TW201203450A - Cassette carrying stage for substrates - Google Patents

Cassette carrying stage for substrates Download PDF

Info

Publication number
TW201203450A
TW201203450A TW100122421A TW100122421A TW201203450A TW 201203450 A TW201203450 A TW 201203450A TW 100122421 A TW100122421 A TW 100122421A TW 100122421 A TW100122421 A TW 100122421A TW 201203450 A TW201203450 A TW 201203450A
Authority
TW
Taiwan
Prior art keywords
cassette
mounting
substrate
mounting table
pair
Prior art date
Application number
TW100122421A
Other languages
English (en)
Chinese (zh)
Inventor
Shigeru Teratani
Original Assignee
Muratec Automation Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Muratec Automation Co Ltd filed Critical Muratec Automation Co Ltd
Publication of TW201203450A publication Critical patent/TW201203450A/zh

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/6773—Conveying cassettes, containers or carriers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/062—Easels, stands or shelves, e.g. castor-shelves, supporting means on vehicles
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67379—Closed carriers characterised by coupling elements, kinematic members, handles or elements to be externally gripped

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • General Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Power Engineering (AREA)
  • Nonlinear Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Packaging Frangible Articles (AREA)
  • Vibration Prevention Devices (AREA)
TW100122421A 2010-07-01 2011-06-27 Cassette carrying stage for substrates TW201203450A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010151215A JP5099386B2 (ja) 2010-07-01 2010-07-01 基板用のカセットの載置台

Publications (1)

Publication Number Publication Date
TW201203450A true TW201203450A (en) 2012-01-16

Family

ID=45601427

Family Applications (1)

Application Number Title Priority Date Filing Date
TW100122421A TW201203450A (en) 2010-07-01 2011-06-27 Cassette carrying stage for substrates

Country Status (4)

Country Link
JP (1) JP5099386B2 (ja)
KR (1) KR101399399B1 (ja)
CN (1) CN102372144A (ja)
TW (1) TW201203450A (ja)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102862772B (zh) * 2012-09-19 2015-04-15 深圳市华星光电技术有限公司 玻璃基板卡匣的承载装置及仓储设备
CN102910405B (zh) * 2012-10-25 2015-12-09 深圳市华星光电技术有限公司 一种卡匣搬运叉车
JP6061020B2 (ja) 2013-02-12 2017-01-18 村田機械株式会社 保管棚
CN104891083B (zh) * 2015-05-19 2017-07-21 深圳市华星光电技术有限公司 一种用于自动化仓库的货架

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB8626408D0 (en) * 1986-11-05 1987-12-16 Secr Defence Damping treatment for pipes & bodies
JPH0727625Y2 (ja) * 1988-09-29 1995-06-21 大日本スクリーン製造株式会社 基板収納カセット昇降機の振動防止装置
JPH1059539A (ja) * 1996-08-20 1998-03-03 Dainippon Screen Mfg Co Ltd カセット保持装置
JPH10101177A (ja) * 1996-09-25 1998-04-21 Nippon Valqua Ind Ltd 板状部品を収容するためのカセット
JP2000283224A (ja) * 1999-03-31 2000-10-13 Yokohama Rubber Co Ltd:The 粘弾性ダンパーの構造
JP2001301878A (ja) * 2000-04-26 2001-10-31 Vantec Co Ltd 半導体ウェハ包装容器輸送用コンテナ
JP2002286091A (ja) * 2001-03-26 2002-10-03 Murata Mach Ltd 物品載置台及びそれを備えた搬送装置
JP2004132415A (ja) * 2002-10-09 2004-04-30 Yokohama Rubber Co Ltd:The 粘弾性ダンパーの構造
JP4120396B2 (ja) * 2002-12-27 2008-07-16 村田機械株式会社 搬送台車
JP2004301290A (ja) * 2003-03-31 2004-10-28 Fujitsu Display Technologies Corp 防振機構及び搬送装置
US7201276B2 (en) * 2003-11-07 2007-04-10 Entegris, Inc. Front opening substrate container with bottom plate
JP4675601B2 (ja) * 2003-11-18 2011-04-27 株式会社 ネットプラスチック 大型精密シート状製品および半製品用密封容器
JP2006258156A (ja) * 2005-03-16 2006-09-28 Kaneka Corp 粘弾性ダンパー
JP2007146898A (ja) * 2005-11-24 2007-06-14 Showa Science Co Ltd 除振装置
CN201301503Y (zh) * 2008-11-14 2009-09-02 大连理工大学 粘弹性多维减振器

Also Published As

Publication number Publication date
JP5099386B2 (ja) 2012-12-19
CN102372144A (zh) 2012-03-14
JP2012015371A (ja) 2012-01-19
KR101399399B1 (ko) 2014-05-30
KR20120002921A (ko) 2012-01-09

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