KR20130005128A - Glass panel tranferring apparatus - Google Patents

Abstract

PURPOSE: An apparatus for transferring a glass panel is provided to prevent the effective region of a glass panel from being attached to an absorption part and to prevent the damage of the effective region of a glass panel. CONSTITUTION: A guide rail(61) is extended in a transferring direction. A transferring member(62) is movably installed on the guide rail. An absorption member(63) absorbs a glass panel and supports. The absorption member absorbs a non-effective region of the glass panel and supports an absorption part. A transferring unit(65) moves along the guide rail.

Description

Glass Panel Transfer Device {GLASS PANEL TRANFERRING APPARATUS}

The present invention relates to a glass panel transfer apparatus which is provided in an array test apparatus for inspecting a glass panel.

In general, a flat panel display (FPD) is an image display device that is thinner and lighter than a television or a monitor employing a CRT. The flat panel display includes a liquid crystal display (LCD), a plasma display panel (PDP), a field emission display (FED), organic light emitting diodes (OLED), and the like. It is developed and used.

Among such flat panel displays, a liquid crystal display is a display device in which an original image can be displayed by controlling a light transmittance of liquid crystal cells by individually supplying data signals according to image information to liquid crystal cells arranged in a matrix form. Liquid crystal displays are widely used due to their thin, light, low power consumption and low operating voltage. The manufacturing method of the liquid crystal panel generally employed in such a liquid crystal display will be described.

First, a color filter and a common electrode are formed on an upper substrate, and a thin film transistor (TFT) and a pixel electrode are formed on a lower substrate corresponding to the upper substrate. Subsequently, after the alignment films are applied to the substrates, the alignment films are rubbed to provide a pre-tilt angle and an orientation direction to the liquid crystal molecules in the liquid crystal layer to be formed therebetween.

Then, the paste is applied to at least one substrate in a predetermined pattern to form a paste pattern so as to maintain a gap between the substrates and to prevent the liquid crystal from leaking to the outside and to seal the gaps between the substrates. Through the process of forming a liquid crystal layer in the liquid crystal panel is manufactured.

During this process, the gate line and data lines of the thin film transistor TFT and the lower substrate (hereinafter, referred to as the "glass panel") on which the pixel electrodes are formed are inspected for defects such as disconnection of color lines and color defects of the pixel cells. The process will be carried out.

In the inspection process of the glass panel, a glass panel conveying apparatus for conveying the glass panel brought into the array test apparatus to the test unit is used. The glass panel conveying apparatus comprises an adsorption member for adsorbing and supporting the glass panel, and a conveying unit for conveying the adsorption member in a straight line. On the other hand, in the glass panel, a thin film transistor (TFT) and a pixel electrode are formed so that a thin film transistor (TFT) and a pixel electrode are not formed between the effective area that is applied to the actual product and the effective area. The virtual cut line to be cut is divided into an invalid area passing by. Since the adsorption member of the conventional glass panel conveying apparatus adsorbs the glass panel without distinguishing between the effective area and the ineffective area of the glass panel, a problem occurs that the effective area of the glass panel is adsorbed on the adsorption member. There is a problem that the quality of the product is degraded due to damage to the effective area.

The present invention is to solve the above problems of the prior art, an object of the present invention is to provide a glass panel conveying apparatus capable of conveying the glass panel while preventing damage to the effective area of the glass panel.

In the glass panel transport apparatus according to the present invention for achieving the above object, a thin film transistor and a pixel electrode is formed, and the non-effective area disposed between the plurality of effective areas and the plurality of effective areas are spaced at a predetermined interval. A glass panel conveying apparatus for conveying a glass panel having: a guide rail extending in a direction in which the glass panel is conveyed, a movable member installed to be movable on the guide rail, and installed on the movable member; And an adsorption member for adsorbing and supporting the panel, wherein the adsorption member is formed in a size and shape that does not contact the effective area of the glass panel, and may have an adsorption part for adsorbing and supporting an invalid area of the glass panel. .

The glass panel conveying apparatus according to the present invention is configured so that the shape of the adsorption part to which the glass panel is adsorbed corresponds to the shape of the non-effective area of the glass panel so that only the non-effective area of the glass panel is adsorbed to the adsorption part, By preventing the effective area of the glass panel from adsorbing on the glass panel, the effective area of the glass panel can be prevented from being damaged during the transport of the glass panel.

1 is a perspective view showing an array test apparatus provided with a glass panel transfer apparatus according to a first embodiment of the present invention.
Figure 2 is a schematic diagram showing a glass panel conveyed by the glass panel conveying apparatus according to the first embodiment of the present invention.
3 is an enlarged view of a portion of the glass panel of FIG. 2.
4 to 6 is a perspective view showing a glass panel transport apparatus according to a first embodiment of the present invention.
7 is a side view of the glass panel conveying apparatus of FIG. 4.
8 and 9 are schematic views showing the operation of the glass panel transfer apparatus of FIG.
10 and 11 are schematic views showing the alignment and transfer operation of the glass panel using the glass panel transfer device of FIG.
12 is a perspective view showing an adsorption member of the glass panel transport apparatus according to the second embodiment of the present invention.
13 is a perspective view showing another example of the adsorption member of the glass panel transport apparatus according to the second embodiment of the present invention.
14 is a perspective view showing an adsorption member of the glass panel transport apparatus according to the third embodiment of the present invention.
15 is a perspective view showing another example of the adsorption member of the glass panel transport apparatus according to the third embodiment of the present invention.

Hereinafter, with reference to the accompanying drawings will be described a preferred embodiment of a glass panel transfer apparatus and an array test apparatus according to the present invention.

As shown in FIG. 1, the array test apparatus according to the present invention includes a base frame 10, a loading unit 30 for loading a glass panel P, and a glass panel loaded by the loading unit 30. It may include a test unit 20 for performing the inspection (P), and the unloading unit 40 for unloading the glass panel (P) is completed by the test unit 20.

The test unit 20 inspects the electrical defect of the glass panel P, and includes a light transmitting support plate 21 on which the glass panel P loaded by the loading unit 30 is disposed, and a light supporting plate ( Probe for applying an electrical signal to the test module 22 for inspecting the electrical defect of the glass panel (P) disposed on the 21 and the electrode of the glass panel (P) disposed on the translucent support plate 21 It may be configured to include a module 23, a control unit (not shown) for controlling the test module 22 and the probe module 23.

The test module 22 may be installed to be movable in the X-axis direction on the test module support frame 223 extending in the X-axis direction from the upper side of the light transmitting support plate 21. In addition, the test module 22 may be provided in plural along the extension direction (X-axis direction) of the test module support frame 223. The test module 22 is disposed above the glass panel P disposed on the light transmitting support plate 21 to detect whether the substrate S is defective. The test module 22 may include a modulator 221 disposed adjacent to the glass panel P disposed on the translucent support plate 21, and an imaging device 222 for imaging the modulator 221. Can be.

The test unit 20 may be divided into two types, a reflection method and a transmission method. In the case of the reflection method, the light source is disposed together with the test module 22, and a reflective layer is provided on the modulator 221 of the test module 22, whereby the light emitted from the light source is incident on the modulator 221. After the reflection from the reflective layer of the modulator 221, by measuring the light amount of the reflected light, it is detected whether the substrate (S) is defective. In the case of the transmission method, a light source is provided below the light transmission support plate 21, and thus, by measuring the amount of light emitted from the light source and passing through the modulator 221, the defect of the substrate S can be detected. do. Both the reflection method and the transmission method may be applied to the test unit 20 of the array test apparatus according to the present invention.

In the modulator 221 of the test module 22, the amount of light reflected (in the case of reflection) or the amount of light transmitted (in the case of transmission) is reflected according to the magnitude of the electric field generated between the glass panel P. A modifying electro-optical material layer is provided. The allergen layer is made of a material whose specific properties are changed by an electric field generated when electricity is applied to the glass panel P and the modulator 221 to change the amount of light incident on the allergen layer. The all-optical material layer is made of a material having a characteristic of being arranged in a predetermined direction according to the size of the electric field, and consists of a liquid crystal (LC) or a polymer dispersed liquid crystal (PDLC) that polarizes light incident thereto. Can be.

The probe module 23 may be arranged at predetermined intervals along the probe module support frame 231 extending in the X-axis direction and the length direction (X-axis direction) of the probe module support frame 231, and the plurality of probe pins ( It may be configured to include a probe head 233 is provided.

The probe module support frame 231 may be connected to the Y axis driving unit 235 to move in a direction (Y axis direction) orthogonal to the length direction (X axis direction) of the probe module support frame 231. An X axis driving unit 236 may be provided between the probe module support frame 231 and the probe head 233 to move the probe head 233 in the longitudinal direction of the probe module support frame 231. As the Y-axis driving unit 235 and / or the X-axis driving unit 236, a linear moving mechanism such as a linear motor or a ball screw device may be applied.

The loading unit 30 supports the glass panel P to be inspected and transfers the glass panel P onto the light-transmitting support plate 21, and the unloading unit 40 is inspected. While supporting the completed glass panel (P) serves to transfer the glass panel (P) from the transparent support plate 21. The loading unit 30 and the unloading unit 40 are disposed to be spaced apart at predetermined intervals, the plurality of support plates 50 on which the glass panel P is mounted, and the glass panel conveying for transporting the glass panel P. Device 60 may be provided.

The support plate 50 may have an air injection hole 51 through which air for supporting the glass panel P is injected, and the air hole 51 may be connected to an air supply device (not shown) for supplying air. Can be.

As shown in FIGS. 2 and 3, the glass panel P, which is inspected by the array test apparatus according to the present invention, includes a plurality of thin film transistors (TFTs) and pixel electrodes that are applied to actual products. The thin film transistor TFT may be divided into an effective area PB disposed between the effective area PA, the outer side of the glass panel P, and the plurality of effective areas PA, and the thin film transistor TFT and the pixel electrode are not formed. . The plurality of effective areas PA are disposed to be spaced apart from each other at predetermined intervals. A virtual cut schedule line CL, which serves as a reference for cutting the glass panel P, may pass through the ineffective area PB.

As shown in FIG. 3, the ineffective area PB includes a plurality of X-axis extension parts BX extending linearly in the X-axis direction around the effective area PA, and around the effective area PA. It may be composed of a plurality of Y-axis extension (BY) extending in a straight line in the Y-axis direction. Each X-axis extension portion BX has a width WBY in the Y-axis direction. The plurality of X-axis extension parts BX are spaced apart at a predetermined interval WY in the Y-axis direction with one effective area PA therebetween. Each Y-axis extension part BY has a width WBX in the X-axis direction. The plurality of Y-axis extension parts BY are spaced apart at a predetermined interval WX in the X-axis direction with one effective area PA therebetween. Further, each of the X-axis extension part BX and the Y-axis extension part BY cross each other at the intersection portion A.

4 to 9, the glass panel transport apparatus 60 according to the first embodiment of the present invention may be provided in plurality in the loading unit 30 and the unloading unit 40, respectively. The glass panel conveying apparatus 60 includes a guide rail 61 extending in a direction parallel to the direction in which the glass panel P is conveyed (Y-axis direction), and a movement provided to be movable on the guide rail 61. A member 62 and an adsorption part 632 on which the lower side of the glass panel P is adsorbed and supported are provided, and an adsorption member 63 installed on the movable member 62 so as to be rotatable in a horizontal direction. The elevating unit 64 which is installed on the member 62 and raises and lowers the suction member 63 in the vertical direction (Z-axis direction), and is provided between the guide rail 61 and the movable member 62 to move the movable member 62. ) Is transported to the guide rail 61 along the transfer unit 65, the one end is fixed to the adsorption member 63, the elastic member 66 extending in the downward direction, and the movable member 62 is fixed to the elastic member It may be configured to include a support member 67 for supporting the moveable 66 in the vertical direction.

One or more adsorption holes 631 may be provided in the adsorption part 632 of the adsorption member 63, and an air suction device (not shown) may be connected to the adsorption hole 631. The adsorption part 632 may protrude in the vertical direction (Z-axis direction) with respect to the other part of the adsorption member 63, and thus, the lower surface of the glass panel P may be adsorbed to the adsorption part 632. have. As the air is sucked through the adsorption hole 631 by the operation of the air suction device, the lower side surface of the glass panel P may be firmly adsorbed to the upper side surface of the adsorption part 632.

As shown in FIG. 5, the adsorption member 63 may be provided with two adsorption portions 632 spaced apart in the Y-axis direction. Of course, the present invention is not limited to a configuration in which two adsorption parts 632 are provided on the adsorption member 63, and two or more adsorption parts 632 may be provided on one adsorption member 63. The width WSY of the respective adsorption portions 632 in the Y-axis direction may be formed to be equal to or less than the width WBY of the X-axis extension portion BX in the Y-axis direction among the ineffective regions PB. In addition, the interval WY between the two adsorption portions 632 is set equal to the interval WY between the two X-axis extension portions BX. As described above, each of the adsorption parts 632 is formed in a size and shape that does not contact the effective area PA of the glass panel P, and an interval WY between the plurality of adsorption parts 632 is ineffective area. By setting the same as the interval WY between the X-axis extension parts BX in the PB, the adsorption part 632 is allowed to adsorb the X-axis extension parts BX among the ineffective areas PB of the glass panel P. Can be.

As another example of the adsorption member 63, as shown in FIG. 6, the adsorption member 63 may be provided with two adsorption portions 632 spaced apart in the X-axis direction. Of course, the present invention is not limited to a configuration in which two adsorption parts 632 are provided on the adsorption member 63, and two or more adsorption parts 632 may be provided on one adsorption member 63. The width WSX of the adsorption part 632 in the X-axis direction may be formed to be equal to or less than the width WBX of the Y-axis extension part BY in the X-axis direction of the ineffective area PB. In addition, the interval WX between the two adsorption units 632 is set equal to the interval WX between the two Y-axis extension units BY. As such, each adsorption part 632 is formed in a size and shape that does not contact the effective area PA of the glass panel P, and the space WX between the plurality of adsorption parts 632 is ineffective area. By setting the same as the interval WY between the Y-axis extension parts BY in the PB, the adsorption part 632 is allowed to adsorb the Y-axis extension parts BX among the ineffective areas PB of the glass panel P. Can be.

As such, the adsorption part 632 of the adsorption member 63 is formed to correspond to the shape of the ineffective area PB of the glass panel P, and is formed to have a size and shape that does not contact the effective area PA. The non-effective area PB of the glass panel P may be contacted and adsorbed to the adsorption part 632, and the effective area PA of the glass panel P may not be in contact with the adsorption part 632.

On the other hand, the adsorption member 63 is rotatable between the adsorption member 63 and the lifting unit 64 so that the adsorption member 63 can be rotatably installed in the horizontal direction on the movable member 62. Adsorbing member support portion 68 for supporting may be provided. The adsorption member support portion 68 may include a rotation shaft 681 connected to the rotation center of the adsorption member 63 and a rotation shaft support portion 682 to which the rotation shaft 681 is rotatably connected.

The elevating unit 64 includes a cylinder 641 installed under the suction member support 68 and operated by hydraulic or pneumatic pressure, and a rod 642 connecting the cylinder 641 and the suction member support 68. It can be configured. By this configuration, the rod 642 moves in the vertical direction by the driving of the cylinder 641, whereby the suction member support portion 68 connected to the rod 642 is moved in the vertical direction by the suction member. 63 can be elevated in the vertical direction. However, the present invention is not limited to the configuration in which the adsorption member support 68 and the lifting unit 64 are integrally connected, and the lifting unit 64 and the suction member support 68 are independently installed on the moving member 62. As a result, the lifting unit 64 may lift the suction member 63 in the vertical direction, and the suction member support portion 68 may support the suction member 63 to the movable member 62 to be rotatable. . In addition, the present invention is not limited to the configuration in which the elevating unit 64 includes a cylinder 641 and the rod 642, the elevating unit 64 is a structure or a linear motor is connected to the rotating motor and the ball screw is adopted. Various configurations that can raise and lower the adsorption member 63 such as a structure may be applied. The lifting unit 64 is a glass panel (P) in the adsorption portion 632 of the adsorption member (63) when moving the glass panel (P) or adjusting the position of the glass panel (P). The adsorption part 632 may be lifted from the glass panel P when the operation of raising the adsorption member 63 to be in contact with each other and moving the glass panel P or adjusting the position of the glass panel P is completed. Serves to lower the adsorption member 63 so as to be spaced apart.

The transfer unit 65 may include a stator 652 disposed in the longitudinal direction (Y-axis direction) of the guide rail 61 and a mover 651 connected to the moving member 62. As the transfer unit 65, a linear motor in which the stator 652 includes a permanent magnet and the mover 651 includes an electromagnet may be applied. However, the present invention is not limited to this configuration, the transfer unit 65, such as a ball screw device installed between the guide rail 61 and the moving member 62, a moving member such as a cylinder operating by hydraulic or pneumatic pressure ( Various configurations capable of linearly moving 62) along the guide rail 61 may be applied.

On the other hand, in the glass panel conveying apparatus 60 according to the first embodiment of the present invention, the adsorption member 63 is perpendicular to the direction (Y-axis direction) in which the glass panel P is conveyed (the X-axis direction). It may be configured to further include a mobile unit (69) for moving to. The moving unit 69 is provided below the moving member 62 and is supported by the support part 691 which is connected to the guide rail 61, and the screw shaft 692 is installed between the support part 691 and the moving member 62. And it can be configured to include a ball screw device including a rotating motor (693) for rotating the screw shaft (692). By this configuration, the moving member 62 can be moved in the X-axis direction by the operation of the moving unit 69, and thus, the adsorption member 63 connected to the moving member 62 is moved in the X-axis direction. The glass panel P adsorbed on the adsorption member 63 may be moved in the X-axis direction. The moving unit 69 may serve to adjust the position of the glass panel P in the X-axis direction in the state where the glass panel P is carried on the upper side of the support plate 50. On the other hand, the present invention is not limited to the configuration in which the ball screw device is applied to the mobile unit 69, the mobile unit 69 is a linear motor installed between the guide rail 61 and the moving member 62, hydraulic or Various configurations may be applied to linearly move the moving member 62 such as a cylinder operated by pneumatic pressure in a direction (X-axis direction) orthogonal to the longitudinal direction (Y-axis direction) of the guide rail 61.

One end 661 of the elastic member 66 is a bolt, nut or rivet at a position eccentric from a rotation center of the suction member 63 (a portion where the suction member 63 is connected to the rotation shaft 681) at a predetermined interval. It can be fixed to the lower side of the adsorption member (63) through the fastening means. The elastic member 66 may be formed in a plate shape extending downward, and the other end 663 of the elastic member 66 may be a free end. The elastic member 66 may be formed of a metal or synthetic resin having a predetermined elasticity.

The supporting member 67 is fixed to the moving member 62 to guide the movement of the elastic member 66 in the vertical direction and to support the central portion 662 of the elastic member 66. The support member 67 may be fixed to the movable member 62 by being installed on the upper side of the movable member 62 and fixed to the connecting member 621 extending upward. However, the present invention is not limited to this configuration, the configuration in which the support member 67 is directly fixed to the upper side of the moving member 62 may be applied. The supporting member 67 is formed of the elastic member 66 such that the elastic member 66 is positioned between the first member 671 in contact with one side of the elastic member 66 and the first member 671. It may be configured to include a second member 672 in contact with the side. As shown in FIG. 8, when the elastic member 60 moves up and down with the adsorption member 63 according to the operation of the lifting unit 64, the first member 671 and the second member 672 may be elastic members. It serves to support both sides of the elastic member 66 so that the position of the 66 in the horizontal direction does not change. In addition, as shown in FIG. 9, when the adsorption member 63 is rotated by an external force, the first member 671 and the second member 672 have one end 661 of the elastic member 66 as the adsorption member. While allowing deformation in the rotational direction of the 63, the elastic member 66 serves to support the central portion 662 of the elastic member 66 so as not to be separated from the support member 67.

According to the configuration in which one end 661 of the elastic member 66 is fixed to the adsorption member 63 and the central portion 662 of the elastic member 66 is fixed to the movable member 62 through the support member 67, FIG. As shown in FIG. 9, when the adsorption member 63 is rotated by an external force acting on the adsorption member 63, one end 661 of the elastic member 66 has an elastic limit in the rotational direction of the adsorption member 63. It is modified below. That is, when the adsorption member 63 is rotated, the elastic member 66 is deformed into a shape bent in the direction in which the adsorption member 63 is rotated. When the external force for rotating the adsorption member 63 does not act on the adsorption member 63, the adsorption member 63 is rotated by the elastic restoring force to return the elastic member 66 to its original state. Can be returned to the state.

Hereinafter, the operation of the array test apparatus according to the first embodiment of the present invention configured as described above will be described.

First, when the glass panel P to be inspected is carried in the upper side of the support plate 50 and air is injected into the upper side of the support plate 50 through the air injection hole 51, the glass panel ( P) is positioned in a suspended state above the support plate 50. At this time, the suction member 63 is raised by the operation of the elevating unit 64 so that the lower side of the glass panel P and the suction part 632 come into contact with each other, and at the same time, air is sucked through the suction hole 631. As a result, the lower surface of the glass panel P is adsorbed to the adsorption part 632 of the adsorption member 63.

At this time, the plurality of adsorption parts 632 of the adsorption member 63 are formed to correspond to the shape of the non-effective area PA of the glass panel P, and the intervals WX between the plurality of adsorption parts 632 ( Since WY is formed to correspond to the interval WX (WY) between the non-effective areas PA, only the non-effective area PA of the glass panel P is adsorbed to the adsorption part 632 of the adsorption member 63. The effective area PA is not adsorbed by the adsorption part 632. Therefore, damage to the effective area PA, which may occur when the effective area PA of the glass panel P is adsorbed by the adsorption part 632, and the deterioration of the product quality may be prevented.

On the other hand, when the non-effective area PA of the glass panel P is adsorbed by the adsorption part 632 of the adsorption member 63, and the moving member 62 moves along the guide rail 61, the glass panel (P) may be transferred to the test unit 20 or from the test unit 20.

When the glass panel P is conveyed to the upper side of the light transmitting support plate 21, the suction member 63 is lowered by the operation of the lifting unit 64 while the suction of air through the suction hole 631 is blocked, and the support is lowered. As the injection of air from the air injection hole 51 of the plate 50 is blocked, the glass panel P is in contact with the upper surface of the translucent support plate 21, the probe head 233 is lowered, and the probe pin is glass. The electrode of the panel P is pressed to apply an electric signal to the electrode of the glass panel P. Then, the test module 22 is lowered so that electricity is applied to the modulator 221 while the modulator 221 is adjacent to the upper side of the glass panel P.

At this time, an electric field is generated between the glass panel P and the modulator 221, and the characteristics of the all-optical material constituting the all-optical material layer are changed by the electric field. Accordingly, in the case of the reflection method, the amount of light that is incident from the light source to the modulator 221 and then reflected by the reflection layer of the modulator 221 is changed. In the case of the transmission method, the light emitted from the light source and passed through the modulator 221 is changed. The amount of light is changed. Therefore, the amount of light may be analyzed from the image of the modulator picked up by the imaging device 222 to detect the magnitude of the electric field generated between the glass panel P and the modulator 221. If there is no defect in the glass panel P, a normal electric field is formed within the preset range between the glass panel P and the modulator 221, but if the glass panel P is defective, the glass panel P and An electric field is not formed between the modulators 221 or a small electric field is formed as compared with the normal case. Therefore, it is possible to measure whether the glass panel P is defective by using the detected magnitude of the electric field.

Meanwhile, before the glass panel P is loaded into the test unit 20, an operation of adjusting the position of the glass panel P may be performed. In order to adjust the position of the glass panel P in the X-axis direction, the moving member 62 and the adsorption member 63 connected to the moving member 62 are moved in the X-axis direction by the operation of the moving unit 69. As a result, the glass panel P may be moved in the X-axis direction.

In addition, as shown in FIG. 10, the operation of rotating the glass panel P to align the glass panel P in the rotation direction may be performed. In order to rotate the glass panel P, the adsorption member 63 of one of the glass panel conveying apparatus 60 of the pair of glass panel conveying apparatus 60 is moved along the guide rail 61 and the other When the position of the adsorption member 63 of the glass panel transfer device 60 is fixed in the horizontal direction, the adsorption member 63 having a fixed position is rotated, and the adsorption of one of the two adsorption members 63 is performed. The glass panel P may be rotated by the movement of the member 63 and the rotation of the other adsorption member 63. After the glass panel P is rotated and its position in the rotational direction is aligned, as shown in FIG. 11, two adsorption members 63 are simultaneously moved along the guide rail 61. The glass panel P may be transported in the direction in which the guide rails 61 extend (Y-axis direction).

In addition, after the glass panel P is loaded into the test unit 20, the adsorption member 63 is blocked by the suction of the air through the adsorption hole 631 and the lowering of the adsorption member 63. When spaced apart from), since the load of the glass panel (P) is not applied to the adsorption member 63, the rotated adsorption member 63 is rotated by the elastic restoring force of the elastic member 66 to be returned to its original state. Can be.

In the glass panel conveying apparatus 60 according to the first embodiment of the present invention as described above, the shape of the adsorption portion 632 to which the glass panel P is adsorbed is ineffective area PB of the glass panel P. It is formed so as to correspond to the shape of the adsorption unit 632 is configured to adsorb only the non-effective area (PB) of the glass panel (P), the effective area (PA) of the glass panel (P) adsorbed to the adsorption unit (632). By preventing that, the effective area of the glass panel (P) in the transfer process of the glass panel (P) can be prevented from being damaged.

In addition, the glass panel conveying apparatus 60 according to the first embodiment of the present invention is provided with a plurality of adsorption parts 632 to which the glass panel P is adsorbed, and the interval between the plurality of adsorption parts 632 ( WX and WY are set so as to correspond to the interval WX and WY between the ineffective areas PB of the glass panel P, so that the adsorption portion 632 has an ineffective area ( It is configured to adsorb only PB and prevent the effective area PA of the glass panel P from being adsorbed to the adsorption unit 632, so that the effective area of the glass panel P is transferred during the transfer of the glass panel P. There is an effect that can prevent damage.

12 and 13, a glass panel transfer apparatus according to a second embodiment of the present invention will be described. The same parts as those described in the first embodiment of the present invention will be denoted by the same reference numerals and detailed description thereof will be omitted.

12 and 13, in the glass panel conveying apparatus according to the second exemplary embodiment of the present invention, the adsorption member 63 includes an X-axis extension part of the ineffective region PB of the glass panel P. A shape corresponding to the Y-axis extension portion BY of the first adsorption portion 637 having a shape corresponding to BX and having a plurality of adsorption holes 631 formed therein, and an invalid area PB of the glass panel P. And a second adsorption part 638 having a plurality of adsorption holes 631 formed therein. Here, the first adsorption part 637 and the second adsorption part 638 may be integrally provided in one adsorption member 63.

As illustrated in FIG. 12, the adsorption member 63 may have a first adsorption part 637 and a second adsorption part 638 orthogonal to each other and crosswise.

Here, the first adsorption portion 637 extends in the X-axis direction and is Y-axis less than or equal to the width WBY of the X-axis extension portion BX in the Y-axis direction among the ineffective areas PB of the glass panel P. It has a width WSY in the direction. The second adsorption part 638 extends in the Y-axis direction, and the width WSX in the X-axis direction which is equal to or less than the width WBX of the Y-axis extension part BY in the X-axis direction among the ineffective areas B of the glass panel. ) The first adsorption part 637 and the second adsorption part 638 intersect at the cross-shaped center part 635, and the central part 635 has an X-axis extension part BX in the ineffective area PB of the glass panel P. ) And the intersection A where the Y-axis extension BY crosses are adsorbed and supported.

As shown in FIG. 13, the adsorption member 63 includes a plurality of first adsorption parts 637 and a plurality of second adsorption parts 638, and a plurality of first adsorption parts 637 and a plurality of agents. The second adsorption part 638 may be arranged in a quadrangular shape. When the suction member 63 is formed in the shape of a quadrangle, the shape of the quadrangle inner region C may match the shape of the effective area PA of the glass panel P. That is, the rectangular inner region C formed by the plurality of first adsorption parts 637 and the plurality of second adsorption parts 638 is formed with an area including at least one effective area PA.

Here, the first adsorption portion 637 extends in the X-axis direction and is Y-axis less than or equal to the width WBY of the X-axis extension portion BX in the Y-axis direction among the ineffective areas PB of the glass panel P. It has a width WSY in the direction. The second adsorption part 638 extends in the Y-axis direction, and the width WSX in the X-axis direction which is equal to or less than the width WBX of the Y-axis extension part BY in the X-axis direction among the ineffective areas B of the glass panel. ) The first adsorption part 637 and the second adsorption part 638 intersect at the corner part 639 of the quadrangle, and the corner part 639 has an X-axis extension part in the ineffective area PB of the glass panel P. The intersection A where the BX and the Y-axis extension BY intersect is adsorbed and supported.

The configuration and operation of the glass panel transfer device 60 according to the second embodiment of the present invention may not be the same as the configuration and operation of the glass panel transfer device 60 according to the first embodiment of the present invention. .

In the glass panel conveying apparatus 60 according to the second embodiment of the present invention, the shape of the adsorption part 637 and 638 on which the glass panel P is adsorbed is defined as the area of the ineffective area PB of the glass panel P. It is formed to correspond to the shape so that only the non-effective area PB of the glass panel P is adsorbed to the adsorption parts 637 and 638, and the effective area of the glass panel P to the adsorption parts 637 and 638. By preventing the adsorption of PA, the effective area of the glass panel P may be prevented from being damaged during the transport of the glass panel P.

Hereinafter, the glass panel transfer apparatus according to the third embodiment of the present invention will be described with reference to FIGS. 14 and 15. The same parts as those described in the above-described first and second embodiments of the present invention will be denoted by the same reference numerals and detailed description thereof will be omitted.

As shown in FIG. 14 and FIG. 15, in the glass panel transport apparatus according to the third embodiment of the present invention, the adsorption member 63 moves in a direction in which the plurality of adsorption portions 632 are spaced apart from each other and in an adjacent direction. This can be installed possibly.

For example, as shown in FIG. 14, two adsorption parts 632 may be provided on the adsorption member 63 to allow slide movement. As described above with reference to FIG. 5 of the first embodiment of the present invention, two adsorption parts 632 may be installed to be spaced apart in the Y-axis direction. As described with reference to FIG. 6, two adsorption parts 632 may be provided. It may be installed to be spaced apart in the X-axis direction.

In addition, the adsorption member 63 may be provided with an adsorption part moving device 70 connected to the two adsorption parts 632 to move the two adsorption parts 632 in a direction adjacent to each other and in a direction away from each other. . The adsorption part moving device 70 may be connected to both adsorption parts 632, and may be connected to only one adsorption part 632 of the two adsorption parts 632. For example, the adsorption | suction part movement apparatus 70 is provided between the two adsorption | suction parts 632, the actuator 71 containing the cylinder operated | worked hydraulically or pneumatically, and the power of the actuator 71 carries out the adsorption | suction part ( And a delivery rod 72 for delivering to 632. The present invention is not limited to the configuration in which the adsorption unit moving device 70 includes an actuator 71 and a transfer rod 72. The adsorption unit moving device 70 has a structure or a linear motor connected to a rotating motor and a ball screw. Various configurations that can move the adsorption unit 632, such as the structure employed can be applied.

As another example of the adsorption member 63, as illustrated in FIG. 15, four adsorption portions 632 may be provided in the adsorption member 63 to allow slide movement. Two adsorption parts 632 of the four adsorption parts 632 may be installed to be spaced apart in the Y-axis direction, and two adsorption parts 632 may be installed to be spaced apart in the X-axis direction. In addition, the adsorption member 63 may be provided with an adsorption part moving device 70 connected to each adsorption part 632 to adjust the interval between the plurality of adsorption parts 632.

According to such a structure, the space | interval between the some adsorption part 632 is the space | interval WY between the X-axis extension part BX, and / or the Y-axis extension part BY of the ineffective area PB of glass panel P. The plurality of adsorption parts 632 may be moved in a direction spaced apart from each other and / or in a direction adjacent to each other by the operation of the adsorption part moving device 70 so as to be coincident with the interval WX between them.

Meanwhile, although FIGS. 14 and 15 illustrate a configuration in which two adsorption parts 632 and four adsorption parts 632 are provided in one adsorption member 63, the present invention is not limited thereto. A configuration in which a plurality of adsorption parts 632 is provided on the adsorption member 63 may be applied.

The configuration and operation of the glass panel conveying apparatus 60 according to the third embodiment of the present invention, which are not described above, are performed by the glass panel conveying apparatus 60 according to the first and second embodiments of the present invention. It may be the same as the configuration and operation.

In the glass panel conveying apparatus 60 according to the third embodiment of the present invention as described above, a plurality of adsorption parts 632 having a shape corresponding to the ineffective area PA of the glass panel P are adjacent to each other. It is installed to be movable in the direction and spaced apart from each other. Accordingly, the glass panel P having different intervals WY between the X-axis extension portions BX and / or spaces WX between the Y-axis extension portions BY among the ineffective regions PB of the glass panel P. In this regard, there is an effect that the non-effective area PA of the glass panel P can be adsorbed and supported by a simple operation of moving the adsorption part 632 without replacing the adsorption member 63.

The technical ideas described in the embodiments of the present invention may be implemented independently or in combination with each other. In addition, the glass panel transfer apparatus according to the present invention may be applied to an apparatus for transferring a glass panel or a semiconductor in a manufacturing process of a flat panel display or a semiconductor as well as an array test apparatus.

60: glass panel feeder 61: guide rail
62: moving member 63: adsorption member
632: adsorption unit 70: adsorption unit mobile unit

Claims (6)

In the glass panel conveying apparatus for transporting a glass panel having a thin film transistor and a pixel electrode is provided with a plurality of effective regions disposed at a predetermined interval and a non-effective region disposed between the plurality of effective regions,
A guide rail extending in the direction in which the glass panel is conveyed;
A moving member installed to be movable on the guide rail; And
It is installed on the moving member and includes an adsorption member for adsorbing and supporting the glass panel,
The adsorption member is provided with a size and shape that does not contact the effective area of the glass panel is provided with an adsorption unit for adsorbing and supporting the non-effective area of the glass panel. The method of claim 1,
The non-effective area of the glass panel is composed of a plurality of extensions extending linearly around the effective area,
The adsorption member is provided with a plurality of adsorption parts,
And a distance between the plurality of adsorption parts is equal to a distance between the plurality of extension parts of the invalid area. The method of claim 2,
The adsorption member is provided with a glass panel transfer device, characterized in that the adsorption unit moving device for moving the plurality of adsorption unit to adjust the interval between the plurality of adsorption unit. The method of claim 1,
The non-effective area of the glass panel includes an X-axis extension part extending in the X-axis direction around the effective area, and a Y-axis extension part extending in the Y-axis direction around the effective area so as to be orthogonal to the X-axis extension part. Become,
The adsorption member is provided with a glass panel conveying apparatus, characterized in that the first adsorption portion is formed with a width corresponding to the width of the X-axis extension portion and the second adsorption portion is formed with a width corresponding to the width of the Y-axis extension portion. 5. The method of claim 4,
The first adsorption portion and the second adsorption portion are arranged crosswise to each other,
And a cross section intersecting the X-axis extension section and the Y-axis extension section is adsorbed to a central portion where the first adsorption section and the second adsorption section intersect. 5. The method of claim 4,
The first adsorption part and the second adsorption part are provided in plural and are arranged in a rectangular shape,
And a rectangular inner region formed by the plurality of first adsorption portions and the plurality of second adsorption portions corresponds to a shape of an effective area of the glass panel.

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