1341753 九、發明說明： 【發明所屬之技術領域】 本發明係關於一種平面顯示器之製造，特別是關於一種 依預定圖案以塗佈膠至基板上之點膠機。 【先前技術】 通常，平面顯示器(FPD)是一種影像顯示裝置，其較使用 陰極射線管(CRT)之電視或監視器輕、薄。此種平面顯示器包 括液晶顯示器(LCD)、電漿顯示面板(pop) '場發射顯示器 (FED)、有機發光二極體(〇led)等。 液晶顯示器藉由供應分別對應至影像資訊之資料訊號予 液ΒΘ單元以顯示欲得之影像，其中液晶單元係以矩陣形式排 列以調整液晶單元之光傳輸比例。液晶顯示器已被廣泛使 用，因其輕、薄且具有低消耗功·率與低運作電壓。在下文中， 將描述製造普遍用於液晶顯示器中之液晶面板的一種方法。 首先，於上玻璃基板形成圖案化的彩色濾光片與共用電 極。薄膜電晶體(TFT)與畫素電極_化職於面對上玻璃基 板之下玻璃基板。配向層分別先後形成於上與下玻璃基板 上’隨後摩擦以提供麵纽配向方料軸於配向層間的 液晶層之液晶分子。 為了能在上與下玻璃基板之間保持間隙，防止液晶漏 5 1341753 玻纖，膠以封閉圈之形式塗佈上與下 玻㈣基板其巾之—’ *形成軸案 玻璃基板之灿紅顯示吨Ba層於上與下 在此，為了於基板上形成勝圖案，1341753 IX. Description of the Invention: [Technical Field] The present invention relates to the manufacture of a flat panel display, and more particularly to a dispenser for applying glue to a substrate in a predetermined pattern. [Prior Art] In general, a flat panel display (FPD) is an image display device which is lighter and thinner than a television or monitor using a cathode ray tube (CRT). Such flat displays include a liquid crystal display (LCD), a plasma display panel (pop), a field emission display (FED), an organic light emitting diode (〇led), and the like. The liquid crystal display displays the desired image by supplying data signals respectively corresponding to the image information, wherein the liquid crystal cells are arranged in a matrix form to adjust the light transmission ratio of the liquid crystal cells. Liquid crystal displays have been widely used because of their lightness, thinness, and low power consumption rate and low operating voltage. Hereinafter, a method of manufacturing a liquid crystal panel commonly used in liquid crystal displays will be described. First, a patterned color filter and a common electrode are formed on the upper glass substrate. Thin film transistors (TFTs) and pixel electrodes are used to face the glass substrate under the upper glass substrate. The alignment layers are formed on the upper and lower glass substrates, respectively, and subsequently rubbed to provide liquid crystal molecules of the liquid crystal layer between the alignment layers of the alignment axes. In order to maintain a gap between the upper and lower glass substrates, to prevent liquid crystal leakage 5 1341753 glass fiber, the glue is applied in the form of a closed ring and the lower glass (four) substrate is coated with the towel - ' * forming a red display of the axis glass substrate Tons of Ba layer on top and bottom here, in order to form a winning pattern on the substrate,
Γ=:膠之喷嘴塗佈膠至基板上而於基板:形： I。依據將形成之膠圖案，相對於基板移動喷嘴。氣體供 應1應預定動至儲存膠之注射財，以施加排出壓力^ 注射益中之膝’從而自連接至注射器之嗔嘴排出膠。 當膠圖案以封賴之形式由點膠機形成，膠圖案之寬产 及厚度需-致’以防止膠圖案與影像顯示區域重疊，以及ς 黏合基板之後，以於基板之合部分轉應力不變。因此， 需要設定開始塗佈膠之塗佈起始位置，與終止塗佈膠之 結束位置，使得膠圖案之寬度及厚度一致。 如上述’當藉由氣體供魅，以自噴嘴排出封閉圈形式 之膠形成膠圖案時’膠可能通過設定之塗佈起始位置，而於 不同位置開始塗佈。 ' 此乃導因於自氣體供應器作用至膠藉由注射器内施於膠 之排出壓力·喷嘴實際排㈣過程巾，需—反應時間發生 時間延遲。因此，膠並非於設定之塗佈起始位置排出，而係 經反應時間後，始於噴嘴移至之位置排出。亦即，實際塗佈 6 1341753 膠之位置相異於設定之塗佈起始位置。 傳統技術中’由於塗佈終止位置絲於設定之塗佈起始. 位置，右设定之塗佈起始位置相異於開始實際塗佈膠之真實 塗佈起始位置’則不—致之膠圖案可能形^為解決此問題， 於經顧及反應時_設定之塗颇始位置塗佈較可能的， 但因反應咖麟_，卿此麵不驗決問題。Γ =: The nozzle of the glue is applied to the substrate on the substrate: Form: I. The nozzle is moved relative to the substrate depending on the glue pattern to be formed. The gas supply 1 should be predetermined to the injection of the storage gel to apply the discharge pressure ^ the knee of the injection medium to discharge the glue from the nozzle connected to the syringe. When the glue pattern is formed by the dispenser in the form of a seal, the wide production and thickness of the glue pattern need to be made to prevent the glue pattern from overlapping with the image display area, and after the substrate is bonded, the transfer stress of the joint portion of the substrate is not change. Therefore, it is necessary to set the starting position of the coating of the starting glue, and to terminate the end position of the coating glue so that the width and thickness of the glue pattern are uniform. As described above, when the glue is formed by the gas in the form of a closed loop, the glue may be applied at different positions by setting the coating start position. This is due to the fact that the reaction time from the gas supply to the discharge pressure of the glue applied to the glue by the syringe and the actual discharge of the nozzle (4) is delayed. Therefore, the glue is not discharged at the set coating start position, but after the reaction time, it is discharged from the position where the nozzle is moved. That is, the position of the actual coating 6 1341753 is different from the set coating starting position. In the conventional art, 'because the coating end position is at the set coating start position, the right set coating start position is different from the actual coating start position of the actual coating glue'. The glue pattern may be shaped to solve this problem, and it is more likely to be applied at the beginning of the application when the reaction is taken into account, but because of the reaction, the face is not verified.
【發明内容】 本發明提供-槪賴，其囉實際咖 圖塗=厚度並二真實塗佈起始位置塗佈膠，從而致= 之附加面向將在下列之敘述中呈現 ，_由實施本發_^ 於相對於-基板移動供給膠之—噴 ：=膝機’以 形式之膠至基板上’點膠機包含：_量噴W佈封閉圈 際開始塗佈膠的真實塗佈起始位置；以及_==以置測實 實塗佈起始位置，㈣終止塗_之辑’基於真 置。 屬示範和解釋 耑瞭解的是，前揭之概述與下 性貝，旨在提供本發明更進一步的說明。a '、 7 【實施方式】 ^本發明於下文中，參照伴隨之較佳具體實施例之圖式， 係t完全地加以描述。然而，本發明可以許多不同之形式加 貝知且不應限於此所呈現之具體實施例。相反的，提供 k些較佳具體實施例使本發明能詳盡地被揭露，且能完整傳 ，本發明之範_予在此賴巾熟知技藝者。在圖式中，層與 區域之尺寸及相對尺寸可能因為求清晰而放大。又圖式中了 相同之參照號碼代表相同之元件。 第1圖為依據本發明一具體實施例之點膠機100之透視 同’而第2圖為第】圖令之點膠機蘭之頭單元14〇之透視 θ，其係依據本發明之一具體實施例。 與m轉機_在控制111G1之控制下， 饮ί於基板丨〇移動噴嘴151時，藉由供給膠之喷嘴151塗 佈封閉圈形式之膠至基板1G上，以形祕圖案卜 上。 10。 置=機力!^包含—框架11G’且藉由之框架iig固定於地 ;框木11〇上之臺座12〇係用以支撐欲塗佈膠之基板 致動Ϊϋ，框架UG所支樓，且藉由用於臺座】20 . 或γ轴方向滑動。若喷嘴151可沿x」 多動，則堂座120可固定於框架11〇上。 1341753 頭支撐單元〗30置於臺座12〇上方 端部由框架_支撐，單元m 於臺座120上方。頭支撐單元13〇可為框架u〇: =: 藉由用於頭支樓單元130之致動器，沿γ轴方 牙 可沿Υ軸方向移動，則可蚊頭支料元_框二 升產t。右需處理大尺寸基板，可提供複數個頭支揮單元以提 頭單元140係安裝於頭支撐單元130之-側。頭單元14〇 佈膠至置於臺座12°上之基板⑴上。頭單U4。沿頭 ^撑早凡130被支樓，且可藉由用於頭單元140之X轴致動 ^沿X軸方向滑動。若臺座12〇可沿χ軸方向移動，則頭 單το 140可固定於頭支樓單元⑽上。亦可提供複數個頭單 疋’以同時形成概個卵案！>於大尺寸基板⑴上，從而提 升產能。 如第2圖所說明，頭單元14〇包含塗佈頭141。塗佈頭 ⑷包含塗佈膠之料⑸，以及連接至喷嘴⑸之注射器 152 〇 注射器152儲存膠於其中，且供給膠至喷嘴151。注射器 152連接至氣體供應器〗53(pneumaticsupp丨彳的；氣體供應器 153提供用以自噴嘴151排出膠之排出壓力。氣體供應器⑸ 提供預設壓力之空氣至儲存狀注射器丨52，輯注射器152 9 1341753 中之膠施加排出壓力’從而自連接至注射器152之噴嘴15】 排出膠。 塗佈頭141包含間隙感應器16卜間隙感應器161量測介 於基板10與噴嘴151之間隙以使間隙維持固定。頭單元14〇 包含橫戴面制單元，_以量測之賊面(未於 中顯示）。SUMMARY OF THE INVENTION The present invention provides a coating, the actual application of the coating, the thickness and the actual coating of the starting position of the coating glue, so that the additional aspect of the = will be presented in the following description, _^ Move the glue to the substrate - spray: = knee machine 'in the form of glue to the substrate' dispenser: _ volume spray W cloth closed loop to start the actual coating start position of the coating And _== to test the actual coating start position, (4) terminate the coating _ the album 'based on the true. 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 a ', 7 [Embodiment] The present invention is hereinafter fully described with reference to the accompanying drawings of the preferred embodiments. However, the invention may be embodied in many different forms and should not be limited to the specific embodiments presented herein. Rather, the preferred embodiments are provided so that this invention will be fully disclosed, and the invention can be fully disclosed. In the drawings, the dimensions and relative sizes of layers and regions may be magnified for clarity. In the drawings, the same reference numerals represent the same elements. 1 is a perspective view of a dispensing machine 100 according to an embodiment of the present invention, and FIG. 2 is a perspective view of a head unit 14 of the dispensing machine, according to one embodiment of the present invention. Specific embodiment. With the m transfer machine _ under the control of the control 111G1, when the substrate 丨〇 is moved by the nozzle 151, the glue in the form of a closed loop is applied to the substrate 1G by the nozzle 151 for supplying the glue to form a shape. 10. Set = machine power! ^ contains - frame 11G' and is fixed to the ground by the frame iig; the pedestal 12 〇 on the frame wood 11 〇 is used to support the substrate to be coated with glue, 框架 框架And by sliding for the pedestal 20 or γ axis direction. If the nozzle 151 is movable more than x", the temple 120 can be fixed to the frame 11A. 1341753 Head support unit 30 is placed above the pedestal 12 . The end is supported by the frame _, and the unit m is above the pedestal 120. The head supporting unit 13〇 can be a frame u〇: =: by the actuator for the head striking unit 130, the γ-axis square tooth can be moved along the z-axis direction, and the mosquito head material element _ frame two liters Produce t. The large-sized substrate needs to be processed to the right, and a plurality of head fulcrum units can be provided to mount the head unit 140 to the side of the head supporting unit 130. The head unit 14 is glued to the substrate (1) placed on the pedestal 12°. Head single U4. Along the head, the 130 is supported, and can be slid in the X-axis direction by the X-axis actuation of the head unit 140. If the pedestal 12 〇 is movable in the x-axis direction, the head το 140 can be fixed to the head sill unit (10). A number of headers can also be provided to form an egg case at the same time! > on a large-sized substrate (1) to increase productivity. As illustrated in Fig. 2, the head unit 14A includes a coating head 141. The coating head (4) contains a coating material (5), and a syringe 152 connected to the nozzle (5). The syringe 152 stores the glue therein and supplies the glue to the nozzle 151. The syringe 152 is coupled to a gas supply 153 (pneumaticsupp®; the gas supply 153 provides a discharge pressure for discharging the glue from the nozzle 151. The gas supply (5) provides a preset pressure of air to the storage syringe 丨52, a syringe The glue in 152 9 1341753 applies a discharge pressure 'and thus self-connects to the nozzle 15 of the syringe 152.} The glue is discharged. The coating head 141 includes a gap sensor 16 and a gap sensor 161 measures the gap between the substrate 10 and the nozzle 151 so that The gap remains fixed. The head unit 14A includes a transversely worn unit, _ measured by the thief face (not shown).
塗佈頭⑷藉由z轴驅動單元m上、下移動， J嘴⑸之上下位置。Z轴驅動單元171將塗佈頭單元⑷ 牛固地耗合至可藉由如馬達之驅㈣以沿 元，因而沿Z軸方向升、降塗佈頭⑷。㈣认舉早The coating head (4) is moved up and down by the z-axis driving unit m, and the J-nozzle (5) is positioned above and below. The Z-axis driving unit 171 solid-states the coating head unit (4) so as to be able to raise and lower the coating head (4) in the Z-axis direction by, for example, driving the motor (4). (4) Recognizing early
γ軸可藉由YW"動單元1〜 ^丫抽方向水平移動嘴嘴15卜丫轴驅私1 172可安裝於z軸驅動料m上。亦即，由=早疋 單元171牢_合至Y軸驅動單心2之；^動 y軸驅動單it m能藉由如馬達之驅_ ，其中 塗佈頭⑷刺_元171一同沿;二向· 塗佈頭⑷更可包含用以微The γ-axis can be mounted on the z-axis driving material m by the YW" moving unit 1~^ 丫 pumping direction horizontally moving the nozzle 15 and the shaft driving 1 172. That is, the = early 疋 unit 171 is firmly coupled to the Y-axis to drive the single core 2; the y-axis driving single it m can be driven by, for example, a motor, wherein the coating head (4) thorns _ 171 together; The two-way coating head (4) can also be used to micro
軸驅動單元173。此案例中，提4 =下位置之ZZ =:151可藉―動單元173=:頭二中’ 注射器152,㈣隙感應相皆安裝=舉 151 1341753 180 依據此實施例，點賴Ηχ)包含心量 :之真?塗佈起始位置(叫之量測單元。使用=塗佈 里測真貫塗佈起始位置之原因如下述。Axis drive unit 173. In this case, mention 4 = the lower position of ZZ =: 151 can be borrowed by the "moving unit 173 =: the first two of the 'injector 152, (four) gap sensing phase are installed = 151 1341753 180 according to this embodiment, depending on) Heart volume: true? Coating starting position (called the measuring unit. The reason for using the = coating in the coating to determine the starting position of the coating is as follows.
点知當藉由氣體供應器153自喷嘴⑸排出膠以形 成如第2圖中所說明之封_形式之膠圖案P時，自氣體供 應器153開始運作至施加排出壓力至注射器152中之勝，且 噴嘴⑸後開始塗佈膠之過針，存在—反應時間。夕 於疋’如第3與4圖中所說明，當塗佈谬至基板上，膠 並非立即排出於喷嘴151開始移動之設定塗佈起始位置 (s^ ’而是經過氣體供應器153之反應時間後，實際排出於噴 嘴151移至之位置。亦即，膠實際塗佈之位置可能異於設定 塗佈起始位置。此現象之發生可源自上素以外之不同因 素0 若基於設定塗佈起始位置而設定塗佈結束位置之後乃塗 佈膠，由於真貫塗佈起始位置與設定塗佈起始位置間之差 異，膠圖案P可能變得不一致。因此，為使膠圖案p之寬度 及厚度一致，需量測實際開始塗佈膠之真實塗佈起始位置， 使得膠之塗佈可基於真實塗佈起始位置而終止。 1341753 如第2圖中所說明’量測單元18〇係安裝於支撐噴嘴 之頭單元140 ’以量測自喷嘴151實際排出膠之位置。因此， 虽膠自喷嘴151排出並塗佈至基板1〇上時，量測單元可 與噴嘴151 —同相對於基板1〇移動。 3，提供複數個碩單元之案例中，複數個量測單元將以各 量測單元安裝於各頭單元中之形式提供。其理由為使所有之 • 頭單元形成具有—致寬度及厚度之膠圖案，因為各頭單元可 ，有，同之塗佈起始位置。量測單元⑽包含相機組件⑻ /、計算組件182。當喷嘴⑸相對於基板1〇移動，相機 拍攝喷嘴⑸_過之基板區域之照片，且提卿片至 歧件182。計算組件182自相機組件⑻接收相機組件⑻ 之照片及位置資訊，並基於相機組件⑻之照片及位 計算出真實塗佈起始位置。 ° 準例來說 叶鼻組件182分析由相機組件181 :錢，，並判定喷嘴151是否實際開始塗佈二 f ’右計舁組件182判定噴嘴⑸實際開始塗佈膠 、…、片參考位置作比較，於料算㈣實塗佈起始位 目娜181相對於基板1G移動，而照片參 ⑻移動時，計算組件182即時接收介於相機_ 中央人育嘴！51中央間之距離值，以及喷嘴⑸之位置 12 1341753 值，從而間接獲取照片參考位置 舉例來說，藉由測試或模擬而得之膠圖案資料，於 膝至基板10上之前，輸入至控制器1〇1。在此，如第2 ^ 2明，使用膠圖案資料以封閉圈之形式，形成具有一 又及厚度之顧案P。糊㈣料包含關於塗佈触位置次 料、關於塗佈結束位置之資料，以及關於噴嘴⑸與基板^ 間，自於塗佈起始位置開始塗佈膠時至於塗佈結束位置 塗佈膠時’相對位置變化之資料β 、 若於膠圖案資料輸入至控制器〗01時，控制器101自旦 測單元180接收到真實塗佈起始位置，則依據膠圖案資料= 真實塗佈起始位置與塗佈起始位置間之差異，膠圖案資料令 之塗佈結束位置被重設。再者，控制器1〇1基於噴嘴Μ〗與 基板10間相對位置變化之相關資料，自於真實塗佈起始位置 開始塗佈膠起，直到於重設之塗佈結束位置塗佈终止膠止， 控制膠之塗佈，使得形成的膠圖案具有一致之寬度及厚度。 如上述，依據本發明，藉由量測實際開始塗佈膠之真實 1341753 ，佈起始位置，以及藉由基於真實㈣起始位置而塗佈膠， 可形成具有-致紐及厚度之膠圖案。因此，防止膠圖案盘 =像顯示區域重4是有可能的。再者，於將基板黏合後^ 土板之黏合部分雜應力—致，而因此將基板緊密地點合在 一起，亦是有可能的。 一 2，當為提升產能，而於大尺寸基板上藉由複數個頭 早疋同時形成複數個膠_時，由於量測得各頭單元之 塗佈起始位置，且基於真實塗佈起始位置而塗佈膠，全部之 碩单元可形成具有一致寬度及厚度之膠圖案。 熟此技藝者當知本發明可作許多修改與變細不惊離盆 =範轉。是故：後，t專利範圍與其同等物所界； 乾圍内，本發明旨在涵蓋其本身之修改與變化。 【圖式簡單說明】 伴隨之圖式包含提供此發明更進—步 =刚書之一部分，其說明本發明之具二施= 於解釋本發明之原理描述。 同用 在圖式十 第1圖為依據本發明之—實施例之點膠機 第2圖為第1圖中所說明，依據本發明 · ’ 膠機之頭單元的透視圖； a 例之點 Μ 1341753 第3和4圖為用以解釋一處理之圖，於該處理中，第1 圖中所說明之點膠機之量測單元量測塗佈起始位置。It is known that when the glue is discharged from the nozzle (5) by the gas supply 153 to form the seal pattern P as shown in Fig. 2, the operation from the gas supply 153 to the application of the discharge pressure to the syringe 152 is won. And after the nozzle (5), the over-needle of the coating is started, and there is a reaction time. As illustrated in Figures 3 and 4, when the coating is applied to the substrate, the glue is not immediately discharged to the set coating start position where the nozzle 151 starts to move (s^' but passes through the gas supply 153 After the reaction time, it is actually discharged to the position where the nozzle 151 is moved. That is, the actual coating position of the glue may be different from the set coating start position. This phenomenon may occur from different factors other than the upper element. After the coating start position is set and the coating end position is set, the glue is applied, and the glue pattern P may become inconsistent due to the difference between the true coating start position and the set coating start position. Therefore, in order to make the glue pattern The width and thickness of p are the same, and it is necessary to measure the actual coating start position of the coating glue, so that the coating of the glue can be terminated based on the actual coating start position. 1341753 As described in Fig. 2 The unit 18 is attached to the head unit 140' supporting the nozzle to measure the position at which the glue is actually discharged from the nozzle 151. Therefore, although the glue is discharged from the nozzle 151 and applied to the substrate 1 , the measuring unit can be coupled to the nozzle 151. - the same as the substrate 1 3. In the case of providing a plurality of master units, a plurality of measuring units will be provided in the form of mounting units in each head unit. The reason is that all of the head units are formed to have a width and thickness. The glue pattern, because each head unit can, and is the same as the coating start position. The measuring unit (10) includes a camera assembly (8) /, a calculation component 182. When the nozzle (5) moves relative to the substrate 1 , the camera captures the nozzle (5) _ A photograph of the substrate area, and the sheet is raised to the manifold 182. The computing component 182 receives the photo and position information of the camera assembly (8) from the camera assembly (8) and calculates a true coating start position based on the photograph and position of the camera assembly (8). ° For example, the leaf nose assembly 182 analyzes the camera assembly 181: money, and determines whether the nozzle 151 actually begins to apply the second f' right meter assembly 182 to determine that the nozzle (5) actually begins to apply the glue, ..., the sheet reference position In comparison, in the calculation (4), the actual coating start position MN 181 moves relative to the substrate 1G, and when the photo reference (8) moves, the calculation component 182 immediately receives the camera _ Central People's Yuzui! Offset, and the position of the nozzle (5) 12 1341753, thereby indirectly obtaining the photo reference position. For example, the glue pattern data obtained by testing or simulation is input to the controller 1〇1 before the knee is on the substrate 10. Here, as shown in the second paragraph, the rubber pattern data is used in the form of a closed loop to form a case P having a thickness and a thickness. The paste (four) material contains information on the coating touch position and the coating end position. And the information about the relative position change of the nozzle (5) and the substrate, when the glue is applied from the coating start position to the coating end position, and if the glue pattern data is input to the controller〗 01 When the controller 101 receives the real coating start position from the measuring unit 180, the glue pattern data is used to make the coating end position according to the glue pattern data=the difference between the actual coating starting position and the coating starting position. Was reset. Furthermore, the controller 1〇1 starts to apply the glue from the actual coating start position based on the relevant information of the relative position change between the nozzle and the substrate 10, and the coating is terminated at the coating end position of the reset coating. Then, the coating of the glue is controlled so that the formed rubber pattern has a uniform width and thickness. As described above, according to the present invention, by measuring the actual starting 1341753 of the coating glue, the starting position of the cloth, and by applying the glue based on the true (four) starting position, a glue pattern having a thickness and a thickness can be formed. . Therefore, it is possible to prevent the rubber pattern disk = like the display area weight 4. Furthermore, it is also possible to closely bond the substrates together after the bonding of the substrate to the adhesion of the soil plate. In the case of increasing the productivity, a plurality of glues are formed on the large-sized substrate by a plurality of heads at the same time, and the coating start position of each head unit is measured, and based on the actual coating start position. With the coating glue, all the units can form a glue pattern with a uniform width and thickness. It is known to those skilled in the art that the present invention can be modified and thinned. Therefore, after the patent scope and its equivalents are bounded; within the scope of the invention, the invention is intended to cover modifications and variations thereof. BRIEF DESCRIPTION OF THE DRAWINGS The accompanying drawings are included to provide a further description of the invention, and are intended to be illustrative of the principles of the invention. Figure 1 is a first embodiment of a dispenser according to the present invention. Figure 2 is a perspective view of the head unit of the melter according to the present invention. Μ 1341753 Figures 3 and 4 are diagrams for explaining a process in which the measuring unit of the dispenser illustrated in Fig. 1 measures the coating start position.
【主要元件符號說明】 P 膠圖案 RL 真實塗佈起始位置 SL 設定塗佈起始位置 10 基板 100 點膠機 101 控制器 110 框架 120 臺座 130 頭支撐單元 140 頭單元 141 塗佈頭 142 提舉塊 151 喷嘴 152 注射器 153 氣體供應器 161 間隙感應器 171 Z軸驅動單元 172 Y軸驅動單元 173 ZZ軸驅動單元 180 量測單元 1341753 181 相機組件 計算組件 182[Main component symbol description] P Glue pattern RL Real coating start position SL Set coating start position 10 Substrate 100 Dispenser 101 Controller 110 Frame 120 pedestal 130 Head support unit 140 Head unit 141 Coating head 142 Lifting block 151 Nozzle 152 Syringe 153 Gas supply 161 Clearance sensor 171 Z-axis drive unit 172 Y-axis drive unit 173 ZZ-axis drive unit 180 Measurement unit 1341753 181 Camera component calculation component 182