JP5099386B2 - 基板用のカセットの載置台 - Google Patents
基板用のカセットの載置台 Download PDFInfo
- Publication number
- JP5099386B2 JP5099386B2 JP2010151215A JP2010151215A JP5099386B2 JP 5099386 B2 JP5099386 B2 JP 5099386B2 JP 2010151215 A JP2010151215 A JP 2010151215A JP 2010151215 A JP2010151215 A JP 2010151215A JP 5099386 B2 JP5099386 B2 JP 5099386B2
- Authority
- JP
- Japan
- Prior art keywords
- cassette
- mounting table
- mounting
- substrate
- pad
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/6773—Conveying cassettes, containers or carriers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/062—Easels, stands or shelves, e.g. castor-shelves, supporting means on vehicles
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67379—Closed carriers characterised by coupling elements, kinematic members, handles or elements to be externally gripped
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- General Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Power Engineering (AREA)
- Nonlinear Science (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Optics & Photonics (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Packaging Frangible Articles (AREA)
- Vibration Prevention Devices (AREA)
Description
4 フレーム
5,6 ビーム
8 ダブルアームのスカラアーム
10 アーム
12 軸
14 取付部
16 液晶カセット
18,19 桟
20,21 受台
22 ガイド部
23 取付板
24,25 金属板
26 粘弾性体
28 樹脂パッド
30 カバー
33 取付板
32 アース線
34〜36 ビス
Claims (2)
- 複数本の梁を底面に備えた、基板用のカセットを載置するための載置台であって、
粘弾性体を備えた、前記梁の受台が複数個、載置台本体に取り付けられ、前記受台で前記カセットの底面を支持するように構成され、
前記粘弾性体は上下双方から少なくとも一対の金属板で挟み込まれ、下方の金属板は前記載置台本体に固定され、上方の金属板の上面側に前記梁の底面を支持する導電性樹脂のパッドが取り付けられ、
さらに前記パッドを前記載置台本体に接地するアース線が設けられ、
前記上方の金属板及び前記パッドは前記梁よりも幅広で、
前記梁の左右の両外側で、左右一対の取付板が前記パッドの上面に押し当てられ、かつ前記左右一対の取付板は前記上方の金属板に締結されていることを特徴とする、基板用のカセットの載置台。 - 前記梁を両側から案内する一対のガイドからなるガイド部が、前記載置台本体に設けられていることを特徴とする、請求項1の基板用のカセットの載置台。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010151215A JP5099386B2 (ja) | 2010-07-01 | 2010-07-01 | 基板用のカセットの載置台 |
CN2011101655045A CN102372144A (zh) | 2010-07-01 | 2011-06-20 | 基板用盒的载放台 |
KR1020110060162A KR101399399B1 (ko) | 2010-07-01 | 2011-06-21 | 기판용 카세트의 재치대 |
TW100122421A TW201203450A (en) | 2010-07-01 | 2011-06-27 | Cassette carrying stage for substrates |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010151215A JP5099386B2 (ja) | 2010-07-01 | 2010-07-01 | 基板用のカセットの載置台 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2012015371A JP2012015371A (ja) | 2012-01-19 |
JP5099386B2 true JP5099386B2 (ja) | 2012-12-19 |
Family
ID=45601427
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2010151215A Expired - Fee Related JP5099386B2 (ja) | 2010-07-01 | 2010-07-01 | 基板用のカセットの載置台 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP5099386B2 (ja) |
KR (1) | KR101399399B1 (ja) |
CN (1) | CN102372144A (ja) |
TW (1) | TW201203450A (ja) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102862772B (zh) * | 2012-09-19 | 2015-04-15 | 深圳市华星光电技术有限公司 | 玻璃基板卡匣的承载装置及仓储设备 |
CN102910405B (zh) * | 2012-10-25 | 2015-12-09 | 深圳市华星光电技术有限公司 | 一种卡匣搬运叉车 |
JP6061020B2 (ja) | 2013-02-12 | 2017-01-18 | 村田機械株式会社 | 保管棚 |
CN104891083B (zh) * | 2015-05-19 | 2017-07-21 | 深圳市华星光电技术有限公司 | 一种用于自动化仓库的货架 |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB8626408D0 (en) * | 1986-11-05 | 1987-12-16 | Secr Defence | Damping treatment for pipes & bodies |
JPH0727625Y2 (ja) * | 1988-09-29 | 1995-06-21 | 大日本スクリーン製造株式会社 | 基板収納カセット昇降機の振動防止装置 |
JPH1059539A (ja) * | 1996-08-20 | 1998-03-03 | Dainippon Screen Mfg Co Ltd | カセット保持装置 |
JPH10101177A (ja) * | 1996-09-25 | 1998-04-21 | Nippon Valqua Ind Ltd | 板状部品を収容するためのカセット |
JP2000283224A (ja) * | 1999-03-31 | 2000-10-13 | Yokohama Rubber Co Ltd:The | 粘弾性ダンパーの構造 |
JP2001301878A (ja) * | 2000-04-26 | 2001-10-31 | Vantec Co Ltd | 半導体ウェハ包装容器輸送用コンテナ |
JP2002286091A (ja) * | 2001-03-26 | 2002-10-03 | Murata Mach Ltd | 物品載置台及びそれを備えた搬送装置 |
JP2004132415A (ja) * | 2002-10-09 | 2004-04-30 | Yokohama Rubber Co Ltd:The | 粘弾性ダンパーの構造 |
JP4120396B2 (ja) * | 2002-12-27 | 2008-07-16 | 村田機械株式会社 | 搬送台車 |
JP2004301290A (ja) * | 2003-03-31 | 2004-10-28 | Fujitsu Display Technologies Corp | 防振機構及び搬送装置 |
US7201276B2 (en) * | 2003-11-07 | 2007-04-10 | Entegris, Inc. | Front opening substrate container with bottom plate |
JP4675601B2 (ja) * | 2003-11-18 | 2011-04-27 | 株式会社 ネットプラスチック | 大型精密シート状製品および半製品用密封容器 |
JP2006258156A (ja) * | 2005-03-16 | 2006-09-28 | Kaneka Corp | 粘弾性ダンパー |
JP2007146898A (ja) * | 2005-11-24 | 2007-06-14 | Showa Science Co Ltd | 除振装置 |
CN201301503Y (zh) * | 2008-11-14 | 2009-09-02 | 大连理工大学 | 粘弹性多维减振器 |
-
2010
- 2010-07-01 JP JP2010151215A patent/JP5099386B2/ja not_active Expired - Fee Related
-
2011
- 2011-06-20 CN CN2011101655045A patent/CN102372144A/zh active Pending
- 2011-06-21 KR KR1020110060162A patent/KR101399399B1/ko active IP Right Grant
- 2011-06-27 TW TW100122421A patent/TW201203450A/zh unknown
Also Published As
Publication number | Publication date |
---|---|
TW201203450A (en) | 2012-01-16 |
CN102372144A (zh) | 2012-03-14 |
JP2012015371A (ja) | 2012-01-19 |
KR101399399B1 (ko) | 2014-05-30 |
KR20120002921A (ko) | 2012-01-09 |
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