CN202411983U - Grinding device - Google Patents

Grinding device Download PDF

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Publication number
CN202411983U
CN202411983U CN2011202335213U CN201120233521U CN202411983U CN 202411983 U CN202411983 U CN 202411983U CN 2011202335213 U CN2011202335213 U CN 2011202335213U CN 201120233521 U CN201120233521 U CN 201120233521U CN 202411983 U CN202411983 U CN 202411983U
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CN
China
Prior art keywords
grinding
emery wheel
workpiece
injection nozzle
mentioned
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
CN2011202335213U
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Chinese (zh)
Inventor
林田彻
佐田博
青山博司
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Hallys Corp
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Hallys Corp
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Publication date
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Publication of CN202411983U publication Critical patent/CN202411983U/en
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B7/00Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
    • B24B7/20Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground
    • B24B7/22Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain
    • B24B7/24Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain for grinding or polishing glass
    • B24B7/242Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain for grinding or polishing glass for plate glass
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B55/00Safety devices for grinding or polishing machines; Accessories fitted to grinding or polishing machines for keeping tools or parts of the machine in good working condition
    • B24B55/02Equipment for cooling the grinding surfaces, e.g. devices for feeding coolant
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B57/00Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents
    • B24B57/02Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents for feeding of fluid, sprayed, pulverised, or liquefied grinding, polishing or lapping agents
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B9/00Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor
    • B24B9/02Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground
    • B24B9/06Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain
    • B24B9/08Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of glass
    • B24B9/10Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of glass of plate glass
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24DTOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • B24D3/02Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
    • B24D3/04Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic
    • B24D3/06Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic metallic or mixture of metals with ceramic materials, e.g. hard metals, "cermets", cements
    • B24D3/10Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic metallic or mixture of metals with ceramic materials, e.g. hard metals, "cermets", cements for porous or cellular structure, e.g. for use with diamonds as abrasives

Abstract

The utility model aims to provide a grinding device capable of reliably and safely grinding and processing the end surfaces of a thin-plate-shaped processed object. The grinding device provided by the utility model is provided with an abrasive wheel (61), a moving mechanism, a plurality of spray nozzles (112) and a control mechanism, wherein a grinding surface capable of grinding the end surfaces of the processed object (W) and rotating is arranged on the periphery of the abrasive wheel (61); the moving mechanism is used for enabling the abrasive wheel (61) and the processed object (W) to relatively move, so as to utilize the grinding surface to grind the end surfaces of the processed object (W); the spray nozzles (112) are assembled and arranged on the periphery of the abrasive wheel (61) at roughly equal-angle intervals, so as to tinily granulate liquid and spray the liquid to the grinding surface; and the control mechanism controls the spraying of the spray nozzles (112) by taking the grinding and processing position of the abrasive wheel (61) in contact with the processed object (W) as reference, so as to spray the liquid to positions behind the rotating direction of the abrasive wheel (61).

Description

Grinding attachment
Technical field
The utility model relates to a kind of grinding attachment.
Background technology
Grinding attachment is for the cross grinding of the sheet glass of the high fragility used in the portable terminals such as laminal machined object of carrying out general square shape (roughly polygon) etc., for example portable phone and use.In this portable terminal monitor, use the laminal glass plate of general square shape more.The laminal glass of this kind generally cuts out workpiece shape roughly from large-scale glass plate, and the emery wheel through utilizing grinding attachment is the end face of this glass plate that cuts out of grinding exactly, and forms the shape of regulation.Especially when this grinding, through carrying out chamfer machining simultaneously, and prevent that the end face of laminal glass plate from taking place damaged.When the emery wheel of above-mentioned grinding attachment carries out grinding, spray grinding fluid from injection nozzle to adding man-hour heated emery wheel, and make the emery wheel cooling.
When the profile of grinding glass plate as stated, through being relatively moved around the glass plate, emery wheel carries out, and therefore when the rotating shaft direction of emery wheel is observed, the grinding change in location that emery wheel is contacted with glass plate becomes 360 directions arbitrarily spent.That is, for example when long limit of the glass plate of grinding general square shape, if supposition is observed and the grinding position is being positioned at 12 o'clock direction from the rotating shaft direction; Then on the long limit of grinding and this during adjacent minor face; The grinding position moves to 3 o'clock direction, and when another length limit of grinding, the grinding position moves to 6 o'clock direction; When another minor face of grinding, the grinding position moves to 9 o'clock direction.And; Under the situation that the grinding position changes when the grinding operation successively as stated; In order to supply with grinding fluid to grinding location-appropriate ground, and observing down from the rotating shaft direction of emery wheel, the feed mechanism of grinding fluid also need form 360 and spend directions.
The mechanism that grinding fluid is supplied with around emery wheel as this kind a kind of; (1) a kind of setting is arranged is the supply pipe of the ring-type at center with the emery wheel in exploitation, and supplies with the technology (opening the 2006-346803 communique with reference to the spy of Japan) of grinding fluid incessantly towards the emery wheel center position from this supply pipe.Yet under the supply mode of this kind grinding fluid, existence needs the problem of a large amount of grinding fluids.This point is described in detail, and emery wheel is rotated under the state that rotates together with its ambient air, in order to break through this air layer grinding fluid is supplied to emery wheel, and need supply with grinding fluid with sufficient pressure and sufficient flow.Therefore, above-mentioned that kind when the supply pipe of ring-type is supplied with grinding fluid, if not with nearly approximately 10 times flow of the required grinding fluid in grinding position and guarantee that corresponding pressure supplies with continuously, then can't sufficient grinding fluid be supplied to the grinding position.
In addition, when will with this kind supply mode when sufficient flow is supplied with in the grinding position, spraying a large amount of grinding fluids towards emery wheel, consequently, the such situation of ponding can take place around emery wheel, and become the state that emery wheel is rotated in this ponding.In this case; Can stop injection stream by the formed moisture film of the rotation of emery wheel from the grinding fluid of supply pipe; Might produce and stably to supply with the phenomenon of necessary grinding fluid, thereby might can't bring into play the original function of grinding fluid to the grinding position.
In addition; As other grinding fluid supply method; (2) exploitation have a kind of along machined object be square glass plate around a plurality of injection nozzles are set, and technology (opening flat 5-162055 communique) with reference to the spy of Japan from spray grinding fluid near the injection nozzle of grinding position.Yet, when so injection nozzle being set, according to the size of glass plate and a plurality of injection nozzles of needs, the problem that not only exists manufacturing installation self cost to uprise, but also existence need be guaranteed the problem that the place is set of injection nozzle.
In addition, as other grinding fluid supply method, (3) are considered to have makes an injection nozzle follow the cut position of emery wheel and change and move and the structure of injection direction.Yet, when so constituting, because of this mechanism's device of following becomes complicated, the problem that exists the cost of lapping device self to uprise, and also existence need be guaranteed the above-mentioned problem that the space is set of following mechanism.
Patent documentation 1: the spy of Japan opens the 2006-346803 communique
Patent documentation 2: the spy of Japan opens flat 5-162055 communique
The utility model content
Therefore, the purpose of the utility model is to provide a kind of grinding attachment of can be reliably and safely the end face of laminal machined object being carried out grinding.
The grinding attachment of the utility model possesses:
Workbench is put laminal machined object its year;
Emery wheel, its periphery have can grinding machined object end face grinding face, and can rotate;
Travel mechanism, it relatively moves emery wheel and machined object, to utilize the end face of this grinding face grinding machined object;
A plurality of injection nozzles, they roughly the equal angles compartment of terrain be provided in emery wheel around, liquid is carried out corpusculed and sprays to grinding face;
Controlling organization, its grinding position with the emery wheel that contacts with above-mentioned machined object is a benchmark, controls the injection of above-mentioned a plurality of injection nozzles and injects liquid into the direction of rotation rear of emery wheel.
This grinding attachment can be uploaded at workbench and put machined object, through travel mechanism machined object and emery wheel is relatively moved, and utilizes the end face of wheel grinding machined object.And; When this grinding operation; Injection nozzle sprays the liquid of corpusculed towards emery wheel, so the liquid of this corpusculed breaks through easily on the surface of emery wheel (grinding face) air layer by the rotation institute driven rotary of emery wheel, and supplies to the grinding face of emery wheel easily reliably.And, leaning on the direction of rotation rear owing to injecting liquid into than grinding position from injection nozzle, the liquid that has therefore arrived the wheel grinding face arrives the grinding position easily under the drive of the rotation of emery wheel.
Especially in this grinding attachment; Even change has taken place in the relative position of the rotating shaft of grinding position and emery wheel along with the grinding of end face; Under the effect of the injection that utilizes controlling organization control injection nozzle; Also can inject liquid into than the grinding position of emery wheel and lean on the direction of rotation rear, and need not to supply with a large amount of liquid.Therefore,, can realize the reduction of the cost that liquid is required, and can prevent around the emery wheel the such situation of ponding to take place according to this grinding attachment.
In addition, because the injection of this kind liquid is undertaken by being provided in emery wheel injection nozzle on every side, therefore need not a plurality of injection nozzles to be set in the whole end of machined object.Therefore, compare in the situation that the whole end of machined object is provided with a plurality of injection nozzles, can reduce injection nozzle, can realize that the cost of manufacturing installation self reduces with this device, and than the place that is provided with that is easier to guarantee injection nozzle.
In this utility model, as injection nozzle, the two-fluid spray nozzle that preferably adopts mixing material and gas to spray.Thus, the fluid that is sprayed by corpusculed can be broken through the ambient air layer of the emery wheel that the rotation because of emery wheel produces reliably.
In addition, in this utility model, the injection central shaft of injection nozzle can be along the tangential direction setting of the periphery of emery wheel.And, also can roughly be provided with across with the rotating shaft of emery wheel.
In addition, in this utility model, controlling organization can adopt the structure of controlling as follows: during the grinding operation, under the situation of the relative position of the rotating shaft of change above-mentioned grinding position and emery wheel, the injection nozzle of injection is switched.Thus; In the cut position during with respect to the rotating shaft change of location of emery wheel; Controlling organization leans on the direction of rotation rear through the injection nozzle that sprays in a plurality of injection nozzles is switched and can inject liquid into reliably than the grinding position of emery wheel.
In addition; When adopting said structure; Can adopt following structure: the rotating shaft axle supporting that also possesses above-mentioned emery wheel is grinding wheel bearing parts that can rotate and the nozzle carrier of fixing with respect to these grinding wheel bearing parts, and above-mentioned a plurality of injection nozzles are installed on the nozzle carrier.Thus, a plurality of injection nozzles can be installed on the nozzle carrier that is fixed in the grinding wheel bearing parts easily and reliably, thereby injection nozzle is set easily.
In addition, when adopting said structure, the injection nozzle that preferably will spray simultaneously is controlled in two, thus, can obtain carrying out through a spot of liquid the effect of reliable grinding operation.
In addition; When adopting said structure; Controlling organization preferably adopts the structure of controlling as follows: when emery wheel relatively moves along a direction with respect to machined object, from an injection nozzle atomizing of liquids, after this sprays; When the other direction that intersects with respect to a machined object edge and an above-mentioned direction at emery wheel relatively moves; From another injection nozzle atomizing of liquids, during switching to relatively moving of above-mentioned other direction, from an above-mentioned injection nozzle and this both sides' atomizing of liquids of another injection nozzle from relatively moving of an above-mentioned direction.Thus, on the end face of a direction of machined object, utilize an above-mentioned injection nozzle to spray; And; On the end face of the other direction of machined object, utilize above-mentioned another injection nozzle to spray, thereby can carry out the grinding operation reliably; And between the end face of the end face of a direction of machined object and other direction (for example corner part); From an above-mentioned injection nozzle and this both sides' atomizing of liquids of another injection nozzle, therefore for said part, feed fluid and carry out the grinding of machined object reliably.
[invention effect]
As described above said; In the utility model; Can carry out the grinding of machined object through the grinding position that injection nozzle make liquid arrive emery wheel reliably, therefore, can be reliably and safely the end face of laminal machined object is carried out grinding.
Description of drawings
Fig. 1 is the vertical view of an embodiment of the grinding attachment of expression the utility model.
Fig. 2 is the front view of the grinding attachment of Fig. 1.
Fig. 3 is the side view of the grinding attachment of Fig. 1.
Fig. 4 is the three-view drawing of transfer robot of the grinding attachment of Fig. 1, and Fig. 4 (a) is a front view, and Fig. 4 (b) is a side view, and Fig. 4 (c) is a vertical view.
The figure of the action when Fig. 5 is the carrying of transfer robot of grinding attachment of key diagram 1, Fig. 5 (a) is the figure that expression normal condition to workpiece keeps initial state, Fig. 5 (b) is that the expression workpiece keeps initial state to the figure to the state of machine table carrying workpiece.
The figure of the action when Fig. 6 is the carrying of transfer robot of grinding attachment of key diagram 1; Fig. 6 (c) is the figure of expression to state to the camera shooting state of machine table carrying workpiece, and Fig. 6 (d) is the figure of expression camera shooting state to the maintenance initial state of next workpiece.
Fig. 7 is the vertical view of second machining cell of the grinding attachment of Fig. 1.
Fig. 8 is the front view that comprises part section of second machining cell of the grinding attachment of Fig. 1.
Fig. 9 is the side view that comprises part section of second machining cell of the grinding attachment of Fig. 1.
Figure 10 is the detailed side view that comprises part section when in the grinding attachment of Fig. 1, using the grinding tool in big footpath.
Figure 11 is the detailed side view that comprises part section when in the grinding attachment of Fig. 1, using the grinding tool of path.
Figure 12 is the flow chart of control method of the grinding attachment of presentation graphs 1.
Figure 13 is that the camera that utilizes of the grinding attachment of presentation graphs 1 is taken the side view of the state of machine table.
Figure 14 (a)~(d) explains the processing of the data that in the grinding attachment of Fig. 1, photograph and the key diagram of operation method.
Figure 15 is the schematic plan of injection nozzle unit that is used for the grinding attachment of key diagram 1.
Figure 16 (a)~(d) is the schematic plan of state of grinding work piece of the grinding attachment of presentation graphs 1.
Figure 17 (a)~(d) is the schematic plan that is illustrated in the state of grinding work piece in another embodiment of grinding attachment of the utility model.
Figure 18 (a)~(c) is the schematic plan that is illustrated in the state of grinding work piece in another embodiment of grinding attachment of the utility model.
Figure 19 (a)~(d) is the schematic plan that is illustrated in the state of grinding work piece in another embodiment of grinding attachment of the utility model.
Symbol description:
The M grinding attachment
W workpiece (sheet glass, machined object)
The unprocessed workpiece of Wi
The workpiece that Wo processes
The Wm part model
15 electronic control units (controlling organization)
23 cameras
30 machine table
31 grinding spindles
33 processing workbench (workbench)
61,161 processing portion (emery wheel)
71 reference pins
100 grinding wheel bearing parts
110 injection nozzle unit
112 (the injection nozzles of 112a~112d)
The C mechanical origin
The position of centre of gravity of P workpiece profile
The position of centre of gravity of Q hole portion shape
The specific embodiment
Below, based on accompanying drawing, the embodiment of the utility model is elaborated.
At first, with reference to Fig. 1~Fig. 3, the overall structure of grinding attachment is described.Need to prove, in each figure, though specifically do not describe, well-known in this grinding attachment, in order to ensure operator's security, and baffle is set around.
Like Fig. 2, shown in Figure 3, this lapping device M possesses the essentially rectangular shape and is assembled into cancellate pedestal 1 in the bottom, and the surface is provided with the various unit that are used to carry out grinding above that.
Pedestal 1 passes through the square material 11,12,13 of known steel is assembled along left and right directions, fore-and-aft direction and above-below direction, and each unit on top is carried out firm supporting.
Carry to put at the upper surface of pedestal 1 and be fixed with metal plate material 14.Carry out the square material 11,12 of pedestal 1, stifled eye between 13 through this plate material 14, and each unit can be set on pedestal 1.
In addition, in pedestal 1, be provided with electronic control unit 15 (controlling organization), carry out the control of various unit, wherein these various unit are the unit that carry out grinding.And, though do not keep detailed accounts, in this electronic control unit 15, possess the storing mechanism of storage machining information etc.In addition, though not shown, also be provided with and be used to supply the control panel of operator H these electronic control unit 15 input information.
As shown in Figure 1, the unit that is arranged on the top (on the pedestal 1) of grinding attachment M comprises: the transfer robot 2 that is arranged on central authorities; Be arranged on its four machining cell 3A, 3B, 3C, 3D on every side; Be arranged on the input taking-out platform 4 in transfer robot 2 the place aheads; Be arranged to move unit 5 in the position, the left and right sides of transfer robot 2 along the illumination that fore-and-aft direction extends.
Above-mentioned transfer robot 2 is made up of the SCARA robot in three joints that so-called along continuous straight runs moves.In Fig. 1~Fig. 3, represented the normal condition that transfer robot 2 does not move, but, utilized Fig. 4~Fig. 6 to describe in the back about operating state.
Front end on transfer robot 2 is provided with slide down moving axis 20.Be provided with absorption hand 21 in the lower end of this slide down moving axis 20,21 pairs of machined objects of this absorption hand (workpiece) are that the sheet glass W of general square shape (roughly polygon) adsorbs maintenance.And, via installation bracket the camera 23 that the absorption image is used is installed in the upper end of slide down moving axis 20.
This transfer robot 2 is carried from being dropped into taking-out platform 4 sheet glass W (Wo, Wi) to each machining cell 3A, 3B, 3C, 3D, and carries to dropping into taking-out platform 4 from each machining cell 3A, 3B, 3C, 3D.The transport operation of this workpiece W utilizes above-mentioned absorption hand 21 to carry out.And, in this transfer robot 2, can utilize above-mentioned camera 23 to take and carry the workpiece W that puts from the top of machining cell 3A, 3B, 3C, 3D.
Four above-mentioned machining cells are separately positioned on transfer robot 2 all around, are provided with as the first machining cell 3A, the second machining cell 3B, the 3rd machining cell 3C and the 4th machining cell 3D.
The structural element of each machining cell 3A, 3B, 3C, 3D all is set at identical, all carries out identical grinding operation.For example, represent that with the first machining cell 3A its structural element possesses: workpiece W absorption is held in the machine table 30 that supplies the grinding state; Grinding spindle 31 from the top grinding work piece W of machine table 30; Adjacent with machine table 30 and keep the tool storage room 32 of a plurality of grinding tools (emery wheel); Towards the injection nozzle unit 110 that is installed in the emery wheel injection grinding fluid on the grinding spindle 31.
And, wherein, on machine table 30, be provided with the machine table 33 that makes central authorities along the mechanism 34 (travel mechanism) that horizontally slips that left and right directions slide to move.Be provided with resinous fold protective cover 35 (the fold protective cover on the right side of machine table 33 is blocked by grinding spindle etc. and be not shown) in the left and right sides of machine table 33.Through this fold protective cover 35, prevent that grinding fluid from getting into the mechanism 34 that horizontally slips.And, the upper surface of machine table 33 be provided with the rectangular box shape and above the catch tray 36 opened, prevent that through this catch tray 36 grinding fluid from disperseing.
In addition, grinding spindle 31 possesses the front and back slide mechanism 38 (travel mechanism) that slides and move along fore-and-aft direction.And, between grinding spindle 31 and front and back slide mechanism 38, be provided with the guide up and down 39 that moves along the vertical direction.So, grinding spindle 31 is not only along fore-and-aft direction, and also can move freely along the vertical direction.
In addition, as shown in Figure 2, front and back slide mechanism 38 firmly fixes with respect to the bogie side frame 16 of the large-scale square material that extends along fore-and-aft direction.Thus, improve the supporting rigidity of grinding spindle 31, and can improve grinding accuracy.
Tool storage room 32 can keep at most five grinding tools (emery wheel) 6 ... (with reference to Fig. 2, Fig. 3).In tool storage room 32, maintain different emery wheel of diameter or the different a plurality of grinding tools 6 such as emery wheel of grinding-material.Select these a plurality of grinding tools 6 and it is installed on the grinding spindle 31 according to processing content.
Above-mentioned input taking-out platform 4 possesses: operator H carries out the shutter door 40 of opening and closing operations; The box of mobile rectangular shape is provided with platform 41 with shutter door 40 interlocks; Dismounting is arranged at the workpiece cassette 42 that box is provided with platform 41 freely.
Shutter door 40 is made up of the vertically long rectangular steel plate of the horizontal ratio of the hinge axis 43 (with reference to Fig. 3) that is provided with the along continuous straight runs extension in the lower end, is provided with in outer surface of upper and overlooks the roughly handle portion 44 of U-shaped.Operator H is that rotate this shutter door 40 at the center to the front side through controlling handle portion 44 with hinge axis 43, drops into taking-out platform 4 and can open, and can carry out the access of workpiece W in grinding attachment M.
Two side ends and linkage 45 that box is provided with platform 41 link, and this linkage 45 links with the top of shutter door 40.And the bottom that box is provided with platform 41 is slidably carried and is put on the slide rail 46 (with reference to Fig. 3) that extends along fore-and-aft direction.Therefore, when operator H carried out opening operation to shutter door 40, the box that links with shutter door 40 via linkage 45 was provided with platform 41 and slides mobile to the lateral direction of grinding attachment M.And when operator H carried out shutoff operation to shutter door 40, box was provided with platform 41 and slides mobile to the interior side direction of grinding attachment M.
Workpiece cassette 42 possesses four laminated sections 48 that are separated by resin wall 47, so that the duplexer of workpiece W is arranged in four row along left and right directions.Wherein, range upon range of unprocessed workpiece Wi in two laminated sections 48 in right side, and the workpiece Wo that process are folded in two laminated section 48 middle levels in the left side.Handle part 49 when this workpiece cassette 42 will be carried is arranged on two ends, so that operator H can be provided with on the platform 41 from box easily it is taken off.
Operator H lays unprocessed workpiece W (carry and put) and in this workpiece cassette 42, is positioned over box through the workpiece cassette 42 of this being laid workpiece W platform 41 is set, and close shutter door 40, and prepares before can accomplishing processing.
Above-mentioned illumination is moved unit 5 and is possessed: the shifting sledge 50 that extends along fore-and-aft direction at two side positions of transfer robot 2; Be bearing in the roughly tetragonal illumination frame 52 on this shifting sledge 50 via reciprocating mechanism 51.
Shifting sledge 50 is fixedly installed on front-end and back-end on the metal flat part 14 via frame support bracket 50a, 50a.The position of the tool storage room 32 of the machining cell (the second machining cell 3B, the 4th machining cell 3D) that is set to rear side is extended in the rear end of this shifting sledge 50.Therefore, illumination frame 52 moves greatlyyer to the rear side of grinding attachment M.In the stand-by time of not using illumination frame 52 (utilizing each machining cell 3A, 3B, 3C, 3D to carry out the time of grinding etc.), can make illumination frame 52 retreat into the position of rear side.
Illumination frame 52 through each 52a of frame portion ... Inner peripheral surface imbed a plurality of not shown LED, and to shining in the frame.When utilizing camera 23 to take workpiece W, this illumination frame 52 moves to the catch tray 36 of machine table 30, shines workpiece W from the side through utilizing LED, and the outer shape (profile) of workpiece W is appeared in one's mind, thereby carry out the photography of workpiece W easily.
Next, utilize Fig. 4~Fig. 6, transfer robot 2 is described.Fig. 4 is the three-view drawing of transfer robot, and Fig. 4 (a) is a front view, and Fig. 4 (b) is a side view, and Fig. 4 (c) is a vertical view.Fig. 5, Fig. 6 are the figure that the action when transfer robot is carried is described; Fig. 5 (a) is the figure that expression normal condition to workpiece keeps initial state; Fig. 5 (b) is that the expression workpiece keeps initial state to the figure that carries the state of workpiece to machine table; Fig. 6 (c) is the figure of expression to state to the camera shooting state of machine table carrying workpiece, and Fig. 6 (d) is the figure of expression camera shooting state to the maintenance initial state of next workpiece.
As stated, transfer robot 2 is made up of the SCARA robot in three joints that along continuous straight runs moves, and can move by along continuous straight runs.Particularly, shown in Fig. 4 (b), transfer robot 2 is arranged in the first joint 2Ja, second joint 2Jb and the 3rd joint 2Jc and can rotates, and is arranged to and can moves along left and right directions.Thus, the slide down moving axis 20 of the front end of preceding side arm 24 can move by along continuous straight runs.
This slide down moving axis 20 connects preceding side arm 24 front end settings along the vertical direction, and it is mobile to slide along the vertical direction.
Be provided with above-mentioned absorption hand 21 in the lower end of slide down moving axis 20.This absorption hand 21 on rectangular flat base plate 25, be provided with towards four suckers 26 of downside ...Through making suction function in this sucker 26, and producing absorption affinity, is sheet glass W thereby absorption keeps workpiece.
Shown in Fig. 4 (c), these four suckers 26 ... About two positions respectively set two.Utilize 26 absorption of two suckers to keep a workpiece W respectively.Therefore, can utilize an absorption hand 21 once to carry two workpiece W.
In addition, in this absorption hand 21, be provided with outstanding pin 27 downwards at the two ends of base plate 25.This pin the 27, the 27th is with the butt parts of workpiece W butt.That is, before carrying workpiece W, utilize this pin 27 temporarily workpiece W to be pressed in the workpiece cassette 42 through moving of transfer robot 2, and workpiece W is arranged in workpiece cassette 42.
As stated, be provided with camera 23 in the upper end of slide down moving axis 20.This camera 23 is arranged on from the holding position (ledge of base plate 25) of the workpiece W of absorption hand 21 and has departed from about 90 ° position.This is for when utilizing camera 23 to take, in order to avoid base plate 25 becomes interference.This camera 23 is made up of general CCD camera, takes in the view data of two dimension.
In addition, this camera 23 is installed on slide down moving axis 20 via installation bracket 22.This installation bracket 22 comprises reclinate slightly wrist 22a, can adjust the camera installation portion 22b of above-below direction position, is the axle fixed part 22c that tubular ground is fixed in slide down moving axis 20.Camera 23 is fixed in slide down moving axis 20 via wrist 22a, therefore is positioned at the position of separating from slide down moving axis 20, when photography, and side arm 24 before preventing to be shining into.
Next, utilize Fig. 5 and Fig. 6, the action when transfer robot 2 is carried is described.
Shown in Fig. 5 (a), transfer robot 2 at first makes each joint around rotating slightly counterclockwise from normal condition, utilizes absorption hand 21 adsorption layers to be stacked in the unprocessed workpiece Wi in the workpiece cassette 42.At this moment, through making slide down moving axis 20 around rotating significantly counterclockwise, and the base plate 25 of absorption hand 21 is rotated, utilize the sucker 26 in left side to adsorb unprocessed workpiece Wi.
Then, shown in Fig. 5 (b), transfer robot 2 makes each joint around rotation significantly counterclockwise, and with machine table 30 carryings of workpiece Wi to first machining cell.At this moment, workpiece Wi is moved to approximate location, places machine table 30 and carry.That is, need not carry out strict location confirmation, and workpiece Wi is carried to machine table 30, and put in approximate location its year.
And shown in Fig. 6 (c), side arm 24 and made slide down moving axis 20 around clockwise rotating further around rotating counterclockwise before transfer robot 2 made, thus make reliably camera 23 be positioned at workpiece Wi the top (directly over).So, transfer robot 2 utilizes 23 pairs in camera oneself carrying and carries the workpiece Wi that puts and take.Need to prove,, narrate in the back about the photography step of workpiece W.
And last, shown in Fig. 6 (d), transfer robot 2 in order to carry next unprocessed workpiece W, and makes each joint around returning clockwise after the photography of workpiece Wi finishes, and the sucker 26 in the left side through base plate 25 adsorbs next workpiece W.
And afterwards, transfer robot 2 carries out the action of Fig. 5 (b) repeatedly, carries unprocessed workpiece W from workpiece cassette 42 to next machine table.Like this, constantly with the machine table carrying of unprocessed workpiece W to the machining cell of sky.
In addition, particularly, though not shown, transfer robot 2 utilizes the workpiece Wo that processes after 26 pairs of process finishing of sucker on right side to adsorb, and from machine table 30 to workpiece cassette 42 carryings.Transfer robot 2 through mentioning the workpiece Wo that processes from machine table 30, and carried out the carrying of unprocessed workpiece Wi and the carrying of the workpiece Wo that processes simultaneously before the action of Fig. 5 (b).
Next, machining cell is described.Fig. 7 is the vertical view of machining cell, and Fig. 8 is the front view that comprises part section of machining cell, and Fig. 9 is the side view that comprises part section of machining cell.
As shown in Figure 7, machining cell 3B (for for simplicity, describing with second machining cell) possesses: the machine table 30 that keeps above-mentioned workpiece W; Workpiece W is carried out the grinding spindle 31 of grinding; The tool box 32 that keeps grinding tool 6.
And, wherein, in machine table 30, possess: the processing workbench 33 (workbench) of rectangle as stated; Make the mechanism 34 that horizontally slips of processing workbench 33 move left and right; The horizontally slip fold protective cover 35 of mechanism 34 of covering; Be arranged on the catch tray 36 of processing workbench 33 upper surfaces; Spray the injection nozzle unit 110 of grinding fluid.
In addition, as shown in Figure 8, this processing workbench 30 also possesses various structural elements.
At first, be provided with absorptive table 70 at the upper surface of processing workbench 33, this absorptive table 70 is used for keeping workpiece W in the inboard central authorities absorption of catch tray 36.This absorptive table 70 is become the roughly T word shape of rectangle (with reference to Fig. 7) by upper surface (bearing plane) 70a block-shaped base constitutes.In order to apply negative pressure, and on the upper surface 70a of absorptive table 70, be provided with a plurality of air entry 70b (with reference to Figure 10, Figure 11).And, be the surface generation scar of workpiece W in order not make sheet glass, and the upper surface 70a of absorptive table is implemented level and smooth processing.
Two reference pins 71,71 of the mechanical origin when being used to calculate grinding with erect towards the mode of camera 23 sides (upper side) be arranged on above-mentioned absorptive table 70 around.Put (maintenance) under the state of absorptive table 70 in that workpiece W is carried, this reference pins 71,71 is configured in nonoverlapping position with workpiece W, so that can take from above-mentioned camera 23.In addition, under the complete transparent situation of workpiece W, the position of reference pins also can be set for workpiece W overlapping.
And as shown in Figure 8, the height hs that the leading section 71a of reference pins 71 sets the upper surface 70a of its height hp and absorptive table 70 for is an equal height.Through setting like this, when utilizing camera 23 to take, between workpiece W and reference pins 71, can not produce the deviation of focus, therefore can carry out the absorption of view data reliably.
In addition, be provided with the roughly tetragonal background board 72 that the unsettled end has produced inclination in the inside of catch tray 36.72 pairs of whole faces of this background board carry out delustring and coat black, the reflection when preventing to mirror camera 23, and make mirroring of workpiece W and reference pins 71 showy.And, through background board 72 is obliquely installed, and grinding fluid is wandered immediately.And, on this background board 72, be formed with and be used to supply reference pins 71 and absorptive table 70 to insert logical inserting holes (concrete condition is not shown).
Be provided with the drainpipe 73 and adjutage 74 that is used for wandering the grinding fluid discharge on the catch tray 36 on the adjacent position of catch tray 36.Through this drainpipe 73 and adjutage 74 are set, and prevent that grinding fluid is trapped in the catch tray 36.
Horizontally slip mechanism 34 through known line slideway make processing workbench 33 freely slide mobile along left and right directions.And this mechanism 34 that horizontally slips controls slippage through stepping motor 34M.That is, control the position of the left and right directions of processing workbench 33 through the mechanism 34 that horizontally slips.Thus, after state grinding the time, the mechanism 34 of horizontally slipping limits the position, the left and right sides in grinding paths.
Fold protective cover 35 is flexible along left and right directions as so-called accordion.Therefore,, between processing workbench 33 and fold protective cover 35, can not produce the gap about the effect lower edge of mechanism 34 that horizontally slips yet, thereby can prevent that grinding fluid from flowing into the mechanism 34 that horizontally slips even processing workbench 33 moves.
As stated, catch tray 36 constitutes the rectangular box shape opened of top, and is set at and prevents that grinding fluid from spilling to the outside.Particularly, as shown in Figure 8, the sidewall 36a of catch tray 36 is extended to than reference pins 71 (hp) or the high position h of absorptive table 70 (hs), in order to avoid the spilling of grinding fluid.
Grinding spindle 31 possesses: the motor 31a that produces the rotary driving force when carrying out grinding; Grinding tool (emery wheel) is fixed on the chuck 31b on the main shaft of motor 31a.
As stated, slide mechanism 38 before and after grinding spindle 31 has.This front and back slide mechanism 38 possesses: along the slide rail 38a of fore-and-aft direction extension; The sliding part 38b that on slide rail 38a, moves.This front and back slide mechanism 38 is through the amount of movement of stepping motor 38M control sliding part 38b, through the front and back position of these front and back slide mechanism 38 control grinding spindles 31.Thus, when grinding, the fore-and-aft direction position in the grinding path of this front and back slide mechanism 38 is limited.
In addition, between grinding spindle 31 and front and back slide mechanism 38, be provided with the aforesaid mechanism 39 that slides up and down.This slides up and down mechanism 39 possesses: the track 39a that extends along the vertical direction; The moving-member 39b that moves in orbit.In addition, this slides up and down the move up and down amount of mechanism 39 through stepping motor 39M control moving-member 39b.Slide up and down the upper-lower position of mechanism's 39 control grinding spindles 31 through this.Thus,, use this to slide up and down mechanism 39, carry out the position adjustment in that grinding tool 6 is carried out the position to fashionable with workpiece W.
In addition, the nozzle carrier 111 of the injection nozzle unit of after being equipped with on the grinding wheel bearing parts 100, stating 110, these grinding wheel bearing parts 100 be fixed on that above-mentioned moving-member 39b goes up and with 31 supportings of above-mentioned grinding spindle for rotating.
As stated, tool storage room 32 can keep at most five grinding tools 6 ...Particularly, as shown in Figure 9, maintenance grinding tool 6 ... Five instrument maintaining part 32a ... Form a line along fore-and-aft direction, between this instrument maintaining part 32a and grinding spindle 31, automatically carry out the exchange of grinding tool 6.
Therefore, in this grinding attachment M, according to the grinding position, can automatically change a plurality of grinding tool 6 ..., can improve the grinding free degree.
Through Figure 10, Figure 11, the grinding tool 6 of grinding spindle 31 is described.Detailed side view when Figure 10 is to use the grinding tool in big footpath, the detailed side view when Figure 11 is to use the grinding tool of path.
As stated, this grinding spindle 31 can dismounting grinding tool 6 through chuck 31b, can switch and install the grinding tool 6A in big footpath shown in Figure 10 and the grinding tool 6B of path shown in Figure 11.
The grinding tool 6A in big footpath shown in Figure 10 possesses on the surface and is attached with the columned processing portion 61 in big footpath (emery wheel) of diamond particles 60 on (grinding face) and the axial region 62 of extension along the vertical direction that is fixed on the chuck 31b, is provided with the flange part 63 that broadens to foreign side at the upside of processing portion 61.And, be formed with three recesses 64 that are muscle shape depression in the bottom of processing portion 61.
Utilize grinding spindle 31 to make the grinding tool 6A rotation in this big footpath, make outer rim (profile) the Wa butt of recess 64 and workpiece W, thereby can carry out profile grinding or the chamfering of workpiece W.Need to prove, the 70th, absorptive table.
So, through utilizing the grinding tool 6A grinding work piece in big footpath, and when grinding, grinding tool 6A can stably cut, and therefore can improve machining accuracy.And, because grinding tool 6A be big footpath, so can prolong the life tools of instrument, thus continuous grinding workpiece W in large quantities.
The grinding tool 6B of path shown in Figure 11 possesses on the surface and is attached with the columned processing portion 161 of path (emery wheel) of diamond particles 160 and is fixed on the axial region 162 on the chuck 31b on (grinding face), is provided with flange part 163 at the upside of processing portion 161.And, be formed with three recesses 164 that are muscle shape depression in the bottom of processing portion 161.
In the grinding tool 6B of this path, because diameter is little, therefore grinding tool 6 is inserted in the Wb of hole portion of workpiece W, make the inner edge Wc butt of recess 164 and the Wb of hole portion, thereby can carry out interior shape grinding or the chamfering of the Wb of hole portion of workpiece W.
So, the interior shape of the Wb of hole portion of the grinding tool 6B grinding work piece W through utilizing path even be difficult under the situation of processing the diameter of the Wb of hole portion less, also can be carried out grinding reliably.
Utilize Figure 15, injection nozzle unit 110 is described.Figure 15 is the schematic plan that is used to explain the injection nozzle unit.
Injection nozzle unit 110 possesses: be installed in the nozzle carrier 111 on the grinding wheel bearing parts 100 as stated; Be installed in a plurality of injection nozzles 112 on this nozzle carrier 111.Above-mentioned injection nozzle 112 equal angles compartment of terrains be provided in emery wheel 61 (processing portion) around.In this embodiment, this injection nozzle 112 sets four with the mode of surrounding emery wheel 61 peripheries, and these four injection nozzles 112 set with the interval of 90 degree each other.In this embodiment, on the position of the angle that limit (long limit) written treaty 45 of imaginary line that opposed a pair of injection nozzle 112 is linked and workpiece W is spent, be equipped with injection nozzle 112.Need to prove, shown in figure 17, also can make the above-mentioned imaginary line mode parallel set injection nozzle 112 with the limit of workpiece W.
In addition, in this embodiment, injection nozzle 112 sprays grinding fluid towards the rotating shaft of emery wheel 61, so that the fixing injection nozzle 112 of the mode that the rotating shaft of the injection central shaft of injection nozzle 112 and emery wheel 61 intersects.Need to prove, can make and spray central shaft along the fixing injection nozzle 112 of the mode of the tangential direction of the periphery of emery wheel.And, in order to change the direction (injection direction) of spraying central shaft injection nozzle 112 to be arranged to turn, the direction through 15 pairs of these injection central shafts of above-mentioned electronic control unit changes control.
Each injection nozzle 112 is controlled its injection, is stopped through above-mentioned electronic control unit respectively.Concrete control method is narrated in the back.
In addition, in this embodiment, the two-fluid spray nozzle that each injection nozzle 112 uses mixing material and gas to spray.The liquid pulverizing that this two-fluid spray nozzle utilization will be supplied with high pressure conditions by the high velocity air that constitutes of squeezing air and carry out corpusculed, and these liquids and gases are sprayed together.And; Injection nozzle unit 110 possesses liquid connector 113 and the gas connector 114 that is used for to each injection nozzle 112 feed fluids (grinding fluid) and gas (air), and this liquid connector 113 and gas connector 114 are connected with grinding fluid resettlement section (not shown) and compressor reducer (not shown) respectively.
In addition, the grinding fluid as spraying from above-mentioned injection nozzle 112 can adopt various grinding fluids.As grinding fluid, can have the refrigerating function, the cleaning function of removing grindstone dust that make emery wheel cooling, be used for reducing the lubricating function of grinding resistance and prevent any function of the antirust function that emery wheel gets rusty or have a plurality of functions simultaneously.And, also have by interfacial agent, emulsifying agent etc. constitute and transparent or semitransparent be dissolved in water solvable be the monomer of grinding fluid (water-soluble type) or lam-oil etc. or be mixed with EP agents such as sulphur, chlorine therein after the oil base of material etc. be grinding fluid (mineral oil type), or except mineral oil, emulsifying agent by the material of synthetic system etc. constitute between above-mentioned solvable be that grinding fluid and oil base are that emulsion between the grinding fluid is grinding fluid etc.In the said multiple grinding fluid, can be according to the suitably preferred grinding fluid of employings such as grinding condition.
Next, about the control method of grinding attachment M, the control method when at first utilizing the grinding path that Figure 12~Figure 14 explains computing workpiece W.Figure 12 is the flow chart of the control method of expression grinding attachment, and Figure 13 is that expression utilizes camera to take the side view of the state of machine table, and Figure 14 explains the processing of the data that photograph and the key diagram of operation method.
Shown in the flow chart of Figure 12, after beginning, at first, in S1, the model data (profile, hole portion etc.) of workpiece W is imported (foundation) to electronic control unit 15.In this input operation, the design data (cad data) that for example will process workpiece Wo is taken in other the software temporarily, after converting the grinding data in grinding path etc. to, to electronic control unit 15 inputs (foundation).
After this kind input end of job, then, in S2, the workpiece Wi of reality (below be called practical work piece) was put (moving into) in 30 years to machine table.Putting operation this year carries out through above-mentioned transfer robot 2.Through putting operation this year unprocessed practical work piece Wi carried and to put on the absorptive table 70 of machine table 30.
Then, in S3, utilize camera 23 to take in the image of practical work piece Wi and reference pins 71,71.Figure 13 representes the photography state that this camera carries out.Shown in Figure 13 like this, in grinding attachment M,, take the workpiece Wi and the reference pins 71,71 of machine table 30 through the camera 23 on the high position that is installed in the transfer robot 2 of carrying workpiece Wi.So, through taking machine table 30 from the position of leaving of top, and can reduce the distortion of view data of workpiece Wi or the reference pins 17,17 of absorption as much as possible.
Figure 14 (a) is so figure of the example of the view data of absorption of expression.Be taken into workpiece Wi and two reference pins 71,71 as view data, calculate position data separately.
Then, in S4,, calculate the mechanical origin C of machine table 30 according to the position of reference pins 71,71.At this, mechanical origin C is the benchmark that is used to carry out the mechanical coordinate of grinding, through this mechanical origin is limited, and can carry out grinding accurately.
Shown in Figure 14 (b), mechanical origin C is confirmed by the mid point of the line L that two reference pins 71,71 are linked.In addition,, shown in dotted line, also can append two reference pins 71 ', 71 ' again as other examples, and with above-mentioned line L and the intersection point regulation that links this two reference pins 71 ', 71 ' line N as mechanical origin C.
Then, in S5,, calculate position of centre of gravity P and the position of centre of gravity Q of the Wb of hole portion of the profile Wa of practical work piece Wi according to the data of practical work piece Wi.At this, position of centre of gravity is the position of the center of gravity of figure, is decided by outer shape and the hole portion shape of workpiece W.The position of centre of gravity of the profile Wa that black circle P shown in Figure 14 (b), Q are practical work piece W and the position of centre of gravity of the Wb of hole portion.
Then, in S6, make the position of centre of gravity (the position of centre of gravity P of profile and the position of centre of gravity Q of hole portion) of practical work piece Wi consistent with the position of centre of gravity (the position of centre of gravity Pm of profile and the position of centre of gravity Qm of hole portion) of model Wm.Position of centre of gravity P, Q through making practical work piece are consistent with position of centre of gravity Pm, the Qm of model Wm, and clear and definite practical work piece Wi and model Wm poor (position data poor).State shown in Figure 14 (c) is the consistent state of position of centre of gravity P, Q, Pm, Qm that makes practical work piece Wi and model Wm (single-point line).So, consistent through making position of centre of gravity P, Q, Pm, Qm, can clear and definite practical work piece Wi and model Wm poor.
Then; In S7; The mechanical origin C of machine table 30 and the position of centre of gravity P of practical work piece Wi are compared the side-play amount of the position of centre of gravity P of computing mechanical origin C and practical work piece Wi (horizontal offset X, the side-play amount θ of side-play amount Y, direction of rotation) longitudinally.And, practical work piece Wi and model Wm are compared, come computing to cut according to the profile difference into amount Δ w.So, stock removal that can clear and definite practical work piece Wi etc.
Figure 14 (d) representes each side-play amount or cuts into amount.Example is as shown in the drawing, and the position of centre of gravity P of practical work piece Wi is apart from the side-play amount of the mechanical origin C of the machine table X that squints to the left, and upwards lateral deviation is moved Y, and cant angle theta to the right.
And; In the amount of cutting; The amount of the cutting Δ w1 of width deducts through the width dimensions r1 from practical work piece Wi behind the width dimensions T1 of model and calculates divided by 2, and the amount of the cutting Δ w2 of length direction calculates divided by 2 deduct the length dimension T2 of model through the length dimension r2 from practical work piece Wi after.
So, after obtaining the amount of the cutting Δ w1 of width and length direction, Δ w2, determine wherein big value as final cutting into amount Δ w.So decision be because, when carrying out grinding, through the track similar with mould shapes; With certain cutting into amount grinding work piece complete cycle; Therefore through being predetermined into big value, can produce reliably cut into, and can be ground to more shape near mould shapes.
Then, in S8, according to the side-play amount of X, Y, θ and cut, calculate the grinding path of workpiece Wi into amount Δ w.This grinding path root factually shape or the practical work piece Wi of border workpiece Wi the change of carrying seated position and change, different in each workpiece W.
Then, in S9, come grinding practical work piece Wi according to the grinding path of calculating.This grinding operation is moved respectively and is carried out through making grinding spindle 31 and machine table 30 (processing workbench 33).In the grinding operation of this workpiece W,, use the grinding tool 6A in above-mentioned big footpath or the grinding tool 6B of path to carry out according to the grinding position.
Control method when next, utilizing Figure 16 that the grinding operation is described from injection nozzle injection grinding fluid.Figure 16 is the state of grinding is carried out in expression to workpiece a schematic plan.Need to prove, in Figure 16, use the symbol of 112a~112d as injection nozzle in order to distinguish four injection nozzles.
Shown in Figure 16 (a), when the end face on the long limit of workpiece W is carried out grinding, spray grinding fluid from the first injection nozzle 112a of the direction of rotation rear side that leans on emery wheel 61 than grinding position (contact point of the end face of workpiece W and emery wheel 61).At this moment, from other three injection nozzle 112b ... Do not spray grinding fluid.
Then; Shown in Figure 16 (b); When the corner part between the above-mentioned long limit of workpiece W and the minor face adjacent with this length limit is carried out grinding; Also spray grinding fluid not only from the above-mentioned first injection nozzle 112a, and from the second injection nozzle 112b (leaning on the injection nozzle of the direction of rotation rear side of emery wheel 61 than the first injection nozzle 112a).At this moment, do not spray grinding fluid from other two injection nozzle 112c, 112d.
Then, shown in Figure 16 (c), when the minor face of grinding work piece W, the injection from the grinding fluid of the above-mentioned first injection nozzle 112a is stopped, spraying grinding fluid from the above-mentioned second injection nozzle 112b of the direction of rotation rear side that leans on emery wheel 61 than grinding position.At this moment, do not spray grinding fluid from other two injection nozzle 112c, 112d.
Shown in Figure 16 (d), when the end face on another long limit of grinding work piece W, spray grinding fluid from the 3rd injection nozzle 112c of the direction of rotation rear side that leans on emery wheel 61 than grinding position.At this moment, from other three injection nozzle 112a ... Do not spray grinding fluid.Need to prove, in the corner part between Figure 16 (c) and 16 (d), with above-mentioned corner part (Figure 16 (b)) likewise, also spray grinding fluid not only from the above-mentioned second injection nozzle 112b, and from the 3rd injection nozzle 112c.
Need to prove; In above-mentioned explanation; The situation of using big grinding tool 6A directly to carry out the profile grinding of workpiece W only has been described; But when using the interior shape of hole portion of grinding tool 6B grinding work piece W of path, can be through spraying, stop and carrying out the grinding operation with above-mentioned same control method control.That is, can be from spraying grinding fluid and carry out the grinding operation than the injection nozzle of grinding position by the direction of rotation rear side of emery wheel.And, in corner part, can spray grinding fluid from the predetermined injection nozzle that next uses and these both sides of injection nozzle that up to the present spraying always, carry out the grinding operation.
At last, in S10, take out (taking out of) practical work piece Wi from machine table 30.This taking-up operation is carried out through above-mentioned transfer robot 2, takes out the workpiece Wo that processes from machine table 30.
Then, next, in S11, judge whether operation finishes, when operation continues, (be judged as not), move to S2 in order to process next workpiece W.On the other hand, when the end of job, (be judged as and be: when power supply breaks off), intactly mobile to finishing.
More than, according to this kind step, control the grinding attachment M of this embodiment.
In the grinding process of this embodiment; The injection nozzle 112 that is made up of two-fluid spray nozzle sprays the grinding fluid behind the corpusculed towards emery wheel 61; Therefore the grinding fluid behind this corpusculed is broken through on the surface of emery wheel 61 (grinding face) air layer because of the rotation driven rotary of emery wheel 61 easily, supplies to the grinding face of emery wheel 61 easily reliably.And, since from injection nozzle 112 to lean on the direction of rotation rear to spray grinding fluid than grinding position, the liquid that therefore arrives the grinding face of emery wheel 61 is driven by the rotation of emery wheel 61, arrives the grinding position easily.
In addition; The grinding fluid that sprays from two-fluid spray nozzle 112 and the interference of the liquid spittle are few; Arrive the grinding face of emery wheel 61 expeditiously successively; Repeatedly with the grinding face of emery wheel 61 and this both sides' collision of grindstone dust, produce when wherein the centrifugal force that produced by emery wheel 61 of the liquid grain of the grinding fluid that formerly arrives of this liquid spittle is discharged.This collision is for the gas that exists in the space between the abrasive particle of the grinding face of emery wheel 61, (from the supply mode of the such liquid of whole state that gas is covered time) different effect when demonstrating with general liquid supply mode.That is, act on the gas piece in each space respectively through making the liquid grain, and bring into play the effect that gas is extruded from the space between this abrasive particle, thereby produce the effect that the gas displacement that will be stuck in the space becomes liquid.And, arrived between this abrasive particle grinding fluid with its periphery capillary effect under stay in this space.Therefore, stable and keep grinding fluid in right amount between abrasive particle, so keep the space of grinding fluid to follow the rotation of emery wheel 61 and arrive the grinding position, thus stable and effectively the grinding fluid in space is supplied with.
In addition; If this grinding fluid has refrigerating function, then make the state of cooling stabilisation of the locational abrasive particle of grinding, and measure bigger effect on every side for the grinding heat of going out from the grinding position; Consequently, have and prevent the overheated of abrasive particle and reduce the effect that its mill does not have.In addition, follow this kind cooling effect, reduce the heating of grindstone dust, prevent the molten phenomenon of applying in the space of grindstone dust between abrasive particle or abrasive particle effectively, and aspect hot, make its machining state stable.Therefore, when hot-short weak, the material that heat is irritated of processing, can realize the stable of its processing quality.
In addition, when grinding fluid has lubricating function etc., through fully supplying with grinding fluid in the space between emery wheel 61, abrasive particle and abrasive particle, can play non-tack effect and lubrication, the heating that reduces effect and abrasive particle of adhering to that can obtain grindstone dust prevents effect.
In addition, according to this grinding attachment, can bring into play by the interrupted collision of liquid grain, the cleaning performance that impulsive force produces.This is to reduced the effect that the grindstone dust that between abrasive particle, adheres to is further removed through above-mentioned effect.Though for the space between the abrasive particle that reduces generation delay as stated, adheres to and the grindstone dust of abrasive particle face but continuation generates; Through directly making the collision of liquid grain; And grindstone dust is impacted, and is stripped from from fixing position, is removed effectively with grinding fluid.And, according to the effect of above-mentioned grinding fluid, can produce the set state that comprises attachment and reduce in the interior effect that grindstone dust is adhered at double with lubricating function.
In addition; According to this grinding attachment; In the grinding operation, when the relative position change of the rotating shaft of grinding position and emery wheel 61, through utilizing the injection of controlling organization 15 control injection nozzles 112; Can need not to carry out the supply of unnecessary grinding fluid reliably to leaning on the direction of rotation rear to spray grinding fluid than the grinding position of emery wheel 61.Therefore,, the required cost of grinding fluid can be reduced, and the such situation of ponding can be prevented around emery wheel 61, to take place according to this grinding attachment.
In addition, according to this grinding attachment, when the grinding operation, injection nozzle 112 moves with emery wheel 61, therefore need not in the whole end of machined object injection nozzle 112 to be set.Therefore, the situation that injection nozzle is set with whole end at machined object is compared, and can reduce injection nozzle, reduces the cost of device, and than the place that is provided with that is easier to guarantee injection nozzle.And; This grinding attachment sets four injection nozzles 112 with the mode of surrounding emery wheel 61 peripheries, and each injection nozzle 112 is provided with the mode that does not change with the relative position of the rotating shaft of emery wheel 61, therefore can simplified structure; Reduce the cost of device, and the place that is provided with of guaranteeing injection nozzle easily.
In addition; According to this grinding attachment; Can spray grinding fluid from suitable injection nozzle 112 according to long limit and the minor face of workpiece W, can carry out the grinding operation reliably, and on the corner part of workpiece W, spray grinding fluid from two injection nozzles 112; Even therefore on these parts, also feed fluid also carries out the grinding of machined object simultaneously reliably.And the injection nozzle 112 that so will spray simultaneously through controlling organization 15 is controlled in two, therefore according to this grinding attachment, will play the effect that can carry out reliable grinding operation through a spot of liquid.
In addition; Fluid through suitably setting each two-fluid spray nozzle according to various conditions such as the rotating speed of emery wheel, the kind of emery wheel, the sizes of abrasive particle is fluid quantity delivered ratio/the pressure when quantity delivered, supply pressure etc. of fluid-mixing of (grinding fluid and air) separately; Utilize the method for grinding of the grinding attachment of this embodiment; In the grinding of the sheet glass of thickness of slab 0.2mm~3.0mm, can carry out end face and face upward the high efficiency grinding below the amount of the inclining 20 μ m.This compares with the situation of utilizing common method for grinding to carry out, has about 5 times~10 times grinding speed and improves effect.
In addition; The grinding attachment M of this embodiment is the grinding attachment M that carries out the cross grinding of sheet glass (W); Set up the data (S1) of the model Wm of (storage) sheet glass in advance, according to the photographed data of the reference pins of taking in by camera 23 71,71, the mechanical origin C (S4) that calculates machine table 30.Then, the photographed data of the sheet glass of taking in according to camera 23 (practical work piece Wi) is obtained the position of centre of gravity P (S5) of sheet glass (practical work piece Wi); The mechanical origin C of machine table 30 and the position of centre of gravity P of sheet glass (W) are compared; The side-play amount (offset X, horizontal side-play amount Y, the side-play amount θ of direction of rotation longitudinally) of calculating sheet glass (S7), according to this side-play amount, computing grinding path (S8); According to this grinding path that calculates, make grinding spindle 31 work (S9).
Therefore; Even not at sheet glass (W) from forming " becoming the mark (mark) of benchmark " etc. on one's body; Also can obtain " mechanical origin C " through the reference pins 71,71 that is arranged on the machine table 30; Can hold the side-play amount (X, Y, θ) of sheet glass (W), according to the side-play amount of this assurance, even there is not the sheet glass (W) of mark (mark) etc. also can carry out grinding exactly.
Thus; In the grinding attachment M of the cross grinding that uses the sheet glass (W) in the display frame of portable terminals such as portable phone; Photographed data through utilizing camera 23 is carried out grinding; And can process accurately, and need not on the surface of sheet glass (W), to be provided with mark etc. and just can carry out grinding.
Need to prove; Though utilize a plurality of reference pins 71,71 to obtain mechanical origin in this embodiment, in addition, also can obtain mechanical origin through making local outstanding benchmark protuberance; And, can also obtain mechanical origin through the painted benchmark portion in part.
In addition, in this embodiment, make the position of centre of gravity P of sheet glass (W) consistent, sheet glass (W) and model Wm are compared with the position of centre of gravity Pm of model Wm, and the cutting into amount Δ w of computing grinding spindle 31.That is, judge that sheet glass (W) with respect to model Wm how much big (for example, detect the residual quantity of length direction and the residual quantity of width, and judge the size of being somebody's turn to do " residual quantity "), according to this size, makes to cut into amount Δ w to change.
Therefore, cutting into amount Δ w of sheet glass (W) changes by each workpiece, thereby can sheet glass (W) be processed into shape and size more accurately.
Thus, hold the cutting of sheet glass that changes by each workpiece more accurately and carry out the grinding operation, therefore can process a plurality of glass plates accurately into amount Δ w.
In addition, in this embodiment, obtain position of centre of gravity P and the position of centre of gravity Q of the Wb of hole portion shape of the profile Wa of sheet glass, and calculate the position of centre of gravity of workpiece Wi.
Thus, the position of centre of gravity Q of the position of centre of gravity P of the profile Wa through calculating sheet glass (W) and the Wb of the hole portion shape of sheet glass even have the sheet glass of hole portion, also can carry out grinding with the shape that meets model Wm reliably.
Thus, even have the sheet glass (W) of the complicated shape of the Wb of hole portion, also computing grinding path exactly can be carried out grinding accurately.
In addition, in this embodiment, reference pins 71,71 is set at two side positions across sheet glass (W).
Thus, can mechanical origin C be formed on the position near the position of centre of gravity P of sheet glass (W), wherein this mechanical origin C is formed on the line L of two reference pins of binding 71,71 at least.
Therefore, the side-play amount of computing sheet glass (W) more accurately.That is, through making the position of centre of gravity P of mechanical origin C near sheet glass (W), and therefore the error can reduce side-play amount the time can calculate side-play amount accurately.
Thus, can carry out more high-precision grinding.
In addition, in this embodiment, the upper surface 70a that sets for absorptive table 70 through the leading section 71a with reference pins 71 is equal height (hp=hs), and makes its distance apart from camera 23 unanimous on the whole with sheet glass (W).
Thus, the position of the point that is taken (leading section 71a) of reference pins 71 and the short transverse of sheet glass (W) is unanimous on the whole, and is therefore can be reliably that the focus of camera 23 and both is involutory.
Thus, can take reference pins 71 and sheet glass (W) reliably simultaneously, thus the side-play amount of computing sheet glass (W) more accurately.
More than, the utility model is not limited to this embodiment, and comprises the embodiment that is applicable to all grinding attachments.
In the grinding attachment of this embodiment, be the sheet glass that portable phone is used with workpiece W, but also can be the sheet glass used of portable audio equipment for example, or the sheet glass used of portable game machine.In addition, can also be the sheet glass used of portable navigation device, sheet glass of portable TV etc.
Need to prove; In the above-described embodiment; Be provided with four injection nozzles 112; Therefore can play the end and the advantage of carrying out the grinding operation simultaneously that reliably liquid are supplied to each limit of general square shape shape through each injection nozzle 112, but the number of the injection nozzle of the utility model is not limited to four.For example shown in Figure 180, eight injection nozzles 112 also can be set.In grinding attachment shown in Figure 180, the equal angles compartment of terrain sets eight injection nozzles 112, particularly is provided in the position that is spaced from each other 45 degree.In addition, also can six injection nozzles (equal angles compartment of terrain) be provided in the position that is spaced from each other 60 degree.
Need to prove, in this grinding attachment shown in Figure 180,, likewise spray grinding fluid from an injection nozzle 112 respectively with above-mentioned embodiment about the long limit of workpiece W and the grinding of minor face.And when the grinding of corner part, the injection nozzle 112 between the injection nozzle 112 that also can be only uses respectively when being provided in the grinding of carrying out above-mentioned long limit and minor face sprays grinding fluids.
In addition; Even under the situation that four injection nozzles 112 are set; Also be not limited to above-mentioned embodiment (Figure 16) and form shown in Figure 17; Also can be for example shown in Figure 19, become with the limit (growing the limit) of workpiece W at the imaginary line that links opposed a pair of injection nozzle 112 on the position of predetermined angular to set injection nozzle 112.At this, even being meant the corner part to workpiece W, the angle of regulation carries out the position that grinding also can be supplied with grinding fluid reliably, for example can be 30 degree.
In addition, the control method of the controlling organization of a plurality of injection nozzles 112 is not limited to above-mentioned embodiment, in the scope of the aim of the utility model, can carry out suitable design alteration.
For example; Can control, lean on the injection nozzle 112 of the direction of rotation front side of emery wheel also to spray grinding fluid so that be positioned at, thus than grinding position; Through the injection nozzle 112 of above-mentioned direction of rotation front side, can remove attached to the grindstone dust on the grinding face of emery wheel 61.
In this case; Lean on the injection nozzle 112 of the front side of direction of rotation (for example can use different grinding fluids with the injection nozzle 112 that leans on rear side than cut position; Spray grinding fluid from the injection nozzle of rear side, and spray grinding fluid) with cleaning function from the injection nozzle of front side with refrigerating function.But, when the diameter of emery wheel hour, owing to there is the situation that diminishes function in the mutual interference of two kinds of grinding fluids, the therefore preferred use of only under the big situation of the diameter of emery wheel, adopting above-mentioned two kinds of grinding fluids.
In addition; The situation of two-fluid spray nozzle as injection nozzle of using has been described in the above-described embodiment; But for example also can use ultrasonic wave eclipsed form nozzle, this ultrasonic wave eclipsed form nozzle ejection through the ultrasonic vibration part make the overlapping and corpusculed of ultrasonic vibration and liquid liquid.
So through using ultrasonic wave eclipsed form nozzle; Transmitting medium to the injection current of object (cutting face of emery wheel and workpiece) as ultrasonic wave from nozzle, the strong vibration active force that can the ultrasonic vibration acceleration that this grinding fluid is propagated be produced imposes on the air layer in space between attachment and the abrasive particle of grinding face of emery wheel.Therefore; According to ultrasonic wave eclipsed form nozzle; Have the advantage that can obtain following effect, these effects are: make the air layer vibration in space between attachment and abrasive particle, make grinding fluid to the wedge shape effect of soaking into the contact point that contacts around it and removing, replacement result effectively through vibration.Yet (; Need the ultrasonic vibration part in the nozzle front; And from the current of nozzle and object between can not interrupt, therefore have following shortcoming: method to set up of device (ultrasonic vibration part accommodate volume, with the distance of object etc.) or utilization are gone up and can be produced restriction and comprise the supersonic oscillations device in interior installation cost burden increase)
In addition, in the above-described embodiment, only the end face processing to the interior shape of the hole portion of the end face processing of the profile of workpiece and workpiece is illustrated, but according to the device of above-mentioned embodiment, for example can use drill bit as grinding tool, the processing of holing.Need to prove; Add man-hour holing; Owing to need the cut position of grinding fluid to become the inside of machined object, so in grinding, can't obtain the direct effect of two-fluid spray nozzle, but after boring processing; Through under the purpose of the stifled eye of removing drill bit, being suitable for, and can obtain the cleaning performance of two-fluid spray nozzle.And; The grindstone dust of discharging in the grinding might reduce quality because of the surface attached to machined object; But supply near the surface of processing through the grinding fluid that will have the effect of two-fluid spray nozzle all the time, and can promptly get rid of grindstone dust, thereby can obtain keeping the effect of surface quality.And; Impulsive force through two-fluid can make drill main body produce small vibration; Though not talkative vibratory output, vibration number are all abundant, have and the same action effect of effect that obtains through above-mentioned ultrasonic wave overlapping nozzles, thereby can expect certain effect.
In addition; In the above-described embodiment, when the grinding operation, explained that emery wheel 61 is along the long side direction of workpiece W moves and workpiece W moves along the short side direction of workpiece W situation; But in this grinding attachment; Workpiece and emery wheel 61 are relatively moved get final product, emery wheel is moved along the long side direction of workpiece, and it is moved along short side direction.
In addition, in the overall structure of grinding attachment, be not limited to this embodiment, for example, also go for machining cell and be one or be the situation that five or six etc. are provided with a plurality of machining cells on the contrary.
In addition, about grinding tool 6, being not limited to the instrument enumerated in this embodiment, for example also can be spherical grinding tool, discoidal grinding tool or conical grinding tool.And, about emery wheel material, also be not limited to diamond.
[industrial applicibility]
As previously discussed; The grinding attachment of the utility model carries out the grinding of machined object through the grinding position that injection nozzle can make liquid arrive emery wheel reliably; Therefore, can be reliably and safely the end face of laminal machined object is carried out grinding.

Claims (5)

1. grinding attachment, it possesses:
Workbench is put laminal machined object its year;
Emery wheel, its periphery have can grinding machined object end face grinding face, and can rotate;
Travel mechanism, it relatively moves emery wheel and machined object, to utilize the end face of this grinding face grinding machined object;
A plurality of injection nozzles, their equal angles compartment of terrains be provided in emery wheel around, liquid is carried out corpusculed and sprays to grinding face;
Controlling organization, its grinding position with the emery wheel that contacts with above-mentioned machined object is a benchmark, controls the injection of above-mentioned a plurality of injection nozzles and injects liquid into the direction of rotation rear of emery wheel.
2. grinding attachment according to claim 1, wherein,
Above-mentioned injection nozzle is the two-fluid spray nozzle that mixing material and gas spray.
3. grinding attachment according to claim 1, wherein,
The injection central shaft of above-mentioned injection nozzle is along the tangential direction setting of the periphery of emery wheel.
4. grinding attachment according to claim 1, wherein,
The injection central shaft of above-mentioned injection nozzle is provided with the mode that the rotating shaft with emery wheel intersects.
5. grinding attachment according to claim 1, wherein,
The rotating shaft axle supporting that also possesses above-mentioned emery wheel is grinding wheel bearing parts that can rotate and the nozzle carrier of fixing with respect to these grinding wheel bearing parts,
Above-mentioned a plurality of injection nozzle is installed on the nozzle carrier.
CN2011202335213U 2010-07-05 2011-07-05 Grinding device Expired - Lifetime CN202411983U (en)

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JP2010-153503 2010-07-05

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Cited By (2)

* Cited by examiner, † Cited by third party
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CN106903567A (en) * 2017-03-17 2017-06-30 桂林创源金刚石有限公司 A kind of diamond abnormity emery wheel and vertical processing cooling system
CN114055254A (en) * 2020-07-31 2022-02-18 诬陷害者株式会社 Method for grinding workpiece

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CN106891220A (en) * 2017-03-10 2017-06-27 朱杰 A kind of digital controlled profile glass circulates edge polisher

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000024872A (en) * 1998-07-09 2000-01-25 Enshu Ltd Fluid injection method by multiple nozzles
JP3948005B2 (en) * 1999-05-24 2007-07-25 旭硝子株式会社 Plate-shaped body processing apparatus and method
JP3916982B2 (en) * 2002-03-22 2007-05-23 株式会社ジェイテクト Grinding fluid supply method and apparatus
KR20040021964A (en) * 2002-09-06 2004-03-11 세호로보트산업 주식회사 Apparatus and method for cooling and lubricating bit in drilling machine
WO2004091861A1 (en) * 2003-03-31 2004-10-28 The Gleason Works Coolant delivery apparatus for machine tool
JP2006142391A (en) * 2004-11-16 2006-06-08 Olympus Corp Centering device for optical lens

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106903567A (en) * 2017-03-17 2017-06-30 桂林创源金刚石有限公司 A kind of diamond abnormity emery wheel and vertical processing cooling system
CN106903567B (en) * 2017-03-17 2023-05-12 桂林创源金刚石有限公司 Diamond special-shaped grinding wheel and vertical machining cooling system
CN114055254A (en) * 2020-07-31 2022-02-18 诬陷害者株式会社 Method for grinding workpiece

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TWI468257B (en) 2015-01-11
JP2012011536A (en) 2012-01-19

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