TW201037312A - Micro-sensing IC test sorting machine - Google Patents

Micro-sensing IC test sorting machine Download PDF

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TW201037312A
TW201037312A TW98111058A TW98111058A TW201037312A TW 201037312 A TW201037312 A TW 201037312A TW 98111058 A TW98111058 A TW 98111058A TW 98111058 A TW98111058 A TW 98111058A TW 201037312 A TW201037312 A TW 201037312A
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micro
sensing
test
patent application
item
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TW98111058A
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Chinese (zh)
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TWI385388B (en
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shi-xin Huang
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Hon Tech Inc
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Abstract

A micro-sensing IC test sorting machine is disclosed, which comprises a feeding cartridge, a collecting cartridge and an empty cartridge. The feeding cartridge is used to accommodate micro-sensing ICs under test. The collecting cartridge is used to accommodate tested micro-sensing ICs at different levels. The empty cartridge is used to receive an empty plate from the feeding cartridge, or to supplement an empty plate required by the collecting cartridge. An angle motion test device is installed in the back of the machine. The angle motion test device is capable of testing a rotation angle motion of the micro-sensing IC, and transmitting a test result to a central controlling unit. A conveying device is used to move among the feeding cartridge, the collecting cartridge and the angle motion test device, so as to convey the micro-sensing IC under test to the angle motion test device, and to convey the tested micro-sensing IC to the collecting cartridge for being sorted and stored. Therefore, the present invention allows the micro-sensing IC to perform the angle motion test operation, and significantly increases the test yield by means of coordinating the timeline of each device for operations. Further, the present invention can effectively improve operation performance of testing and sorting accommodation by means of immediately performing sorting accommodation according to the test result.

Description

201037312 六、發明說明: 【發明所屬之技術領域】 、本發明係提供-種可使微感須Π C執行角度運動測試作業, 並利用各裝置之時序搭配作動,而大幅增加職產能,且立即依 ,試結果迅速分類收置’以姐提升測試分類收置健效能之微 感測IC測試分類機。 【先前技術】 ❹201037312 VI. Description of the invention: [Technical field to which the invention pertains] The present invention provides a method for performing an angular motion test operation for a micro-sense ΠC, and using the timing of each device to actuate, thereby greatly increasing the productivity, and immediately According to the results, the test results are quickly classified and collected. The micro-sensing IC test sorting machine that collects the health performance by the sister-up test. [Prior Art] ❹

微感測I C係廣泛應用於各式電子產品,例如Wii 、PS3或i Phone手機等,由於微感測J c應用之產品會執行 ,態之加速度運動及靜態之旋轉角度運動,目前坊間業者於 則段製程之微感測晶片製作完成後,為確保微制晶片良率及避 免後段封裝製程之成本浪費,係於執行後段封裝作業之前,均會 對巧感測晶片執行角度運動測試作業,以測試微感測晶片是 否嗳抽,而角度運動測試作業係將複數個微感測晶片裝設於 電路板上’再將電路板置放定位於探針卡測試機之治具上,並 於治具之上方設有-連接職器之探針卡,該探針糊具有複數 讎針’用以探測微感測晶片’進而治具可㈣複數個微感測晶 片作旋轉肖度運動之測試,並使探針卡將職訊號傳輸至測試 器,由測試關斷測試之微_晶片為良品或不良品,若為不良 品即於微_晶片㈣料庫上標註記號,以先行_出不良品 之微感測晶片,於微感測晶片執行測試作業完畢後,再將完測之 微感測晶片收置容器中’而移載至下—卫作站;惟,由於複數個 微感測晶>1测試完雜’並無法直接將各完測之微感測晶片依 測試等級而加以自動化分類收置,必須再以人工揀選方式將完測 之微感測晶片一分類收置’以致相當耗費時間,造成降低生產 效能之缺失,再者,各微感測晶片於測試完畢後,係進入後段封 裝製程’而製作成-微感測Ic,由於微感冑i c會歷經多道製 程’為確保微感測I C之品質’亦必須對封裝後之微感測】〇執 打角度運動之測試作業以確保品質,但目前業界卻無針對微感測 I C測試狀測試分議,以致無法將各微制〗c作—測試及 3 201037312 楝選分類,造成無法確保微感測ic品質之缺失。 故在講求全面自動化及測試品質提升之趨勢下,如何設計一 種可對微感測I C執行角度運動測試作業,並立即依測試^果, =微感測I C作一分類收置,而一貫化自動執行測試及分類,以 k升作業便利性及產说之微感測I c測試分類機,即為孝者致力 研發之標的。 【發明内容】 本發明之主要目的係提供一種微感測I c測試分類機,其包 含設於機台之供料匣、收料匣及空匣,該供料匣係供承置待測之 微感測I c,收料匣係供承置不同等級完測之微感測! c,空匣 則可接收供料匣處之空料盤或補充收料匣處所需之空料盤,另於 機台後端設有角度運動測試裝置,該角度運動測試裝置係可測試 微感測I C之旋轉角度運動,並將測試結果傳輪至中央控制單 元:一可移動於供、收料匣及角度運動測試裝置間之輸送裝置, 其係將待測之微感測I c移載至角度運動測試裝置,並將完測之 微感測I C移載至收料匣而分類收置;藉此,可使微感測J c自 動化的執行角度運動測試作業,並利用各裝置之時序搭配作動, 而大幅增加測試產能,且立即依測試結果迅速分類 自Micro-sensing ICs are widely used in various electronic products, such as Wii, PS3 or i Phone mobile phones. Because the products of micro-sensing J c applications will be executed, the acceleration motion and the static rotation angle motion are currently used by the industry. After the fabrication of the micro-sensing wafer is completed, in order to ensure the micro-chip yield and avoid the waste of the post-packaging process, the angular motion test operation is performed on the smart sensing wafer before the post-packaging operation is performed. The micro-sensing chip is tested for pumping, and the angular motion test operation is to install a plurality of micro-sensing chips on the circuit board, and then the circuit board is placed on the jig of the probe card testing machine, and Above the device is provided a probe card for connecting the device, the probe paste has a plurality of needles for detecting the micro-sensing wafers, and the fixture can test (four) a plurality of micro-sensing wafers for the rotation of the micro-shake. And the probe card transmits the job signal to the tester, and the micro-chip of the test shutdown test is a good product or a defective product, and if it is a defective product, the micro-chip (four) material library is marked with a mark to advance the defective product.The micro-sensing wafer is transferred to the lower-weiwei station after the micro-sense wafer is subjected to the test operation, and then the micro-sensing wafer is placed in the container; however, due to a plurality of micro-sensing crystals 1 test is complete and can't directly sort the micro-sensing chips of each test according to the test level. The micro-sensing chips must be sorted and sorted by manual sorting. It takes time, which leads to the lack of production efficiency. Moreover, after the test is completed, each micro-sensing chip enters the back-end packaging process' to make a micro-sensing Ic, because the micro-sensing 胄ic will go through multiple processes' Ensure that the quality of the micro-sensing IC 'also has to be micro-sensing after packaging】 〇 test the angular motion test to ensure quality, but the industry has no test for the micro-sensing IC test test, so that each Micro-made c-testing and 3 201037312 selection classification, resulting in the inability to ensure the lack of micro-sensing ic quality. Therefore, under the trend of comprehensive automation and improved test quality, how to design an angular motion test for micro-sensing ICs, and immediately according to the test results, = micro-sensing IC for a classification, and consistent automatic Execute the test and classification, with the k-litre operation convenience and the micro-sensing I c test classification machine, which is the target of the research and development of the filial piety. SUMMARY OF THE INVENTION The main object of the present invention is to provide a micro-sensing I c test sorting machine, which comprises a feeding hopper, a receiving hopper and an empty raft provided on a machine table, and the feeding raft is for bearing the test to be tested. Micro-sensing I c, receiving 匣 is used to set the micro-sensing of different levels of measurement! c. The open space can receive the empty tray at the feeding hopper or the empty tray required at the supplementary receiving hopper, and the angle motion testing device is provided at the rear end of the machine. The angle motion testing device can test the micro Sensing the rotation angle movement of the IC, and passing the test result to the central control unit: a transport device that can be moved between the supply and the receiving device and the angle motion test device, which shifts the micro-sensing I c to be tested Carrying to the angular motion test device, and transferring the completed micro-sensing IC to the receiving device for sorting and collecting; thereby, the micro-sensing J c can be automatically performed to perform the angular motion test operation, and the device is utilized. Timing collocation, and greatly increase test capacity, and quickly classified according to test results

動化作業以有效提升測試分類收置之效能。 置違J ¢) 本發明之另一目的係提供一種微感測I C測試分類機,其 中/該設於機台後端之角度運動測試裝置係以機座架置傳動軸, 於,傳動軸上連結擺臂,而可由第一驅動源帶動傳動軸上之擺臂 作第-方向的角度旋轉,再於擺臂上裝設—可由第二驅動源帶動 作第=方向角度旋轉之承架,並於該承架上承置具複數個測試座 之測試板,進而以二方向的角度旋轉對微感測J C進行角度運動 測4 ’並將待測微感測I c之測試訊號傳輸至測試器,該測試器 再將微,測I C之角度運動測試結果傳輸至巾央控制單元,由中 央控制單元控制錢置作崎選分類,㈣_有 則 IC品質之效益。 4 201037312 【實施方式】 為使貴審查委員對本發明作更進一步之瞭解,茲舉一較佳 實施例並配合圖式,詳述如后: 請參閱第1圖’本發明微感測I c測試分類機係包含設於機 台10之供料匣2 0、第一收料匣3 0、空匣4 0及第二收料匣 5 0,該供料匣2 0係以疊放的方式供承置數盤之待測微感測 I C,供料匣2 〇在供料時,可將供料盤2丄移送至供料區,位 於收料區上之各收料盤3 i則依測試結果分級承裝完測之微感測 I C,並於滿載後可移入第一收料匣3 〇内疊放收置,空匣4 〇 0 則可接收供料區處之空料盤或補充良品收料區所需之空料盤,第 一收料匣5 0亦可依測試結果分級承裝完測之微感測j c,另於 機台10後端設有角度運動測試裝置6〇,該角度運動測試裝置 6 0包含有兩組之角度測試機61、6 2及可作χ — γ— z軸向 f之移料機構6 3,-輸送裝置,其包括有第—取放料機 1:載送機構7 2及第二取放料機構了 3,第-取放料機構 係叹有可作χ — γ— Z軸向位移之複數支第一取放器71 供料區之料盤2 1上取出待測之微感測I C,並將待 ,測試機n1=載3送機構7 2,該載送機構7 2係於角度 〇 方設有人料載台7 2 1及出料載台7 2 Ί1 ί人?1Ί1可供第—取放料機構71之第一取放器7 測1機6= ί測1 C ’ 將待測之微感測1 C載送至角度 工處,以供移料機構6 3 Ϊ ==機構6 3之吸嘴6 31置入完測之微感= 取放料==以職裝置6〇,而第二 測之微感測J C,並依测二 載台7 2 2上取出完 第二收 5 0 ;錢台!缝料區之收難3 1上或 埶之需〇没有預熱盤8〇,如測試前有預 而树+取放料機構7 1可麵制之微❹D! C移載 5 201037312 巧m ’再將完成預熱之微感測1 c移载至入料載 6 f15 ^ ^^ i 1内之l驅触「上連結有—擺臂6 1 3,而可由機座6 1 ^ 動源(圖式未示)帶動傳動軸β12上之|臂β ί Ο ο 向的角度旋轉,再於擺臂6 1 3上裝設 動作第二方向角度旋轉之承架6 1 4,;於 中,測試^ 具複數個測試座6 1 5之測試板6 1 6 ’其 型測試座之峨座6 1 5係可為常閉㈣懷座或常開 有-^移動開型測試座時,則於承架6 1 4上設 於賴測試座内微感測1 C之下壓件6 1 7,以 lY時機之吸嘴6 3 1將待測之微感測1 C置人測試座6 ; f=:壓定位微感測1 C,若為常閉型測試座時, 常^型、、处下壓之下壓件6 1 7,則會先移動下壓開啟 I C置^3料機構6 3之吸嘴6 3 1將待測之微感測 = 難測继,接著下餅6 1 7移出脫離下壓常閉型 =座常閉型測試座即會自動關閉定位微感測I C,無論常 測試座或常開咖彳試座,*可 ϋ 試座615叫進嫩=== 度旋轉對微感測1 c進拥度運動測試,並將待測 試訊號傳輸至測試器,測試器再將微感測1 α 裝傳触+姑鮮Α,Μ缺料元控制各 之笛請if第4圖,本發明於初始狀態時,第—取放料機構71 i1可作X—γ—z軸向轉,祕供料區之供 科盤2 1上取出制之微感測ί c 9 〇,並移載置入於載送機構 6 201037312 7 2之入料載台7 21上(如待測之微感測I C 9 0須先行預 熱,則第一取放器71 1先將待測之微感測IC 9 0移載至預熱 盤8 0預熱,再將完成預熱之微感測IC 9 0移載至入料載台7 2 1)。 請參閱第5圖,接著載送機構7 2之入料载台7 21將待測 之微感測IC 9 0載送至角度運動測試裝置6 〇之前方,其移料 機構6 3之吸嘴6 31即於入料載台7 21上取出待測之微感測 I C 9 0,並將待測之微感測I c 9 0移載至角度測試機61處 以便執行角度運動之測試作業。 〇 請參閱第6圖,當該角度測試機61之測試座615 (本實 施例為常開型測試座)置入待測之微感測j C 9 〇後,下壓件6 17即移動下壓微感測IC 9 0,使微感測Ic 9 0穩固的電性 接觸於測試座615,第一驅動源並開始驅動擺臂613作第一 方向的角度旋轉,以及第一驅動源亦開始帶動承架6 1 4作第二 方向角度旋轉,而以二個方向的角度旋轉對微感測IC9 〇進行 =運動_試,待測之微感測1 C 9 Q之測試訊號將傳輸至測 试益,測試器再將微感測Ic g 〇之角度運動測試結果傳輸至中 央控制單元。 〇 、請參閱第7圖,當制之微感測I C90於角度測試機6工 上進行角度運動的測試時,第一取放料機構7 i之第一取放哭7 ^ 區之供_ 2 i上取出另—批待測之微感測工 、、,並移載置入於載送機構72之入料載台721上,而 7 2 1將待測之微感測1 c 1 ◦ Q載送至角度運動測試 方;請參閱第8圖,接著移料機構6 3之吸嘴6 3 汰料載台7 21上取出待測之微感測丨c丄 並將待 移載增測試機6 2處,以便執行角度 動測閱圖2角!測試機61完成微感測1c 9 0之運 〜帛-驅動源及第動源將帶動縣6 i 4旋轉回復 7 201037312 至原起始位置,下壓件617並移動脫離下壓測試座615 ;請 參閱第10圖’接著,移料機構6 3之吸嘴6 31即於承架61 4上取出完測之微感測IC 9 0,並將完測之微感測IC 9 0移 载至出料载台7 2 2上。 Ο Ο 請參閱第11圖,當出料載台7 2 2上承置完測之微感測I c90後’出料載台722即將該完測之微感測IC90移載出 角度運動測試裝置6 0 ;請參閱第12圖,接著第二取放料機構 7 3之第二取放器7 31則於出料載台7 2 2上取出完測之微感 測I C 9 0,並依據測試結果將完測之微感測【c g 〇移載至第 收料區之收料盤31上或第二收料匣5 〇 ;在此同時,第一取 放料機構7 1之第一取放器7 2 將繼續於供料區之供料盤2工 上取出另一批待測之微感測i c i丄〇,並再次移 於 2之人料載台7 2 1上’而入料載台7 2 1將制之微感 c1 1〇載送至角度運動測試裝置6 0之前方,以供移料機 ^ 嘴6 3 1將待測之微感測1 C 1 1 0移載至角度測試 櫸61處’接續執行角度運動之測試作業。 ,此,本發明可自動化之對微感測j (:進行角度運動之 5依裝序搭配作動,而大幅增加測試產能,且立 =實為—深具實用性及進步性之設計,'然未見有 【圖^單=發明專利申請要件,編提出申請。°口 本發明測試分類機之各裝置配置圖。 本發明測試分類機之角度運動測試裝置之示音 本發明測試分類機之角度運動測試裝置之 本發明測試分類機之使用示意圖(一)。〜Θ 本發明測試分類機之使用示意圖(二)。 )° 第1圖 第2圖 第3圖 第4圖 第5圖 本發明測試分類機之使用示意圖(三) 本發明測試分類機之使用示意圖(四 8 201037312 第8圖:本發明測試分類機之使用示意圖(五)。 第9圖:本發明測試分類機之使用示意圖(六)。 第1 0圖:本發明測試分類機之使用示意圖(七)。 第1 1圖:本發明測試分類機之使用示意圖(八)。 第1 2圖:本發明測試分類機之使用示意圖(九)。 【主要元件符號說明】 本發明部份: 1 0 :機台 2 0 :供料匣 2 1 :供料盤 3 0 :第一收料匣 31 :收料盤 〇 4 0 :空匣 5 0 :第二收料匣 6 0 :角度運動測試裝置 61:角度測試機 6 1 1 ··機座 6 1 2 :傳動軸 6 1 3 :擺臂 614:承架 615:測試座 616:測試板 617:下壓件 6 2 :角度測試機 6 3 :移料機構 6 3 1 ··吸嘴 70:輸送裝置 〇 71:第一取放料機構711:第一取放器 7 2 :載送機構 7 21 :入料載台 7 2 2 :出料載台 7 3 :第二取放料機構 7 31 :第二取放器 8 0 :預熱盤 81 :料盤傳送機構Dynamic work to effectively improve the performance of test classification. Another object of the present invention is to provide a micro-sense IC test sorting machine, wherein the angular motion test device disposed at the rear end of the machine is mounted on the drive shaft, and the drive shaft Connecting the swing arm, and the swing arm on the drive shaft can be driven by the first driving source to rotate in the first direction, and then mounted on the swing arm - the second drive source can be rotated by the second direction driving direction, and the angle is rotated. A test board having a plurality of test sockets is mounted on the rack, and then the angular motion measurement of the micro-sensing JC is performed by rotating at a two-direction angle 4′ and the test signal of the micro-sensing I c to be tested is transmitted to the tester. The tester then transmits the angular motion test results of the micro and test ICs to the central control unit of the towel, and the central control unit controls the money to be selected for classification, and (4) has the benefit of IC quality. 4 201037312 [Embodiment] In order to make the present invention further understand the present invention, a preferred embodiment and a diagram will be described in detail as follows: Please refer to FIG. 1 'The micro-sensing I c test of the present invention The sorting machine includes a supply unit 20, a first receiving unit 3 0, an empty unit 4 0 and a second receiving unit 5 0 disposed on the machine table 10, and the feeding unit 20 is provided in a stacked manner. The micro-sensing IC to be tested is placed on a plurality of trays, and the feeding tray 2 is transported to the feeding area. The receiving trays 3 i located in the receiving area are tested according to the test. As a result, the micro-sensing ICs that have been tested are graded and can be moved into the first receiving 匣3 叠 for stacking and storage after full load. The empty 匣4 〇0 can receive empty trays or supplements at the feeding area. The empty tray required in the receiving area, the first receiving 匣50 can also be fitted with the micro-sensing jc according to the test result, and the angle motion testing device 6〇 at the rear end of the machine 10, The angle motion testing device 60 includes two sets of angle testing machines 61, 62 and a transfer mechanism 63, which can be used as a γ-γ-z axis f, a conveying device including a first pick-and-drop machine 1: The carrier mechanism 7 2 and the second pick-and-place mechanism 3, the first pick-and-drop mechanism is sighable - γ - Z axial displacement of the plurality of first pick-and-place 71 feed material The micro-sense IC to be tested is taken out from the disc 2 1 and is to be tested. The test machine n1=the 3-feed mechanism 7 2 is attached to the human-made stage 7 2 1 at the angle 及 and the discharge is provided. Loading platform 7 2 Ί 1 ί people? 1Ί1 is available for the first pick-and-place mechanism 71. The first pick-and-place unit 7 measures the machine 6= ί test 1 C ' The micro-sensing 1 C to be tested is carried to the angle work for the transfer mechanism 6 3 Ϊ == mechanism 6 3 nozzle 6 31 placed into the measured micro-sensing = take the discharge == employment device 6 〇, and the second measurement of the micro-sensing JC, and according to the test of the second stage 7 2 2 Take out the second collection 5 0; money station! In the sewing area, there is no need to preheat the tray 8 上, or if there is no preheating tray 8 〇 before the test, if there is a pre-test tree + take-out mechanism 7 1 can be made by the micro-D! C transfer 5 201037312 巧 m ' Then, the micro-sensing 1 c that completes the preheating is transferred to the loader 6 f15 ^ ^^ i 1 and the drive is connected to the upper arm-swing arm 6 1 3, and can be moved by the base 6 1 The figure does not show) the angle of the arm of the transmission arm β12 on the arm β ί Ο ο, and then the arm 6 13 is mounted on the swing arm 6 1 3 to rotate the frame in the second direction. ^ Test board with multiple test sockets 6 1 5 6 1 6 'The test seat of the test seat 6 1 5 can be normally closed (four) pockets or normally open -^ move open type test seat, then Cheng Cheng The frame 6 1 4 is disposed in the Lai test seat, and the micro-sensing 1 C lower pressing member 6 1 7 is used to set the micro-sensing 1 C to be tested to the test seat 6 at the lY timing nozzle 6 3 1 ; f= : Pressure positioning micro-sensing 1 C, if it is a normally closed test seat, the normal type, and the lower pressing part 6 1 7 will move the lower pressure to open the IC to set the material mechanism 6 3 The nozzle 6 3 1 will be the micro-sensing to be tested = difficult to measure, then the lower cake 6 1 7 is removed from the lower pressure normally closed type = seat The closed test stand will automatically close the positioning micro-sensing IC, regardless of the test stand or the constant open coffee test stand, * can be tested 615 called tender === degree rotation to micro-sensing 1 c into the movement Test, and transmit the signal to be tested to the tester. The tester then transmits the micro-sensing 1 α to the touch + Α fresh Α, and the missing element controls each flute. If the present invention is in the initial state, The first pick-and-place mechanism 71 i1 can be used for X-γ-z axial rotation, and the micro-sensing of the secret supply area for the disc 2 1 is taken out and placed in the carrying mechanism. 6 201037312 7 2 on the loading stage 7 21 (if the micro-sensing IC 9 to be tested must be preheated first, the first pick-and-place unit 71 1 first transfers the micro-sensing IC 90 to be tested to The preheating tray 80 is preheated, and the micro-sensing IC 90 that has completed the preheating is transferred to the loading stage 7 2 1). Referring to FIG. 5, the loading stage 7 of the carrier mechanism 7 2 is next. 21, the micro-sensing IC 90 to be tested is carried to the front of the angular motion testing device 6 ,, and the suction nozzle 6 31 of the loading mechanism 6 3 takes out the micro-sensing to be tested on the feeding platform 7 21 IC 9 0, and transfer the micro-sensing I c 9 0 to be tested to The test machine 61 is used to perform the angular motion test operation. 〇Please refer to FIG. 6 , when the test stand 615 of the angle tester 61 (this embodiment is a normally open test stand) is placed into the micro-sensing to be tested. After C 9 , the pressing member 6 17 moves the micro-sensing IC 90 to make the micro-sensing Ic 90 firmly contact the test socket 615, and the first driving source starts to drive the swing arm 613. The angular rotation in one direction, and the first driving source also starts to drive the carrier 6 1 4 to rotate in the second direction, and the rotation in two directions is performed on the micro sensing IC9 = = motion _ test, the micro to be tested The test signal for sensing 1 C 9 Q will be transmitted to the test benefit, and the tester will transmit the angular motion test result of the micro-sensing Ic g 至 to the central control unit. 〇, please refer to Figure 7, when the micro-sensing I C90 is tested on the angle test machine for angle motion, the first pick-and-place mechanism 7 i is the first to take the crying 7 ^ zone for _ 2 i takes out another micro-sensing tool to be tested, and transfers it to the loading stage 721 of the carrying mechanism 72, and 7 2 1 will measure the micro sensing 1 c 1 ◦ Q is carried to the angle motion test side; please refer to Fig. 8, then the suction mechanism 6 3 nozzle 6 3 removes the micro-sensing 丨c丄 to be tested and will be transferred to test Machine 6 2, in order to perform the angular motion test to read the 2 corners! Test machine 61 completes the micro-sensing 1c 9 0 operation ~ 帛 - drive source and the source will drive the county 6 i 4 rotation recovery 7 201037312 to the original start Position, the lower pressing member 617 moves away from the pressing test stand 615; please refer to FIG. 10' Next, the suction nozzle 6 31 of the transfer mechanism 6 3 takes out the micro-sensing IC 9 0 on the carrier 61 4 And transfer the completed micro-sensing IC 90 to the discharge stage 7 2 2 . Ο Ο Please refer to Fig. 11. After the micro-sensing I c90 is placed on the discharge stage 7 2 2, the discharge stage 722 will transfer the micro-sensing IC90 to the angular motion test device. 6 0 ; Please refer to FIG. 12 , and then the second pick-and-place device 7 31 of the second pick-and-place mechanism 7 3 takes out the measured micro-sensing IC 9 0 on the discharge stage 7 2 2 and according to the test. As a result, the measured micro-sensing [cg 〇 is transferred to the receiving tray 31 of the first receiving area or the second receiving 匣 5 〇; at the same time, the first pick-and-place mechanism 7 1 picks up the first pick-and-place 7 2 will continue to take another batch of micro-sensing ici丄〇 to be tested on the supply tray 2 of the feeding area, and then move again to the human loading stage 7 2 1 ' and the loading stage 7 2 1 The micro-sensing c1 1〇 is sent to the front of the angle motion test device 60 for the transfer machine nozzle 6 3 1 to transfer the micro-sensing 1 C 1 1 0 to be tested to the angle test.榉61's follow-up test operation to perform angular motion. In this way, the present invention can automatically control the micro-sensing j (the 5-angle operation of the angle movement is performed, and the test capacity is greatly increased, and the vertical=real--practical and progressive design, 'then There is no [Figure ^ single = invention patent application requirements, the preparation of the application. ° mouth of the invention test classification machine configuration diagram. The invention of the test classification machine angle motion test device of the sound of the invention test classification machine angle Schematic diagram of the use of the test sorting machine of the present invention for the motion test device (1). Θ The schematic diagram of the use of the test sorter of the present invention (2).) 1st image, 2nd drawing, 3rd drawing, 4th drawing, 5th drawing, test of the present invention Schematic diagram of the use of the sorting machine (III) Schematic diagram of the use of the test sorting machine of the present invention (four 8 201037312 Fig. 8: Schematic diagram of the use of the test sorting machine of the present invention (5). Fig. 9: Schematic diagram of the use of the test sorting machine of the present invention (six Fig. 10: Schematic diagram of the use of the test sorter of the present invention (7). Fig. 1 1 : Schematic diagram of the use of the test sorter of the present invention (8). Fig. 1 2: Test tester of the present invention Use schematic diagram (9) [Main component symbol description] Part of the invention: 1 0 : Machine 2 0 : Feeding 匣 2 1 : Feeding tray 3 0 : First receiving 匣 31 : Receiving tray 〇 4 0 : air 5 0 : second receiving 匣 6 0 : angular motion test device 61 : angle tester 6 1 1 · · base 6 1 2 : drive shaft 6 1 3 : swing arm 614: carrier 615: test seat 616: test plate 617: lower pressing member 6 2 : angle testing machine 6 3 : moving mechanism 6 3 1 · suction nozzle 70: conveying device 〇 71: first take-out mechanism 711: first pick-and-place device 7 2 : carrying mechanism 7 21 : feeding stage 7 2 2 : discharging stage 7 3 : second pick-and-place mechanism 7 31 : second pick-and-place unit 8 0 : preheating tray 81 : tray conveying mechanism

9 0 :微感測IC 10 0 :微感測IC 110:微感測IC 99 0 : Micro-sensing IC 10 0 : Micro-sensing IC 110: Micro-sensing IC 9

Claims (1)

201037312 七、申請專利範圍: 1 ·一種微感測Ic測試分類機,其包含: 機台; 供料匣:係設於機台上’並以供料盤承置待測之微感測丨C ; 收料匣.係設於機台上,並以收料盤承置完測之微感測】C ; 角度運動測試裝置:係設於機台上,並設有具測試座之角度 測試機,用以測試微感測i C ; 輸送裝置:係設於機台上,可移動於供、收料匣及角度運動 測試裝置間’以載送供料匣上之待測微感測IC及 0 角度運動測試裝置内之完測微感測IC; 中央控制單元:係用以控制及整合各裝置作動,以執行自動 化作業。 2·依申請專利範圍第1項所述之微感測IC測試分類機,其中, 該供料Ε係以疊放的方式供承置數盤之待測微感測IC,並 於供料時可將供料盤移送至供料區。 3.依申請專利範圍第1項所述之微感測Ic測試分類機’其中, 該收料匣係具有第一收料匣及第二收料匣,用以承置不同測 試結果之完測微感測I C。 Q 4·依f請專利範圍第3項所述之微感測IC測試分類機’其中, 該第一收料匣係可疊放收置由收料區移入之收料盤。 5·依申請專利範圍第1項所述之微感測I ◦測試分類機,其中, ,角度運動測試裝置係設有可位移取放微感測IC至角度測 試機之移料機構。 6 申請專利範圍第1項所述之微感測I C測試分類機,其中, f角度運動測試裝置之角度測試機係設有可作角度旋轉之承 架’並於該承架上承置具至少一個測試座之測試板,以對微感 測IC進行角度運動測試。 7·依申請專利範圍第6項所述之微感測IC測試分類機,其中, 該角度測試機之承架係可作二個方向的角度旋轉,以對微感測 201037312 ic進行二個方向的角度運動測試。 8·依申請專利範圍第7項所述之微感測I C測試分類機,其中, 該角度測試機係以機座架置傳動轴,於該傳動軸上連結有、擺臂 ,而由機座内之第一驅動源帶動傳動軸上之擺臂作第一方向 的角度旋轉,再於擺臂上裝設一可由第二驅動源帶動作第二 方向角度旋轉之承架。 一 9 ·依申請專利範圍第6項所述之微感測I c測試分類機,其中, 該測試板上之測試座係為常開型測試座。 八201037312 VII. Patent application scope: 1 · A micro-sensing Ic test classification machine, which includes: machine table; feeding material: it is set on the machine table and the micro-sense measurement to be tested is carried out by the feeding tray ; receiving 匣. is set on the machine, and is based on the receiving tray to measure the micro-sensing] C; angle motion testing device: is set on the machine, and has a tester with angle tester For testing micro-sensing i C; conveying device: it is set on the machine platform and can be moved between the supply, receiving and angle motion testing devices to carry the micro-sensing IC to be tested on the feeding device and 0 Complete micro-sensing IC in the angle motion test device; Central control unit: used to control and integrate the operation of each device to perform automated work. 2. The micro-sensing IC test sorting machine according to item 1 of the patent application scope, wherein the feeding cassette is used for stacking a plurality of micro-sensing ICs to be tested, and when feeding The feed tray can be transferred to the feed area. 3. The micro-sensing Ic test sorter according to item 1 of the patent application scope, wherein the receiving machine has a first receiving hopper and a second receiving hopper for carrying out the test of different test results. Micro-sensing IC. Q 4: According to the micro-sensing IC test sorting machine described in item 3 of the patent scope, wherein the first receiving cassette can stack and receive the receiving tray moved in from the receiving area. 5. The micro-sensing I ◦ test sorting machine according to item 1 of the patent application scope, wherein the angle motion testing device is provided with a shifting mechanism for shifting the micro-sensing IC to the angle measuring machine. 6 The micro-sensing IC test sorting machine according to the first aspect of the patent application, wherein the angle tester of the f-angle motion test device is provided with a frame that can be rotated angularly and mounted on the frame at least A test bench for the test bench to perform angular motion testing on the micro-sensing IC. 7. The micro-sensing IC test sorting machine according to item 6 of the patent application scope, wherein the frame of the angle tester can be rotated in two directions to perform two directions on the micro-sensing 201037312 ic Angle motion test. 8. The micro-sensing IC test sorting machine according to item 7 of the patent application scope, wherein the angle test machine mounts a drive shaft with a machine base, and the swing arm is connected to the drive shaft, and the base is connected The first driving source drives the swing arm on the drive shaft to rotate in a first direction, and then mounts a swing arm on the swing arm in a second direction. A micro-sensing I c test sorting machine according to item 6 of the patent application scope, wherein the test seat on the test board is a normally open test stand. Eight 10 ·依申請專利範圍第9項所述之微感測I c測試分類機,其 中,該測試板上為常開型測試座,而於承架上另設有一 移動下壓微感測IC之下壓件。 1 1 ·依申請專利範圍第6項所述之微感測I C測試分類機,其 中,該測試板上之測試座係為常閉型測試座。 12.依申請專利範圍第11項所述之微感測Ic測試分類機, 其中,該測試板上為常閉型測試座,而於承架上另設有一 可移動下壓開啟常閉型測試座之下壓件。 13 ·依申請專利範圍第1項所述之微感測I C測試分類機,其 中’該輸送裝置包括有第一取放料機構、载送機 丄 取放料機構。 一 14 ·依申請專利範圍第i 3項所述之微感測丨測 其中,該第-取放料機構係設有可作X —移 巧數支第-取放器,而可於供料盤上取出待測之微感測 I C,並將待測之微感測! c移載至載送機構。 1 5 _依中請專利顧第χ 3項所述之微感測丨c測試分 其中,該載送機構係設有入料載台及出料載台,該入 台係載送待測之微感測I C至角度測試機,而^料 角度測試機载出完測之微感測I c。 口、 16·依申請專利範圍f13項所述之微感測!〇測試分類 其中,該第二取放料機構係設有可作χ_γ—ζ軸向位移 11 201037312 之複數支第二取放器,而可於載送機構上取出完測之微感測 Ic,並移載至收料盤上。 17 ·依申請專利範圍第1項所述之微感測j c測試分類機,更 包含於該機台上設有預熱盤,以預熱待測之微感測〗c。 18 .依申凊專利範圍第1項所述之微感測j匚測試分類機,更 包含於機台上設有設有空匣,用以收置空料盤,並依需要將 空料盤補充於各收料匣用以收料。 19 .依申s青專利範圍第1 §項所述之微感測I c測試分類機, 其中,該機台上設有料盤傳送機構,用可傳送移載空料盤 0 至空匣’或將空匣上之空料盤補充移載給第一收料匣所需之 空料盤。 2 0 .—種微感測Ic測試分類機,其包含: 機台; 供料匣:係設於機台上,並以供料盤承置待測之微感測 1C; 收料匣:係設於機台上,並以收料盤承置完測之微感測 1C; 角度運動測試裝置:係設於機台上,並設有具測試座之角 Q 度測試機’該角度測試機係以具有第一驅動源之 機座架置傳動軸,於該傳動軸上連結有可作第一 方向角度旋轉之擺臂’再於擺臂上裝設一可由第 二驅動源帶動作第一方向角度旋轉之承架,並於 該承架上承置具有至少一個測試座之測試板,以 使微感測I c進行一個方向的角度運動測試; 輸送裝置:係設於機台上,可移動於供、收料匣及角度運 動測試裝置間,以载送供料匣上之待測微感測 IC及角度運動測試裝置内之完測微感測Ic; 中央控制單元:係用以控制及整合各裴置作動,以執行自 動化作業。 12 201037312 1 ·依申請專利範圍第2 0項所述之微感測IC測試分類機, 其·中’該供料匣係以疊放的方式供承置數盤之待測微感測 2p 1 C ’並於供料時可將供料盤移送至供料區。 •依申請專利範圍第2 0項所述之微感測I C測試分類機, 其中’該收料匣係具有第一收料匣及第二收料匣,用以承 2 3置不同測試結果之完測微感測IC。10: The micro-sensing I c test sorting machine according to claim 9 of the patent application scope, wherein the test board is a normally open test seat, and a movable down micro-sensing IC is further disposed on the rack. Lower pressing piece. 1 1 The micro-sensing I C test sorting machine according to item 6 of the patent application scope, wherein the test seat on the test board is a normally closed test stand. 12. The micro-sensing Ic test sorting machine according to item 11 of the patent application scope, wherein the test board is a normally closed test seat, and the movable frame is further provided with a movable lower pressing open normally closed type test. Pressing under the seat. 13. The micro-sensing I C test sorting machine according to claim 1, wherein the conveying device comprises a first pick-and-place mechanism, a carrier pick-and-place mechanism. A 14 · According to the micro-sensing test described in item i 3 of the patent application scope, the first-take-and-discharge mechanism is provided with an X-shifting number-pick-up device, which can be supplied Take out the micro-sensing IC to be tested on the disk and measure the micro-sensing to be tested! c Transfer to the carrier. 1 5 _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ The micro-sensing IC to the angle tester, and the material angle tester carries out the measured micro-sensing I c. Mouth, 16· According to the micro-sensing described in the patent scope f13! 〇 test classification, wherein the second pick-and-place mechanism is provided with a plurality of second pick-and-place devices that can be used as χγ-ζ axial displacement 11 201037312, and the measured micro-sensing Ic can be taken out on the carrying mechanism. And transfer to the receiving tray. 17 · The micro-sensing j c test sorting machine according to item 1 of the patent application scope is further included on the machine table and provided with a preheating tray to preheat the micro-sensing to be tested. 18. The micro-sensing j匚 test sorting machine according to item 1 of the patent scope of the application, further comprising an open space on the machine for receiving the empty tray and emptying the tray as needed It is added to each receipt to receive the goods. 19. The micro-sensing I c test sorting machine according to item 1 § of the patent application scope, wherein the machine is provided with a tray conveying mechanism for transporting the empty tray 0 to the space 'or The empty tray on the empty tray is replenished to the empty tray required for the first receiving magazine. 20 0. - Micro-sensing Ic test sorting machine, which comprises: machine; feeding 匣: is set on the machine, and the micro-sense to be tested is taken by the feeding tray 1C; It is set on the machine and is equipped with the micro-sense 1C measured by the receiving tray. The angle motion testing device is set on the machine and has a corner tester with a test stand. The drive shaft having the first drive source is mounted, and the swing arm coupled to the first direction is coupled to the drive shaft, and the second drive source is firstly mounted on the swing arm. a bearing frame rotated in a direction angle, and a test board having at least one test seat is mounted on the frame, so that the micro-sensing I c performs an angular motion test in one direction; the conveying device is disposed on the machine table, Moving between the supply, receiving and angle motion testing devices to carry the micro-sensing IC and the end-measuring micro-sensing Ic on the feeding device; the central control unit is used to control And integrate the various actions to perform automated operations. 12 201037312 1 · The micro-sensing IC test sorting machine according to item 20 of the patent application scope, in which the 'feeding rafts are stacked for the micro-sensing to be tested 2p 1 C 'and feed the feed tray to the feed area when feeding. • The micro-sensing IC test sorting machine according to item 20 of the patent application scope, wherein 'the receiving machine has a first receiving quantity and a second receiving quantity for carrying different test results. Complete the micro-sensing IC. •依申請專利範圍第2 2項所述之微感測IC測試分類機, 2 .其中’該第一收料匣係可疊放收置由收料區移入之收料盤。 •依申請專利範圍第2 0項所述之微感測I C測試分類機, 其中’該角度運動測試裝置係設有可位移取放微感測I C 2 至角度測試機之移料機構。 依申睛專利範圍第2 0項所述之微感測I C測試分類機, 2 其中’該測試板上之測試座係為常開型測試座。 依申凊專利範圍第2 5項所述之微感測I c測試分類機, 其中,該測試板上為常開型測試座,而於承架上另設有一 2 可移動下壓微感測Ic之下壓件。 7 ·依申請專利範圍第2 0項所述之微感測I (:測試分類機, 2 其中,該測試板上之測試座係為常閉型測試座。 •依申請專利範圍第2 7項所述之微感測I C職分類機, 其中,該測試板上為常閉型測試座,而於承架上另設有一 2 可移動下壓開啟常閉型測試座之下壓件。 9 ·依申請專利範圍第2 0項所述之微感測I c測試分類機, 其中,該輸送裝置包括有第一取放料機構、載送機構及第 二取放料機構。 3 〇.^請專利範圍第2 9項所述之微感測1。測試分類機, 其中,該第一取放料機構係設有可作χ〜γ — ζ軸向位移 =數支第-取放器,而可於供料盤上取出制之微感測 3 1 C,並將待測之微感測I C移載至載送機構。 •依申請專利範圍第2 9項所述之微感測IC測試分類機, 13 201037312 其中j該载送機構係設有入料載台及出料載台,該入料載 台係載送待測之微感測I c至角度測試機,而出料載台則自 角度測試機載出完測之微感测I C。 3 2 .依申請專利範圍第2 Θ項所述之微感測I c測試分類機, 其中,該第二取放料機構係設有可作χ_γ__ζ轴向位移 之複數支第二取放器,而可於载送機構上取出完測之微感測 I C ’並移載至收料盤上。 3 3 ·依申請專利範圍第2 0項所述之微感測I c測試分類機, 更包含於該機台上設有預熱盤,以預熱待測之微感測I C。 〇 3 4 .依申請專利範圍第2 〇項所述之微感測T C測試分類機, 更包含於機台上設有設有空匣,用以收置空料盤,並依需要 將空料盤補充於各收料匣用以收料。 3 5 .依申凊專利範圍第3 4項所述之微感測I ς測試分類機, 其中,該機台上設有料盤傳送機構,用可傳送移載空料盤 至空匣,或將空匣上之空料盤補充移載給第一收料匣所 空料盤。• The micro-sensing IC test sorting machine according to item 22 of the patent application scope, wherein the first receiving hopper can stack and receive the receiving tray moved from the receiving area. • The micro-sensing I C test sorting machine according to item 20 of the patent application scope, wherein the angle motion test device is provided with a shifting mechanism for the displacement pick-and-place micro-sensing I C 2 to the angle tester. The micro-sensing I C test sorting machine according to item 20 of the scope of the patent application, 2 wherein the test stand on the test board is a normally open test stand. The micro-sensing I c test sorting machine according to item 25 of the patent application scope, wherein the test board is a normally open test seat, and a movable movable micro-sensing is further provided on the support frame. Press under Ic. 7 · Micro-sensing I according to item 20 of the patent application scope (: test sorting machine, 2 where the test seat on the test board is a normally closed test seat. • According to the patent application scope item 27 The micro-sensing IC job classification machine, wherein the test board is a normally closed type test seat, and the frame is further provided with a movable movable lower pressing type to open the normally closed type test seat lower pressing part. The micro-sensing I c test sorting machine according to item 20 of the patent application scope, wherein the conveying device comprises a first pick-and-place mechanism, a carrying mechanism and a second pick-and-place mechanism. 3 〇. The micro-sensing according to the scope of claim 29, the test sorting machine, wherein the first pick-and-place mechanism is provided with a χ~γ-ζ axial displacement=several-first pick-and-placer, and The micro-sensing 3 1 C can be taken out on the feeding tray, and the micro-sensing IC to be tested is transferred to the carrying mechanism. • The micro-sensing IC test classification according to item 29 of the patent application scope Machine, 13 201037312 wherein the carrier mechanism is provided with a loading stage and a discharge stage, which carries the micro-sensing I c to the angle to be tested The test machine, and the discharge stage carries the measured micro-sensing IC from the angle tester. 3 2. The micro-sensing I c test sorting machine according to the second paragraph of the patent application scope, wherein the The second pick-and-drop mechanism is provided with a plurality of second pick-and-place devices that can be used as the axial displacement of χγ__ζ, and the micro-sensing IC ' can be taken out on the carrying mechanism and transferred to the receiving tray. 3 3 · According to the micro-sensing I c test classification machine described in item 20 of the patent application scope, a preheating plate is arranged on the machine to preheat the micro-sensing IC to be tested. 〇3 4 . The micro-sensing TC test sorting machine described in the second paragraph of the patent application scope is further provided with an empty space on the machine for collecting empty trays, and adding empty trays to each collection as needed. The material is used for receiving materials. 3 5. The micro-sensing I ς test sorting machine according to item 34 of the patent application scope, wherein the machine table is provided with a tray conveying mechanism for conveying the moving empty material The disk is empty, or the empty tray on the empty tray is reloaded to the empty tray of the first receiving container.
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