KR102026891B1 - Dispensing apparatus - Google Patents

Abstract

The coating apparatus according to the present invention is a stage provided so that the substrate is seated on the upper surface, it is installed on the upper side of the stage to move horizontally, is located on one side of the nozzle and the nozzle for applying the raw material toward the substrate, irradiating light to the substrate A dispenser having a gap sensor for measuring a vertical separation distance between the substrate and the nozzle, the dispenser is provided on the outside of the stage, the image of the light spot irradiated from the gap sensor and the nozzle under the nozzle and the gap sensor to capture the light spot and And an image capturing unit for acquiring an image image including a nozzle, the sensor distance measuring unit measuring a horizontal separation distance between the nozzle and the light spot on the image image.
Therefore, according to the embodiment of the present invention, the image image of the light spot can be obtained clearly and without position distortion, thereby improving the accuracy of the separation distance measurement between the nozzle and the gap sensor. This improves the reliability of adjusting the vertical separation distance between the substrate and the nozzle during the actual raw material coating step, thereby improving the raw material coating quality.

Description

Application device {DISPENSING APPARATUS}

The present invention relates to a coating device, and more particularly to a coating device that can improve the accuracy of the separation distance measurement between the nozzle and the gap sensor.

BACKGROUND OF THE INVENTION The use of flat panel displays such as liquid crystal display devices (LCDs), plasma display panels (PDPs), and organic light emitting devices (OLEDs) is increasing. It is characterized by light weight, thinness and low power consumption.

In the case of such a flat panel display panel, a pair of flat panel type substrates are bonded together and manufactured. That is, taking the manufacture of a liquid crystal display panel as an example, first, a lower substrate on which a plurality of thin film transistors and pixel electrodes are formed, and an upper substrate on which a color filter and a common electrode are formed are manufactured. Thereafter, a liquid crystal is dropped on the lower substrate, and a sealant is applied to the edge region of the lower substrate. Subsequently, the lower substrate surface on which the pixel electrode is formed and the upper substrate surface on which the common electrode is formed are positioned to face each other, and then the two substrates are bonded and sealed to manufacture a liquid crystal display panel.

Here, a dispenser having a nozzle is used as a means for applying the sealant.

On the other hand, in applying the sealant continuously on the substrate, in order to achieve a uniform quality of the sealant pattern, a technique is required to precisely control the gap between the nozzle's nozzle and the substrate's vertical distance or nozzle height. Accordingly, a gap sensor, which is a means for measuring a vertical separation distance between the nozzle and the substrate by irradiating light to the substrate on one side of the nozzle, is provided.

At this time, in order to accurately measure the vertical distance between the nozzle and the substrate, the light irradiated to the substrate, that is, the light spot should be located outside the position where the sealant is to be applied in the substrate, and maintain a certain distance. That is, when light spots deviate to the outside of the substrate, interfere with the outermost edges of the substrate, or interfere with the thin film formed on the substrate, the vertical distance between the nozzle and the substrate cannot be accurately measured, and thus, the sealant pattern is defective. There is a problem.

Korean Laid-Open Patent 2015-0133885

The present invention provides an application apparatus capable of improving the accuracy of the separation distance measurement between the nozzle and the gap sensor.

The coating apparatus according to the present invention comprises a stage installed so that the substrate is mounted on the upper surface; A gap sensor installed at an upper side of the stage to move horizontally, and positioned at one side of the nozzle and the nozzle to apply a raw material toward the substrate, and to measure a vertical distance between the substrate and the nozzle by irradiating light onto the substrate; Dispenser having a; An image capturing unit provided outside the stage and configured to capture an optical spot and the nozzle irradiated from the gap sensor under the nozzle and the gap sensor, and obtain an image image including the light spot and the nozzle; A sensor distance measuring unit measuring a horizontal separation distance between the nozzle and the light spot on an image; It includes.

The image pickup unit may include: a window unit having a light transmitting member having a light transmittance, provided to be positioned below the dispenser, which is moved outside the stage, outside the stage; And an imager positioned below the window portion to capture the nozzle projected through the window portion and the light spot irradiated from the gap sensor to the window portion. It includes.

It is preferable that the said light transmitting member is 90% or more and 100% or less.

The light transmitting member includes glass and a film attached to the glass.

The film comprises Kapton tape.

Preferably, the glass has a thickness of 0.2 mm to 0.3 mm.

The gap sensor includes a light emitting unit for irradiating light to the substrate and a light receiving unit arranged to be spaced apart from the light emitting unit to receive the light reflected from the substrate, the nozzle according to the result measured in the sensor distance measuring unit, The light emitting part and the light receiving part are horizontally moved in a direction in which the light emitting parts are arranged in a row.

The sensor distance measuring unit includes an analyzer configured to measure a horizontal separation distance between the nozzle and the light spot on the image image measured by the imaging unit, and compare the measured horizontal separation distance with a reference distance.

The dispenser may move horizontally to a position corresponding to an upper surface of the stage and to the outside of the stage, and the imaging unit is fixed to the side of the stage.

According to the embodiment of the present invention, an image image of the light spot can be obtained clearly and without position distortion, thereby improving the accuracy of the separation distance measurement between the nozzle and the gap sensor.

Therefore, there is an effect of improving the vertical distance adjustment reliability between the substrate and the nozzle during the actual raw material coating step, thereby improving the raw material coating quality.

1 and 2 are three-dimensional views showing the main portion of the coating device according to an embodiment of the present invention
3 is a conceptual diagram illustrating a state in which a sealant is coated on a substrate on which a thin film is formed;
Figure 4 is a three-dimensional view showing a dispenser according to an embodiment of the present invention
5 is a view from below of the dispenser according to an embodiment of the present invention;
6 is a cross-sectional view showing main parts of the dispenser according to the embodiment of the present invention.
7 illustrates the location of a light spot irradiated on a substrate.
8 is a view of the light spot and the nozzle on the image image obtained through the imaging unit according to an embodiment of the present invention
9 is a photograph showing an image of a light spot and a nozzle according to a comparative example and a light transmitting member according to an embodiment of the present invention
Fig. 10 is a photograph showing an image of light spots and nozzles when using a Kapton tape and a general tape.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. However, the present invention is not limited to the embodiments disclosed below, but may be implemented in various forms, and only the embodiments are intended to complete the disclosure of the present invention and to those skilled in the art. It is provided for complete information.

1 and 2 are three-dimensional views showing the main portion of the coating device according to an embodiment of the present invention. 3 is a conceptual diagram illustrating a state where a sealant is coated on a substrate on which a thin film is formed. 4 is a three-dimensional view showing a dispenser according to an embodiment of the present invention. 5 is a view from the bottom of the dispenser according to an embodiment of the present invention. 6 is a cross-sectional view showing main parts of the dispenser according to the embodiment of the present invention. 7 is a diagram illustrating the position of the light spot irradiated on the substrate. 8 is a view of the light spot and the nozzle on the image image obtained through the imaging unit according to the embodiment of the present invention. 9 is a photograph showing an image of a light spot and a nozzle according to the use of a light transmitting member according to a comparative example and an embodiment of the present invention. Fig. 10 is a photograph showing image images of light spots and nozzles when using Kapton tape and normal tape.

1, 2 and 4 to 6, the coating apparatus according to an embodiment of the present invention is installed on the base 100, the base 100, the stage on which the substrate (S) is placed on the top (200), the nozzle (4152) for applying the raw material on the substrate (S) placed on the stage 200 and the distance between the substrate (S) and the nozzle (4152) by irradiating light to the substrate (S) A coating unit 4000 having a dispenser 4100 having a gap sensor 4160 to measure, a first horizontal moving part 300 for horizontally moving the coating unit 4000 in a first direction, and a stage top on which a substrate is seated. A sensor distance measuring unit 5000 is mounted on the stage 200 so as to be located outside the surface, and measures a horizontal separation distance D between the nozzle 4422 and the light spot before actual application of the raw material.

Hereinafter, the sealant which has adhesive performance as a raw material apply | coated on the board | substrate S is demonstrated, for example. Of course, the material to be applied is not limited to the sealant, and various materials can be applied.

The stage 200 supports the board | substrate S which is the to-be-processed object to apply the sealant, and it is preferable that it is a shape corresponding to the board | substrate S. FIG. The stage 200 is configured to be horizontally movable in the horizontal movement (the X axis direction and the Y axis direction). The stage 200 is formed to have a smaller area than the base 100 and is installed on the base.

The first horizontal moving part 300 is positioned outside the substrate S on the stage 200, and extends in the first direction, for example, the X-axis direction, to the first guide member 310 and the first guide member 310. It includes a first moving block 320 that can slide along. The first guide member 310 according to the embodiment may be, for example, rail means such as an LM guide or a linear guide, and the first moving block 320 may be a linear motor or the like that slides along the first guide member 310. Various means can be applied.

The coating unit 4000 extends in the dispenser 4100 for applying the sealant, in a second direction crossing the first direction, and on the gantry 4200 and the gantry 4200 for supporting the dispenser 4100. A second horizontal moving part 4300 having a second guide member 4310 extending in a second direction crossing the first guide member 310 to horizontally move the dispenser 4100 itself in a second direction. It includes.

The gantry 4200 may include a first support member 4210 extending in a direction intersecting the first guide member 310 on the base 100 and the stage 200, and one end of each of the first support members 4210. It is connected to both ends of the () and the other end is formed to extend toward the first guide member 310, and includes a pair of second support member 4220, the first moving block 320 is mounted on the bottom.

Here, one end of the first support member 4210 is formed to extend so that one end is located outside the stage 200 and the other end is located outside the stage 200. In addition, a second support member 4220 is provided at one end and the other end of the first support member 4210. Accordingly, the second support member 4220 connected to one end of the first support member 4210 is positioned outside one side of the stage 200 on the base 100 and is connected to the other end of the first support member 4210. The support member 4220 is positioned on the other side of the stage 200 on the base 100.

The second horizontal moving part 4300 is a means for moving the dispenser 4100 in a second direction that crosses the first direction on the first support member 4210 of the gantry 4200, that is, in the Y-axis direction. The second horizontal moving part 4300 is formed to extend in a direction corresponding to the first supporting member 4210 or to intersect the first direction, and the second guide member 4310 mounted on the first supporting member 4210. And a second moving block (not shown) that is engaged with the second guide member 4310 in a state of being mounted on the dispenser 4100, and that can slide along the second guide member 4310. The second guide member 4310 according to the embodiment may be, for example, rail means such as an LM guide or a linear guide, and the second moving block may be formed of various means such as a linear motor sliding along the second guide member 4310. Application is possible.

As shown in FIG. 2, the horizontal direction in the first direction of the coating unit 4000 as described above and the horizontal direction in the second direction of the dispenser show the first and second directions on the substrate S as shown in FIG. 2. The sealant pattern may be applied to extend.

On the other hand, as shown in Figure 2, the sealant is usually applied to the edge of the substrate (S), or to be located on the outer surface of the thin film (F) formed on the substrate (S). In addition, the substrate S may be applied in a shape corresponding to the shape of the substrate S. In the case of the quadrangle of the substrate S, the sealant may have a rectangular shape, which is the first and second horizontal moving parts 300 as described above. 4300).

The dispenser 4100 includes a main block 4110 mounted to be engaged with the second guide member 4310 on the gantry 4200, a syringe 4120 for storing a raw material to be applied, that is, a sealant, and a syringe 4120. The sealant provided from the syringe 4120 is connected to the head block 4130, the support block 4140 positioned between the head block 4130 and the support block 4140, and the syringe 4120, and the sealant provided from the syringe 4120 may be mounted on the substrate S. (4150) having a nozzle (4152) for discharging toward the (), is mounted to the lower portion of the support block 4140 to be located on one side of the nozzle (4152), in a manner of irradiating light toward the substrate (S) And a gap sensor 4160 for measuring a vertical separation distance (or nozzle height) between the substrate S and the nozzle 4152. In addition, it includes a lifting unit (not shown) for raising and lowering the entire dispenser 4100, the driving unit may be connected to the support block 4140, for example.

The second moving block is mounted on a rear surface of the main block 4110, that is, a surface facing the gantry 4200. Accordingly, as the second moving block slides along the second guide member 4310, the dispenser 4100 having the main block 4110 moves horizontally in the second direction.

The head block 4130 is a means for stably supporting the syringe 4120 storing the sealant, and may be installed to be mounted or supported on the support block 4140 in front of the support block 4140. More specifically, the head block 4130 is configured so that at least the lower end of the syringe 4120 is inserted so that both sides of the first block 4131 and the first block 4131 supporting the syringe 4120 are centered. , One side and the other side), a pair of second blocks 4132 fixed to the support block 4140 and a fastening portion 4133 for fastening the first block 4131 to the second block 4132. Include.

At least a lower portion of the syringe 4120 may be inserted into the first block 4131, or may have an internal space capable of temporarily receiving or moving the sealant discharged from the lower end of the syringe. The first block 4131 is a separate part from the second block 4132, and is separated from the second block 4132, and the first block 4131 and the second are fastened by the fastening part 4133 which will be described later. When the fastening of the block 4132 is released, the first block 4131 may be horizontally moved. Here, the horizontal movement of the first block 4131 means a movement in the direction in which the pair of second blocks 4132 are listed between the pair of second blocks 4132, and the nozzles 4252 may be moved by the movement. And the horizontal separation distance D between the gap sensor 4160 is adjusted, and thus the horizontal moving distance between the light spot irradiated from the gap sensor 4160 and the nozzle 4152 is adjusted.

The fastening part 4133 fastens or separates the first block 4131 to which the discharge part 4150 is connected to the second block 4132 that is fixed to the support block 4140. The fastening part 4133 according to the embodiment extends in the direction in which one second block 4132, the first block 4131, and the other second block 4132 are arranged in a row, and the first block 4131 is formed. ) And a fastening member 4133a connectable to the pair of second blocks 4132, and a fastening member 4133b fastening and fixing the fastening member 4133a and the pair of second blocks 4132. Here, the fixing member 4133b may be a bolt, and the bolt may be inserted into the fastening member 4133a and the second block 4132.

According to the fastening between the first block 4131 and the second block 4132 by the fastening part 4133 as described above, the first block 4131 is one second block of the pair of second blocks 4132. The horizontal movement is possible in the direction in which the 4132 is located or in the direction in which the other second block 4132 is located. In other words, the first block 4131 can be moved horizontally between the pair of second blocks 4132. Accordingly, as the discharge part 4150 connected to the first block 4131 moves horizontally, the horizontal distance D between the nozzle 4152 and the gap sensor 4160 is changed.

The discharge portion 4150 is a means for discharging or dropping the sealant provided from the syringe 4120 onto the substrate S. FIG. One end of the discharge part 4150 is connected to the inner space of the head block 4130 or the syringe 4120 in the head block 4130, and the outer side of the head block 4130 or the gap sensor 4160 is positioned. A nozzle which is attached to the lower portion of the discharge member 4251 that is extended and the discharge member 4151 protruding outward of the head block 4130, and discharges the sealant transferred through the discharge member 4141 toward the substrate S ( 4152).

The discharge member 4141 is connected to the first block 4131 of the head block 4130 to move the sealant discharged from the syringe 4120 inserted into the first block 4131 to the nozzle 4452. To this end, the discharge member 4251 is a means having an inner space capable of moving or passing the sealant, and the head block 4130 is connected to the inner space or the lower end of the syringe 4120 as described above, with one side opening thereof. It is equipped with a nozzle (4152). In addition, a screw member may be further installed inside the discharge member 4141 so that the sealant can easily move in the direction in which the nozzle 4252 is located.

The gap sensor 4160 irradiates light, for example, a laser, toward the substrate S at the time of applying the sealant, receives a laser reflected from the substrate S, and measures the separation distance between the substrate S and the nozzle 4452. Measure The gap sensor 4160 is installed to be spaced apart from the nozzle 4152 by a predetermined distance, and irradiates a laser to one side of the position where the sealant is to be applied on the substrate S. FIG.

The gap sensor 4160 according to the embodiment is a kind of distance sensor for measuring a distance using a light, for example, a laser. The gap sensor 4160 is spaced apart from the light emitting part 4411 and the light emitting part 4411 to irradiate a laser toward the substrate S. And a signal connected to the light receiving unit 6162, the light emitting unit, and the light receiving unit receiving the laser beam reflected from the substrate S, and calculating a gap between the substrate and the nozzle using the irradiated laser and the received reedger. It includes a portion (not shown). At this time, the light emitting unit 4411 and the light receiving unit 6162 may cross the direction in which the discharge unit 4150 extends, and the first block 4131 and the second block 4132 of the head block 4130 may be arranged side by side. It is spaced apart in a corresponding direction and in a direction corresponding to the horizontal movement direction of the first block 4131.

In addition, the discharge member 4251 is formed to extend through the spaced space between the light emitting unit 4141 and the light receiving unit 6162, and the nozzle 4422 is positioned at a position adjacent to the light emitting unit 4141 and the light receiving unit 6162. .

On the other hand, even if the distance between the nozzle 4252 and the substrate S is adjusted to be a reference distance (hereinafter, referred to as a first reference distance) before applying the sealant, an environment such as flatness of the upper surface of the substrate S to which the sealant is applied is controlled. According to a factor, the separation distance between the nozzle 4252 and the substrate S may vary. Therefore, when the sealant is applied, the gap distance between the nozzle 4252 and the substrate S is measured using the gap sensor 4160 in real time, and the dispenser 4100 is measured according to the measurement result. By raising or lowering in real time, it adjusts so that the separation distance between the nozzle 4222 and the board | substrate S may become a 1st reference distance. That is, when the measured separation distance between the nozzle (4152) and the substrate (S) exceeds the first reference distance, the up and down driving unit lowers the dispenser (4100), conversely between the measured nozzle (4152) and the substrate (S) If the separation distance is less than the first reference distance, the vertical driving unit raises the dispenser 4100.

Hereinafter, when the laser is irradiated onto the substrate S, the laser reaching the substrate is in the form of a spot, so it is called an optical spot.

As described above, when the sealant is applied to the substrate S in this manner, a laser is irradiated onto the substrate S for measuring the vertical separation distance between the substrate S and the nozzle 4152. At this time, the laser is not irradiated to the outer side (P2) or the thin film (F) of the substrate (S), as shown in FIG. In other words, while the light spot is located in the substrate S, one side of the position SP where the sealant is to be applied without interfering with the outermost position P2 and the thin film F position P3 of the substrate S. Should be spaced apart (P1). In this case, one side of the sealant coating position where the light spot is to be positioned may be a position P1 corresponding to the outside of the substrate S, not between the sealant coating position SP and the thin film.

The position of the light spot as described above depends on the horizontal separation distance D between the nozzle 4222 and the gap sensor 4160, more specifically, between the nozzle 4152 and the light emitting portion 4141. Accordingly, before the actual sealant is applied, the horizontal separation distance D between the gap sensor 4160 and the nozzle 4152 is measured, and the nozzle 4222 is horizontally moved in accordance with the measurement distance, so that the gap sensor 4160 and the nozzle 4152 are moved. ), The horizontal separation distance D is adjusted to a reference distance (hereinafter referred to as a second reference distance). That is, before actually applying the substrate S onto the substrate S, the gantry 4200 or the dispenser 4100 is moved so that the dispenser 4100 is positioned on the outside of the stage 200. After the corresponding position on the upper side of 5000, and the horizontal separation distance (D) between the gap sensor 4160 and the nozzle (4152) is measured and calibrated to be the second reference distance, the sealant with respect to the substrate (S) Apply.

Thereby, while the light spot comes to the P1 position during the actual sealant coating process, the horizontal separation distance D between the P1 and the nozzle 4152 may be the second reference distance.

In the present invention, in measuring the separation distance between the light spot and the nozzle 4422, the nozzle 4252 and the light spot are captured under the dispenser 4100 and measured by analyzing the captured image image.

The sensor distance measuring unit 5000 includes an image capturing unit 5100 for acquiring an image of a nozzle 4222 and an optical spot under the dispenser 4100, and a display unit 5200 displaying an image image captured by the image capturing unit 5100. And an analyzer 5300 for measuring the distance between the nozzle 4252 and the light spot on the image image displayed on the display unit 5200.

The imaging unit 5100 is located below the nozzle 4252 and the gap sensor 4160 of the dispenser 4100 at the time of measurement, and has a window portion 5110 and a window portion having a predetermined opacity. An imager 5120, a window portion 5110, and an imager disposed to be spaced apart from the lower portion 5110, and to capture a light spot irradiated through the window portion 5110 and a nozzle projected through the window portion 5110. While supporting 5120, a jig 5130 is mounted to be horizontally movable on the stage 200.

The window portion 5110 has a predetermined light transmittance, and is mounted on the light transmitting member 5111 and the jig 5130 configured to enable the projection of the nozzle 4252 and the light spot from the lower side to support the light transmitting member 5111. 5121.

The light transmitting member 5111 has a predetermined thickness and has an opacity of 90% or more and less than 100%. The light transmitting member 5111 according to the embodiment includes a glass 5111a having a predetermined thickness and a film 5111b attached to at least one of the upper and lower surfaces of the glass 5111a. The light transmitting member having the structure in which the glass 5111a and the film 5111b are laminated in this manner has an opacity of 90% or more and less than 100% as described above.

Referring to FIG. 9, when no light transmitting member having an opaque characteristic is applied (FIG. 9A), a nozzle image is obtained, but an image of a light spot is not obtained. In addition, in the case of FIGS. 9C and 9D, in which the opacity of the film 5111b is less than 90%, the light spot is less visible than in FIG. 9B in which the opacity is 90%. Thus, in the present invention, by using the light transmitting member () having an opacity of 90% or more, an image of a light spot having clear and no positional distortion is obtained.

In the present invention, the glass 5111a has a thickness of 1 mm to 4 mm. This is to prevent the positional distortion of the light spot irradiated to the light transmitting member and to form a light spot on the light transmitting member well. That is, when the glass 5111a exceeds 1 mm, a positional distortion of the light spot may occur, and when the glass 5111a exceeds 4 mm, there is a problem that light spots are not easily formed on the light transmitting member.

The film 5111b according to the embodiment uses a kapton tape, which is characterized in that the total reflection of the kapton tape is easily performed by light or laser, and a general type of tape may be used. This is because there is less diffuse reflection. Thus, in the present invention, by using a kapton tape as the film 5111b, it is possible to clearly obtain an image image of the light spot from the imager.

The holder 5112 supports the light transmitting member 5111 and the entire window portion 5110 on the jig 5130. The holder 5112 according to the embodiment has a hollow shape with an open center, and a light transmitting member 5111 is inserted into the opening. Of course, the holder 5112 is not limited to the above-described hollow type, it is possible to support the light transmitting member (5111), it can be changed into various shapes that can secure the window portion 5110 to the jig (5130).

The jig 5130 supports the window part 5110 and the imager 5120, and may be fixed to the side of the stage 200. More specifically, the light transmitting member 5111 is mounted on the jig 5130, one surface of the jig 5130 is fastened to the stage 200, and an imager 5120 is fastened to the back of the jig facing one surface of the jig 5130. .

By this jig 5130, the entire imaging unit 5100 is provided so as to be located outside the stage 200. At this time, the imaging part 5100 may be provided in any direction and position in the movable area of the dispenser 4100 among the outside of the stage 200.

1 to 7, the operation of the sensor distance measuring unit according to an exemplary embodiment of the present invention and the process of measuring the separation distance between the light spot and the nozzle and adjusting the separation distance accordingly will be described.

Measuring the horizontal separation distance D between the light spot and the nozzle 4152 is performed before applying the sealant on the substrate S to which the sealant is to be applied.

First, the dispenser is moved so that the dispenser is located above the imaging unit located outside the stage. To this end, the gantry may be moved, the dispenser may be moved separately on the gantry, or both the gantry and the dispenser may be moved so that the dispenser is positioned above the imaging unit. At this time, the window portion 5110 of the image pickup unit 5100 and the imager 5120 are moved so as to correspond to the nozzle (4152) and the gap sensor 4160 of the dispenser 4100.

Thereafter, the gap sensor 4160 is operated to irradiate the laser to the window portion 5110 through the light emitting portion 4411. When the laser is irradiated to the window portion 5110, a light spot is formed on the window portion 5110, and since the window portion 5110 has an opacity of 90% or more, the nozzle under the window portion 5110 Identification or perspective of 4415 is possible.

When the laser is irradiated to the window portion 5110, the imaging unit 5100 captures the light spot and the nozzle 4152 under the window portion 5110. The image image obtained by the imaging is transmitted to the display unit 5200 for display (see FIG. 8), and the analysis unit 5300 uses the light spot on the image image and the coordinates of the nozzle 4252 to the nozzle 4252 and the light spot. Calculate the horizontal separation distance between them.

In addition, when the calculated horizontal separation distance is compared with the second reference distance, and the calculated horizontal separation distance D is out of the second reference distance, the discharge part 4150 may emit the light emitting part 4411 of the gap sensor 4160. Adjust the separation distance with. That is, when the calculated horizontal separation distance D exceeds the second reference distance, the first block 4131 is horizontally moved in the direction opposite to the light emitting part 4411 or in the direction of the light receiving part 6162. On the contrary, when the calculated horizontal separation distance D is less than the second reference distance, the first block 4131 is horizontally moved in the direction in which the light emitter 4411 is positioned or in the direction opposite to the light receiver 6162. As the first block 4131 moves, the discharge part 4150 connected to the first block 4131 is moved together, thereby adjusting the separation distance between the nozzle 4252 and the light spot to be the second reference distance. Can be.

When the separation distance between the nozzle 4222 and the light spot becomes the second reference distance, the imaging unit 5100 is moved outside the dispenser 4100 so that the imaging unit 5100 and the dispenser 4100 do not interfere.

Thereafter, the sealant is applied onto the substrate S while the coating unit 4000 is moved. At this time, while measuring the laser beam to the substrate (S) through the gap sensor 4160 in real time to measure the vertical separation distance between the substrate (S) and the nozzle (4152), and operating the vertical driving unit in accordance with the measurement distance substrate (S) The sealant is applied while allowing the vertical distance between the nozzle and the nozzle 4422 to be the first reference distance.

Wherein the laser is irradiated to the substrate (S), the light spot of the laser does not interfere with the outermost angle of the thin film (F) or the substrate (S) or deviate to the outside of the substrate (S), the outside of the position where the sealant is to be applied And maintain a second reference distance from the nozzle 4152. This is because the horizontal separation distance D between the light spot and the nozzle is adjusted through the sensor distance measuring unit 5000 according to the embodiment of the present invention before applying the sealant.

As the light spot is irradiated to a position outside the position where the sealant is to be applied so as to maintain the second reference distance without the light spot of the laser interfering with the outermost portion of the thin film or the substrate or leaving the outside of the substrate S, When the sealant is applied, the vertical separation distance between the substrate S and the nozzle 4152 can be easily measured, and reliability thereof is improved. In addition, during the application of the sealant, the vertical separation distance between the substrate S and the nozzle 4252 may be adjusted to the first reference distance, thereby improving the quality of the sealant pattern.

4100: dispenser 4110: main block
4120 syringe 4130 head block
4140: support block 4150: discharge part
4151: discharge member 5152: nozzle
4160: gap sensor 4200: gantry
4300: second horizontal moving unit 5000: sensor distance measuring unit
5100: Imager 5111a: Glass
5111b: film 5112: holder
5120: Imager 5130: Jig

Claims (9)

A stage installed on the upper surface of the substrate;
A gap sensor installed at an upper side of the stage to move horizontally, and positioned at one side of the nozzle and the nozzle to apply a raw material toward the substrate, and to measure a vertical distance between the substrate and the nozzle by irradiating light onto the substrate; Dispenser having a;
An image capturing unit provided outside the stage and configured to capture an optical spot and the nozzle irradiated from the gap sensor under the nozzle and the gap sensor, and obtain an image image including the light spot and the nozzle; A sensor distance measuring unit measuring a horizontal separation distance between the nozzle and the light spot on an image;
Including,
The dispenser,
A syringe in which the raw material is stored;
A head block on which the syringe is mounted;
A discharge part including a discharge member installed to be connected to the syringe below the head block, and the nozzle mounted below the discharge member;
Including;
The head block,
A first block in which a lower end of the syringe is inserted and installed and has an internal space capable of receiving the raw material and is movable;
A pair of second blocks respectively positioned on both sides of the first block; And
A fastening part configured to fasten and separate the first block from the second block;
Including,
The gap sensor,
Light emitting unit for irradiating light and
A light receiving unit spaced apart from the light emitting unit so as to be aligned in the direction in which the first block and the second block are arranged in order to receive light reflected from the substrate;
Including,
The discharge member has an internal space in communication with the internal space of the first block to move the raw material, is formed to extend between the light emitting portion and the light receiving portion, is connected to the first block,
Inside the discharge member is further provided with a screw member for allowing the raw material to move to the nozzle,
The first block is movable in the direction of alignment of the pair of second blocks between the pair of second blocks according to the horizontal separation distance between the nozzle and the light spot measured by the sensor distance measuring unit.
Wherein the first block moves in the direction of alignment of the pair of second blocks between the pair of second blocks,
And the first block is horizontally moved in a direction in which the light emitting part and the light receiving part are arranged side by side according to the result measured by the sensor distance measuring unit. The method according to claim 1,
The imaging unit,
A window unit disposed outside the stage and positioned below the dispenser moved outside the stage and having a light transmitting member having a light transmittance; And
An imager positioned below the window portion to capture the nozzle projected through the window portion and an optical spot irradiated from the gap sensor to the window portion;
Applicator comprising a. The method according to claim 2,
The translucent member has a transmittance of 90% or more and 100% or less. The method according to claim 3,
The translucent member comprises glass and a film attached to the glass. The method according to claim 4,
And the film comprises a Kapton tape. The method according to claim 4,
The coating apparatus of the glass (0.2mm) thickness is 0.2mm to 0.3mm. delete The method according to any one of claims 2 to 6,
The sensor distance measuring unit,
And an analyzer configured to measure a horizontal separation distance between the nozzle and the light spot on the image image measured by the imaging unit, and compare the measured horizontal separation distance with a reference distance. The method according to any one of claims 2 to 6,
The dispenser is horizontally movable to a position corresponding to the top surface of the stage and to the outside of the stage,
And the imaging unit is fixed to the side of the stage.

Images