KR20120007328A - Apparatus for testing array - Google Patents

Abstract

PURPOSE: An array test device is provided to supply/block a gas to lift a substrate according to a location of the substrate during substrate loading/unloading processes. CONSTITUTION: A support plate(50) includes a plurality of jetting holes(51). A gas for lifting a substrate is jetted through the jetting holes. A gas supply device(71) supplies a gas. A plurality of connection pipes(72) connects each jetting hole with the gas supply device. An opening/closing unit(73) is connected to the connection pipes. The opening/closing unit individually opens/closes the connection pipes. A location sensing unit(74) senses the location of the substrate.

Description

Array Test Device {APPARATUS FOR TESTING ARRAY}

The present invention relates to an array test apparatus.

In general, a flat panel display (FPD) is an image display device that is thinner and lighter than a television or a monitor employing a CRT. As flat panel displays, liquid crystal displays (LCDs), plasma display panels (PDPs), field emission displays (FEDs) and organic light emitting diodes (OLEDs) are developed. It is used.

Among them, the liquid crystal display is a display device in which a desired image is displayed by individually supplying data signals according to image information to liquid crystal cells arranged in a matrix to adjust light transmittance of the liquid crystal cells. Liquid crystal displays are widely used due to their thin, light, low power consumption and low operating voltage. The manufacturing method of the liquid crystal panel generally employed in such a liquid crystal display will be described.

First, a color filter and a common electrode are formed on an upper substrate, and a thin film transistor (TFT) and a pixel electrode are formed on a lower substrate corresponding to the upper substrate.

Subsequently, after the alignment films are applied to the substrates, the alignment films are rubbed to provide a pre-tilt angle and an orientation direction to the liquid crystal molecules in the liquid crystal layer to be formed therebetween.

Then, paste is applied to at least one substrate in a predetermined pattern to form a paste pattern so as to maintain a gap between the substrates and to prevent the liquid crystal from leaking to the outside and to seal the gaps between the substrates. Through the process of forming a liquid crystal layer in the liquid crystal panel is manufactured.

During this process, a process of testing for defects such as disconnection of gate lines and data lines and poor color of pixel cells included in the thin film transistor TFT and the lower substrate (hereinafter, referred to as a substrate) on which the pixel electrode is formed. Will be performed.

In order to perform a predetermined test on the substrate, an array test apparatus including a test unit for testing the substrate, a loading unit for loading the substrate into the test unit, and an unloading unit for unloading the substrate from the test is used.

The loading and unloading portions of the array test apparatus are provided with substrate supporting means for supporting the substrate to a predetermined height. The substrate supporting means includes a support plate, which is positioned under the substrate and is formed with a plurality of injection holes through which gas is injected, and a gas supply device connected to the injection holes of the support plate to supply gas to the injection holes.

By this configuration, gas is supplied from the gas supply device to the injection hole of the support plate and the gas is injected through the injection hole before the substrate is conveyed to the loading part or the unloading part. In addition, when the substrate is conveyed to the loading unit or the unloading unit, the substrate is maintained in a state of being supported at the upper portion of the support plate by the gas injected through the injection hole. Subsequently, the substrate is loaded into or unloaded from the test unit in a suspended state on top of the support plate.

As such, a plurality of injection holes are formed in the support plate, and the injection holes are connected to the gas supply device through one pipe. Therefore, when the gas supply device is operated, gas is injected from all the plurality of injection holes regardless of the actual position of the substrate, so that the gas injected in the area where the substrate is actually positioned serves to support the substrate while the substrate is actually positioned. The gas sprayed in the unaffected area is dispersed to the surroundings without serving to support the substrate to the surroundings.

As described above, the conventional array test apparatus has a configuration in which gas is injected through an injection hole existing in a region where the substrate is not actually positioned, and thus energy efficiency of the gas supply apparatus is used for unnecessary gas injection. This has a problem of deterioration.

On the other hand, in order to ensure mass production of the liquid crystal panel, a large area substrate is processed to manufacture a liquid crystal panel. In order to test such a large-area substrate, the area occupied by the support plate must be large, and in order to support the large-area substrate, gas must be injected at a pressure corresponding to the large-area substrate.

In addition, the substrate should be supported at a uniform height with respect to the support plate in its entire area. If the substrate is not supported at a uniform height with respect to the support plate, a problem may occur in the transfer process of the substrate, and the substrate sag. In this portion, scratch damage may occur due to contact with the support plate.

Therefore, in order to prevent unnecessary gas injection to prevent energy efficiency from being lowered and to support the large-area substrate uniformly, an optimal design for the substrate supporting means is required.

SUMMARY OF THE INVENTION The present invention has been made to solve the above requirements, and an object of the present invention is to inject a gas that supports the substrate only to a region where the substrate is actually located, thereby preventing the energy efficiency from being lowered during the gas injection process. An array test apparatus is provided.

Another object of the present invention is to provide an array test apparatus capable of supporting a substrate at a uniform height relative to a support plate in its entire area.

An array test apparatus according to the present invention for achieving the above object, the substrate is mounted on top, the support plate is formed with a plurality of injection holes for ejecting the gas for supporting the substrate, and for supporting the substrate A gas supply device for supplying gas, a plurality of connection pipes connecting the respective injection holes and the gas supply device, an opening and closing unit connected to the connection pipes to individually open and close the connection pipes, and a position of the substrate. It may include a position sensing unit for sensing, and a control unit for controlling the opening and closing unit on the basis of the position of the substrate detected by the position sensing unit.

Here, the position detecting unit may be configured to include a detection sensor which is disposed at a predetermined interval from each other to detect the presence of the substrate.

In addition, the array test apparatus according to the present invention for achieving the above object, the substrate is mounted on top, the support plate is formed with a plurality of injection holes in which a gas is injected for supporting the substrate, and supporting the substrate A gas supply device for supplying a gas for supplying gas, a plurality of connection pipes connecting the respective injection holes and the gas supply device, and a pressure for individually controlling the pressure of the gas connected to the connection pipes and injected into the respective injection holes An adjusting unit, a gap measuring unit measuring a gap between the substrate and the support plate, and a control unit controlling the pressure regulating unit based on the gap between the substrate and the support plate measured by the measuring unit. It can be configured to include.

Here, the spacing measuring unit may be configured to include a plurality of spacing measuring sensors arranged at a predetermined interval from each other to measure the spacing with the substrate.

On the other hand, the connecting pipe may be arranged to communicate with two or more adjacent injection holes of the plurality of injection holes.

The array test apparatus according to the present invention, when the substrate is transferred during the loading and / or unloading process of the substrate, by supplying a gas for supporting the substrate according to the actual position of the substrate or by blocking the supply of the substrate, Irrespective of the boost, it is possible to prevent the gas is unnecessarily injected, there is an effect that can improve the use efficiency of energy.

In addition, the array test apparatus according to the present invention measures the distance between the substrate and the support plate with respect to each area of the substrate, and if there is an area out of the preset range of the measured interval in the area of the substrate, spraying to the corresponding area By controlling the injection pressure of the gas to be maintained, the distance between the substrate and the support plate can be maintained uniformly in the entire area of the substrate, and thus the substrate is brought into contact with the support plate during the loading and / or unloading of the substrate. There is an effect that can prevent the substrate from being damaged.

1 is a perspective view showing an array test apparatus according to a first embodiment of the present invention.
FIG. 2 is a perspective view illustrating a substrate transfer unit of the array test apparatus of FIG. 1.
FIG. 3 is a schematic diagram illustrating substrate supporting means for supporting a substrate in the array test apparatus of FIG. 1.
4 is a schematic diagram showing another example of the substrate supporting means of the array test apparatus of FIG.
5 is a control block diagram of the substrate supporting means of the array test apparatus of FIG.
6 and 7 are schematic views sequentially showing operations of the substrate supporting means of the array test apparatus of FIG. 1.
8 is a schematic diagram showing the substrate supporting means of the array test apparatus according to the second embodiment of the present invention.
FIG. 9 is a schematic diagram illustrating a gap measuring unit in the substrate supporting means of the array test apparatus of FIG. 8.
FIG. 10 is a control block diagram of substrate supporting means of the array test apparatus of FIG. 8.
11 and 12 are schematic diagrams sequentially showing operations of the substrate supporting means of the array test apparatus of FIG. 8.

Hereinafter, exemplary embodiments of an array test apparatus according to the present invention will be described with reference to the accompanying drawings.

As shown in FIG. 1, the array test apparatus according to the first exemplary embodiment of the present invention includes a base 10, a test unit 20 for testing a substrate S, and a substrate S. 20 may be configured to include a loading unit 30 for loading into the loading unit and an unloading unit 40 for unloading the substrate S from the test unit 20.

The test unit 20 serves to test whether the substrate S is electrically or optically defected, the test plate 21 on which the substrate S loaded by the loading unit 30 is disposed, and the test plate ( The test module 22 for testing the electrical defect of the substrate S disposed on the substrate 21 and the probe module 23 for applying an electrical signal to the electrodes of the substrate S disposed on the test plate 21. It may be configured to include).

The test module 22 may be installed to be movable in the X-axis direction on the support 223 extending in the direction (X-axis direction) perpendicular to the direction in which the substrate S is transferred from the upper side of the test plate 21. have. The test module 22 may be provided in plural along the extending direction (X-axis direction) of the support 223. The test module 22 is disposed above the substrate S disposed on the test plate 21 and serves to detect whether the substrate S is defective. The test module 22 may include a modulator 221 adjacent to the substrate S disposed on the test plate 21, and an imaging device 222 for imaging the modulator 221.

The test unit 20 may be divided into two types, a reflection method and a transmission method. In the case of the reflection method, the light source is disposed together with the test module 22, and a reflective layer is provided on the modulator 221 of the test module 22, whereby the light emitted from the light source is incident on the modulator 221. After the reflection from the reflective layer of the modulator 221, by measuring the light amount of the reflected light, it is detected whether the substrate (S) is defective. In the case of the transmission method, a light source is provided below the test plate 21, and thus, by measuring the amount of light emitted from the light source and passing through the modulator 221, the defect of the substrate S is detected. . Both the reflection method and the transmission method may be applied to the test unit 20 of the array test apparatus according to the present invention.

The modulator 221 of the test module 22 changes the amount of light reflected (in the case of reflection) or the amount of light transmitted (in the case of transmission) according to the magnitude of the electric field generated between the substrate S. An electro-optical material layer is provided. The allergen layer is made of a material whose specific property is changed by an electric field generated when electricity is applied to the substrate S and the modulator 221 to change the amount of light incident on the allergen layer. The all-optical material layer may be made of a polymer dispersed liquid crystal (PDLC) that is made of a material having a characteristic of being arranged in a predetermined direction according to the size of an electric field and polarizes light incident thereto.

The loading unit 30 supports the substrate S to be tested, and transfers the substrate S to the test unit 20, and the unloading unit 40 has completed the test of the substrate ( In addition to supporting S), the substrate S is transferred from the test unit 30.

In the loading part 30 and the unloading part 40, a plurality of support plates 50, which are arranged at predetermined intervals and on which the substrate S is mounted, and a substrate for transferring the substrate S Transfer unit 60 may be provided.

As shown in FIG. 2, the substrate transfer unit 60 includes a guide rail 61 extending in a direction parallel to the direction in which the substrate S is transferred (Y-axis direction), and a movement of the guide rail 61. The support member 62 which is installed as possible, the adsorption plate 63 installed on the support member 62, and the lower surface of the substrate S is adsorbed, and the adsorption plate that lifts the adsorption plate 63 in the vertical direction (Z-axis direction). It may be configured to include a lifting device (64). As the guide rail 61, a linear transport mechanism such as a linear motor may be applied. In addition, an adsorption hole through which gas passes may be formed in the adsorption plate 63, and a negative pressure source for providing a negative pressure for adsorbing the substrate S to the adsorption plate 63 may be connected.

The substrate S is loaded into the test unit 20 or unloaded from the test unit 20 by the operation of the substrate transfer unit 60 in a state of being supported at a predetermined height from the upper surface of the support plate 50. Therefore, the array test apparatus according to the present invention is provided with substrate supporting means 70 for supporting the substrate S from the upper surface of the support plate 50.

3 and 4, the substrate supporting means 70, the gas supply device 71 for supplying a gas for supporting the substrate (S), and a plurality of jets formed in the support plate 50 A plurality of connecting pipes 72 for connecting the hole 51 and the gas supply device 71, the opening and closing unit 73 for opening and closing the connecting pipe 72 individually, the position for sensing the position of the substrate (S) The sensing unit 74 and the control unit 75 for controlling the opening and closing unit 73 according to the position of the substrate (S) detected by the position sensing unit 74 may be configured.

The gas supply device 71 may be constituted by a device such as a blower for forcibly supplying gas. The gas supplied by the gas supply device 71 may be inert gas or air having low chemical reactivity.

As shown in FIG. 3, the connection pipe 72 may be provided in a number corresponding to the number of the plurality of injection holes 51 so that the plurality of injection holes 51 may be directly connected to the gas supply device 71. Can be. However, the present invention is not limited thereto, and as shown in FIG. 4, two or more adjacent injection holes 51 are defined as one group, and a plurality of injection holes 51 belonging to one group are included in one group. It may be configured to be connected to the gas supply device 71 through the connection pipe (72). In this case, the connection pipe 72 has a configuration in which two or more adjacent injection holes 51 communicate with each other.

Opening and closing unit 73 may be configured to include a plurality of control valves disposed in each connection pipe (72). As a control valve, a solenoid valve operated by electromagnetic characteristics may be applied, such as an automatic control valve capable of automatically opening / closing the connecting tube 72 according to an electrical or electronic control signal of the control unit 75. Can be applied. As shown in FIG. 3, when the connection pipe 72 is connected to each of the plurality of injection holes 51, the number of control valves may correspond to the number of the plurality of injection holes 51. As shown, when two or more adjacent injection holes 51 are connected in groups, the number of control valves may correspond to the number of groups.

The position detecting unit 74 may be configured to include a plurality of sensing sensors disposed at predetermined intervals to detect whether the substrate S is present on the support plate 50. The plurality of sensing sensors may be fixed on the support plate 50. However, the present invention is not limited thereto and may be installed to detect the presence of the substrate S at a position adjacent to the support plate 50. The plurality of sensing sensors are perpendicular to the direction in which the substrate S is loaded and / or unloaded (Y-axis direction) and the direction in which the substrate S is loaded and / or unloaded (Y-axis direction) (X-axis direction). ) May be arranged at predetermined intervals. The plurality of detection sensors detect the presence of the substrate S at each position, and the substrate S is loaded with the loading unit 30 and / or the unloading unit 40 according to the information detected by the plurality of detection sensors. It can detect where it is located in the area. The sensing sensor includes a light emitting part for emitting light and a light receiving part for receiving light reflected from the substrate S after being emitted from the light emitting part, and the presence of the substrate S depending on whether the light is received by the light receiving part. A configuration for detecting whether or not may be applied. However, the present invention is not limited to such a configuration, and is configured to be in physical contact with the lower surface of the substrate S using a detection sensor to detect the position of the substrate S, such as a configuration for detecting the presence or absence of the substrate S. Various configurations may be applied.

As shown in FIG. 5, the control unit 75 is connected to the position detecting unit 74 and the opening / closing unit 73 to each other, thereby determining the actual position of the substrate S detected by the position detecting unit 74. By controlling the opening and closing unit 73 as a reference to the gas to be sprayed at a position corresponding to the actual position of the substrate (S) serves to control the operation so that the substrate (S) is supported from the top of the support plate 50 do.

On the other hand, between the gas supply device 71 and the opening and closing unit 73 is preferably provided with a regulator 76 for maintaining a constant pressure of the gas flowing through the connecting pipe 72. The regulator 76 may be controlled by the operation of the control unit 75. By the operation of the regulator 76, a gas having a uniform pressure and a flow rate may be injected from the plurality of injection holes 51, so that the substrate S is uniform from the upper side of the support plate 50. Can be raised to a height. On the other hand, the regulator 76 may be disposed in each connecting pipe 72 between the plurality of injection holes 51 and the opening and closing unit 73.

6 and 7, the operation of the array test apparatus according to the first embodiment of the present invention will be described.

First, when the substrate S is loaded into the loading unit 30 and / or the unloading unit 40, the gas having a predetermined pressure and flow rate is operated by the operation of the gas supply device 71. Sprayed through 51). The substrate S is lifted from the upper surface of the support plate 50 by the gas injected from the plurality of injection holes 51. At this time, the adsorption plate 63 of the substrate transfer unit 60 is raised by the operation of the adsorption plate elevating device 64 so as to be in close contact with the lower side of the substrate S, and the substrate S is moved by the operation of the negative pressure source. 63). In this state, as the support member 62 moves along the guide rail 61, the substrate S may be loaded and / or unloaded.

As such, in the process of transferring the substrate S, the position detecting unit 74 detects the actual position of the substrate S on the support plate 50. That is, when the sensing sensor of the position detecting unit 74 detects the existence of the substrate S after a predetermined time has elapsed in a state in which the detection sensor of the position detecting unit 74 does not detect the existence of the substrate S, the position detecting unit 74 detects the substrate. It is detected that S is located in the area detected by the corresponding sensor. In addition, after a predetermined time has elapsed in a state in which the detection sensor does not detect the presence of the substrate S, the predetermined time has elapsed and then the predetermined time has elapsed and thus the presence of the substrate S cannot be detected. In this case, the position detection unit 74 detects that the substrate S has passed through the area detected by the corresponding sensor. Through this process, the position detection unit 74 can detect whether the substrate S is actually located at which position, which position is passing through, and which position has passed.

Then, the control unit 75 controls the opening and closing unit 73 based on the actual position information of the substrate (S) detected by the position detection unit 74. That is, the control unit 75 controls the opening and closing unit 73 so that the connection pipe 72 connected to the injection hole 51 disposed in the area where the substrate S has already passed, is closed, and the substrate S is The opening and closing unit 73 is controlled to open the connection pipe 72 connected to the injection hole 51 disposed in the area to be forward. Accordingly, the gas is prevented from being unnecessarily injected in the area where the substrate S has already passed, and the gas is sprayed in advance in the area where the substrate S will pass in the future, and the substrate S is transferred to the corresponding area. The substrate S can be properly floated.

As described above, in the array test apparatus according to the first embodiment of the present invention, when the substrate S is transported in a suspended state during the loading and / or unloading of the substrate S, the array test apparatus is actually used. By supplying the gas for supporting the substrate S or blocking the supply of the gas depending on the position of the substrate S, it is possible to prevent the gas is unnecessarily injected irrespective of the support of the substrate (S), thereby improving the use efficiency of energy It can be effected.

Hereinafter, an array test apparatus according to a second exemplary embodiment of the present invention will be described with reference to FIGS. 8 to 12. The same parts as those described in the above-described first embodiment will be denoted by the same reference numerals and detailed description thereof will be omitted.

As shown in FIG. 8, in the array test apparatus according to the second embodiment of the present invention, the substrate supporting means 70 for supporting the substrate S from the upper surface of the support plate 50 is the substrate S. A gas supply device 71 for supplying gas for supporting), a plurality of injection holes 51 formed in the support plate 50, and a plurality of connection pipes 72 connecting the gas supply device 71 with the gas supply device 71. , A pressure adjusting unit 77 connected to the connection pipe 72 to adjust the pressure of the gas passing through the connection pipe 72, and a gap measurement unit measuring the distance between the substrate S and the support plate 50. And a control unit 75 for controlling the pressure regulating unit 77 based on the distance between the substrate S measured by the gap measuring unit 78 and the support plate 50. Can be.

The connection pipe 72 may be configured to connect at least two or more adjacent injection holes 51 to the gas supply device 71. However, the present invention is not limited thereto and may be provided in a number corresponding to the number of the plurality of injection holes 51 so as to directly connect each injection hole 51 to the gas supply device 71.

The pressure regulating unit 77 may include a plurality of pressure regulating valves connected to the connection pipe 72. The pressure regulating valve serves to adjust the pressure of the gas injected from the injection hole 51 by adjusting the pressure of the gas supplied from the gas injection device 71 through the connecting pipe 72. By the operation of the pressure control valve, the pressure of the gas injected from each injection hole 51 may be equal to each other, it may be different from each other. As the pressure regulating valve, a solenoid valve operated by electromagnetic characteristics may be applied, and the pressure of the gas passing through the connection pipe 72 may be automatically adjusted according to the electric or electronic control signal of the control unit 75. Automatic control valves can be applied. When the connection pipe 72 is connected to each of the plurality of injection holes 51, the number of pressure control valves may correspond to the number of the plurality of injection holes 51, and the plurality of injection holes 51 are connected in groups. If the number of the pressure control valve may correspond to the number of the plurality of groups.

On the other hand, the pressure control unit 77 may also perform an operation to block the flow of the gas supplied from the gas injection device 71 through the connecting pipe 72 toward the injection hole 51. Therefore, the pressure regulating unit 77 supplies the gas for supporting the substrate S or blocks the supply of the gas according to the actual position of the substrate S as described in the first embodiment. Can be done together.

The gap measuring unit 78 may be configured to include a plurality of gap measuring sensors disposed at predetermined intervals to measure the gap with the substrate (S). The plurality of gap measuring sensors may have a direction X perpendicular to a direction in which the substrate S is loaded and / or unloaded (Y-axis direction) and a direction in which the substrate S is loaded and / or unloaded (Y-axis direction). Axially) at predetermined intervals.

The plurality of spacing sensors measure the spacing from the substrate S at each position. That is, the plurality of gap measuring sensors are disposed along a preset reference plane R parallel to the upper surface of the support plate 50 to measure the gap between the substrate S and the reference plane R. Since the distance between the upper surface of the support plate 50 and the reference plane R can be known, the distance between the substrate S and the support plate 50 is measured by measuring the distance between the substrate S and the reference plane R. can do. As shown in FIG. 9, the distance measuring sensor may include a light emitting part 781 for emitting light and a light receiving part 782 for receiving light reflected from the substrate S after being emitted from the light emitting part 781. And measuring the distance between the substrate S and the reference plane R by measuring the position at which light is received by the light receiving portion 782, that is, the position of the imaging point P of light on the light receiving portion 782. Displacement sensors can be applied. However, the present invention is not limited to such a configuration, and the distance between the substrate (S) and the support plate 50 by the sensor to capture the gap, and converts the captured image into an electrical signal to the substrate (S) And an image sensor measuring a gap between the substrate 50 and the support plate 50 may be applied, and a mechanical sensor measuring a gap between the substrate S and the support plate 50 may be applied by physically contacting the substrate S. As such, various configurations capable of measuring a distance between the substrate S and the support plate 50 may be applied.

As shown in FIG. 10, the control unit 75 is connected to the pressure regulating unit 77 and the gap measuring sensor 78, and the substrate S and the support plate measured by the gap measuring unit 78 ( By controlling the pressure control unit 77 on the basis of the interval between 50) serves to adjust the pressure of the gas injected toward the substrate (S).

The substrate S mounted on the upper portion of the support plate 50 may not be maintained in parallel with the upper surface of the support plate 50 in the entire region of the substrate S due to its characteristics and surrounding environment. A portion may sag downwards or protrude upwards as compared to other portions. In addition, when the substrate S is supported by the sprayed gas, the respective parts of the substrate S may not be supported at the same height due to a design or assembly error of each component forming the substrate supporting means 70. Can be generated. When a portion of the substrate S protrudes from the other portion in the state in which the substrate S is supported, a portion of the substrate S may not be properly adsorbed to the adsorption plate 63 of the substrate transfer unit 60. Problems may arise in the transfer process of S). In addition, when a portion of the substrate S sags in comparison with other portions in a state in which the substrate S is supported, scratch damage may occur due to contact with the support plate 50 at a portion of the substrate S. FIG.

In order to prevent such a problem in advance, in the array test apparatus according to the second embodiment of the present invention, the control unit 75 is disposed between the substrate S and the support plate 50 measured by the distance measuring unit 78. By controlling the pressure adjusting unit 77 on the basis of the interval of the to individually adjust the pressure of the gas injected into each injection hole (51). That is, as shown in FIG. 11, when the distance between the substrate S and the support plate 50 in the portion A of the substrate S is larger than the preset optimal range, the portion A is directed toward the portion A. The pressure regulating unit 77 is controlled so that the pressure of the gas to be injected is small compared to other parts. As shown in FIG. 11, when the distance between the substrate S and the support plate 50 in the portion B of the substrate S is smaller than the predetermined optimum range, the gas is injected toward the portion. The pressure regulating unit 77 is controlled to increase the pressure of the other portions. Therefore, as shown in FIG. 12, the distance between the substrate S and the support plate 50 is uniformly maintained in the entire area of the substrate S, and the substrate S is maintained in its flatness. In the test unit 20 may be loaded or unloaded from the test unit 20.

As described above, in the array test apparatus according to the second exemplary embodiment of the present invention, when the substrate S is transferred in a suspended state during the loading and / or unloading of the substrate S, each of the substrates S is supported. By measuring the distance between the substrate (S) and the support plate 50 in the portion, and by adjusting the pressure of the gas injected into each part of the substrate (S), the distance between the substrate (S) and the support plate 50 It can be made uniform, and thus there is an effect that the problem that can be caused when the spacing between the substrate S and the support plate 50 is not uniform can be prevented in advance.

The technical ideas described in the embodiments of the present invention can be implemented independently, or in combination with each other.

20: test unit 22: test module
23: probe module 30: loading unit
40: unloading portion 50: support plate
51: injection hole 70: substrate support means

Claims (7)

A support plate having a substrate mounted thereon and having a plurality of injection holes through which a gas for supporting the substrate is injected;
A gas supply device supplying a gas for supporting the substrate;
A plurality of connecting pipes connecting the respective injection holes and the gas supply device;
An opening / closing unit connected to the connecting pipe to open and close the connecting pipe individually; And
Array test apparatus comprising a position detecting unit for detecting the position of the substrate. The method of claim 1,
And a control unit for controlling the opening and closing unit based on the position of the substrate detected by the position detecting unit. The method of claim 1,
The position sensing unit, the array test apparatus characterized in that it comprises a plurality of sensing sensors disposed at predetermined intervals to detect the presence of the substrate. A support plate having a substrate mounted thereon and having a plurality of injection holes through which a gas for supporting the substrate is injected;
A gas supply device supplying a gas for supporting the substrate;
A plurality of connecting pipes connecting the respective injection holes and the gas supply device;
A pressure regulating unit connected to the connection pipe to individually adjust the pressure of the gas injected into the injection hole; And
And an interval measuring unit measuring an interval between the substrate and the support plate. The method of claim 4, wherein
And a control unit for controlling the pressure regulating unit based on the distance between the substrate and the support plate measured by the gap measuring unit. The method of claim 4, wherein
The gap measuring unit includes a plurality of gap measuring sensors arranged at a predetermined interval from each other to measure a gap with the substrate. The method according to any one of claims 1 to 6,
The connecting pipe is an array test device, characterized in that the two or more adjacent injection holes of the plurality of injection holes are arranged to communicate with each other.

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