JP5933920B2 - Coating apparatus and coating method - Google Patents

Description

  The present invention relates to a coating apparatus and a coating method.

  A fine pattern such as a wiring pattern or an electrode pattern is formed on a glass substrate constituting a display panel such as a liquid crystal display. In general, such a pattern is formed by a technique such as photolithography. In the photolithography method, a step of forming a resist film on a glass substrate, a step of pattern exposing the resist film, and a step of developing the resist film are performed.

  As a device for applying a resist film on the surface of a substrate, a coating device for fixing a slit nozzle and applying a resist to a glass substrate that moves under the slit nozzle is known. Among these, a coating apparatus that floats and moves a substrate is known. As a floating type coating apparatus, for example, a configuration in which an end portion of a substrate is held and moved is known. In order to apply the resist so that the thickness is uniform on the substrate, it is necessary to keep the distance between the surface to be processed of the substrate and the tip of the nozzle for discharging the resist constant. For this reason, it has been necessary to float the substrate with a uniform flying height.

JP 2007-88201 A

  However, for example, the end portion of the substrate may have a holding force or bend due to the size of the substrate, so that the floating amount of the end portion of the substrate is the floating amount of other portions of the substrate. There were cases where it was different.

  In view of the circumstances as described above, an object of the present invention is to provide a coating apparatus and a coating method capable of floating a substrate with a uniform flying height.

  The coating apparatus according to the present invention includes a coating unit having a nozzle that discharges a liquid material to a predetermined region, a substrate transport unit that floats and transports the substrate so as to pass through the predetermined region, and at least the substrate in the predetermined region. And an adjustment unit that adjusts the flying height of the end portion in the direction orthogonal to the substrate transport direction.

  According to such a configuration, in the predetermined area where the liquid material is discharged from the nozzle, the adjustment unit that adjusts the flying height of the end portion of the substrate in the direction orthogonal to the substrate transport direction is provided. The flying height can be adjusted to be equal to the flying height of other portions. As a result, the substrate can be floated with a uniform flying height.

The coating apparatus further includes a detection unit that detects the flying height of the end portion, and an adjustment amount control unit that controls an adjustment amount by the adjustment unit based on a detection result of the detection unit. .
According to such a configuration, it is possible to detect the flying height of the end portion and to control the adjustment amount by the adjusting unit based on the detection result, so that the flying height of the substrate can be precisely adjusted.

In the coating apparatus, the detection unit is provided in the nozzle.
According to such a structure, since the detection part is provided in the nozzle, the detection result when the nozzle is used as a reference can be obtained. Thereby, the flying height at the discharge position of the liquid material with respect to the substrate can be precisely adjusted.

In the coating apparatus, the detection unit includes a sensor disposed toward the end.
According to such a configuration, the flying height of the substrate can be accurately detected by using the sensor arranged toward the end.

In the coating apparatus, a plurality of sensors are provided, and the plurality of sensors are arranged at positions corresponding to both the end portions in a direction orthogonal to the substrate transport direction.
According to such a configuration, since the plurality of sensors are arranged at positions corresponding to both ends in the direction orthogonal to the substrate transport direction, the flying height of the substrate can be accurately detected.

In the coating apparatus, the substrate transport unit includes a transport unit that transports the substrate, and the transport unit includes a substrate holding unit that holds at least a part of the end portion.
According to such a configuration, even when at least a part of the end portion of the substrate is held by the substrate holding portion, the flying height of the end portion of the substrate is adjusted to be equal to the flying height of the other portion. can do. As a result, the substrate can be floated with a uniform flying height.

The coating apparatus may further include a gas ejection unit that ejects gas onto the substrate, and the adjustment unit includes an ejection amount adjustment unit that adjusts an ejection amount of the gas to the end portion.
According to such a structure, the adjustment part can adjust the flying height of the edge part of a board | substrate precisely by adjusting the ejection amount of the gas to an edge part.

The coating apparatus further includes a suction unit that suctions the substrate transport unit, and the adjustment unit includes a suction amount adjustment unit that adjusts a suction amount of a portion corresponding to the end portion.
According to such a configuration, the adjustment unit can precisely adjust the flying height of the end portion of the substrate by adjusting the suction amount of the portion corresponding to the end portion.

  In the coating method according to the present invention, a substrate transport step for floating and transporting a substrate so as to pass through a predetermined region, a coating step for discharging a liquid material onto the substrate passing through the predetermined region, and at least the predetermined region And an adjusting step for adjusting a flying height of an end portion of the substrate in a direction orthogonal to the substrate transport direction.

  According to such a configuration, the floating amount at the end of the substrate in the direction orthogonal to the substrate transport direction is adjusted in a predetermined region where the liquid material is discharged from the nozzle. It is adjusted to be equal to the flying height of the other part. As a result, the substrate can be floated with a uniform flying height.

The application method further includes a detection step of detecting the flying height of the end portion, and an adjustment amount control step of controlling the adjustment amount in the adjustment step based on a detection result in the detection step. To do.
According to such a configuration, it is possible to detect the flying height of the end portion and to control the adjustment amount by the adjusting unit based on the detection result, so that the flying height of the substrate can be precisely adjusted.

In the substrate transporting step, the substrate is transported while holding at least a part of the end portion.
According to such a configuration, even when at least a part of the end portion of the substrate is held, the flying height of the end portion of the substrate can be adjusted to be equal to the flying height of the other portion. . As a result, the substrate can be floated with a uniform flying height.

The coating method further includes a gas ejection step of ejecting a gas to the substrate, and the adjusting step includes adjusting the amount of the gas ejected to the end portion.
According to such a structure, the flying height of the edge part of a board | substrate can be adjusted precisely by adjusting the amount of gas ejection to an edge part.

The application method further includes a suction step of sucking the substrate transport unit, and the adjusting step includes adjusting a suction amount of a portion corresponding to the end portion.
According to such a configuration, the flying height of the end portion of the substrate can be precisely adjusted by adjusting the suction amount of the portion corresponding to the end portion.

  According to the present invention, it is possible to float a substrate with a uniform flying height.

It is a perspective view which shows the structure of the coating device which concerns on this embodiment. It is a front view which shows the structure of the coating device which concerns on this embodiment. It is a top view which shows the structure of the coating device which concerns on this embodiment. It is a side view which shows the structure of the coating device which concerns on this embodiment. It is a figure which shows the principal part structure of a conveying machine. It is a top view which shows the structure of the process stage of the coating device which concerns on this embodiment. It is sectional drawing which shows the structure of a part of process stage of the coating device which concerns on this embodiment. It is a figure which shows operation | movement of the coating device which concerns on this embodiment. FIG. FIG. FIG. FIG. FIG. It is a figure which shows the structure of the conveyance mechanism which concerns on a modification. It is a figure which shows the structure of the conveyance mechanism which concerns on a modification.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.
FIG. 1 is a perspective view of a coating apparatus 1 according to this embodiment.
As shown in FIG. 1, a coating apparatus 1 according to the present embodiment is a coating apparatus that coats a resist on a glass substrate used for a liquid crystal panel, for example, and includes a substrate transport unit (substrate transport system) 2 and a coating unit. The (coating system) 3, the management unit 4, and the control device CONT are the main components. The coating apparatus 1 is configured such that a resist is applied onto a substrate by a coating unit (coating system) 3 while the substrate is floated and transported by a substrate transport unit (substrate transport system) 2. Thus, the state of the application unit 3 is managed.

  2 is a front view of the coating apparatus 1, FIG. 3 is a plan view of the coating apparatus 1, and FIG. The detailed configuration of the coating apparatus 1 will be described with reference to these drawings.

(Substrate transport section)
First, the structure of the board | substrate conveyance part 2 is demonstrated.
The substrate transport unit 2 includes a substrate carry-in region 20, a coating processing region 21, a substrate carry-out region 22, a transport mechanism 23, and a frame unit 24 that supports them. In the substrate transport unit 2, the transport mechanism 23 transports the substrate S sequentially to the substrate carry-in area 20, the coating processing area 21, and the substrate carry-out area 22. The substrate carry-in area 20, the coating treatment area 21, and the substrate carry-out area 22 are arranged in this order from the upstream side to the downstream side in the substrate carrying direction. The transport mechanism 23 is provided on one side of each part so as to straddle each part of the substrate carry-in area 20, the coating treatment area 21, and the substrate carry-out area 22.

  Hereinafter, in describing the configuration of the coating apparatus 1, for simplicity of description, directions in the figure will be described using an XYZ coordinate system. The substrate transport direction is the longitudinal direction of the substrate transport unit 2 and the substrate transport direction is referred to as the X direction. A direction orthogonal to the X direction (substrate transport direction) in plan view is referred to as a Y direction. A direction perpendicular to the plane including the X direction axis and the Y direction axis is referred to as a Z direction. In each of the X direction, the Y direction, and the Z direction, the arrow direction in the figure is the + direction, and the direction opposite to the arrow direction is the-direction.

The substrate carry-in area 20 is a portion for carrying the substrate S carried from the outside of the apparatus, and has a carry-in stage 25 and a lift mechanism 26.
The carry-in stage 25 is provided on the upper portion of the frame portion 24, and is a rectangular plate-like member made of, for example, SUS or the like in plan view. The carry-in stage 25 has a long X direction. The carry-in stage 25 is provided with a plurality of air outlets 25a and a plurality of elevating / lowering pins 25b. The air outlet 25a and the lifting pin retracting hole 25b are provided so as to penetrate the carry-in stage 25.

  The air ejection port 25a is a hole through which air is ejected onto the stage surface (conveying surface) 25c of the carry-in side stage 25. For example, the air jet port 25a is arranged in a matrix in a plan view in the region through which the substrate S passes in the carry-in stage 25. Yes. An air supply source (not shown) is connected to the air outlet 25a. In the carry-in stage 25, the substrate S can be floated in the + Z direction by the air ejected from the air ejection port 25a.

  The elevating pin retracting hole 25b is provided in an area of the loading side stage 25 where the substrate S is loaded. The elevating pin retracting hole 25b is configured such that air supplied to the stage surface 25c does not leak out.

  One alignment device 25d is provided at each end of the carry-in stage 25 in the Y direction. The alignment device 25d is a device that aligns the position of the substrate S carried into the carry-in stage 25. Each alignment device 25d has a long hole and an alignment member provided in the long hole, and mechanically holds the substrate loaded into the loading side stage 25 from both sides.

  The lift mechanism 26 is provided on the back side of the substrate loading position of the loading stage 25. The lift mechanism 26 includes an elevating member 26a and a plurality of elevating pins 26b. The elevating member 26a is connected to a driving mechanism (not shown), and the elevating member 26a is moved in the Z direction by driving the driving mechanism. The plurality of elevating pins 26b are erected from the upper surface of the elevating member 26a toward the carry-in stage 25. Each raising / lowering pin 26b is arrange | positioned in the position which overlaps with said raising / lowering pin retracting hole 25b, respectively by planar view. As the elevating member 26a moves in the Z direction, each elevating pin 26b appears and disappears on the stage surface 25c from the elevating pin appearing hole 25b. Ends in the + Z direction of the lift pins 26b are provided so that their positions in the Z direction are aligned, so that the substrate S transported from the outside of the apparatus can be held in a horizontal state. .

  The coating processing region 21 is a portion where resist coating is performed, and a processing stage 27 that floats and supports the substrate S is provided.

  The processing stage 27 is a rectangular plate-like member in plan view in which the stage surface (conveying surface) 27c is covered with a light-absorbing material mainly composed of hard alumite, for example, on the + X direction side with respect to the loading-side stage 25. Is provided. In the portion of the processing stage 27 covered with the light absorbing material, reflection of light such as laser light is suppressed. The processing stage 27 has a longitudinal Y direction. The dimension of the processing stage 27 in the Y direction is substantially the same as the dimension of the loading stage 25 in the Y direction. The processing stage 27 is provided with a plurality of air ejection ports 27a for ejecting air onto the stage surface 27c and a plurality of air suction ports 27b for sucking air on the stage surface 27c. The air ejection port 27 a and the air suction port 27 b are provided so as to penetrate the processing stage 27. In addition, a plurality of grooves (not shown) are provided inside the processing stage 27 for imparting resistance to the pressure of the gas passing through the air ejection port 27a and the air suction port 27b. The plurality of grooves are connected to the air outlet 27a and the air suction port 27b inside the stage.

  In the processing stage 27, the pitch of the air jets 27 a is narrower than the pitch of the air jets 25 a provided in the carry-in stage 25, and the air jets 27 a are provided more densely than the carry-in stage 25. In the processing stage 27, the air suction ports 27b are densely provided together with the air ejection ports 27a. As a result, in this processing stage 27, the flying height of the substrate can be adjusted with higher accuracy than in the other stages, and the flying height of the substrate is controlled to be, for example, 100 μm or less, preferably 50 μm or less. Is possible. The processing stage 27 is provided with a detection unit MS that can detect the distance between the stage surface 27c and the substrate S.

  The substrate carry-out area 22 is a part where the substrate S coated with resist is carried out of the apparatus, and includes a carry-out stage 28 and a lift mechanism 29. The carry-out stage 28 is provided on the + X direction side with respect to the processing stage 27, and is composed of substantially the same material and dimensions as the carry-in stage 25 provided in the substrate carry-in region 20. As with the carry-in stage 25, the carry-out stage 28 is provided with an air jet outlet 28 a and a lift pin retracting hole 28 b. The lift mechanism 29 is provided on the back side of the substrate carry-out position of the carry-out stage 28 and is supported by the frame unit 24, for example. The lift member 29 a and the lift pin 29 b of the lift mechanism 29 have the same configuration as each part of the lift mechanism 26 provided in the substrate carry-in area 20. The lift mechanism 29 can lift the substrate S by lift pins 29b for transferring the substrate S when the substrate S on the unloading stage 28 is unloaded to an external device.

  As shown in FIG. 4, the transport mechanism 23 includes a first transport mechanism 60 and a second transport mechanism 61. 3 shows a state where the first transport mechanism 60 holds the substrate S, and the second transport mechanism 61 disposed below the first transport mechanism 60 is not shown.

  The first transport mechanism 60 includes a transporter (holding unit) 60a, a vacuum pad (suction unit) 60b, a rail 60c, and a moving mechanism that allows the transporter 60a to move on a surface parallel to the transport surface of the substrate S. (Advance / retreat mechanism) 63. The second transport mechanism 61 includes a transporter (holding unit) 61a, a vacuum pad (suction unit) 61b, a rail 61c, and an elevating mechanism (advancing / retracting mechanism) 62 that allows the transporter 61a to move up and down (up and down operation). And have. The rails 60c and 61c extend across the stages on the side of the carry-in stage 25, the processing stage 27, and the carry-out stage 28.

  The conveyors 60a and 61a have a configuration in which, for example, a linear motor is provided therein. When the linear motor is driven, the conveyors 60a and 61a move on the rails 60c and 61c along the respective stages. Can move. In other words, the transporters 60a and 61a have a function as a holding unit that holds the substrate S and a function as a driving unit that drives the holding unit. The transporters 60a and 61a are configured such that predetermined portions 60d and 61d overlap with the −Y direction end of the substrate S in plan view. The portions 60d and 61d overlapping the substrate S are arranged at a position lower than the height position of the back surface of the substrate when the substrate S is levitated.

  As shown in FIG. 4, the second transport mechanism 61 is disposed at the lower stage of the stepped step portion 24 a of the frame portion 24 compared to the first transport mechanism 60. Further, when viewed in plan, the second transport mechanism 61 is arranged on the stage side with respect to the first transport mechanism 60.

  As shown in FIG. 4, the second transport mechanism 61 is accessible (can be advanced and retracted) by raising the transport device 61 a by the lifting mechanism 62. On the other hand, the first transfer mechanism 60 can access (retract) the substrate S by horizontally moving the transfer device 60 a on a plane parallel to the transfer surface of the substrate S by the moving mechanism 63. The transport device 60a of the first transport mechanism 60 and the transport device 61a of the second transport mechanism 61 can be moved independently of each other.

  Further, for example, when the first transport mechanism 60 holds the substrate S, the transport device 61a of the second transport mechanism 61 that does not hold the substrate S waits downward when the elevating mechanism 62 is lowered. The first transfer mechanism 60 (the transfer device 60a) is retracted from the transfer path. When the second transport mechanism 61 holds the substrate S, the transport device 60a of the first transport mechanism 60 that does not hold the substrate S moves in the −Y direction by the moving mechanism 63, and the second transport mechanism 61 (conveyor 61a) is retracted from the conveyance path.

  As shown in FIG. 3, a plurality of (three in this embodiment) vacuum pads 60b are arranged along the transport direction of the substrate S in the portion 60d overlapping the substrate S of the transport device 60a. The vacuum pad 60b has a suction surface for vacuum-sucking the substrate S, and is arranged so that the suction surface faces upward. The vacuum pad 60b can hold the substrate S when the suction surface sucks the back surface end of the substrate S. These vacuum pads 60b are preferably held within 250 mm from the front end of the substrate S in the transport direction, and preferably within 80 mm. Specifically, in the present embodiment, the transporter 60a holds the substrate S such that the distance W from the front end of the substrate S in the transport direction to the vacuum pad 60b is within 80 mm. As a result, the substrate S is uniformly held by the transfer device 60a, and the end portion of the substrate is prevented from sagging, so that the substrate S can be transferred in a state of being uniformly lifted. Therefore, unevenness is prevented from occurring in the film obtained by drying and solidifying the resist applied on the substrate S.

  In addition, although the structure of the conveyance machine 61a in the 2nd conveyance mechanism 61 is not illustrated in FIG. 3, it has the same structure as the said conveyance machine 60a. That is, three vacuum pads 61b in the transport device 61a are arranged along the transport direction of the substrate S in a portion overlapping the substrate S.

  Here, the configuration of the main parts of the transporters 60a and 61a will be described. Since the transporters 60a and 61a have the same configuration as described above, the transporter 60a is taken as an example in this description, and the configuration will be described with reference to FIG. 5A is a diagram illustrating a plan configuration of a main part of the transporting device 60a, and FIG. 5B is a diagram illustrating a cross-sectional configuration of a main part of the transporting device 60a.

  As shown in FIG. 5A, the vacuum pad 60b provided in the transporter 60a has a substantially oval shape in a plan view in contact with the substrate S. An exhaust hole 65 connected to a vacuum pump (not shown) or the like is provided inside the vacuum pad 60b. The vacuum pad 60b can vacuum-suck the substrate S by exhausting the sealed space formed between the vacuum pad 60b and the substrate S through the exhaust hole 65.

  Further, as shown in FIG. 5B, a stopper member (position regulating member) 66 for regulating the position of the substrate S being transported is provided on the side of the vacuum pad 60b provided on the transport machine 60a. Yes. The stopper member 66 includes a convex portion 66a that faces the side surface S1 of the substrate S and faces the lower surface side of the substrate S. The convex portion 66a functions as a stopper that restricts downward bending of the substrate S. As shown in FIG. 5A, the convex portion 66a is provided in a state of surrounding the outer peripheral portion of the vacuum pad 60b in a frame shape. The upper surface of the convex portion 66a is preferably set in the range of −30 to +30 μm with respect to the upper surface of the carry-in stage 25, and is preferably set in the vicinity of −20 μm. The positional relationship between the convex portion 66a and the vacuum pad 60b is preferably set so that the vacuum pad 60b is about 0 to 1 mm upward.

  In addition, you may make it the structure where the convex part 66a is arrange | positioned between the adjacent vacuum pads 60b, ie, the convex part 66a surrounds the four sides of each vacuum pad 60b.

  The vacuum pad 60b according to the present embodiment can be displaced with respect to the substrate S. In the specific embodiment, the vacuum pad 60b has a bellows portion 67 having a bellows structure. Thereby, for example, even when the height of the substrate S fluctuates due to bending at the end of the substrate S, the vacuum pad 60b follows the movement of the substrate S to reliably hold the suction to the substrate S. can do. Further, the vacuum pad 60b can adsorb the substrate S satisfactorily by the displacement of the bellows portion 67 even when the flying height of the substrate S on the stage is changed.

(Applying part)
Next, the configuration of the application unit 3 will be described.
The application unit 3 is a part for applying a resist on the substrate S, and includes a portal frame 31 and a nozzle 32.

  The portal frame 31 includes a support member 31a and a bridging member 31b, and is provided so as to straddle the processing stage 27 in the Y direction. One support member 31 a is provided on the Y direction side of the processing stage 27, and each support member 31 a is supported on both side surfaces of the frame portion 24 on the Y direction side. Each strut member 31a is provided so that the height positions of the upper end portions are aligned. The bridging member 31b is bridged between the upper end portions of the respective column members 31a, and can be moved up and down with respect to the column members 31a.

  The portal frame 31 is connected to a moving mechanism 31c and is movable in the X direction. The portal frame 31 is movable between the management unit 4 by the moving mechanism 31c. That is, the nozzle 32 provided in the portal frame 31 can move between the management unit 4. Further, the portal frame 31 can be moved in the Z direction by a moving mechanism (not shown).

  The nozzle 32 is formed in a long and long shape in one direction, and is provided on the surface on the −Z direction side of the bridging member 31 b of the portal frame 31. A slit-like opening 32 a is provided along the longitudinal direction of the nozzle 32 at the tip 32 c in the −Z direction, and a resist is discharged from the opening 32 a. The nozzle 32 is disposed so that the longitudinal direction of the opening 32 a is parallel to the Y direction and the opening 32 a faces the processing stage 27. The dimension in the longitudinal direction of the opening 32a is smaller than the dimension in the Y direction of the substrate S to be transported, so that the resist is not applied to the peripheral region of the substrate S. A flow passage (not shown) through which the resist flows through the opening 32a is provided inside the nozzle 32, and a resist supply source (not shown) is connected to the flow passage. The resist supply source has a pump (not shown), for example, and the resist is discharged from the opening 32a by pushing the resist to the opening 32a with the pump. The support member 31a is provided with a moving mechanism (not shown), and the nozzle 32 held by the bridging member 31b is movable in the Z direction by the moving mechanism. The nozzle 32 is provided with a moving mechanism (not shown), and the moving mechanism allows the nozzle 32 to move in the Z direction with respect to the bridging member 31b.

  On the lower surface of the bridging member 31b of the portal frame 31, a sensor that measures the distance in the Z direction between the opening 32a of the nozzle 32, that is, the tip 32c of the nozzle 32 and the facing surface facing the nozzle tip 32c. 33 is attached. As the sensor 33, for example, an optical sensor is used, and has, for example, a light emitting unit and a light receiving unit (not shown). The sensor 33 is directed to the end Sd of the substrate S, for example.

  For example, three sensors 33 are arranged in the nozzle 32. The three sensors 33 are arranged side by side at an equal pitch in the Y direction, for example. Of these, the two sensors 33 are disposed at positions facing the end Sd of the substrate S, for example. With the two sensors 33, for example, the distance at the end Sd of the substrate S can be detected. Further, the other sensor 33 can detect the distance in the other part Sc (for example, the Y direction center) of the substrate S.

The detection result by the sensor 33 is transmitted to the control device CONT, for example. In the control device CONT, for example, the flying height (D1) of the substrate S can be calculated based on the detection result by the sensor 33. In this case, the control device CONT stores in advance data on the distance (D2) from the surface 27c of the processing stage 27 to the nozzle tip 32c and data on the thickness (D3) of the substrate S. Using the detection result (D4) and these data, the flying height (D1) of the substrate S is calculated based on the following equation (1).
D1 = D2-D3-D4 (1)
(Management Department)
The configuration of the management unit 4 will be described.
The management unit 4 is a part that manages the nozzle 32 so that the discharge amount of the resist (liquid material) discharged onto the substrate S is constant, and the −X direction side with respect to the coating unit 3 in the substrate transport unit 2. (Upstream in the substrate transport direction). The management unit 4 includes a preliminary discharge mechanism 41, a dip tank 42, a nozzle cleaning device 43, a storage unit 44 that stores them, and a holding member 45 that holds the storage unit. The holding member 45 is connected to the moving mechanism 45a. The accommodating portion 44 is movable in the X direction by the moving mechanism 45a.

  The preliminary discharge mechanism 41, the dip tank 42, and the nozzle cleaning device 43 are arranged in this order in the −X direction side. The dimensions of the preliminary discharge mechanism 41, the dip tank 42, and the nozzle cleaning device 43 in the Y direction are smaller than the distance between the columnar members 31a of the portal frame 31, and the portal frame 31 straddles each part. It can be accessed at.

  The preliminary ejection mechanism 41 is a part that ejects the resist preliminary. The preliminary discharge mechanism 41 is provided closest to the nozzle 32. The dip tank 42 is a liquid tank in which a solvent such as thinner is stored. The nozzle cleaning device 43 is a device for rinsing and cleaning the vicinity of the opening 32a of the nozzle 32, and includes a cleaning mechanism (not shown) that moves in the Y direction and a moving mechanism (not shown) that moves the cleaning mechanism. This moving mechanism is provided on the −X direction side of the cleaning mechanism. The nozzle cleaning device 43 has a larger dimension in the X direction than the preliminary discharge mechanism 41 and the dip tank 42 because the moving mechanism is provided. In addition, about arrangement | positioning of the preliminary discharge mechanism 41, the dip tank 42, and the nozzle washing | cleaning apparatus 43, it is not restricted to arrangement | positioning of this embodiment, Other arrangement | positioning may be sufficient.

(Air ejection mechanism / suction mechanism)
FIG. 6 is a diagram illustrating the configuration of the air ejection mechanism / suction mechanism of the carry-in stage 25, the processing stage 27, and the carry-out stage 28 of the substrate transport unit 2. Based on the same figure, the structure regarding the air ejection and air suction of each said stage is demonstrated.

  The carry-in stage 25 and the carry-out stage 28 are provided with only air ejection mechanisms 150 and 155, and are not provided with a suction mechanism. The air ejection mechanisms 150 and 155 have the same configuration in both stages. These air ejection mechanisms 150 and 155 have blowers 151 and 156, temperature control units 152 and 157, and manifolds 153 and 158, respectively.

  The blowers 151 and 156 are connected to temperature control units 152 and 157 by pipes 150a and 155a, respectively. The temperature control units 152 and 157 are provided with, for example, a cooling mechanism such as a refrigerant mechanism or a heating mechanism such as a heating wire, and the temperature of the supplied air can be adjusted by the cooling mechanism and the heating mechanism. Yes. The temperature control unit 152 and the temperature control unit 157 can adjust the temperature of the air independently. The temperature control units 152 and 157 are connected to the manifolds 153 and 158 by pipes 150b and 155b, respectively.

  Temperature sensors 154 and 159 are attached to the manifolds 153 and 158, respectively.

  The temperature sensors 154 and 159 measure the temperature of the air in the manifolds 153 and 158, and transmit the measurement results to the temperature control units 152 and 157, respectively. The temperature control units 152 and 157 can adjust the air temperature by feeding back the measurement results of the temperature sensors 154 and 159. As described above, the temperature control units 152 and 157 and the temperature sensors 154 and 159 constitute temperature adjustment mechanisms 181 and 182 that respectively adjust the air temperature by feeding back.

  Pressure gauges are attached to the pipes 150b and 155b, and are connected to the carry-in stage 25 and the carry-out stage 28 by pipes 150c and 155c, respectively. Various valves are provided in each of the pipes 150a to 150c and 155a to 155c. The pipes 150a to 150c and 155a to 155c may be provided with an air particle amount measuring device that measures the amount of air particles.

On the other hand, the processing stage 27 is provided with a suction mechanism 170 in addition to the air ejection mechanism 160.
FIG. 7 is a diagram illustrating a configuration of an air ejection mechanism and a suction mechanism provided in the processing stage 27. As shown in the figure, the air ejection mechanism 160 has a blower 161, a temperature control unit 162, a filter 163, an auto pressure controller (APC) 164, a manifold 165, a temperature sensor 166, and an ejection amount monitoring port 167.

  The blower 161 is an air supply source that supplies air to the air ejection mechanism, and is connected to the temperature control unit 162 by a pipe 160a. As an air supply source, an air supply line such as a factory may be connected instead of the blower 161.

  The temperature control unit 162 is a unit that adjusts the temperature of supplied air, for example. In the air circulation part in the temperature control unit 162, for example, a cooling mechanism such as a refrigerant mechanism and a heating mechanism such as a heating wire are provided. By these cooling mechanism and heating mechanism, the temperature of air can be raised or lowered. In the temperature control unit 162, the temperature of the air can be adjusted independently of the temperature control units 152 and 157 described above. The temperature control unit 162 is connected to the APC 164 by a pipe 160b.

  A filter 163 is provided in the pipe 160b. The filter 163 is a part that removes foreign matters mixed in the supplied air. Further, a relief valve (not shown) may be provided in the pipe 160b.

  The APC 164 is a unit that adjusts the supply amount of air. The APC 164 includes a butterfly valve 164a and a controller 164b. The controller 164b can adjust the opening degree of the butterfly valve 164a, and the supply amount of air can be adjusted by adjusting the opening degree of the butterfly valve 164a. The APC 164 is connected to the manifold 165 via a pipe 160c.

  A flow meter 169a and a pressure gauge 169b are attached to the pipe 160c. The flow rate and pressure of the air in the pipe 160c are measured by the flow meter 169a and the pressure gauge 169b. Each measurement result is transmitted to the APC 164, for example.

  The manifold 165 is a unit that branches the air flowing through the pipe 160c. In the manifold 165, the pipe 160c is connected to a plurality of branched pipes 160d. Each pipe 160d is connected to an air outlet 27a of the processing stage 27. The manifold 165 is provided with a pipe 160f. The piping 160f is connected to an air outlet 27a disposed at the end of the processing stage 27 in the Y direction.

  The piping 160f is provided with an ejection amount adjusting mechanism GCT. The ejection amount adjustment mechanism GCT adjusts the ejection amount of air ejected from the air ejection port 27a disposed at the end of the processing stage 27 in the Y direction. Thus, the air from the APC 164 is ejected from the air ejection port 27a via the piping 160c and each piping 160d.

  Returning to FIG. 7, the temperature sensor 166 is a sensor that measures the temperature of air in the manifold 165. The air temperature data measured by the temperature sensor 166 is transmitted to the temperature control unit 162 via, for example, a communication line. In the temperature control unit 162, the temperature of the air can be adjusted by feeding back the measurement result of the temperature sensor 166. As described above, the temperature control unit 162 and the temperature sensor 166 constitute a temperature adjustment mechanism 183 that adjusts the air temperature by feeding back.

  The ejection amount monitoring port 167 is configured to have a port for air flow rate detection, and the gas flow rate immediately below the stage can be detected by this port for flow rate detection. The ejection amount monitoring port 167 is provided with a flow meter 167a and a pressure gauge 167b, and the flow rate and pressure of air ejected from the air ejection port 27a can be measured. In addition, about the measurement result by the flowmeter 167a and the pressure gauge 167b, the structure transmitted to the controller 164b in APC164 may be sufficient.

  Moreover, various valves etc. are attached to said piping 160a-160e, and an opening degree can be suitably adjusted in each valve.

  The suction mechanism 170 includes a blower 171, an auto pressure controller (APC) 172, a trap tank 173, a manifold 174, and a suction amount monitoring port 175. The blower 171, the APC 172, the trap tank 173, and the manifold 174 are connected to each other by pipes 170a to 170c, and various valves are attached to the pipes 170a to 170c. An air suction line such as a factory may be used instead of the blower 171. Moreover, the structure which is not provided with the manifold 174 may be sufficient.

  The manifold 174 is connected to a plurality of branched pipes 170d. Each piping 170 d is connected to an air suction port 27 b of the processing stage 27. The manifold 174 is provided with a pipe 170f. The pipe 170f is connected to the processing stage 27, for example. The piping 170f is provided with a suction amount adjusting mechanism VCT. The suction amount adjustment mechanism VCT adjusts the suction amount of the air suction port 27b disposed at the end of the processing stage 27 in the Y direction.

  Returning to FIG. 7, the APC 172 is provided with a butterfly valve 172a and a controller 172b for adjusting the air supply amount. The suction amount monitoring port 175 is connected to the processing stage 27 by a pipe 170e, and has a configuration in which a port for detecting an air flow rate is connected to the connection portion. In the suction amount monitoring port 175, the gas flow rate directly below the processing stage 27 can be detected by this flow rate detection port. Further, a flow meter 175a and a pressure meter 175b are attached to the suction amount monitoring port 175 so that the flow rate and pressure of air sucked by the air suction port 27b can be measured. In addition, about the measurement result by the flowmeter 175a and the pressure gauge 175b, the structure transmitted to the controller 172b in APC172 may be sufficient.

  A flow meter may be provided between the APC 172 and the air suction port 27b, and the measurement result may be transmitted to the controller 172b in the APC 172 via an electric wire (indicated by a broken line in the figure). The pipe 160c and the pipe 170c are connected to each other by a connecting portion 180 so that a purge cleaning liquid suction line and a vacuum suction (air suction) line can be switched.

Next, operation | movement of the coating device 1 comprised as mentioned above is demonstrated.
8-13 is a top view which shows the operation | movement process of the coating device 1. FIG. With reference to each figure, the operation | movement which apply | coats a resist to the board | substrate S is demonstrated. In this operation, the substrate S is carried into the substrate carry-in region 20, a resist is applied in the coating treatment region 21 while the substrate S is floated and conveyed, and the substrate S coated with the resist is carried out from the substrate carry-out region 22. . In FIGS. 9 to 11, only the outlines of the portal frame 31 and the management unit 4 are indicated by broken lines, so that the configurations of the nozzle 32 and the processing stage 27 can be easily discriminated. Hereinafter, detailed operations in each part will be described.

  Before the substrate is carried into the substrate carry-in area 20, the coating apparatus 1 is put on standby. Specifically, the transport device 60a of the first transport mechanism 60 is arranged on the −Y direction side of the substrate carry-in position of the carry-in stage 25, and the height position of the vacuum pad 60b is matched with the flying height position of the substrate. At the same time, air is ejected or sucked from the air ejection port 25a of the loading side stage 25, the air ejection port 27a of the processing stage 27, the air suction port 27b, and the air ejection port 28a of the unloading side stage 28, and the substrate is placed on the surface of each stage Air should be supplied to the extent that it rises.

  In this state, for example, when the substrate S is transferred from the outside to the substrate loading position shown in FIG. 3 by a transfer arm (not shown), the lifting member 26a is moved in the + Z direction to move the lifting pin 26b from the lifting pin retracting hole 25b. Project to the stage surface 25c. And the board | substrate S is lifted by the raising / lowering pin 26b, and the said board | substrate S is received. Further, an alignment member is projected from the long hole of the alignment device 25d to the stage surface 25c.

  After receiving the board | substrate S, the raising / lowering member 26a is lowered | hung and the raising / lowering pin 26b is accommodated in the raising / lowering pin retracting hole 25b. At this time, since the air layer is formed on the stage surface 25c, the substrate S is held in a state of being floated with respect to the stage surface 25c by the air. When the substrate S reaches the surface of the air layer, the alignment member 25d aligns the substrate S, and the moving mechanism 63 of the first transport mechanism 60 disposed on the −Y direction side of the substrate loading position. Thus, the vacuum pad 60b of the transfer device 60a can be vacuum-sucked to the end of the substrate S on the −Y direction side (FIG. 3). After the −Y direction side end of the substrate S is adsorbed by the vacuum pad 60b, the transporter 60a is moved along the rail 60c. Since the substrate S is in a floating state, the substrate S moves smoothly along the rail 60c even if the driving force of the transporter 60a is relatively small.

  When the front end of the substrate S in the transport direction reaches the processing stage 27, the control device CONT uses the sensor 33 to detect the distance between the + Z side surface of the substrate S and the front end 32 c of the nozzle 32. The control device CONT emits detection light from a light emitting unit (not shown) in the sensor 33. The detection light is reflected by the surface on the + Z side of the substrate S and is received by a light receiving unit (not shown). The received detection light is transmitted to the control device CONT as an electrical signal. The control device CONT obtains the distance between the + Z side surface of the substrate S and the tip 32c of the nozzle 32 based on the transmitted electrical signal. The control device CONT calculates the flying height of the substrate S from the obtained result using the above formula (1).

  At this time, for example, as shown in FIG. 8A and FIG. 8C, for example, the end of the substrate S opposite to the portion held by the first transport mechanism 60 and the second transport mechanism 61 in the Y direction. The portion Sd may be bent (bent in the −Z direction). In this case, the flying height of the end portion Sd of the substrate S is different from the flying height of the other portion Sc of the substrate S. As described above, when the flying height obtained from the detection result using the sensor 33 is different between the end portion Sd and the other portion Sc as described above, the control device CONT adjusts the flying height of the end portion Sd. To.

  For example, as shown in FIG. 8B, the control device CONT increases the amount of air flowing from the pipe 160f via the ejection amount adjustment mechanism GCT. By this operation, the amount of ejection from the air ejection port 27a at the end in the Y direction of the processing stage 27 is increased. By increasing the ejection amount of the air ejection port 27a, the force (levitation force) acting on the end Sd of the substrate S in the + Z direction is increased, and the bending of the end Sd is eliminated. For this reason, the flying height is uniform over the entire Y direction of the substrate S.

  For example, as shown in FIG. 8D, the control device CONT reduces the amount of air flowing from the pipe 170f via the suction amount adjustment mechanism VCT. By this operation, the suction amount of the air suction port 27b at the end of the processing stage 27 in the Y direction is reduced. By reducing the suction amount of the air suction port 27b, the force (suction force) acting in the −Z direction at the end portion Sd of the substrate S becomes small, and the force (levitation force) acting in the + Z direction is relatively small. Since it becomes large, the bending of the end Sd is eliminated. For this reason, the flying height is uniform over the entire Y direction of the substrate S.

  When the tip of the substrate S in the transport direction reaches the position of the opening 32a of the nozzle 32 while adjusting the flying height of the end Sd of the substrate S in this way, as shown in FIG. Resist is discharged toward the substrate S. The resist is discharged while the position of the nozzle 32 is fixed and the substrate S is transported by the transport device 60a.

  In the present embodiment, in the middle of applying the resist to the substrate S transported by the first transport mechanism 60, for example, another substrate S ′ is transferred from the outside to the substrate loading position by a transport arm (not shown). I have to. After receiving the substrate S ′, the elevating member 26a is lowered and the elevating pins 26b are accommodated in the elevating pin retracting holes 25b, whereby the substrate S ′ is held in a state of being floated with respect to the stage surface 25c by air. .

  When the substrate S ′ reaches the surface of the air layer, the alignment member 25d aligns the substrate S ′ and moves up and down the second transport mechanism 61 disposed on the −Z direction side of the substrate loading position. The transporting device 61a is raised by the mechanism 62, and the vacuum pad 61b is vacuum-sucked to the −Y direction side end portion of the substrate S ′. The control device CONT also causes the flying height to be appropriately detected for the substrate S ′ as in the case of the substrate S.

  As described above, in the present embodiment, the transport device 60a of the first transport mechanism 60 and the transport device 61a of the second transport mechanism 61 are movable independently of each other, so that they are transported by the first transport mechanism 60. Before the resist coating process on the substrate S is completed, another substrate S ′ can be transported onto the stage by the second transport mechanism 61. Therefore, the resist can be satisfactorily applied onto the substrates S and S ′ that are sequentially conveyed in a cantilever state, and high throughput can be obtained in the resist application process.

  As the substrate S moves, a resist film R is applied onto the substrate S as shown in FIG. As the substrate S passes under the opening 32a for discharging the resist, a resist film R is formed in a predetermined region of the substrate S. Further, the transporter 61a of the second transport mechanism 61 moves the substrate S ′ below the opening 32a.

  The substrate S on which the resist film R is formed is transferred to the carry-out stage 28 by the transfer device 60a. In the carry-out stage 28, the substrate S is transferred to the substrate carry-out position shown in FIG. Further, when another substrate S ′ transported by the transport device 61a passes under the opening 32a, a resist film R is formed in a predetermined region of the other substrate S ′.

  When the substrate S reaches the substrate unloading position, the suction of the vacuum pad 60b is released, and the elevating member 29a of the lift mechanism 29 is moved in the + Z direction. Then, the elevating pins 29b protrude from the elevating pin retracting holes 28b to the back surface of the substrate S, and the substrate S is lifted by the elevating pins 29b. In this state, for example, an external transfer arm provided on the + X direction side of the carry-out stage 28 accesses the carry-out stage 28 and receives the substrate S. After passing the substrate S to the transport arm, the first transport mechanism 60 uses the moving mechanism 63 to retract the transport device 60a (vacuum pad 60b) from below the substrate S and transports another substrate S ′. Retreats from the transport path (movement path) of the transport mechanism 61.

  Then, the first transport mechanism 60 returns to the substrate carry-in position of the carry-in stage 25 again and waits until the next substrate is transported. At this time, as shown in FIG. 11, the resist coating is performed on the substrate S ′ that is transported to the second transport mechanism 61, but the first transport mechanism 60 is the second transport mechanism as described above. Since it is retracted from the transport path 61, it can return to the substrate transport position of the transport side stage 25 without contacting the second transport mechanism 61 and preventing the transport of other substrates S '.

  When the substrate S ′ transported by the second transport mechanism 61 reaches the substrate unloading position, the external transport arm similarly accesses the unloading stage 28 and receives the substrate S. And it returns to the board | substrate carrying-in position of the carrying-in side stage 25 again, and waits until the next board | substrate S is conveyed.

  Until the next substrate is conveyed, the application unit 3 performs preliminary discharge for maintaining the discharge state of the nozzles 32. As shown in FIG. 12, the portal frame 31 is moved in the −X direction to the position of the management unit 4 by the moving mechanism 31 c.

  After the portal frame 31 is moved to the position of the management unit 4, the position of the portal frame 31 is adjusted so that the tip 32 c of the nozzle 32 is accessed to the nozzle cleaning device 43, and the nozzle tip 32 c is moved by the nozzle cleaning device 43. Wash.

  After cleaning the nozzle tip 32 c, the nozzle 32 is accessed to the preliminary discharge mechanism 41. The preliminary discharge mechanism 41 moves the opening 32a at the tip 32c of the nozzle 32 to a predetermined position in the Z direction while measuring the distance between the opening 32a and the preliminary discharge surface, and moves the nozzle 32 in the −X direction. The resist is preliminarily discharged from the opening 32a while being moved.

  After performing the preliminary discharge operation, the portal frame 31 is returned to the original position. When the next substrate S is transported, the nozzle 32 is moved to a predetermined position in the Z direction as shown in FIG. In this way, a high-quality resist film R is formed on the substrate S by repeatedly performing the coating operation for applying the resist film R on the substrate S and the preliminary ejection operation.

  If necessary, for example, each time the management unit 4 is accessed a predetermined number of times, the nozzle 32 may be accessed in the dip tank 42. In the dip tank 42, drying of the nozzle 32 is prevented by exposing the opening 32 a of the nozzle 32 to a vapor atmosphere of a solvent (thinner) stored in the dip tank 42.

  As described above, according to the present embodiment, in the processing stage 27 in which the resist R is discharged from the nozzle 32, the end Sd of the substrate S in the direction (Y direction) orthogonal to the substrate transport direction (+ X direction). Since the ejection amount adjustment mechanism GCT and the suction amount adjustment mechanism VCT are provided as the adjustment units for adjusting the flying height, the flying height of the end portion Sd of the substrate S can be adjusted to be equal to the flying height of the other portion Sc. . As a result, the substrate S can be floated with a uniform flying height.

The technical scope of the present invention is not limited to the above-described embodiment, and appropriate modifications can be made without departing from the spirit of the present invention.
For example, in the above-described embodiment, the configuration in which the first transport mechanism 60 and the second transport mechanism 61 are each provided with one transport device 60a and 61a has been described, but the present invention is not limited to this. For example, as shown in FIG. 14, the first transport mechanism 60 may have a configuration in which three transporters 60 a are provided on a rail 60 c. In addition, although illustration is abbreviate | omitted in FIG. 14, the 2nd conveyance mechanism 61 can also be set as the structure provided with three conveyance machines 61a. In this description, a configuration in which each of the three transporters 60a and 61a is provided is described. However, the present invention is not limited to this, and the transporters 60a and 61a are provided in two or four or more. The configuration can also be applied.

  In this description, the first transfer device 261, the second transfer device 262, and the third transfer device 263 are sequentially referred to from the upstream side in the transfer direction of the substrate S, and may be collectively referred to as the transfer devices 261, 262, and 263. is there.

  These transporters 261, 262, and 263 move on the rail 60 c in a synchronized state when the substrate S is transported. Each of the transporters 261, 262, and 263 can move independently on the rail 60c when the substrate S is not transported. According to this configuration, the holding position of the substrate S in each of the transporters 261, 262, and 263 can be arbitrarily set according to the length of the substrate S to be transported.

  The vacuum pad 60b of the transport machine 261 preferably holds within 250 mm from the front end of the substrate S in the transport direction, and preferably within 80 mm. Specifically, the transporter 261 holds the substrate S such that the distance W1 from the front end of the substrate S in the transport direction to the vacuum pad 60b is within 80 mm.

  Further, the vacuum pad 60b of the transport machine 263 preferably holds within 250 mm from the end of the substrate S in the transport direction rear side, and preferably within 80 mm. Specifically, the transporter 263 holds the substrate S so that the distance W2 from the rear end of the substrate S in the transport direction to the vacuum pad 60b is within 80 mm.

  These transporters 261, 262, and 263 hold the substrate S uniformly, prevent the end portion of the substrate from sagging, and allow the large substrate S to be transported in a state of evenly floating. Therefore, unevenness can be prevented from occurring in the film obtained by drying and solidifying the resist applied on the large substrate S.

  In the above embodiment, the sensor 33 provided in the nozzle 32 is described as an example of the detection unit that detects the flying height of the substrate S. However, the present invention is not limited to this. For example, as shown in FIGS. 15A and 15B, a configuration in which a detection unit is provided on the processing stage 27 side may be employed.

FIG. 15A is a plan view showing the configuration of the processing stage 27.
As shown in FIG. 15A, the processing stage 27 has a first flying area FA, a second flying area SA, and a third flying area TA. The first levitation area FA is disposed at both ends of the processing stage 27 in the X direction. The first levitation area FA is an area where the levitation amount is managed more strictly than the carry-in stage 25 and the carry-out stage 28 described above.

  The second flying area SA is arranged on the inner side in the X direction than the first flying area FA. The second flying area SA is an area where the flying height is managed more strictly than the first flying area FA. For example, the flying height of the substrate S in the second flying area SA is set to be different from the flying height of the substrate in the first flying area FA.

  The third levitation area TA is disposed at substantially the center in the X direction of the processing stage 27 and is an area sandwiched between the second levitation areas SA. The third floating area TA is an area including a discharge area CA that faces the opening 32 a of the nozzle 32. In the third flying area TA, the flying height of the substrate S is managed more strictly than in the first flying area FA and the second flying area SA. The flying height of the substrate S in the third flying area TA is set to be different from the flying height of the substrate in the second flying area SA.

  The ejection amount adjustment mechanism GCT and the suction amount adjustment mechanism VCT are provided in the pipes 160f and 170f connected to the end portion of the third floating area TA. Thereby, it is possible to adjust the air ejection amount and the suction amount at the end of the third floating region TA. The ejection amount adjustment mechanism GCT and the suction amount adjustment mechanism VCT can adjust the air ejection amount and the suction amount at the end of the first levitation area FA and the second levitation area SA in addition to the third levitation area TA. It is more preferable to use the configuration provided. In this case, the ejection amount adjustment mechanism GCT and the suction amount adjustment mechanism VCT may be disposed in the pipes 160f and 170f connected to the end portions of the first levitation area FA and the second levitation area SA.

  As shown in FIG. 15A, each of the plurality of detection units MS is arranged in a region through which the substrate S passes. For example, in the present embodiment, the processing stage 27 is provided at the center in the Y direction and at both ends in the Y direction. Thus, by dispersively arranging in the direction orthogonal to the transport direction of the substrate S, the flying height in the entire substrate S can be detected.

  Regarding the position of the detection unit MS in the X direction, for example, three (MS1) are arranged at the boundary portion L1 between the first levitation area FA and the second levitation area SA on the −X side in the figure, and the −X side in the figure Three (MS2) are arranged at the boundary portion L2 between the second levitation area SA and the third levitation area TA, and at the boundary portion L3 between the first levitation area FA and the second levitation area SA on the + X side in the figure. Three (MS3) are arranged. Thus, by dispersively arranging the substrates S in the transport direction, the flying height at each transport position of the substrate S can be detected. In the present embodiment, since the detection unit MS is provided at a position where the flying height of the substrate S changes, the flying height of the substrate S is managed more strictly.

  In the above arrangement, the plurality of detection units MS are provided at positions outside the discharge area CA in the processing stage 27, respectively. Since the resist R ejected from the opening 32a of the nozzle 32 is not directly applied to the detection unit MS, it is possible to prevent an error from occurring in the detection result of the detection unit MS.

  For example, the three detection units MS arranged at the boundary portion between the second flying area SA and the third flying area TA on the −X side in the drawing are provided at positions along the ejection area CA. Thus, since the detection unit MS is provided at a position along the discharge area CA, the flying height in the discharge area CA is detected more accurately. The three detection units MS are provided on the upstream side in the transport direction of the substrate S with respect to the ejection area CA. For this reason, the flying height of the substrate S immediately before the resist R is discharged onto the substrate S can be detected.

  In the processing stage 27, an opening (detection opening) 27d for accommodating the detection unit MS is formed. Each detection unit MS is disposed in the detection opening 27d. The detection opening 27d (and the detection unit MS) are provided at positions away from the air ejection port 27a and the air suction port 27b, respectively. For this reason, it has the structure which does not affect the ejection of gas by each air ejection port 27a, and the suction by the air suction port 27b, respectively.

  In the first levitation area FA, the second levitation area SA, and the third levitation area TA of the processing stage 27, the flying height of the substrate S is adjusted more precisely than, for example, the carry-in stage 25 and the carry-out stage 28 described above. It is the composition which becomes. In the processing stage 27, for example, the first flying area FA and the second flying area SA may be adjusted to have the same flying height.

FIG. 15B is a cross-sectional view showing a partial configuration of the processing stage 27, and shows the configuration of one detection opening 27d and the detection unit MS.
As shown in FIG. 15B, the detection opening 27d has a port PT for accommodating the detection unit MS therein. When the detection unit MS is accommodated in the port PT, for example, the detection unit MS has an upper end (an end on the + Z side) positioned on the −Z side by a depth dx (about 1 mm) with respect to the stage surface 27c. Placed in.

  The detection unit MS is formed in a spherical shape on the + Z side. For example, a light emitting unit LD and a light receiving unit PD are provided inside the spherical portion. The light emitting unit LD irradiates detection light toward the −Z side surface of the substrate S. The light receiving unit PD receives the detection light reflected by the surface on the −Z side of the substrate S.

  As the light emitting unit LD, for example, a laser diode or the like is used. For example, a photodiode is used as the light receiving unit PD. The light emitting unit LD and the light receiving unit PD are connected to the control device CONT, for example. The control device CONT controls the detection light irradiation timing and irradiation intensity in the light emitting unit LD, and analyzes the detection light detected by the light receiving unit PD.

  In the configuration shown in FIG. 15A and FIG. 15B, when the tip in the transport direction of the substrate S reaches the boundary portion L1 of the processing stage 27, the control device CONT detects the detection arranged at the boundary portion L1. The distance (flying amount) between the −Z side surface of the substrate S and the stage surface 27c is detected using the part MS1. The control device CONT emits detection light from the light emitting unit LD in the detection unit MS1. The detection light is reflected by the −Z side surface of the substrate S and is received by the light receiving unit PD. The received detection light is transmitted to the control device CONT as an electrical signal. The control device CONT obtains the flying height of the substrate S based on the transmitted electric signal.

  When the front end of the substrate S in the transport direction reaches the boundary portion L2 of the processing stage 27, the control device CONT uses the detection unit MS2 disposed in the boundary portion L2 to detect the surface on the −Z side of the substrate S. The distance (flying height) from the stage surface 27c is detected. Note that the control device CONT may detect the flying height of the substrate S by simultaneously using the detection unit MS1 disposed in the boundary portion L1.

  Further, the flying height obtained from the detection result using the detection unit MS1 is the end portion Sd (see FIG. 8A to FIG. 8D) and the other portion Sc (FIG. 8A to FIG. 8). If the difference is different from that in FIG. 8D, the control device CONT uses the ejection amount adjustment mechanism GCT and the suction amount adjustment mechanism VCT to adjust the flying height of the end Sd. By this operation, the bending of the end portion Sd of the substrate S is eliminated, and the flying height is uniform over the entire Y direction of the substrate S.

  When the tip in the transport direction of the substrate S reaches the position of the opening 32a of the nozzle 32 while performing such detection and adjustment of the flying height of the end Sd, as shown in FIG. 9 described in the above embodiment, the nozzle A resist is discharged toward the substrate S from the opening 32 a of 32. The resist is discharged while the position of the nozzle 32 is fixed and the substrate S is transported by the transport device 60a.

  Further, when the front end of the substrate S in the transport direction reaches the boundary portion L3 of the processing stage 27, the control device CONT uses the detection unit MS3 disposed in the boundary portion L3 to detect the surface on the −Z side of the substrate S. The distance (flying height) from the stage surface 27c is detected. Note that the control device CONT may detect the flying height of the substrate S by simultaneously using the detection unit MS1 disposed in the boundary portion L1 and the detection unit MS2 disposed in the boundary portion L2.

  Thus, by detecting the flying height of the substrate S from the processing stage 27 side, a more accurate detection result can be obtained regardless of the surface state of the substrate S (presence of resist R, presence of pattern, etc.). Become. In the control device CONT, the flying height of the substrate S may be adjusted based on the detection result in the detection unit MS (MS1 to MS3). In this case, for example, the control device CONT can adjust the flying height of the substrate S by adjusting the air ejection amount from the air ejection port 27a and the suction amount of the air suction port 27b. Note that the flying height of the substrate S may be detected using both the detection units MS1 to MS3 and the sensor 33, and the flying height of the end portion Sd of the substrate S may be adjusted using the detection result.

  In the above embodiment, for example, as shown in FIGS. 8A to 8D, the ejection amount and the suction amount are adjusted at one end portion (+ Y side end portion) of the processing stage 27 in the Y direction. However, the present invention is not limited to this. Of course, it is also ejected at the end (−Y side end) held by the first transport mechanism 60 and the second transport mechanism 61. The configuration may be such that the amount and the suction amount can be adjusted.

  CONT ... Control device S ... Substrate Sd ... End Sc ... Other parts 33 ... Sensor MS (MS1 to MS3) ... Detection unit GCT ... Ejection amount adjustment mechanism VCT ... Suction amount adjustment mechanism CCT ... Ejection amount adjustment mechanism 1 ... Coating device 27 ... Processing stage 27c ... Stage surface 27a ... Air jet 27b ... Air suction port 32 ... Nozzle

Claims (10)

An application unit having a nozzle for discharging a liquid material in a predetermined region;
A substrate transport unit that floats and transports the substrate so as to pass through the predetermined region;
An adjustment unit that adjusts the flying height of an end of the substrate in a direction orthogonal to the substrate transport direction at least in the predetermined region;
A detection unit that detects the flying height of the end in the direction orthogonal to the substrate transport direction ,
The substrate transfer unit is disposed in a holding unit that holds at least a part of the end in a direction orthogonal to the substrate transfer direction, and is disposed in a portion of the holding unit that overlaps the substrate in plan view, and sucks the substrate An adsorbing part,
The holding unit holds the substrate such that the distance from the front end in the conveyance direction of the substrate to the suction unit is within 80 mm,
The adsorption unit exhausts a sealed space generated between the adsorption unit and the substrate through an exhaust hole provided inside the adsorption unit,
The said detection part is a coating device disperse | distributed and arrange | positioned in the conveyance direction of the said board | substrate. The coating apparatus according to claim 1, further comprising an adjustment amount control unit that controls an adjustment amount by the adjustment unit based on a detection result of the detection unit. The detection unit coating apparatus according to claim 1 or claim 2 having a sensor arranged toward the end portion in the direction perpendicular to the substrate conveying direction. A plurality of the sensors are provided,
The coating device according to claim 3 , wherein the plurality of sensors are arranged at positions corresponding to both the end portions in a direction orthogonal to the substrate transport direction. A gas ejection part for ejecting gas to the substrate;
The adjustment unit coating apparatus according to any one of claims 1 to claim 4 having the ejection amount adjustment unit for adjusting the ejection amount of the gas to the end portion in the direction perpendicular to the substrate conveying direction . A suction part for sucking the substrate transport part;
The coating apparatus according to any one of claims 1 to 5 , wherein the adjustment unit includes a suction amount adjustment unit that adjusts a suction amount of a portion corresponding to the end portion in a direction orthogonal to the substrate transport direction. . A substrate transfer step of floating and transferring the substrate so as to pass through a predetermined area;
An application step of discharging a liquid material onto the substrate passing through the predetermined region;
An adjustment step for adjusting a flying height of an end portion in a direction orthogonal to the substrate transport direction of the substrate in at least the predetermined region;
Detecting the flying height of the end in the direction orthogonal to the substrate transport direction ,
In the substrate transporting step, while holding at least a part of the end portion in a direction orthogonal to the substrate transporting direction, the substrate in the portion overlapping the substrate in a plan view among the holding portions of the substrate is sucked,
In the substrate transport step, the distance from the front end in the transport direction of the substrate to the suction portion of the substrate is within 80 mm,
In the substrate transporting step, the sealed space generated between the suction unit and the substrate is exhausted through an exhaust hole provided inside the suction unit that sucks the substrate,
In the detecting step, the detecting unit arranged in a distributed manner in the substrate transport direction detects a flying height of the end portion in a direction orthogonal to the substrate transport direction . The coating method according to claim 7, further comprising an adjustment amount control step of controlling the adjustment amount in said adjustment step based on the detection result in the detecting step. A gas ejection step for ejecting gas to the substrate;
The adjusting step The coating method according to claim 7 or claim 8 comprising adjusting the ejection amount of the gas to the end portion in the direction perpendicular to the substrate conveying direction. A suction step of sucking a substrate transport unit that floats and transports the substrate so as to pass through the predetermined region;
The coating method according to any one of claims 7 to 9 , wherein the adjusting step includes adjusting a suction amount of a portion corresponding to the end portion in a direction orthogonal to the substrate transport direction .

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