TW201012556A - Apparatus and method for measuring relative poisition of discharge opening of nozzle and optical spot of laser displacement sensor of paste dispenser and paste dispenser having the same - Google Patents

Abstract

Disclosed herein is an apparatus and method capable of rapidly and precisely measuring a relative position between a discharge hole of a nozzle and an optical spot of laser light by capturing the optical spot of laser light emitted from a laser displacement sensor and the position of the nozzle using an image capturing unit.

Description

201012556 VI. Description of the Invention: [Technical Field] The present invention relates to an apparatus and method for the relative position between a discharge orifice of a nozzle of a measuring head unit and a spot of a laser displacement sensor. [Prior Art] ^ In general, flat panel displays (FPDs) are video displays that are thinner than conventional TV or monitors that use cathode ray tubes. Examples of flat panel displays that have been developed are liquid crystal displays (LCDs), plasma display (pDPs), field emission displays (FEDs), and organic light emitting diodes (〇LEDs). In many flat panel displays, the liquid crystal display is a display based on image information = supply data signals to the liquid crystal cells of the matrix configuration, thus controlling the transmittance of the liquid cells to display the desired image. Since liquid crystal displays have advantages such as being thin, light, and low in power consumption and operating voltage, liquid crystal displays are widely used. A method of manufacturing a liquid crystal panel for a liquid crystal display is generally described below.

$ ^First' shirt color slab and common electrode are formed on the upper glass substrate, and the smashing body (TFT) and the pixel electrode are formed on the lower molecular tilt angle and the alignment side of the i glass substrate. On the board. Next, the alignment film is coated on the substrate, and the alignment film rubs to provide a liquid phase which is centered in the liquid crystal layer between the alignment films. In order to maintain a predetermined gap between the substrates to avoid liquid crystal vapor leakage, the gap between the plates of Fig. 1 is coated with a predetermined form of glue on the substrate to form a liquid crystal layer between the substrates. In this way, the 201012556 liquid crystal panel was manufactured in the manufacture of the liquid crystal panel, and the dispenser was used to form the rubber pattern in the dead: the point machine included, the platform of the substrate, the nozzle with the discharge glue = 7G early, and the support The first 70 years of failure. The transfer can have a complex number of 2 yuan 'simultaneously forming a plurality of glues _ on a large area of the substrate to increase the production of m 点 m such a gelatin age change each spray amount of the base of the position of the rubber from the nozzle to form a glue pattern on the substrate on. That is, the nozzle pattern and/or the wire plate are moved in the γ γ-axis direction and the (4) nozzle (4) 3 substrate by the upper and lower Ξ t, thereby forming a glue pattern. In order to change the gap between the nozzle and the substrate when forming the glue case, the laser displacement is installed in each head unit. Laser position reducer = between the nozzle and the base field (4), the gap between the substrate and the substrate is determined by the material of the dispenser. That is, when the nozzle and the substrate are at least in the X-axis direction or the γ-axis direction and the glue pattern is formed, the gap is changed due to the uneven substrate surface or other defects, the width 'height' or other size of the substrate. May deviate from the preset range 23 f case. In order to avoid this problem, the dispenser is equipped with a mine: (4): The nozzle of the second device is installed in the head unit' and the sense of laser displacement is also suppressed by the sigh. Therefore, the initial installation or replacement of the device/shot When the device and the laser displacement sense _ the situation, the nozzle and the laser displacement sense of crying = 201012556 The actual position may cause the lack of _ glue _?, his size may deviate from the preset range, and the error, so There is a big machine control between the silk secret/4 inter-position position and the preset position. ======When Wei Da (four) is poor, the transformation of the meta-shaped 3 figure ΐί and the device is installed to each head unit. Ground measurement of the nozzle of each head unit and the lightning ==:= position need to be set: (4) or the replacement of the laser displacement sensor and the injection of the nozzle with the nozzle can be offset from the substrate on the substrate = ί = in the alignment film formed on the substrate. In this case, η丄 interference can be measured and measured incorrectly. ® This requires positioning all Ζί 嘴 (4) ί laser displacement sensors, and by accurately measuring each Head single = rabbit, read the relative position between the displacement sensors, so that the measurement does not send ^ wrong crying = for 1 ^ operation element, the naked eye observation nozzle and laser Shift sensing: red m ^. Therefore, when the #transfer is equipped with a plurality of head units, it is necessary to measure the position of the nozzle and the laser displacement sensor by measuring =:: and 201012556 [invention] Occurrence (four) know the problem, one of the invention -% Ϊ early 70 mouth discharge hole and laser displacement hole and laser displacement nozzle

The purpose of the present invention is to provide a nozzle for the measuring head unit, a nozzle for the relative position of the discharge aperture of the laser displacement sensor, and a variable component placed to face the nozzle and the laser. Displacement;; 22, early, 70, and into the first state - which can transmit the nozzle of the can / Gan and laser displacement of the laser or transform into a second shape =, laser light is reflected and formed an image And the image capturing unit is placed at a position facing the variable transmittance member of the head unit, and the capture spray === miscellaneous "and the lightning transmissivity variable member cut into an image in the Wei village variable member may comprise polymer dispersed liquid crystal A (PDLC) device, or comprising a pair of glass layers and a polymer dispersing device interposed between the pair of glass layers, or comprising glass and a polymer dispersing device attached to the glass through the adhesive film. The device may further comprise a support member having an opening facing the head unit and supporting the image capturing unit; and the plate member is slidably secured to the support member and having an opening communicating with the opening of the support member, and the support transmittance Variable components. 6 201012556 Furthermore, the 'shadowing unit can include subtraction, (4) her nozzle: the light of the laser light that forms the image on the variable member, the second is mounted adjacent to the camera and emits light; and the capture bit t is used to move the camera and At least one of the upward and downward directions, the forward and backward directions, and the right and left directions. The device may further comprise a power supply unit, and the power supply to the transmission rate is variable. In order to achieve the above object, the present invention provides a relative position between the discharge hole of the nozzle and the spot of the laser displacement sensor. a device for locating the discharge hole of the nozzle of the unit and the LY point of the laser displacement sensor, wherein the variable transmittance member is placed between the nozzle of the unit or the laser displacement sensor and the camera, and = state, which can transmit the shape of the discharge orifice of the nozzle and the laser light, or into a first state in which the laser light is reflected and forms an image. The method comprises: positioning=mouth and f-displacement sensing H, such that the adjacent transmissive village-changing member discharges the gap between the Koss and the nozzle in about 2 orders; by supplying power to the transmissive variable member or Jingqi a power source for capturing a discharge hole of the nozzle and capturing a spot of the laser light emitted from the laser displacement sensor and forming an image on the variable transmittance member; and measuring the nozzle row and the laser displacement sensing The location of the device. The port capturing the discharge hole and the light spot may include: supplying a power source to the transmittance variable structure 4' and capturing the discharge hole of the nozzle; and cutting off the power supply to the variable transmittance member S and capturing the variable transmittance member The laser that forms the image = the spot of light. Further, capturing the discharge hole and the light spot may include capturing a spot of the laser light that forms the image of the 201012556 image by the variable transmittance member 2 in a state where the power supply of the variable transmittance member is cut; and supplying The power is supplied to the variable transmittance member and the discharge hole of the nozzle is captured. w

Furthermore, in order to achieve the above object, the present invention provides a method for measuring the relative position between the discharge opening of the nozzle of the measuring head unit and the spot of the laser displacement sensor. a device for the relative position between the light spot of the laser displacement sensor, comprising a variable transmittance member placed between the nozzle of the head unit or the laser displacement sensor and the image capturing unit, and converted into the first state Wherein the shape of the discharge aperture of the nozzle and the laser light can be transmitted, or converted to a second state where the laser light is reflected and forms an image. The method comprises: positioning the nozzle and the laser displacement sensor adjacent to the variable transmittance member, ▲ preferably contacting the nozzle with the variable transmittance member but not applying pressure to the variable transmittance member; Release the pressure to the variable transmittance member to capture the discharge hole of the nozzle, and capture the spot of the laser light emitted from the laser displacement sensor and form an image on the variable transmittance member; and the discharge hole of the nozzle The position of the spot with the laser displacement sensor. Capturing the discharge aperture and the light spot may include: capturing a light spot of the laser light, which is emitted from the laser displacement sensor and forming an image on the variable transmittance member; and moving the nozzle to the variable transmittance member to apply The force to the transmittance is variable and the ejection orifice of the mouth is captured. Furthermore, capturing the discharge hole and the light spot may include: moving the nozzle to the variable transmittance member to apply pressure to the transmittance variable configuration and capturing the nozzle H of the nozzle and moving the nozzle to make the transmittance and the transmittance = 冓The pieces are separated by 'and thus rotated from the transmission lining (4), and the laser is captured. The spot is emitted from the laser switch 11 and the axis image is transmitted. In order to achieve the above object, the present invention provides a measuring head. Unit 201012556=The relative position of the nozzle hole and the stop of the #射 displacement sensing 11 is the same as the i Li Li early H free early 兀 'Supply with nozzle and laser displacement two t machine 置 set to face mouth and laser The displacement sensor, the door and the foot 'is provided in the state of the cymbal or laser (10) and the camera, wherein the shape of the discharge hole of the transportable nozzle is like: $胄 into the second state', the towel laser light is reflected and formed The variable component may comprise a polymer dispersed liquid crystal (PDLC) device. The luminosity variable member may comprise a pair of glass layers, and a polymer knife dispensing device is interposed between the pair of glazing layers. The device may further comprise a power supply unit, a component, a material-variable device, and the device may further comprise a driving unit, provided by the variable-rate variable member moving nozzle, so that the nozzle applies a pressure-transmitting variable member, and The variable transmittance member is converted into the first state. In the method and method for inventing the relative position between the discharge hole of the quantity_unit material and the laser displacement feeling f spot, the -th transmittance = the component is mounted on the tilt or laser displacement ❹jlf and the camera S, the first Second, measuring the spot of the variable transmittance component (where the laser spot X, the laser is imaged on the transmissive spacer member) = the position of the nozzle discharge hole = thus improving the accuracy of the position measurement and reducing According to the present invention, in the apparatus and method for the relative position between the nozzle of the #_ unit nozzle and the laser 201012556: the sensor to the light spot, the light point ί method and the use of the camera are utilized. The nozzle and the laser displacement are changed by measuring the relative position between the discharge hole of the nozzle and the spot of the lightning finder by changing the transmittance to the position of the position or the second state. And the variable transmittance member is fixed and not captured after the measurement is performed: and is separated from each other by Φ. ???Being based on the measurement position of the side spot, the head of the laser displacement sensor can be used Quasi-column. In the plural, the relative position measuring device is measured according to the preferred embodiment of the present invention; and the Litou Lidan + 'very preferred embodiment of the present invention The relative position between the discharge hole and the laser displacement sensing 11 is relative to the relative position of the dispensing machine and the position of the displacement of the displacement point. (4) Hole and laser = to the embodiment of the invention = platform 2 as shown in FIG. , a pair of support moves _3〇

Cl :==60. The platform 20 is mounted on the frame; the platform ==匕 is supported by the support moving guide 30, and the two j's are in the X-axis direction. Each head unit 50 is extended to 1 (four) direction at 4 turns, and is called "moved" to move to the device 54. The relative position measuring device 60 measures the displacement sense of the nozzle field; the discharge hole of the relative position between the light spots of the displacement sensing device 54 and the 詗201012556 平二ΖΧΐ20 χ χ χ χ 移 移 ; ;; The i, Y female HYiN moving unit 22 can be mounted on the frame 0. On the X axis, the Y axis guide 221 can be mounted on the frame 1 element 221. The X axis guide 211 of the early 1 can be mounted on the frame of the γ axis guide sample and the 2 is due to the X axis guide. On the thinner. Through this direction, and the W-lead = guide Φ is mounted on the frame ω at γ__ iZl 1〇. ΙυΙ The guide member 221 can be placed on the long-axis guide moving unit (four) X-axis guide 211, or / = „ Using the X-axis guide member work, only the moving platform 2 is moved to the second and the second and the Υ or Υ axis direction. In one direction, that is, the X-axis direction of the branch moving unit 41 can be installed as a branch _ The interaction between the guide = and the support = second is 41, and the longitudinal direction of the head support "moving guide 3", that is, the γ axis is moved to the branch, and the head can be moved by the head. Υ __ Move H This unit 5 〇 移动 mobile guide member 42 can be provided on the head support, toward. The head moving unit 51 can be mounted on each of the head units 2 and disposed at X, and the head 40 moves the guide 42. Because of the interaction between the head and the head: moving unit 5, each head unit 5 can be 3: _42 and the longitudinal direction of the head ,, that is, the χ axis direction. The kinesis support 201012556, as shown in the figure, each head unit 50 includes an injection of a filling glue, and a nozzle of the ejector 5 (4) and a scaly nozzle is disposed adjacent to the reading w to measure the gap between the nozzle 53 and the substrate S. The laser displacement sensor % of the gap data, the moving nozzle 53 and the laser displacement sensor 54 are driven by the γ-axis square mouth 53 and the laser displacement sensor 54 at the 疋 疋. The ❹α laser displacement sensor 54 includes a transmitting portion that emits light, and is spaced apart from the emission by a predetermined distance and is received from the substrate. ==== The sensor 54 outputs the electrical signal to the control == I/, J substrate S The gap between the mouth and the mouth 53 is such that the image of the laser beam emitted by the emitting portion (4) and reflected from the substrate s should be placed. The cross-sectional area sensor 57 can be mounted on each head unit.

The cross-sectional area of Jp. The cross-sectional area sensor 57 holds the cut =: broom pattern, thereby measuring the rubber figure Ρ Ρ = cross-sectional area. The rubber pattern measured by the cross-sectional area sensor 57 is used to determine whether the glue pattern PS is defective.积贝枓' received the = rib miscellaneous __, its joint rotation, witness (10) $ laser shift sensing 11 54, to control the nozzle 53 and Lei private, shift sense 54 in X, Y, And at least two of the lasers of the z-axis = the structure allows the position of the discharge opening 531 of the nozzle 53 to be automatically changed or the mounting position of the laser displacement sensor 54. Phantom reading = position device 6G detachable wire can be installed on the platform K as shown in Figure I), can be placed on the X-axis mobile unit 2 of the stand, 2 (see Figure 3), or Can be 201012556 = 5 to Figure 12, relative position measuring device

61. Transmissivity variable member 62, plate member 63, and image capture 3 cutting member control unit 7G. The floor member 61 has 64 and a unit 50. The transmittance variable member 62 is mounted adjacent to the support = counter head 62. F-pieces &

The spot of the laser and displacement sensor 54 is extracted. The control unit = the movement of the control head unit 50 toward the relative position measuring device (6), the C phase, the measurement of the movement of the measuring unit 6G toward the head unit 5Q, and also the nozzle laser displacement sensor 54, and the image capturing The operation of unit 64. As shown in FIG. 8, the transmittance variable member & may include a glass 621 and an LC device, which is attached to the glass 621 by an adhesive film 622. Further, as shown in FIG. 9, the transmittance variable member 62 may include a pair of transparent glass layers 624' and a PDLC device 623 interposed between the glass layers 624. Here, the PDLC shake 623 is a polymer-dispersed liquid crystal, and the frame structure is such that the liquid b is uniformly dispersed in the polymer matrix. When the power supply is supplied to the pDLC device at 623 B, the configuration of the liquid crystal changes to the same refractive index configuration as the polymer matrix under the influence of the electric field, and the conversion of the PDLC device into the first state enables the light including the shape of the object to be worn. through. At the same time, when the power is turned off, the second state is obtained, 201012556 where the light is reflected by I to form a spot. Further, although the power supply has been turned off, a first state can be obtained if a predetermined amount of pressure is applied to the p DL c device 623', in which the configuration of the liquid crystal is changed to pass light containing the object = shape. At the same time, if the pressure is released from the PDLC device 623, a second state is obtained, which is reflected and forms a spot. Next, the operation of the transmittance variable member 62 will be explained with reference to FIG. When the transmissive rate Z-changing member 62 becomes the first state, the laser light emitted from the emission f 541 of the laser displacement sensor 54 is not reflected by the incident-rate variable member 62, but penetrates the transmittance. The variable member 62 is such that the actual spot 545 is not transmitted through the liner member 62. Under the condition of recording, it is impossible to capture the laser point 545 ' but can capture 咕峨 π through the variable transmittance structure # 62 .

1'丨々/zr The position of the light spot 545 of the discharge hole 531 of the mouth of the state of the mouth of the state of the mouth of the mouth of the mouth of the mouth of the mouth of the mouth of the mouth of the mouth of the mouth of the nozzle The relative coordinate between the hole 531 and the light spot 545 of the laser displacement sensor 54 or the distance between the discharge hole 531 and the light spot 545. (4) Π, in order to convert the transmittance variable member 62 into the first shape The step of providing the power supply unit 75 is not limited to the above-described architecture including the PD 623 embodiment. The transmittance variable member 62 may include (4) units & Turning to the == or second state. In addition to this architecture, various structures can be applied to the conversion unit plate 63. The slide member 63 can be slidably placed on the reading member 63b and the s-shaped K plate slidably placed on the first plate 6 The two transmittance variable members 62 are mounted between 'and the support member Α. Α 2 =;: the guide member 635 is on the first plate correction (3), and the second plate milk can be slidably moved to adjust the first plate. The sliding movement of the plate 632 can be appropriately performed. At the same time, the sliding movement of the cup can be automatically or hand The movable member 62 can be directly attached to the above structure. That is, the transmittance can be directly applied to the opening 611 of the branch member 61 without being used; 201012556, item 63.

影像 The image capturing unit 64 includes a reflecting plate 641, a camera 642, an illuminator 643, and a capture position adjuster 644. The reflecting plate 641 is mounted adjacent to the opening 611 of the support member 61. Camera 642 captures the image reflected from reflector 641. The illuminator 643 emits light and is mounted adjacent to the opening 6ij of the support member 61 and the camera 642. The capture position adjuster 644 is fixed to the support member 61 to move the anti-f plate 641, the camera 642, and the illuminator 643 in at least one of an upward and downward direction, a forward and backward direction, and a rightward and leftward direction. . The reflecting plate 641 is configured to reflect the shape of the discharge hole 53A passing through the nozzle 53 of the transmittance variable member 62 toward the camera 642, and to form a spot (4) of the laser light of the image on the variable transmittance member 62. The camera 642 is used to capture the nozzles, the discharge holes 531 < the shape, and the spot 545 of the laser light. According to this embodiment, the image capturing unit 64 of the second measuring device (9) is equipped with a reflecting plate and a camera 642. However, the invention is not limited to this architecture. That is, the camera 642 can be directly mounted to the position of the opening 611 of the top member without using the reflecting plate 64 to capture the spot 545 of the light exiting from the discharge opening 53 of the nozzle 53. Samples and: Illumination 643 controls the camera 642 during operation. • Zhao Mingming - Adjuster 644 moves the reflector 641, camera 642, and illumination 643 to adjust in one of the up and down directions, forward and backward ST The shape of the discharge hole 531 of the reflection plate (4), the phase two = ί 鸯 53 is

At set. Such an architecture allows for the capture of the shape of the venting aperture 531 and the spot 545 of the laser light at the correct location. 201012556 Hereinafter, a relative position measurement method according to the present invention will be described, which is a device for utilizing the relative position between the discharge orifice of the nozzle of the probe unit and the spot of the laser displacement sensor. As described above, by supplying or cutting off the power source, the transmittance variable member 62 is converted into the shape of the discharge hole 531 capable of transporting the nozzle 53 and the first state of the laser light, or the discharge hole 531 of the transfer nozzle 53 is prevented from being transported. Shape and reflect the laser light to form the first state of the image. As a result, the transmittance variable member 62 is converted into the first state or the second state by two methods, that is, by supplying or cutting off the power source, or by applying or releasing pressure. Therefore, a method of capturing the discharge hole 53i of the nozzle 53 and the spot 5 of the laser light by supplying or cutting off the power source of the variable transmittance member 62 will be separately described (see FIG. 丨 and by applying or releasing transmission). The discharge member (10) of the pressure variable member 62 and the light spot 545 of the laser light

Cut off 531 to Hanzhou 545. First, the control unit 70 moves the head unit 5〇

The Z-axis drive of the head unit 50 201012556 unit 56' to move! The nozzle 53 of the unit 50 and the laser displacement sensor 54 maintain a predetermined gap between the nipple 53 or the laser displacement sensor 54 and the transmittance variable member 62. Here, when the nozzle 53 and the laser displacement sensor 54 are positioned adjacent to the transmittance variable member 62, the interval between the discharge hole 531 of the nozzle 53 and the transmittance variable member 62 is preferably set equal to the nozzle in the actual operation. The space between 53 and the substrate S. Further, the power supply unit 75 is operated, thereby supplying power to the transmittance variable member 62. When the power is supplied to the transmittance variable member 62, the transmittance variably member 62 is converted into the first state, and the laser light including the shape of the discharge hole 531 of the nozzle 53 can be transmitted. In this state, the nozzle 53 can be captured by the transmittance variable member. At this time, in step S120, the nozzle operation power supply unit 75 is captured by the camera 642 to cut off the source supplied to the transmittance variable member 62. When the power supply is turned off, the transmittance variable member & converts to the second state in which the shape of the discharge hole 53A of the nozzle 53 is not properly transmitted, and the laser light is reflected (10) into an image. In this state, when the laser position "54" is emitted, the laser light is emitted from the transmitting portion 541, and the emitted laser light is formed on the transmittance variable member 62. At this time, in step su, the laser light spot 545 of the laser light is captured by the camera 642. Here, the electric riding transmittance variable member 62 of the (four) member 62 is converted into the second state, and after the light spot 545 of the laser light is captured in step S13, the power supply to the variable transmittance member & The transmittance member 62 is converted into the first state, and the nozzle ^ can be captured in the step (10). As described above, when the nozzle 53 and the spot 545 of the laser light have been captured, the control unit 7q==the measurement nozzle imaginary discharge hole 531 and the mode shown in 201012556=12, when the discharge hole 531 of the nozzle 53 is completed. And when it is determined that the position value of the measurement is not within the range of the valley value, the step of changing the mounting position of the sensor 54 can be performed. Here, can be: each = application relative position control architecture, which is connected to the detector 54 to protect the 哙嵴rt system A only using w A field displacement sense A z 54 ^ x ' γ' ^ universal relative position. Therefore, the control unit 7 〇 automatically changes the position of the money of the detector 54 of the discharge port 531 of the nozzle 53. The sense of displacement will be described in reference to the second method. According to this method, when the pressure of the transmittance variable member 62 is pressed, the discharge hole 531 of the (four) nozzle 53 and the light spot 545 of the laser light are caught. That is, with the characteristics of the PDLC shock 623, the method measures the relative position between the discharge opening 531 of the nozzle 53 and the spot 545 of the laser displacement sensing (4). According to the characteristics of the PDLC device 623, although the power source has been turned off, if the power is applied to the transmittance variable member 62 at a predetermined pressure, the arrangement of the liquid crystal is changed, and the PDLC device 623 is converted into an allowable transport package; a state. Meanwhile, when the pressure is released from the PDLC device 23, the PDLC device 623 transits to the second state in which light is reflected and forms a light spot. First, as described above, the control unit 70 moves at least one of the head unit 5'' and the relative position measuring means 60' to cause the nozzle 53 and the laser shift sensor 54 to be adjacent to the transmittance variable member 62. Further, when the head unit 5 and the relative position measuring device 60 are positioned adjacent to each other, in step S210, the Z-axis driving unit of the unit 19 201012556 unit 50 is allowed to move the core of the measuring device 5 to have a variable transmittance. The member 62 maintains the predetermined sensation as a non-radiation variable contact transmittance variable member. However, when the laser displacement sensor 操作 is operated, the ray 541 is emitted, and the emitted laser light is shaped on the σ. At this time, in step S220, the camera/(10): rate variable member 62 545 〇 捕捉 captures the two-axis drive unit %, 3 of the spot operation unit unit 50 of the laser light with the camera 642, and can transmit the nozzle 53 The discharge port ΐί ^ can capture the nozzle 53 through the transmittance variable member 62. At this time, in step S230, the nozzle 53 is captured by the camera 642. ❹ In the step S230, the pressure is changed to the first state by the compression transmittance = "2", and the nozzle is captured so that the transmittance variable member 62 is not pressed, that is, the shape of the hole 531 is not discharged and the laser light is emitted. The light-reflecting point 545 is captured by the younger brother who is reflected and formed into an image. As described above, when the nozzle 53 and the spot 545 of the laser light have been captured, as shown in FIG. 12, based on the captured nozzle 53 The image data is measured in the step, the relative position between the discharge hole 531 of the nozzle 53 and the light spot 545 of the laser light. In this way, when the position of the discharge hole of the nozzle 53 and the spot 545 of the laser light is completed, it is judged. Whether the quantity_position value falls within the preset range 20 201012556. When the position value* of the 'numeric quantitative measurement> falls within the preset range, the installation of the k-beep 53 or the laser displacement sensor % can be performed. The step of position. Here, a relative position control architecture can be applied to each head unit 5G, which is connected to the nozzle 53 or the laser displacement sensor 54 to control the nozzle Μ and the laser displacement sensor 54 at X, γ, And the relative position of the Z axis at least in the _ direction. Therefore, the control The element 70 can automatically change the mounting position of the discharge hole 531 of the nozzle 53 or the mounting position of the laser displacement sensor 54. Referring to the 'discharge hole 531 of the nozzle 53 of the measuring head unit 5 according to the embodiment of the present invention. The relative position between the light spot 545 of the laser displacement sensor 54 is set to 6G, and the transmittance of the surface member 62 can be regarded as the first state or 'and__ 642 capture nozzle 53 and the spot light of the laser light M5. The method of measuring the relative position between the discharge hole 531 of the nozzle 53 and the laser displacement sensor % ^ spot 545 ' thus clearly positions the nozzle 53 and the laser two, 545 ^ distance ' and then captures the nozzle 53 And the light spot (4), and the shoulder position increases the accuracy of the position measurement. The relative position measuring device 6 according to the embodiment of the present invention is detachable and installed in the dispenser. Therefore, the device (9) can be When necessary, for example, when using It, after the substrate s has been transferred from the dispenser, after the time of the dispenser 2, after the replacement of the sister (four), or the face of the work f4: 53 531 54 For the position, it can be determined that the nozzle 53 or the laser displacement sensor 54 = No female surplus meets the design conditions, because of the difference After the operation of the machine, the apparatus for separately arranging the discharge holes of the single nozzle of the probe and the laser displacement sensing 21 201012556 according to the present invention will be described with reference to FIGS. 5 to 17. The first embodiment and the second The components common to the embodiments use the same reference numerals and will not be described in detail. As shown in FIGS. 15 to 17, the discharge holes of the nozzles of the measuring head το and the laser displacement sensing according to another embodiment of the present invention are shown. The device for the relative position between the light spots of the device comprises a head unit mounting unit 80, a camera 9A, a transmittance variable member 100, a driving unit 83, and a control unit 700. The nozzle 53 and the laser for discharging the glue The head unit 5 of the displacement sensor 54 is mounted on the head unit unit 80. The camera 90 is placed to face the nozzle 53 and the laser displacement sensor 54. The transmittance variable member 1 is provided between the nozzle 53 or the laser displacement sensor 54 and the camera 90. The drive unit 83 moves the nozzle 53 and the laser displacement sensor 54 toward the transmittance variable member 1A. The control unit 7 is configured to control the laser displacement sensor 54, the camera 90, and the drive unit 83. Meanwhile, as with the first embodiment, the measuring device may further include a power supply unit 75 that supplies or cuts off the power of the variable transmittance member 。. VIII. The relative position measuring device according to another embodiment of the present invention is a discharge hole of the nozzle 53 of the head unit 50 after the head unit 50 installed in the dispenser has been connected to the head unit mounting unit 8 531 is a device that is positioned relative to the spot 545 of the laser displacement sensor 54. Here, the head unit 5A has the same configuration as the head unit 50 of the first embodiment described above. The head unit mounting unit 80 may include a platform portion 81 on which the transmittance variable member 100 is disposed, and the frame portion 82 is secured to the platform portion 81 to extend upward in the vertical direction, and the head unit 50 is mounted to the frame portion 82. The head unit 5〇 is located above the platform portion 81, and the camera 90 is positioned below the platform portion. The through hole 8 is formed at a position where the platform portion 81 is to be placed with the variable transmittance member 〇〇 to allow the camera 90 to capture the nozzle 53 and the spot of the laser light formed on the transmittance variable structure 22 201012556 100 545. "The camera 9" can be firmly attached to the slab 9 and is mounted under the platform portion 81 via the bracket % to adjust the position of the camera 9 垂直 in the vertical direction. As shown in Fig. 8 or 9, the transmission variable member 1 〇 The crucible may have a disc first === structure. The transmissivity variable member 1 (8) may have various structures and is not limited to the structure in which the first embodiment includes a PDLC device. For example, the transmission: ^2 may include changing according to conditions The light refraction angle is converted into a plurality of layers in the first state or the second state. The driving unit 83 is attached to the frame portion 82 of the head unit mounting unit 8 and moves up/down the head unit 5G (Z-axis direction). The head unit 5 is moved up/down to adjust the interval between the nozzle μ and the transmittance variable member 1 (5). However, the present invention is not limited to this embodiment, that is, the nozzle 53 has a transmittance of 1 〇 (1 space) The interval adjustment 'can be operated by operating the cymbal drive unit 56 mounted on the head unit 5G to move the nozzle 53 and the laser displacement sensor 54 on the yoke axis' will be described in accordance with another embodiment of the present invention. Position measurement method 'utilizing a nozzle such as the above-mentioned measuring head unit A device for detecting the relative position of the hole and the laser for sensing the displacement of the laser displacement. The measurement method will be described with reference to Figs. 13 and 14 of the first embodiment. As in the first embodiment, the discharge hole of the nozzle of the measuring head unit is The laser position, the method of illuminating the phase of the sensor, may include capturing the discharge hole 5 3 i of the nozzle 5 3 and the laser light by supplying or cutting the power source of the variable transmittance member 1 The method of the light spot 545 (see Fig. 3), and the method of capturing the discharge hole of the nozzle 53 and the spot 545 of the laser light by applying or releasing the pressure of the transmission variable member 100 of 201012556 (see Fig. 14) The first method will be described with reference to Fig. 13. According to the first method, when the power source for cutting the transmission variable member is cut off, the nozzle 5 is vented and the light spot 545 of the laser light is captured.

First, the head unit 5 mounted on the dispenser is fastened to the frame (4) 82 of the head unit mounting = 80, the slit nozzle 53 and the lightning avoidance reducer 54 = the near-transmittance variable member leak. Furthermore, after the head unit 5 is firmly attached to the frame (four) 82 of the single it 8G, in step sm, the driving unit τ 83 ' is operated so that the nozzle 53 and the laser displacement sensor 54 are adjacent to the transmittance. When the 'f nozzle 53 and the laser displacement sensor 54 are positioned adjacent to the transmittance variable member 100, the discharge hole 531 of the nozzle 53 and the transmittance can be set to be equal to the actual operation (4). The gap between the mouth 53 and the substrate S.

The person's operation power supply unit 75 thus supplies power to the transmittance variable member 100. When the power source is supplied, the reading M is first separated, and the center-transportable packet I transmittance variable member is converted into a shape in which the shape of the discharge hole 531 of the nozzle 53 = light '❿ can be captured by the f-element variable member 100 Nozzle 53. In this case, in step 8120, the nozzle 53 is captured by the camera 9. = source; in the case of the unit 75, in order to cut off the supply to the transmissivity interruptible power source, the variable transmittance member 1 (10) is subjected to the shape of the discharge hole 531 201012556 in which the nozzle 53 is not properly passed, and The laser light is reflected to form an image. In this state, if the displacement sensor 54 is operated, the laser light is excited from the emission portion 541, and the laser light forms an image on the variable transmittance member. At this time, the light spot 545 of the laser light is captured by the camera 90 at +step S130.乂 乂 于此 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在The transmittance variable member 100 is converted into the first state, and the nozzle can be captured in step S120. As described above, when the position of the captured nozzle 53 and the laser light ==Γ, the position value falls within the preset: the set value. In the allowable range, the second == step at the mounting position of the pre-positioner 54. Dingwen Change Nozzle 53 or Laser Displacement Sensing The second method will be explained with reference to FIG.压力 The displacement of the variable transmission member is applied to the pressure or the discharge of the nozzle 53 and the discharge hole 531 of the catching nozzle 53. The frame display unit 100 secures the variable member 100 of the unit unit 8. Further, the two laser displacement sensors 54 are adjacent to the frame portion 82 of the transmittance and then the second unit 8. 53 and the laser touches the smart can do 201012556 heart 'When operating the laser displacement sensing 11 54 , the laser light emitted from the laser light emitted from the embedding unit ιοη μ f forms an image at the variable transmittance member point 545 at this step S220' captures the laser light of the laser light by the camera 90 as the z_fresh% of the drive unit 83 or the material element 5G to move the nozzle 53 to the transmittance variable member 丨 (8), thereby pressing the transmittance variable member 100. The variable transmittance member is pressed by the nozzle , to become the first state, and the shape of the discharge hole 531 of the nozzle 53 and the laser light can be transmitted. In this state, the nozzle illusion can be captured by the transmittance variable member 1〇〇. At this time, in step S230, the nozzle 53 is captured by the camera 90. After performing the step S230 to convert the transmittance variable member 100 into the first state by compressing the transmittance variable member 1 and capturing the nozzle 53, step S220' may be performed to allow the transmittance variable member 1 to In the state of being pressed, that is, in the second state in which the shape of the discharge hole "the shape of the discharge hole" is reversed and the image is formed, the light spot 545 of the laser light is captured. As described above, when the nozzle 53 and the spot 545 of the laser light have been captured, based on the captured image data of the nozzle 53, the relative relationship between the discharge hole 53 of the nozzle 53 and the spot 545 of the laser light is measured in step S24. position. In this way, when the position of the discharge hole 531 of the nozzle 53 and the spot 545 of the laser light is completed, it is judged whether or not the measured position value falls within the preset range. Herein, when it is determined that the measured position value does not fall within the preset range, the step of changing the nozzle 26 201012556-53 or the mounting position of the laser displacement sensor 54 may be performed. The device and method for the relative position between the discharge hole of the nozzle of the unit and the spot of the light, clearly the difference between the discharge point 531 and the spot of the laser displacement sensor 54 is then installed in the dispenser The state in which the head unit 50 has been mounted is 'captured by the position of the catching nozzle 53 by the camera 90, and the vent hole and the button are captured, and the position at which the position is increased is actually implemented or combined with each other. It is better to use the secret invention for the purpose of the invention, but it is known that there is a variety of modifications, additions, and replacements in the case of the patent. BRIEF DESCRIPTION OF THE DRAWINGS The above and other objects, features, and advantages of the present invention will become more <RTIgt; Figure 2 is a perspective view showing the head unit of the dispenser of Figure 1, and Figures 3 and 4 are perspective views of the dispenser having a relative position measuring device mounted at a position relative to Figure 1 Figure 5 is a perspective view of the relative position measuring device according to the present invention; Figure 6 is a plan view of the relative position measuring device of Figure 5; Figure 7 is a relative position measuring device of Figure 5. Figure 8 is a perspective view showing an example of the transmittance variable member 27 201012556 of the relative position measuring device of Figure 5; - the variable rate member of the setting device is additionally arranged, and the position of the device is shown in Fig. 5 (4) The measurement is to display the relative position measuring device of FIG. 5" to display the laser displacement sense: == map, which is the relative position measuring device of FIG. 5. FIG. 13 is the relative position and quantity of the device using FIG. The relative position between the point and the discharge hole of the nozzle 14 is to use the relative position of Figure 5 with Ray

Figure i6 is a perspective view showing the phase 2 of Figure 15, and w 17 is the relative position amount of Figure 15: set: r: [Description of main component symbols] 10 frame 21 X-axis moving unit 3 〇 support moving guide 41 Support moving unit 50 head unit 52 syringe 54 laser displacement sensor 2 〇 platform 22 Y-axis moving unit 40 head support 42 head moving guide y 51 head moving unit 53 nozzle 55 Y-axis drive unit 28 201012556 56Z-axis drive Unit 57 cross-sectional area sensor 60 relative position measuring device 61 support

62 Transmittance Variable Member 64 Image Capturing Unit 75 Power Supply Unit 81 Platform Section 83 Drive Unit 91 Support Plate 100 Transmittance Variable Member 221 Y-axis Guide 541 Emitter 545 Spot 623 PDLC Device 632 Second Plate 634 Opening 636 second guide 642 camera 644 capture position adjuster 811 through hole S substrate 63 plate 70 control unit 80 head unit mounting unit 82 frame portion 90 camera 92 bracket 211 X-axis guide 531 discharge hole 542 receiving portion 611 Opening 631 first plate 633 opening 635 first guiding member 641 reflecting plate 643 illuminator 700 control unit d distance P glue pattern 29

Claims (1)

201012556 VII. Patent application scope: 1 The device for the relative position of the discharge hole and the laser displacement sensing nine point, including a variable transmittance member, placed in the face with the displacement of 3 The head unit of the sensor, and converted into a μ laser nozzle, the shirt is in the position and the laser light is reflected and formed on the transmittance portlet - Ο ❹ rate 叮 iron ^ image a unit that positions the transmission position of the handsome unit (four) simple unit and captures the shape of the discharge hole of the nozzle and forms a 敎 鳞 听 听 如 如 如 如 如 如The injectivity variable member comprises a polymer dispersed liquid crystal (PDLC) device. The device of claim 2, wherein the transmittance is variable = each layer is paired and the polymer dispersion device is interposed between the pair of glass layers. 4. The device of claim 2, wherein the variable transmittance member comprises -glass and the polymer dispersing device is squirted to the glass 0. 5. As claimed in claim 1 The device further includes: - a support member having - opening σ, facing the nozzle and the laser displacement sensor being opened, and the image capturing unit being fixed to the support member; and - the plate member slidable i is also securely attached to the building member and has an opening in communication with the opening of the support member and supports the variable transmittance member. 30 201012556 The device of claim 1, wherein the image capturing unit s&gt; 兮· camera captures the shape of the discharge hole of the nozzle and shapes the image on the transmittance 2 variable member The spot of the folio light; °&quot; an illuminator mounted adjacent to the camera and emitting light; and a position of the nx moving the camera and the illuminator in a small direction: the downward direction, a forward and backward direction, and - Rightward and leftward direction to 瘳7. The device of claim 1, further comprising: a power supply for the fresh element, supplying power to the transmissive village variable member. 8. - A type of dispensing machine' has a position measuring device as in the patent application. The method of measuring one of the nozzles of one of the nozzles of the device and the method of measuring the discharge of one of the nozzles of the laser displacement sensor is used to measure the position of the head unit - ^ and The relative position of the light-off of the laser displacement sensor includes a transmittance variable member placed in the spray state of the head unit, wherein one of the discharge holes of the nozzle can transmit a shape and a second a state in which the f-count is reflected and the image-capture includes or is in proximity to the nozzle and the laser displacement sensor so as to be adjacent to the emission and form the image on the variable transmittance member The laser 31 201012556 light spot; and a third step 'measuring the relative position between the discharge aperture of the nozzle and the laser displacement sensor. The method of claim 9, wherein the second step comprises: supplying a power source to the transmittance variable member and capturing the discharge hole of the nozzle, and cutting off the supply to the variable transmittance The power source of the component captures the spot of the laser light that forms the image on the variable transmittance member. 11. The method of claim 9, wherein the second step comprises: capturing the image of the transmissive liner (four) in a state in which the ride is supplied, and the image is formed on the transmissive liner (four) And (b) the spot of light; and supplying a power source to the variable transmittance member and capturing the discharge hole of the nozzle. ❹2: a method for discharging the hole and the position of the laser displacement of one of the nozzles of the seed unit, measuring _ the relative between the two holes of the head unit and the spot of the #-displacement sensor A device in position comprising a variable transmittance member. a nozzle or laser displacement sensor and - image capture single and second - second shape J 'where the laser light is reflected and forms an image on or near the mouth to position the mouth and the sense of displacement of the laser, Aligning it with: the second step 'by applying or releasing the force to capture the discharge hole of the nozzle, and capturing from the laser 32 201012556 and forming the f-like bribe (four) rate variable member The spot of the laser light and the second step 'measured the relative position between the discharge aperture of the nozzle and the spot of the laser displacement sensor. The method of claim 12, wherein the second step comprises: % 敝 the laser light of the laser light emitted from the laser (10) device and % of the image into the variable transmittance member And moving the oyster dragon through the village changing member to apply pressure to the transmittance variable member and capturing the discharge hole of the nozzle. 2. The method of claim 12, wherein the second step of moving the nozzle to the transmittance variable member to apply pressure to the transmissive, variable member, and capturing the discharge of the nozzle And moving the nozzle to be spaced apart from the variable transmittance member, thereby releasing pressure from the variable rate member and capturing the spot of the laser light, and emitting and forming from the vertical displacement sensor The image is on the transmittance variable member. $Cry I kind of measurement - head unit - nozzle - discharge hole and - laser displacement sense, J. . A device for relative position between one of the light spots, comprising: - a speaker set S, a nozzle without a laser displacement sense VJ head unit; - a camera placed to face the nozzle and the sense of displacement of the laser a measuring device; and a material (four) piece 'providing (four) material or the pure moving sensor between the three machines, and converting into a first state, wherein the shape of the one of the outlet holes of the nozzle can be transmitted and the mine The laser light of the displacement sensor, or a second shape of the 201012556 state, in which the laser light is reflected and forms an image. The device of claim 15, wherein the transmittance variable member comprises a polymer dispersed liquid crystal (PDLC) device. The device of claim 15 or 16, further comprising: a power supply unit that supplies power to the variable transmittance member. Where the head unit causes the nozzle to face 18. The apparatus mounting unit according to claim 15 or 16, comprising a driving unit for moving the nozzle, the transmittance variable member moving.