CN108393212B

CN108393212B - Dispensing device

Info

Publication number: CN108393212B
Application number: CN201810117180.XA
Authority: CN
Inventors: 成元珉; 李根德; 柳永虎; 丁玄晟
Original assignee: AP Systems Inc
Current assignee: AP Systems Inc
Priority date: 2017-02-06
Filing date: 2018-02-06
Publication date: 2022-03-15
Anticipated expiration: 2038-02-06
Also published as: KR102026891B1; CN108393212A; TW201829076A; KR20180091295A

Abstract

The present invention provides a dispensing device comprising: a dispenser provided with: a sensor distance measuring unit provided with an imaging part installed outside the stage, configured to take a picture image including the light spot and the nozzle by imaging the nozzle and the light spot emitted from the gap sensor from below the gap sensor, and configured to measure a horizontal separation distance between the nozzle and the substrate by the picture image. Therefore, a picture image of the light spot can be clearly taken without positional distortion, and thus the measurement accuracy of the separation distance between the nozzle and the gap sensor can be improved.

Description

Dispensing device

Technical Field

The present invention relates to a dispensing device, and more particularly, to a dispensing device capable of enhancing the measurement accuracy of a separation distance between a nozzle and a gap sensor.

Background

Recently, flat display panels such as liquid-crystal display devices (LCDs), Plasma Display Panels (PDPs), and Organic Light Emitting Devices (OLEDs) are increasingly used. The flat display panel has the characteristics of light weight, thin profile and low power consumption.

Such a flat display panel is manufactured by bonding a pair of flat substrates. That is, for example, in order to manufacture a liquid crystal display panel, a lower substrate on which a plurality of thin film transistors and a plurality of pixel electrodes are formed and an upper substrate on which a color filter and a common electrode are formed are manufactured. Subsequently, liquid crystal is dropped onto the lower substrate, and a sealant is applied to a peripheral region of the lower substrate. Subsequently, the lower substrate on which the pixel electrode is formed and the upper substrate on which the common electrode is formed are positioned to face each other, and then the two substrates are press-sealed, thereby fabricating a liquid crystal display panel.

In this case, a dispenser provided with a nozzle is used as a method of applying the sealant.

Meanwhile, in order to make a sealant pattern of uniform quality when continuously applying a sealant to a substrate, a technique for precisely controlling a vertical separation distance, a nozzle height, or a gap between a dispenser nozzle and the substrate is required. Accordingly, a gap sensor is installed, which measures a vertical separation distance between the nozzle and the substrate by emitting light to the substrate located at one side of the nozzle.

In this case, in order to accurately measure the vertical separation distance between the nozzle and the substrate, light (that is, a light spot) emitted onto the substrate should be positioned outside the position in the substrate where the sealant is to be applied and maintained at a constant distance. That is, the following limitations exist: when the light spot deviates outside the substrate, interferes with the outermost edge of the substrate, or interferes with the thin film formed on the substrate, the vertical separation distance between the nozzle and the substrate cannot be accurately measured, and thus the sealant pattern becomes defective.

[ Prior art documents ]

[ patent document ]

(patent document 1) Korean patent application laid-open No. 2015-0133885

Disclosure of Invention

The invention provides a dispensing device capable of enhancing the measurement accuracy of a separation distance between a nozzle and a gap sensor.

According to an exemplary embodiment, a dispensing device comprises: a table installed such that a substrate is mounted on an upper surface thereof; a dispenser provided with: a nozzle installed above the stage to be horizontally movable and configured to apply a raw material toward the substrate; and a gap sensor positioned on one side of the nozzle and configured to measure a vertical separation distance between the substrate and the nozzle by emitting light onto the substrate; and a sensor distance measuring unit provided with: an imaging section installed outside the stage, configured to take a picture image including the light spot and the nozzle by imaging the nozzle and the light spot emitted from the gap sensor from below the gap sensor, and configured to measure a horizontal separation distance between the nozzle and the light spot on the picture image.

The image forming part may include: a window part installed outside the work table to be positioned under the dispenser to move outside the work table, and including a light-transmitting member having a light transmittance; and an imager positioned below the window portion and configured to image the nozzle viewed through the window portion and the light spot emitted from the gap sensor toward the window portion.

The light transmittance of the light transmitting means may advantageously be 90% to 100%, including 90% and 100%.

The light transmitting means may include glass and a film attached to the glass.

The film may comprise a polyimide tape (kapton tape).

The thickness of the glass may advantageously be from 0.2mm to 0.3 mm.

The gap sensor may include: a light emitting part for emitting light onto the substrate; and a light receiving part for receiving the light reflected from the substrate, wherein the nozzle is horizontally movable in an arrangement direction of the light emitting part and the light receiving part according to a measurement result from the sensor distance measuring unit.

The sensor distance measuring unit may include: an analysis unit configured to measure the horizontal separation distance between the nozzle and the light spot on the picture image taken by the imaging section, and compare the measured horizontal separation distance with a reference distance.

The dispenser may be horizontally moved to a position corresponding to the upper surface of the table and moved out of the table, and the image forming section may be fitted and fixed on a side surface of the table.

Drawings

The exemplary embodiments may be understood in more detail from the following description, taken in conjunction with the accompanying drawings, in which:

fig. 1 and 2 are three-dimensional views illustrating major components of a dispensing device according to an exemplary embodiment;

fig. 3 is a conceptual diagram illustrating a state in which a sealant is applied to a substrate on which a thin film is formed;

FIG. 4 is a three-dimensional view of a dispenser according to an exemplary embodiment;

FIG. 5 is a view of the dispenser as viewed from below the dispenser in accordance with an exemplary embodiment;

FIG. 6 is a cross-sectional view illustrating the major components of a dispenser according to an exemplary embodiment; and

fig. 7 is a diagram illustrating exemplary positions of light spots emitted onto a substrate.

Detailed Description

Exemplary embodiments will be described in detail below with reference to the accompanying drawings. This invention may, however, be embodied in different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the invention to those skilled in the art.

Fig. 1 and 2 are three-dimensional views illustrating main components of a dispensing device according to an exemplary embodiment. Fig. 3 is a conceptual diagram illustrating a state in which a sealant is applied to a substrate on which a thin film is formed. Fig. 4 is a three-dimensional view of a dispenser according to an exemplary embodiment. Fig. 5 is a view of a dispenser as viewed from below the dispenser according to an exemplary embodiment. Fig. 6 is a sectional view illustrating main components of a dispenser according to an exemplary embodiment. Fig. 7 is a diagram illustrating exemplary positions of light spots emitted onto a substrate.

Referring to fig. 1 and 2 and fig. 4 to 6, the dispensing apparatus according to the exemplary embodiment includes a dispensing unit 4000 provided with a dispenser 4100, the dispenser 4100 having: a table 200 mounted such that a substrate S is mounted on an upper surface thereof; a nozzle 4152 installed above the stage to be horizontally movable and configured to apply a raw material toward the substrate S; and a gap sensor 4160 positioned on one side of the nozzle 4152 and configured to measure a vertical separation distance between the substrate S and the nozzle 4152 by emitting light L onto the substrate S; and a sensor distance measuring unit 5000 provided with: the imaging section 5100, which is installed outside the stage 200, is configured to take a picture image including the light spot and the nozzle 4152 by imaging the nozzle 4152 and the light spot emitted from the gap sensor 4160 from below the gap sensor 4160, and is configured to measure a horizontal separation distance between the nozzle 4152 and the light spot LS on the picture image (that is, a distance between the nozzle position NP and the light spot LS on the light-transmitting member).

Further, a distribution device according to an exemplary embodiment includes: a base 100 for supporting a table 200; and a first horizontal moving part 300 for horizontally moving the dispensing unit 4000 in a first direction.

Hereinafter, as an example of the raw material applied to the substrate S, a sealant having an adhesive function will be explained. Of course, the raw material to be applied is not limited to only the sealant, but various materials may be applied.

The stage 200 supporting the substrate S, which is an object to which the sealant SL is applied, preferably has a shape corresponding to the substrate S. The table 200 is configured to be horizontally movable in the horizontal direction (X direction and Y direction). Further, the table 200 is provided to have an area smaller than that of the base 100, and is mounted on the base.

The first horizontal moving part 300 is positioned on the table 200 outside the substrate S, and includes a first guide member 310 extending in a first direction (e.g., X direction), and a first moving slider (block)320 that is movable along the first guide member 310. The first guide member 310 according to an exemplary embodiment may be, for example, a rail device (e.g., an LM guide or a linear guide), and various devices (e.g., a linear motor) running along the first linear guide member 310 may be employed as the first moving slider 320.

The dispensing unit 4000 includes: a dispenser 4100 for applying a sealant; a hanger 4200 extending in a second direction crossing the first direction and configured to support the dispenser 4100; and a second horizontal moving unit 4300 provided on the cradle 4200 with a second guide member extending in a second direction intersecting the first guide member 310 and configured to horizontally move the dispenser 4100 in the second direction.

The hanger 4200 includes: a first support member 4210 extending in a direction intersecting the first guide member 310 above the base 100 and the table 200; and a pair of second support members 4220 each having one end connected to one of both ends of the first support member 4210 and the other end extending toward the first guide member 310, wherein the first moving slider 320 is fitted onto a lower portion of the second support member 4220.

In this case, the first support member 4210 is provided to extend such that one end thereof is positioned on one outer side of the table 200 and the other end thereof is positioned on the other outer side of the table 200. Further, the second support members 4220 are respectively mounted on one end and the other end of the first support member 4210. Accordingly, the second support member 4220 connected to one end of the first support member 4210 is positioned on one outer side of the table 200 on the base 100, and the second support member 4220 connected to the other end of the first support member 4210 is positioned on the other outer side of the table 200 on the base 100.

The second horizontal moving portion 4300 is a device for moving the dispenser 4100 in a second direction (that is, Y direction) intersecting the first direction on the first support member 4210 of the cradle 4200. The second horizontal moving portion 4300 includes: a second guide member that extends in a direction corresponding to the first support member 4210 or in a direction intersecting the first direction, and is attached to the first support member 4210; and a second moving slider (not shown in the drawings) fastened to and runnable along the second guide member while being fitted to the dispenser 4100. The second guide member according to an exemplary embodiment may be, for example, a rail device (e.g., an LM guide or a linear guide), and various devices (e.g., a linear motor) running along the second linear guide member may be employed as the second moving slider.

As shown in fig. 2, a sealant pattern may be applied to extend in the first and second directions on the substrate S by the horizontal movement of the dispenser unit 4000 in the first direction and the horizontal movement of the dispenser in the second direction as described above.

As shown in fig. 2, generally, the sealant is applied to the periphery of the substrate S, or is applied to be positioned on the outer portion of the film F formed on the substrate S. Further, the sealant is applied in a shape corresponding to the substrate S. When the substrate S is rectangular, the sealant application shape may be rectangular, and this is possible due to the presence of the first and second horizontal moving

portions

300 and 4300 described above.

The dispenser 4100 includes: a main block 4110 assembled as a second guide member fastened to the hanger 4200; a syringe 4120 for storing a raw material (that is, a sealant) to be applied; a head block 4130 assembled so that the injector is detachably assembled thereto; a support slider 4140 positioned between the head slider 4130 and the main slider 4110; and a discharge portion 4150 provided with a nozzle 4152, the nozzle 4152 being connected to the syringe 4120 and configured to discharge the sealant supplied from the syringe 4120 toward the substrate S; and a gap sensor 4160 installed below the support slider 4140 to be positioned on one side of the nozzle 4152, and configured to measure a vertical separation distance (or nozzle height) between the substrate S and the nozzle 4152 by a method of emitting light toward the substrate S. Further, a lifting section (not shown in the drawings) that moves up and down the entire dispenser 4100 is provided, and the driving section may be connected to, for example, the support slider 4140.

On a rear surface of the main slider 4110 (that is, on a surface facing the hanger 4200), a second moving slider is mounted. Accordingly, the second moving slider runs along the second guide member, and thus the dispenser having the main slider 4110 is horizontally moved in the second direction.

The head slider 4130, as a means for stably supporting the sealant-storing syringe 4120, may be installed to be fitted on the support slider 4140 or supported by the support slider 4140 in front of the support slider 4140. More specifically, the head slider 4130 includes: a first slider 4131 configured such that at least a lower end of the syringe 4120 is embedded therein, and configured to support the syringe 4120; a pair of second sliders 4132 positioned on both ends (that is, one side and the other side) of the first slider 4131 to surround the first slider 4131 and fittingly fixed to the support slider 4140; and a fastening portion 4133 for fastening the first slider 4131 to the second slider 4132.

The first slider 4131 may have therein an inner space into which at least a lower portion of the syringe is inserted or in which the sealant discharged from the lower end of the syringe may be temporarily stored or moved. The first slider 4131, which is a separate component from the second slider 4132, is configured to be spaced apart from the second slider 4132, and when fastening of the first slider 4131 and the second slider 4132 is released by a fastening portion 4133 (to be described later), the first slider 4131 is horizontally movable. In this case, the horizontal movement of the first slider 4131 means the movement between the pair of second sliders 4132 in the arrangement direction of the second sliders 4132, and by this movement, the horizontal separation distance D between the nozzle 4152 and the gap sensor 4160 is adjusted, and thus the horizontal movement distance between the light spot emitted from the gap sensor 4160 and the nozzle 4152 is adjusted.

The fastening portion 4133 serves to fasten the first slider 4131 connected with the discharge portion 4150 to the second slider 4132 fixed to the support slider 4140 or to separate the first slider 4131 connected with the discharge portion 4150 from the second slider 4132 fixed to the support slider 4140. The fastening portion 4133 according to the exemplary embodiment includes: a fastening member 4133a extending in a direction in which one second slider 4132, the first slider 4131, and the other second slider 4132 are arranged and disposed, and thus may be connected to the first slider 4131 and the pair of second sliders 4132; and a fixing member 4133b for fixing the fastening member 4133a and the pair of second sliders 4132. In this case, the fixing member 4133b may be a bolt, and have a configuration in which a bolt may be inserted through the fastening member 4133a and the second slider 4132.

By the fastening between the first slider 4131 and the second slider 4132 by means of the fastening portion 4133, the first slider 4131 can be horizontally moved in the direction in which one second slider 4132 of the pair of second sliders 4132 is located or in the direction in which the other second slider 4132 is located. In other words, the first slider 4131 is horizontally movable between the pair of second sliders 4132. Accordingly, since the discharge portion 4150 connected to the first slider 4131 is horizontally moved, the horizontal separation distance D between the nozzle 4152 and the gap sensor 4160 is changed.

The discharge portion 4150 is a device for discharging or dropping the sealant supplied from the syringe 4120 onto the substrate S. The discharge portion 4150 includes: a discharge member 4151 having one end connected to the inner space of the head slider 4130 or to the injector 4120 inside the head slider 4130 and extending to the outside of the head slider 4130 or in the direction in which the gap sensor 4160 is located; and a nozzle 4152 fitted onto a lower portion of the discharge member 4151 protruding to the outside of the head slider 4130, and configured to discharge the sealant fed through the discharge member 4151 onto the substrate S.

The discharge member 4151 is connected to the first slider 4131 of the head slider 4130 and moves the sealant discharged from the syringe 4120 inserted and mounted in the first slider 4131 to the nozzle 4152. For this, the discharge member 4151, which is a device having an inner space through which the sealant moves or passes, has an opening connected to the inner space of the head slider 4130 or to the lower end of the syringe 4120, and the nozzle 4152 is fitted to the lower portion of the discharge member. Further, a screw member may be further provided in the discharge member 4151 so that the sealant may be easily moved in the direction in which the nozzle 4152 is located.

The gap sensor 4160 emits light (e.g., laser light) toward the substrate S during the sealant application process, receives the laser light reflected from the substrate S, and thereby measures a separation distance between the substrate S and the nozzle 4152. The gap sensor 4160 is installed to be spaced apart from the nozzle 4152 by a predetermined distance, and emits laser light to one side of a position on the substrate S where the sealant will be applied.

As a distance sensor that measures a distance using a laser, the gap sensor 4160 according to an exemplary embodiment includes: a light emitting portion 4161 for emitting laser light toward the substrate S; a light receiving portion 4162 disposed to be spaced apart from the light emitting portion 4161 and configured to receive the laser light reflected from the substrate S; and a gap calculating unit (not shown in the drawings) electrically connected to the light emitting part and the light receiving part and configured to calculate a separation distance between the substrate and the nozzle by using the emitted laser light and the received laser light. In this case, the light emitting portion 4161 and the light receiving portion 4162 are disposed to be spaced apart from each other in a direction crossing an extending direction of the discharge portion 4150 (that is, in a direction corresponding to an arrangement direction of the first and second sliders 4131 and 4132 of the head slider 4130, or in a direction corresponding to a horizontal moving direction of the first slider).

Further, the discharge member 4151 extends to pass through a separation space between the light emitting portion 4161 and the light receiving portion 4162, and the nozzle 4152 is located adjacent to the light emitting portion 4161 and the light receiving portion 4162.

Meanwhile, although the separation distance between the nozzle 4152 and the substrate S is adjusted to a reference distance (hereinafter, referred to as a first reference distance) before the sealant is applied, the separation distance between the nozzle 4152 and the substrate S may vary according to environmental factors such as the flatness of the upper surface of the substrate S to which the sealant is applied. Therefore, when the sealant is applied, the separation distance (that is, the gap) between the nozzle 4152 and the substrate S is measured in real time using the gap sensor 4160, and the dispenser 4100 is moved up and down in real time according to the measured result. Accordingly, the separation distance between the nozzle 4152 and the substrate S is adjusted to the first reference distance. That is, the up-down driving part lowers the dispenser 4100 when the measured separation distance between the nozzle 4152 and the substrate S exceeds the first reference distance, and raises the dispenser 4100 when the measured separation distance between the nozzle 4152 and the substrate S is less than the first reference distance.

The laser light that has reached the substrate has a dot shape when the laser light is emitted onto the substrate S thereafter, and is therefore referred to as a spot.

As described above, when the sealant is applied to the substrate S in this manner, laser light is emitted onto the substrate S to measure the vertical separation distance between the nozzle 4152 and the substrate S. At this time, as shown in fig. 7, the laser light should be emitted not to the outermost edge P2 of the substrate S or to the film F but to the side of the position SP where the sealant will be applied. In other words, when the light spot is positioned within the substrate S, the light spot should be positioned at the position P1 so as not to interfere with the outermost position P2 of the substrate S and the position P3 in the film F, but should be positioned to be spaced apart toward the side of the position SP where the sealant is applied. In this case, the side of the sealant application position where the light spot should be located may be a position P1 corresponding to an outer portion of the substrate S, not a portion between the sealant application position SP and the film.

The above-mentioned position of the light spot is changed according to the horizontal separation distance D between the nozzle 4152 and the gap sensor 4160, more specifically, between the nozzle 4152 and the light emitting portion 4161. Accordingly, the horizontal separation distance D between the nozzle 4152 and the gap sensor 4160 is measured by measuring the separation distance D between the nozzle 4152 and the gap sensor 4160 before the sealant is actually applied and horizontally moving the nozzle 4152 according to the measured distance, and is adjusted to a reference distance (hereinafter, referred to as a second reference distance). That is, before the sealant is actually applied onto the substrate S, the hanger 4200 or the dispenser 4100 is moved such that the dispenser 4100 is positioned to correspond to the upper side of the sensor distance measuring unit 5000 located outside the stage 200, and at this time, the horizontal separation distance D between the gap sensor 4160 and the nozzle 4152 is measured and adjusted to a second reference distance, and then the sealant is applied onto the substrate S.

Accordingly, in the actual sealant applying process, the horizontal separation distance D between the P1 and the nozzle 4152 may be adjusted to the second reference distance while the light spot is moved to the position P1.

In an exemplary embodiment, in measuring the separation distance between the light spot and the nozzle 4152, the measurement is performed by imaging the nozzle 4152 and the light spot from below the dispenser 4100 and analyzing the taken picture image.

The sensor distance measuring unit 5000 includes: an imaging unit 5100 for taking a picture image of the nozzle 4152 and the light spot from below the dispenser 4100; and a display portion 5200 for displaying the taken picture image taken by the imaging portion 5100; and an analyzing unit 5300 for measuring a distance between the nozzle 4152 and the light spot on the picture image displayed on the display portion 5200.

The imaging section 5100 includes: a window portion 5110 positioned to correspond to the underside of the nozzle 4152 of the dispenser 4100 and the gap sensor 4160 during measurement and having a predetermined opacity; an imager 5120 disposed below the window portion 5110 spaced apart from the imager and configured to image a light spot and a nozzle emitted to the window portion 5110 observed through the window portion 5110; and a clamp 5130 assembled to the table 200 to be horizontally movable while supporting the window portion 5110 and the imager 5120.

The window portion 5110 includes: a light-transmitting member 5111 having a predetermined light transmittance and configured such that the nozzle 4152 and the light spot can be observed from below the window portion 5110; and a mount 5112 mounted to the jig 5130 to support the light-transmitting member 5111.

The light-transmitting member 5111 has an opacity greater than or equal to 90% and less than 100% when having a predetermined thickness. The light-transmitting member 5111 according to an exemplary embodiment includes: a glass 5111a having a predetermined thickness; and a film 5111b attached to at least one of the upper surface and the lower surface of the glass 5111 a. Therefore, the light-transmitting member having such a configuration that the glass 5111a and the film 5111b are laminated has the above-described opacity of 90% or more and less than 100%.

Meanwhile, when the light-transmitting member having opacity is not applied, an image of the nozzle is captured but an image of the light spot is not captured. Further, when the opacity of the film 5111b is less than 90%, the light spot cannot be observed better than in the case where the opacity of the film 5111b is 90%. Therefore, in the exemplary embodiment, an image of a light spot which is clear and has no positional distortion is obtained using the light-transmitting member 5111 having the opacity of not less than 90%.

Further, in the exemplary embodiment, glass 5111a has a thickness of 1mm to 4 mm. This is to prevent the position of the light spot emitted onto the light-transmitting member from being distorted and to enable a light spot image to be well formed on the light-transmitting member. That is, the following limitations exist: when the thickness of the glass 5111a is less than 1mm, positional distortion of the light spot may occur, and when the thickness of the glass 5111a exceeds 4mm, the light spot image may not be well formed on the light transmitting member.

A polyimide tape is used as the film 5111b according to an exemplary embodiment because the polyimide tape has a property such that total reflection easily occurs with respect to light or laser light, and has diffuse reflection less than general types of tapes. Thus, according to an exemplary embodiment, a sharp picture image of a light spot may be obtained from an imager by using a polyimide tape as the film 5111 b.

The mount 5112 enables both the light-transmitting member 5111 and the window 5110 to be supported on the jig 5130. The mount 5112 according to an exemplary embodiment has a hollow shape having an open central portion, and the light-transmitting member 5111 is inserted and mounted in the open portion. Of course, the mount 5112 is not limited to the above hollow shape, and may be changed into various shapes that can support the light-transmitting member 5111 and fix the window portion 5110 to the jig 5130.

A clamp 5130 supporting the window portion 5110 and the imager 5120 may be fitted and fixed to a side surface of the table 200. More specifically, the light-transmitting member 5111 is fitted on an upper portion of the jig 5130, one surface of the jig 5130 is fastened to the table 200, and the imager 5120 is fastened to a rear surface facing the one surface of the jig.

The entire imaging section 5100 is mounted by a jig 5130 to position the entire imaging section 5100 outside the table 200. At this time, the imaging section 5100 may be mounted outside the table 200 in an arbitrary direction and at an arbitrary position in an area to which the dispenser 4100 is movably reached.

Referring to fig. 1 to 7, the operation of the sensor distance measuring unit according to an exemplary embodiment and a process of measuring a separation distance between a light spot and a nozzle and adjusting the separation distance accordingly will be explained.

The step of measuring the horizontal separation distance D between the light spot and the nozzle 4152 is performed before the sealant is applied to the substrate S as a sealant application target.

First, the dispenser is moved to be positioned to correspond to an upper side of the image forming part located outside the table. For this, the cradle is moved, the dispenser is moved on the cradle separately, or both the cradle and the dispenser are moved at the same time, and thus the dispenser may be positioned to correspond to the upper side of the image forming part. At this time, the movement is performed so that the positions of the window portion 5110 and the imager 5120 of the imaging section 5100 correspond to the nozzle 4152 and the gap sensor 4160 of the dispenser 4100.

Subsequently, the gap sensor 4160 is operated to emit laser light to the window portion 5110 through the light emitting portion 4161. As such, when the laser is emitted to the window portion 5110, a light spot is formed on the window portion 5110, and since the window portion has an opacity of 90% or more than 90%, the nozzle 4152 can be recognized or observed from below the window portion 5110.

When the laser light is emitted to the window portion 5110, the imaging portion 5100 images the spot and the nozzle 4152 from below the window portion 5110. The picture image obtained by the imaging is transmitted to the display portion 5200 and displayed, and the analysis unit 5300 calculates the horizontal separation distance between the nozzle 4152 and the light spot from the light spot on the picture image and the coordinate values of the nozzle 4152.

Further, the calculated horizontal separation distance is compared with a second reference distance, and when the calculated horizontal separation distance D exceeds the second reference distance, the separation distance between the discharge portion 4150 and the light emitting portion 4161 of the gap sensor 4160 is adjusted. That is, when the calculated horizontal separation distance D exceeds the second reference distance, the first slider 4131 is horizontally moved in the direction opposite to the light emitting portion 4161 or in the direction toward the light receiving portion 4162. In contrast, when the calculated horizontal separation distance D is smaller than the second reference distance, the first slider 4131 is horizontally moved in a direction toward the light emitting portion 4161 or in a direction opposite to the light receiving portion 4162. According to the movement of the first slider 4131, the discharge portion 4150 connected to the first slider 4131 is moved together, and thus the separation distance between the nozzle 4152 and the light spot may be adjusted to the second reference distance.

When the separation distance between the nozzle 4152 and the light spot reaches the second reference distance, the imaging section 5100 is moved out of the dispenser 4100, so that the imaging section 5100 and the dispenser 4100 can not interfere with each other.

Subsequently, the sealant is applied to the substrate S while moving the dispensing unit 4000. In this case, the vertical separation distance between the substrate S and the nozzle 4152 is measured in real time while the laser light is emitted onto the substrate S by the gap sensor 4160, the up-down driving part is operated according to the measured distance, and thus the sealant is applied while the vertical separation distance between the substrate S and the nozzle 4152 is adjusted to reach the first reference distance.

In this case, when the laser is emitted onto the substrate S, the spot of the laser does not interfere with the outermost edge of the film F or the substrate S, does not deviate beyond the substrate S (as shown by P4), is located beyond the sealant application position, and is maintained at the second reference distance from the nozzle 4152. This is because the horizontal separation distance D between the light spot and the nozzle has been adjusted by the sensor distance measuring unit 5000 according to an exemplary embodiment before the sealant is applied.

Thus, the spot of the laser does not interfere with the outermost edge of the film or substrate, does not stray beyond the substrate (as shown by P4), and is emitted beyond the location where the sealant is applied to maintain the second reference distance. Accordingly, the vertical separation distance between the substrate S and the nozzle 4152 can be easily measured during the sealant application, and reliability with respect thereto is improved. Further, during the sealant application, the vertical separation distance between the substrate S and the nozzle 4152 may be thus adjusted to the first reference distance. Therefore, the quality of the sealant pattern can be improved.

According to the exemplary embodiments, a sharp picture image of a light spot may be taken without positional distortion, and thus, the measurement accuracy of the separation distance between the nozzle and the gap sensor may be improved.

Therefore, in the actual process of applying the raw material, there are the following effects: the reliability of adjusting the separation distance between the nozzle and the gap sensor is improved, and thus the quality of applying the raw material is improved.

Claims

1. A dispensing device, comprising:

a table installed such that a substrate is mounted on an upper surface thereof;

a dispenser provided with:

a nozzle installed above the stage to be horizontally movable and configured to apply a raw material toward the substrate; and

a gap sensor positioned on one side of the nozzle and configured to measure a vertical separation distance between the substrate and the nozzle by emitting light onto the substrate; and

a sensor distance measuring unit comprising:

an imaging section installed outside the stage, configured to take a picture image including the light spot and the nozzle by imaging the nozzle and the light spot emitted from the gap sensor from below the gap sensor, and configured to measure a horizontal separation distance between the nozzle and the substrate by the picture image,

wherein the gap sensor includes: a light emitting part for emitting light onto the substrate; and a light receiving part spaced apart from the light emitting part to receive the light reflected from the substrate,

the dispenser includes:

a syringe storing the raw material therein;

a first slider inserted into a lower end of the syringe, the first slider having an internal space capable of accommodating the raw material and being movable in an arrangement direction of the light emitting part and the light receiving part based on a result measured by the sensor distance measuring unit;

a discharge member having an inner space communicating with the inner space of the first slider, the discharge member being extendedly positioned between the light emitting portion and the light receiving portion and connected to the first slider; and

a screw member installed in the discharge member to move the raw material to the nozzle,

wherein the nozzle is fitted on a lower portion of the discharge member.

2. The dispensing device according to claim 1, wherein the imaging section comprises:

a window part installed outside the work table to be positioned under the dispenser to move outside the work table, and including a light-transmitting member having a light transmittance; and

an imager positioned below the window and configured to image the nozzle viewed through the window and the spot emitted from the gap sensor toward the window.

3. A dispensing device according to claim 2, wherein the light transmittance of the light transmissive member is 90% to 100%, including 90% and 100%.

4. A dispensing device according to claim 3, wherein the light-transmitting member comprises glass and a film attached to the glass.

5. The dispensing device of claim 4, wherein the film comprises polyimide tape.

6. A dispensing device according to claim 4, wherein the glass has a thickness of 0.2mm to 0.3 mm.

7. The dispensing device according to any one of claims 2 to 6, wherein the sensor distance measuring unit comprises:

an analysis unit configured to measure the horizontal separation distance between the nozzle and the light spot on the picture image taken by the imaging section, and compare the measured horizontal separation distance with a reference distance.

8. The dispensing apparatus according to any one of claims 2 to 6, wherein the dispenser is horizontally moved to a position corresponding to the upper surface of the table and moved outside the table, and the imaging section is fittingly fixed on a side surface of the table.