TW201022481A - Shield plate and electroplating apparatus - Google Patents

Shield plate and electroplating apparatus Download PDF

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Publication number
TW201022481A
TW201022481A TW098116445A TW98116445A TW201022481A TW 201022481 A TW201022481 A TW 201022481A TW 098116445 A TW098116445 A TW 098116445A TW 98116445 A TW98116445 A TW 98116445A TW 201022481 A TW201022481 A TW 201022481A
Authority
TW
Taiwan
Prior art keywords
anode
plate
plating
substrate
electrolytic
Prior art date
Application number
TW098116445A
Other languages
English (en)
Chinese (zh)
Inventor
Dal-Hyun Yoo
Chang-Hwan Choi
Hee-Soo Yoon
Chang-Hwan Park
Yunn-Hong Choi
Original Assignee
Samsung Electro Mech
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Samsung Electro Mech filed Critical Samsung Electro Mech
Publication of TW201022481A publication Critical patent/TW201022481A/zh

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Classifications

    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/02Electroplating of selected surface areas
    • C25D5/022Electroplating of selected surface areas using masking means
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D17/00Constructional parts, or assemblies thereof, of cells for electrolytic coating
    • C25D17/10Electrodes, e.g. composition, counter electrode
    • C25D17/12Shape or form
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/10Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
    • H05K3/18Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material
    • H05K3/188Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material by direct electroplating

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Electroplating Methods And Accessories (AREA)
  • Manufacturing Of Printed Wiring (AREA)
TW098116445A 2008-12-15 2009-05-18 Shield plate and electroplating apparatus TW201022481A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020080127194A KR20100068737A (ko) 2008-12-15 2008-12-15 차폐판 및 전해도금장치

Publications (1)

Publication Number Publication Date
TW201022481A true TW201022481A (en) 2010-06-16

Family

ID=42348852

Family Applications (1)

Application Number Title Priority Date Filing Date
TW098116445A TW201022481A (en) 2008-12-15 2009-05-18 Shield plate and electroplating apparatus

Country Status (3)

Country Link
JP (1) JP2010138483A (ja)
KR (1) KR20100068737A (ja)
TW (1) TW201022481A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112504327A (zh) * 2020-11-23 2021-03-16 中国电子科技集团公司第十八研究所 一种观测电解液流动轨迹的装置

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011096628A (ja) 2009-09-30 2011-05-12 Hirose Electric Co Ltd 電気コネクタ
CN102477576A (zh) * 2010-11-30 2012-05-30 加贺开发科技有限公司 电镀装置及其电镀槽中的电极板结构
KR20130045081A (ko) * 2011-10-25 2013-05-03 삼성전기주식회사 전기도금 장치
KR102194716B1 (ko) * 2014-03-06 2020-12-23 삼성전기주식회사 도금 장치
KR101603503B1 (ko) * 2015-03-09 2016-03-15 김종학 롤투롤 공정의 인쇄회로기판 수직 도금에서 플러드 박스를 이용한 도금 장치
KR102036966B1 (ko) * 2016-09-26 2019-10-25 노바테크인더스트리 주식회사 금속 메쉬의 미세 선폭 도금용 진공 및 차폐 척
CN108004575B (zh) * 2017-12-29 2024-04-16 上海新阳半导体材料股份有限公司 电镀用屏蔽装置
JP7070012B2 (ja) * 2018-04-17 2022-05-18 住友金属鉱山株式会社 電解めっき装置、および金属張積層板の製造方法
CN110344102A (zh) * 2019-08-14 2019-10-18 重庆方正高密电子有限公司 陪镀板以及电镀线
CN117552071B (zh) * 2024-01-11 2024-03-29 宁波惠金理化电子有限公司 一种五金电镀设备及其使用方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000256891A (ja) * 1999-03-04 2000-09-19 Oki Electric Ind Co Ltd 電解めっき方法および陽極構造体
JP2002054000A (ja) * 2000-08-02 2002-02-19 Nitto Denko Corp 基板の電解めっき方法
JP3352081B2 (ja) * 2001-02-01 2002-12-03 株式会社アスカエンジニアリング プリント基板の銅めっき装置
JP2002302799A (ja) * 2001-04-05 2002-10-18 Sumitomo Metal Mining Co Ltd 電気めっき方法および電気めっき方法で用いる遮へい板

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112504327A (zh) * 2020-11-23 2021-03-16 中国电子科技集团公司第十八研究所 一种观测电解液流动轨迹的装置

Also Published As

Publication number Publication date
KR20100068737A (ko) 2010-06-24
JP2010138483A (ja) 2010-06-24

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