type dicing device (cutting device), but can be applied to a single spindle type dicing device or any other dicing device.

DESCRIPTION OF SYMBOLS 10 ... Dicing apparatus, 20 ... Processing part, 26 ... Blade, 28 ... Spindle unit, 30 ... Work table, 42 ... Spindle, 46 ... Cutting whetstone part, 50 ... Blade cover, 52 ... Cutting fluid nozzle, 60, 62 ... Induction Liquid nozzle unit, 64, 66 ... support part, 68, 70 ... guide liquid nozzle, 68A, 70A ... discharge port, 68B, 70B ... curved part, 72, 74 ... guide liquid, 76 ... water curtain (liquid curtain), 80 ... drainage recovery member, 82 ... guide part, 84 ... recovery part body, 86 ... guide surface, 90 ... drainage recovery port

Claims (3)

A liquid curtain forming means for forming a liquid curtain around a rotating blade for processing a workpiece;
The liquid curtain forming means has a pair of nozzles disposed on both sides facing each other across the rotating blade, and is directed from the pair of nozzles toward the workpiece from different directions toward the same target point. Discharging the liquid to form the liquid curtain that flows from the target point in a direction away from the rotating blade,
Liquid curtain forming device. The liquid curtain forming means discharges the liquids having different flow rates from the pair of nozzles, respectively.
The liquid curtain forming apparatus according to claim 1. The liquid curtain forming means has a curved surface at a position in contact with the liquid curtain, and the direction in which the liquid curtain flows is curved by the curved surface.
The liquid curtain forming apparatus according to claim 1.

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