JP2011053204A - Optical inspection apparatus and inspection method using the same - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an optical inspection apparatus with improved efficiency of inspection. <P>SOLUTION: An object 10 to be inspected is mounted on a support unit 100. A first illumination unit 400 generates first light having a short wavelength and irradiates the object to be inspected 10 with the first light. An imaging unit 200 picks up an image of the object to be inspected 10 being irradiated with the first light. Meanwhile, an optical inspection apparatus 1000 takes an image of the object 10 to be inspected by irradiating it with short-wavelength light. This permits inspection of a defect in a transparent pattern formed on the object to be inspected 10. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention relates to an inspection apparatus that inspects an inspection object, and more particularly to an optical inspection apparatus that inspects an inspection object using an image obtained by imaging the inspection object, and an inspection method using the optical inspection apparatus.

Flat panel display devices for displaying images are used in various fields such as computers and portable terminals. Such a flat panel display displays information corresponding thereto as an image by a user operation.
Recently, in order to facilitate the operation of a flat panel display device, a touch panel is applied to the flat panel display device to improve user convenience.
The touch panel includes a coordinate sheet for generating a position value of a point pressed by the user. Since such a touch panel is installed on the upper surface of the flat panel display panel, the part corresponding to the display area where the image of the flat panel display is displayed must be made of a transparent material. Therefore, the coordinate sheet includes a transparent base film, and a conductive transparent pattern and a silver plating pattern for generating a position value of a portion pressed by the user are formed on the upper surface of the base film.
The transparent pattern is formed in a region corresponding to the display region of the flat panel display panel and is made of the same material as indium tin oxide or indium zinc oxide. The silver plating pattern is formed in a region corresponding to a peripheral region surrounding the display region, and is connected to an external device that generates a position value of a portion pressed by a user, a transparent pattern, and a circuit board.
In particular, the coordinate sheet can be inspected by an inspection device using an electrical signal such as a probe inspection device because the base film and the transparent pattern are all transparent. However, when the naked eye or a camera is used, the inspection is performed. I can't do it.

Korean Published Patent No. 10-2009-0039412

The present invention has been made to solve the above problems, and an object thereof is to provide an optical inspection apparatus capable of improving inspection efficiency.
Another object of the present invention is to provide an inspection method using an optical inspection apparatus.

The optical inspection apparatus according to the first aspect for realizing the object of the present invention includes a support unit, a first illumination unit, and an imaging unit.
An inspection object is placed on the support unit. A 1st illumination unit is installed in the upper part of a support unit, produces | generates the 1st light which has a short wavelength, and irradiates it toward the test target object mounted in the support unit. The imaging unit images the inspection object irradiated with the first light.
The optical inspection apparatus according to the second aspect for realizing the object of the present invention includes a support unit, a vertical illumination unit, first and second inclined illumination units, and an imaging unit.

  An inspection object having a transparent pattern formed on the upper surface is placed on the support unit. The vertical illumination unit is installed on the upper part of the support unit, the longitudinal axis is arranged perpendicular to the upper surface of the support unit, and generates a first light having a short wavelength and is placed on the support unit. The first light is irradiated in a linear form toward the inspection object. The first and second inclined illumination units are installed under the vertical illumination unit, generate second light, and irradiate the second light in a linear form toward the inspection object placed on the support unit. The exit surface of the first tilt illumination unit that emits the second light and the exit surface of the second tilt illumination unit are disposed so as to be inclined in opposite directions with respect to the inspection surface of the inspection object. An imaging unit is installed in the upper part of the 1st lighting unit, and images the inspection subject irradiated with the 1st and 2nd light.

The optical inspection method according to the third aspect for realizing the object of the present invention is as follows. First, the inspection object is imaged while irradiating the first light having a short wavelength toward the inspection object on which the transparent pattern is formed. Next, the inspection object is inspected through the captured image.
In such an optical inspection method, the inspection object is imaged while emitting the second light toward the inspection object, and the colored pattern formed on the inspection object through the image obtained by irradiating the second light is captured. A step of inspecting may be further included.
Furthermore, the optical inspection method according to the fourth aspect for realizing the object of the present invention is as follows. First, the inspection object is imaged while simultaneously emitting the first light and the second light having a short wavelength toward the inspection object on which the transparent pattern and the colored pattern are formed. The inspection object is inspected through the captured image.

  According to the present invention, since the optical inspection apparatus irradiates light of a short wavelength and images the inspection object, it is possible to inspect the transparent pattern formed on the inspection object using the captured image. Inspection efficiency can be improved.

1 is a side view schematically showing an optical inspection apparatus according to an embodiment of the present invention. It is sectional drawing which showed the flat panel display which comprises a touch panel. It is the top view which showed the coordinate sheet | seat shown in FIG. It is the top view which showed the support plate shown in FIG. FIG. 5 is a cross-sectional view taken along a cutting line I-I ′ in FIG. 4. It is the side view which showed the vertical illumination unit shown in FIG. 1, and the 1st and 2nd inclination illumination unit. FIG. 7 is a front view showing the vertical illumination unit and the first and second inclined illumination units shown in FIG. 6. FIG. 7 is a side view showing the vertical illumination unit shown in FIG. 6. It is sectional drawing which showed the 1st illumination main body shown in FIG. It is sectional drawing which showed another example of the 1st illumination main body shown in FIG. It is the side view which showed the 1st inclination illumination unit shown in FIG. It is the flowchart which showed the method which test | inspects an ITO film using the optical inspection apparatus shown in FIG. It is the figure which showed a part of test | inspection image of an ITO film. It is the flowchart which showed other embodiment of the ITO film inspection method shown in FIG. It is the figure which showed a part of test | inspection image of the ITO film produced | generated by radiate | emitting blue light and white light simultaneously.

  Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings. Hereinafter, a touch panel coordinate sheet used in an image display device as an inspection object to be inspected by the optical inspection apparatus of the present invention will be described as an example. However, the technical idea and scope of the present invention are not limited thereto.

FIG. 1 is a side view schematically showing an optical inspection apparatus according to an embodiment of the present invention.
Referring to FIG. 1, an optical inspection apparatus 1000 includes a support unit 100 on which an inspection object 10 is placed, an imaging unit 200 that images the inspection object 10, a moving member 310 that moves the imaging unit 200, and the inspection object 10. A vertical illumination unit 400, a first and second inclined illumination units 501 and 502, and a control unit 700.
In this embodiment, the inspection object 10 to be inspected by the optical inspection apparatus 1000 is an ITO film 10 used for a touch panel.

Hereinafter, a configuration of a flat panel display to which a touch panel is applied and an indium tin oxide (hereinafter referred to as ITO) film 10 will be briefly described with reference to the drawings.
2 is a cross-sectional view showing a flat panel display device having a touch panel, and FIG. 3 is a plan view showing the coordinate sheet shown in FIG.
Referring to FIGS. 2 and 3, the flat panel display includes a touch panel 30, a liquid crystal display panel 40 disposed under the touch panel 30, and a position sensing unit 50 connected to the touch panel 30. The touch panel 30 includes an ITO film 10 and an upper sheet 20 disposed on the ITO film 10. On the ITO film 10, a conductive transparent pattern 12 and a silver plating pattern 13 that is a colored pattern are formed on the upper surface of the transparent base plate 11 as a coordinate sheet for generating a position value of a pressing point pressed by a user. Is done.
In this embodiment, the touch panel 30 is provided with the ITO film 10 having the transparent pattern 12 made of ITO as a coordinate sheet. In addition to ITO, various types of transparent materials such as indium zinc oxide (IZO) are provided. A transparent pattern 12 made of a conductive metal material can be provided.

The transparent pattern 12, that is, the ITO pattern 12, is located in an area corresponding to a display area where an image of the liquid crystal display panel 40 is displayed. In this embodiment, the ITO pattern 12 has a zigzag shape, but may have various shapes such as a lattice shape.
The silver plating pattern 13 is located in a region corresponding to the peripheral region surrounding the display region of the liquid crystal display panel 40. The silver plating pattern 13 is formed of a conductive material, and is connected to the position sensing unit 50 and the transparent pattern 12 that generate the position value of the portion pressed by the user, or is connected to an external circuit board.
A liquid crystal display panel 40 provided under the touch panel 30 includes a thin film transistor substrate 41 in which thin film transistors are formed in an array, a color filter substrate 42 in which color filters are formed, and a portion between the thin film transistor substrate 41 and the color filter substrate 42. A liquid crystal layer 43 interposed therebetween. The touch panel 30 can be applied to various types of flat panel displays other than the liquid crystal display panel 40.
Referring to FIGS. 1 and 2, the optical inspection apparatus 1000 inspects the ITO pattern 12 and the silver plating pattern 13 through the captured image of the ITO film 110.
Specifically, at the time of visual inspection, the ITO film 10 is placed on the upper surface of the support unit 100, and the support unit 100 includes a support plate 110 on which the ITO film 10 is placed.

4 is a plan view showing the support plate shown in FIG. 1, and FIG. 5 is a cross-sectional view taken along the cutting line II ′ of FIG.
4 and 5, the support plate 110 includes a base plate 111 and a coating layer 112 formed on the upper surface of the base plate 111. Specifically, the base plate 111 has a larger area than the ITO film 10. The coating layer 112 is subjected to a non-light treatment in order to minimize the reflectance of light that is transmitted through the ITO film 10 from the top and is incident on the upper surface of the coating layer 12.
As an example of the present invention, the base plate 111 is made of an aluminum material. In addition, the coating layer 112 is formed by refining the base plate 111, performing light anodic oxidation (anodicizing), and then performing non-anodic oxidation with a black color.
Further, the support plate 110 includes a number of vacuum holes 113 for vacuum-sucking the ITO film 10 in order to fix the ITO film 10 placed on the upper surface.

Referring to FIGS. 1 and 3, the imaging unit 200 is installed on the support unit 100. The imaging unit 200 images the inspection object placed on the support unit 100, that is, the ITO film 10. As an example of the present invention, a line scan camera is applied to the imaging unit 200.
The imaging unit 200 provides the captured image to the control unit 700, and the control unit 700 displays the image received from the imaging unit 200. Accordingly, the pattern formed on the ITO film 10 through the displayed image, that is, the electrical property inspection such as whether the ITO pattern 12 and the silver plating pattern 13 are short-circuited, whether each pattern is in place, whether each pattern is An appearance inspection is performed to inspect the shape defect and whether or not the foreign matter adheres to the ITO film 10.
On the other hand, the imaging unit 200 is fixedly coupled to the moving member 310. The moving member 310 is installed on the upper part of the support unit 100 and can move horizontally. Thereby, the imaging unit 200 can image the ITO film 10 by the moving member 310 while continuously changing the horizontal position.
Below the imaging unit 200, a vertical illumination unit 400 and first and second inclined illumination units 501 and 502 are installed.

Hereinafter, the configuration of the vertical illumination unit 400 and the first and second inclined illumination units 501 and 520 will be described in detail with reference to the drawings.
FIG. 6 is a side view showing the vertical illumination unit shown in FIG. 1 and the first and second inclined illumination units. FIG. 7 shows the vertical illumination unit shown in FIG. It is the front view which showed the inclination illumination unit.
Referring to FIGS. 3, 6, and 7, the vertical illumination unit 400 is positioned on the support unit 100, generates the first light BL, and is first applied to the inspection object 10 placed on the support unit 100. Irradiate with light BL. The vertical illumination unit 400 extends along one side of the support plate 110 and emits the first light BL in a linear form.
8 is a side view showing the vertical illumination unit shown in FIG. 6, FIG. 9 is a cross-sectional view showing the first illumination body shown in FIG. 8, and FIG. 10 is shown in FIG. It is sectional drawing which showed another example of the 1st illumination main body.
Referring to FIGS. 7, 8, and 9, the vertical illumination unit 400 includes a first cooling body 410 that receives cooling air from the outside and a first light generation unit 420 that generates the first light BL.
Specifically, the first cooling body 410 is extended in the lateral direction of the vertical lighting unit 400 to cool the first lighting body 420. Accordingly, the vertical illumination unit 400 can prevent the first illumination body 420 from being overheated by the heat generated in the process of generating the first light BL. The first cooling body 410 is fixedly coupled to a fixing member 320 installed at the lower end of the moving member 310. The fixed member 320 is coupled to the moving member 310 and horizontally moved by the moving member 310, and accordingly, the vertical illumination unit 400 fixed to the fixed member 320 horizontally moves.

A first illumination body 420 is installed in front of the first cooling body 410, and the first illumination body 420 is installed directly below the imaging unit 200. The first lighting body 420 extends in the lateral direction of the first cooling body 410 and emits the first light BL toward the ITO film 10 seated on the support unit 100. The first illumination body 420 includes a housing 421, a number of first light sources 422, a light separation member 424, and a first light collection member 425.
Specifically, the housing 421 has a substantially hexahedron shape, and includes a rectangular lower wall 421a, an upper wall 421d facing the lower wall 421a, and side walls 421b and 421c connecting the lower wall 421a and the upper wall 421d. A plurality of first light sources 422, a light separating member 424, and a light collecting member 425 are installed in the housing 421.
The plurality of first light sources 422 are fixedly installed on a first side wall 421c that is a side wall 421c adjacent to the first cooling body 410 of the housing 421, and generates the first light BL. In this embodiment, a light emitting diode is used as the first light source 422, but various light sources that generate light may be used in addition to the light emitting diode.

The plurality of first light sources 422 are disposed parallel to each other in the horizontal direction with respect to the upper surface of the support unit 100 along the lateral direction of the housing 421. The first light BL emitted from the first light source is light having a short wavelength so that the shape of the ITO pattern 12 can be easily recognized from the image captured by the imaging unit 200. In this embodiment, the first light BL is blue light.
That is, since the ITO film 10 is transparent with the ITO pattern 12 that is a coordinate pattern not easily recognized by the naked eye, when the ITO film 10 is imaged by irradiating white light, on the imaged image. It is difficult to identify the ITO pattern 12. In particular, the ITO film 10 is more difficult to identify on the image because the base plate 110 is transparent. However, since the first light BL that can be emitted by the vertical illumination unit 400 has a blue color that is not white, the shape of the ITO pattern 12 is displayed in an image captured by emitting the first light BL so that it can be confirmed with the naked eye. The As a result, the optical inspection apparatus 1000 can inspect the appearance of the pattern formed of a transparent material through the captured image, so that the optical inspection of the ITO pattern 12 for the touch panel 30 is possible, and the inspection efficiency can be improved. .
Further, in this embodiment, the facing surface of the support unit 100 is light-free processed to a black color in order to minimize the reflectance of the light that is transmitted through the ITO film 10 and incident on the upper surface of the support unit 100. Thereby, the image quality of the imaging unit 200 can be improved.

On the other hand, the light separating member 424 is disposed so as to face the first side wall 421c of the housing 421, and is spaced apart from the first light source 422. The light separating member 424 reflects the first light BL emitted from the first light source 422, and changes the traveling direction of the first light BL so as to travel downward where the support unit 100 is located.
Specifically, the light separation member 424 can reflect or transmit light according to the direction of light incident on the light separation member 424. That is, the light separating member 424 reflects the first light BL incident from the first light source 422 so as to enter the first light collecting member 425, and the reflected light RL incident from the first light collecting member 425 side. Is transparent. The reflected light RL that has passed through the light separating member 424 is emitted to the outside through a hole 421e formed in the upper wall 421d of the housing 421, and is incident on the imaging unit 200 positioned directly above the first illumination body 420.
In this embodiment, a beam splitter having a mirror 424 a in the diagonal direction is applied to the light separation member 424, and the first light BL emitted from the first light source 422 is a mirror of the light separation member 424. Incident to 424a.

The first illumination body 420 shown in FIG. 9 includes a light separation member 424 formed of a beam splitter. As shown in FIG. 10, the first illumination body 430 includes a half mirror (Half Mirror) on the light separation member 431. It has.
The first illumination body 420 further includes a first parallel light conversion member 423 that converts the first light BL emitted from the first light source 422 into parallel light. The first parallel light conversion member 423 is interposed between the first light source 422 and the light separation member 424, and emits the first light BL converted into parallel light to the light separation member 424 side.
The first illumination body 420 further includes a diffusion member 426 that diffuses the first light BL emitted from the first parallel light conversion member 423. The diffusion member 426 is interposed between the first parallel light conversion member 423 and the light separation member 424, diffuses the first light BL incident from the first parallel light conversion member 423, and provides it to the light separation member 424. .
On the other hand, a first light collecting member 425 is provided under the light separating member 424, and the first light collecting member 425 is disposed so as to face the ITO film 10 placed on the support unit 100. The first light collecting member 425 refracts the first light BL reflected by the light separating member 424 and collects it on the ITO film 10.
A plurality of prism patterns 425 a are formed on the upper surface of the first light collecting member 425 adjacent to the light separating member 424. In addition, a transmission hole 425 b for transmitting the reflected light RL incident from the ITO 10 and providing it to the light separation member 424 is formed at the center of the first light collecting member 425. The prism patterns 425a of the first light collecting member 425 are formed so as to be symmetric with respect to the transmission hole 425b, and each prism pattern 425a has an inclined surface inclined upward toward the transmission hole 425b.
The lower wall 421 a of the housing 421 is provided with an emission hole 421 f so that the first light BL condensed by the first light collecting member 425 is provided to the ITO film 10. The emission hole 421f is located below the first light collecting member 425, and the light RL reflected by the ITO film 10 is incident on the first light collecting member 425 through the emission hole 421f.

Referring to FIGS. 6 and 7, first and second inclined illumination units 501 and 502 are installed under the vertical illumination unit 400, and the first and second inclined illumination units 501 and 502 are opposed to each other. Be placed. The first and second inclined illumination units 501 and 502 generate the second light WL and irradiate the inspection object 10 placed on the support unit 100 with the second light WL.
In this embodiment, the optical inspection apparatus 1000 includes two inclined illumination units 501 and 502, but the number of inclined illumination units 501 and 502 may be increased or decreased depending on inspection efficiency.
When viewed from the side, the first and second inclined illumination units 501 and 502 are arranged such that the central axes extending in the longitudinal direction of the first and second inclined illumination units 501 and 502 are inclined in opposite directions. In this embodiment, the ITO film 10 receives the first light BL emitted from the vertical illumination unit 400 and the second light WL emitted from the first and second inclined illumination units 501 and 502. Overlap with each other. That is, the vertical illumination unit 400 and the first and second inclined illumination units 501 and 502 irradiate the light BL and WL toward the same region.
In this embodiment, the first and second inclined lighting units 501 and 502 have the same configuration. Therefore, hereinafter, in the specific description of the configuration of the first and second inclined illumination units 501 and 502, the first inclined illumination unit 501 will be specifically described, and the description of the configuration of the second inclined illumination unit 502 will be described. Omitted.

FIG. 11 is a side view showing the first inclined illumination unit shown in FIG.
Referring to FIGS. 6, 7, and 11, the first inclined illumination unit 501 includes a second cooling body 510 that receives cooling air from the outside and a second light generation unit 520 that generates the second light WL. .
Specifically, the second cooling body 510 extends in the lateral direction of the first inclined lighting unit 501 and cools the second lighting body 520. Accordingly, the first inclined illumination unit 501 can prevent the second illumination main body 520 from being overheated by heat generated in the process of generating the second light WL.
A second illumination body 520 is installed in front of the second cooling body 510. The second illumination body 520 extends in the lateral direction of the second cooling body 510 and emits the second light WL toward the ITO film 10 placed on the support unit 100. The second illumination main body 520 includes a case 521, a plurality of second light sources 522, a second parallel light conversion member 523, and a second light collecting member 524.
Specifically, the case 521 has a substantially hexahedral shape, and a plurality of second light sources 522 and second parallel light conversion members 523 are installed therein. One side wall of the case 521 is opened so that the second light WL generated inside can be emitted toward the ITO film 10 placed on the support unit 100.

The plurality of second light sources 522 are installed on the inner wall of the case 521 and generate the second light WL. In this embodiment, a light emitting diode is used as the second light source 522, but various light sources that generate light may be used in addition to the light emitting diode.
The plurality of second light sources 522 are arranged along the horizontal direction of the case 521 so as to be parallel to each other in the horizontal direction with respect to the upper surface of the support unit 100. The second light WL emitted from the second light source 522 has a different color from the first light BL so that the shape of the colored pattern 13 and the silver plating pattern 13 can be easily recognized in the image captured by the imaging unit 200. As an example of the present invention, the second light WL is white light.
In this embodiment, the second light WL has a color different from that of the first light BL, but may be light having the same color as the first light BL.
The second parallel light conversion member 523 is disposed so as to face the second light source 522, converts the second light WL incident from the second light source 522 into parallel light, and outputs the parallel light to the second light collecting member 524 side. .
The second light collecting member 524 is disposed so as to face the second parallel light conversion member 523, and is disposed on the side wall of the case 521 that is inclined with respect to the upper surface of the support unit 100. The second light collecting member 524 refracts the second light WL emitted from the second parallel light conversion member 523 and condenses it on the ITO film 10.

The first and second inclined illumination units 501 and 502 are connected to the vertical illumination unit 400 by a bracket 610. The upper end of the bracket 610 is coupled to the side wall of the vertical illumination unit 400, and the first and second inclined illumination units 501 and 502 are coupled to the lower end. The first and second inclined illumination units 501 and 502 can adjust the inclination angle with respect to the upper surface of the support unit 100 by adjusting the coupling angle with the bracket 610.
In this embodiment, the optical inspection apparatus 1000 includes a vertical illumination unit 400 and two inclined illumination units 501 and 502 as an illumination unit for inspecting the inspection object 10, but includes only the vertical illumination unit 400. May be.
As described above, the optical inspection apparatus 1000 can improve the inspection efficiency because all appearance inspections of the transparent pattern 12 as well as the colored pattern 13 can be performed through the captured image.

FIG. 12 is a flowchart showing a method for inspecting an ITO film using the optical inspection apparatus shown in FIG.
Referring to FIGS. 1, 6 and 12, first, the ITO film 10 to be inspected is placed on the upper surface of the support unit 100 (step S110).
Next, the vertical illumination unit 400 emits blue light BL toward the ITO film 10 while moving horizontally by the moving member 310, and at the same time, the imaging unit 200 moves the ITO film 10 while moving horizontally together with the vertical illumination unit 400. Take an image. The control unit 700 receives the first inspection image captured using the blue light BL from the imaging unit 200, and inspects the ITO pattern 12 formed on the ITO film 10 through the received first inspection image (step). S120).

Further, the method in which the optical inspection apparatus 1000 inspects the ITO film 10 further includes a step in which the first and second inclined illumination units 501 and 502 emit white light WL and inspect the silver plating pattern 13 (step S130). .
When the optical inspection apparatus 1000 carefully inspects the process of inspecting the silver plating pattern 13, it is as follows. First, the first and second inclined illumination units 501 and 502 emit white light WL toward the ITO film 10 placed on the support unit 100 while moving horizontally by the moving member 310, and together with this, the imaging unit 200. Takes an image of the ITO film 10 while moving horizontally together with the first and second inclined illumination units 501 and 502. The control unit 700 receives the second inspection image captured using the white light WL from the imaging unit 200, and inspects the silver plating pattern 13 formed on the ITO film 10 through the received second inspection image ( Step S130).
In this embodiment, the optical inspection apparatus 1000 may cause the first and second inclined illumination units 501 and 502 to emit white light WL or blue light BL to inspect the silver plating pattern 13. it can.
In this embodiment, the optical inspection apparatus 1000 separately forms an image for inspecting the ITO pattern 12 and an image for inspecting the silver plating pattern 13, but the inspection of the ITO pattern 12 generated in step S120. The silver plating pattern 13 can be inspected by using the image for use.
As described above, since the optical inspection apparatus 1000 images the ITO pattern 12 by irradiating light with a short wavelength, the shape of the ITO pattern 12 can be recognized on the captured image. Therefore, not only the electrical characteristics inspection of the ITO pattern 12 and the silver plating pattern 13 such as a short circuit using the imaged image but also the shape of the ITO pattern 12 and the silver plating pattern 13 and the adhesion of foreign matter to the ITO film 10 and the like The same appearance inspection is possible and the inspection efficiency can be improved.

FIG. 13A is a view showing a part of an inspection image of the ITO film generated by irradiating the vertical illumination unit shown in FIG. 1 with blue light, and FIG. 13B is shown in FIG. 4 is a view showing a part of an inspection image of an ITO film generated by irradiating white light with the first and second inclined illumination units.
Referring to FIGS. 13A and 13B, in the inspection image taken by irradiating the blue light shown in FIG. 13A, the ITO pattern (I_ITO) is displayed so that it can be recognized with the naked eye. The silver plating pattern (I_ML) or the black color is displayed and can be recognized with the naked eye. On the other hand, in the inspection image captured by irradiating the white light shown in FIG. 13B, only the silver plating pattern (I_ML) can be recognized, and the remaining portions excluding the silver plating pattern (I_ML) are all It is displayed in black color and the shape of the ITO pattern cannot be grasped.

FIG. 14 is a flowchart showing another embodiment of the ITO film inspection method shown in FIG.
Referring to FIGS. 1, 6 and 14, first, the ITO film 10 to be inspected is placed on the upper surface of the support unit 100 (step S210).
Next, the vertical illumination unit 400 and the first and second inclined illumination units 501 and 502 emit light BL and WL simultaneously toward the ITO film 10 while being horizontally moved by the moving member 310, together with the imaging unit. 200 images the ITO film 10 while moving horizontally by the moving member 310 (step S220). Here, the vertical illumination unit 400 emits blue light BL, and the first and second inclined illumination units 501 and 502 emit white light WL.
Next, the control unit 700 receives the inspection image captured from the imaging unit 200, and inspects the ITO pattern 12 and the silver plating pattern 13 formed on the ITO film 10 through the received inspection image (step S230). .
In this embodiment, in the optical inspection apparatus 1000, the first and second inclined illumination units 501 and 502 can emit white light WL or blue light BL.
As described above, since the optical inspection apparatus 1000 images the ITO pattern 12 by irradiating light with a short wavelength, the shape of the ITO pattern 12 can be recognized on the captured image. Therefore, not only the electrical characteristics inspection of the ITO pattern 12 and the silver plating pattern 13 such as a short circuit using the imaged image but also the shape of the ITO pattern 12 and the silver plating pattern 13 and the adhesion of foreign matter to the ITO film 10 and the like The same appearance inspection is possible and the inspection efficiency can be improved.

FIG. 15 is a view showing a part of an inspection image of an ITO film generated by emitting blue light and white light simultaneously.
Referring to FIG. 15, in the inspection image of the ITO film generated by emitting blue light and white light simultaneously, the ITO pattern (I_ITO) and the silver plating pattern (I_ML) are displayed with the naked eye. Through this, it is possible to inspect the ITO pattern (I_ITO) and the silver plating pattern (I_ML).
Although the present invention has been described above with reference to the embodiments, those skilled in the art can understand the present invention within the spirit and scope of the present invention described in the following claims. Various modifications and changes can be made.

DESCRIPTION OF SYMBOLS 100 Support unit 200 Imaging unit 310 Moving member 400 Vertical illumination unit 501, 502 Inclined illumination unit 610 Bracket 700 Control unit 1000 Optical inspection apparatus

Claims (47)

A support unit on which the inspection object is placed;
A first illumination unit installed on an upper part of the support unit, which generates first light having a short wavelength and irradiates the inspection object placed on the support unit;
An imaging unit that images the inspection object irradiated with the first light;
An optical inspection apparatus comprising:   The optical inspection apparatus according to claim 1, wherein the first light is blue light. The first lighting unit includes:
A first light source for generating the first light;
A light separating member disposed so as to face the emission surface of the first light source and transmitting or reflecting along the direction of incident light;
The light separating member condenses the reflected light and provides it to the inspection object, and provides the light reflected from the inspection object placed on the support unit to the light separating member. The optical inspection apparatus according to claim 1, further comprising a light collecting member.   2. The apparatus according to claim 1, further comprising at least one second illumination unit installed on an upper part of the support unit and configured to generate second light and irradiate the inspection object placed on the support unit. The optical inspection apparatus of any one of -3.   The optical inspection apparatus according to claim 4, wherein the second light has the same color as the first light.   The optical inspection apparatus according to claim 4, wherein the second light has a color different from that of the first light.   The optical inspection apparatus according to claim 6, wherein the second light is white light.   The said 1st and 2nd illumination unit is arrange | positioned so that the area | region where the said 1st light was irradiated by the said test object and the area | region where the said 2nd light was irradiated mutually overlap. 4. The optical inspection device according to 4. The second lighting unit includes:
A second light source for generating the second light;
A parallel light conversion member that is disposed so as to face the emission surface of the second light source, converts the second light emitted from the second light source into parallel light, and emits the parallel light;
The inspection object that is installed so as to face the second light source via the parallel light conversion member, collects the second light emitted from the parallel light conversion member, and is placed on the support unit. The optical inspection apparatus according to claim 4, further comprising: a second light collecting member provided to the optical element.   The optical inspection apparatus according to claim 4, further comprising a bracket that couples the second illumination unit and is fixed to the first illumination unit. The first illumination unit is coupled and installed at an upper end of the bracket, and is arranged so that an emission surface from which the first light is emitted is horizontally opposed to an inspection surface of the inspection object.
The second illumination unit is installed to be coupled to a lower end portion of the bracket, and is arranged such that an emission surface from which the second light is emitted is inclined with respect to an inspection surface of the inspection object. Item 11. The optical inspection device according to Item 10.   The apparatus further comprises a horizontal movement unit that is connected to the imaging unit and the first lighting unit and horizontally moves above the support unit to change a horizontal position of the imaging unit and the first lighting unit. The optical inspection apparatus according to any one of 1 to 11.   The optical inspection apparatus according to claim 1, wherein the imaging unit is a line scan camera.   The optical inspection apparatus according to any one of claims 1 to 13, wherein the support unit has a surface on which the inspection object is placed subjected to a non-light coating treatment.   The optical inspection apparatus according to claim 14, wherein a surface of the support unit on which the inspection object is placed has a black color.   The optical inspection apparatus according to claim 15, wherein a surface of the support unit on which the inspection object is placed is anodized in a black color. A support unit on which an inspection object having a transparent pattern formed thereon is placed;
A test object installed on the support unit, having a longitudinal axis arranged perpendicular to the upper surface of the support unit, and generating a first light having a short wavelength and placed on the support unit. A vertical illumination unit that irradiates the first light in a linear form toward an object;
First and second inclined illumination units that are installed under the vertical illumination unit, generate second light, and irradiate the second light in a line form toward an inspection object placed on the support unit; ,
An imaging unit that is installed on top of the first illumination unit and that images the inspection object irradiated with the first and second lights,
The exit surface of the first tilt illumination unit that emits the second light and the exit surface of the second tilt illumination unit are disposed so as to be inclined in opposite directions with respect to the inspection surface of the inspection object. An optical inspection apparatus characterized by.   The optical inspection apparatus according to claim 17, wherein the first light is blue light.   The optical inspection apparatus according to claim 17, wherein the second light is white light. The first and second inclined illumination units are the inspection object, the region where the second light emitted from the first inclined illumination unit is incident, and the second light emitted from the second inclined illumination unit. Are arranged so that they overlap each other,
The vertical illumination unit is arranged so that the first light passes between the first and second inclined illumination units and is incident on the inspection object. The optical inspection apparatus according to any one of the above.   The optical inspection apparatus according to any one of claims 17 to 20, wherein the support unit has a surface on which the inspection object is placed and a non-light-coating treatment with a black color.   The inspection object is imaged while irradiating the first light having a short wavelength toward the inspection object on which the transparent pattern is formed, and the inspection object is inspected through the imaged image. Optical inspection method.   The optical inspection method according to claim 22, wherein the first light is blue light.   The optical inspection method according to claim 22, wherein the transparent pattern is formed of a transparent conductive metal material.   25. The optical inspection method according to claim 24, wherein the conductive metal material is indium tin oxide (ITO) or indium zinc oxide (IZO).   The optical inspection method according to claim 24, wherein the inspection of the inspection object using the captured image includes an electrical property inspection.   Imaging the inspection object while irradiating the second object toward the inspection object, and inspecting a colored pattern formed on the inspection object through the image captured by irradiating the second light; The optical inspection method according to claim 22, further comprising:   28. The optical inspection method according to claim 27, wherein the second light has the same color as the first light.   28. The optical inspection method according to claim 27, wherein the second light has a color different from that of the first light.   30. The optical inspection method according to claim 29, wherein the second light is white light.   28. The optical inspection method according to claim 27, wherein the colored pattern is formed of a conductive metal material.   The inspection on the inspection object performed through the image captured by irradiating the first light or the second light is whether or not foreign substances adhere to the inspection object, and a pattern formed on the inspection object. The optical inspection method according to claim 27, further comprising an inspection for the shape of   The optical inspection method according to any one of claims 22 to 32, wherein the inspection object has the transparent pattern formed on a transparent base plate. The inspection object is irradiated with the first light in a state of being placed on a support unit,
34. The optical inspection method according to claim 33, wherein the support unit is provided with a surface on which the inspection object is placed subjected to a non-light coating process.   35. The optical inspection method according to claim 34, wherein the support unit has a surface on which the inspection object is placed processed in a black color. Imaging the inspection object while simultaneously emitting first light and second light having a short wavelength toward the inspection object on which the transparent pattern and the colored pattern are formed;
Inspecting the inspection object through the imaged image;
An optical inspection method comprising:   The optical inspection method according to claim 36, wherein the first light is blue light.   The optical inspection method according to claim 36, wherein the second light is light having the same color as the first light.   The optical inspection method according to claim 36, wherein the second light is light having a color different from that of the first light.   40. The optical inspection method according to claim 39, wherein the second light is white light.   The optical inspection method according to claim 36, wherein a region irradiated with the first light and a region irradiated with the second light overlap each other on the inspection object.   The optical inspection method according to claim 36, wherein the transparent pattern is formed of a transparent conductive metal material.   43. The optical inspection method according to claim 42, wherein the inspection of the inspection object performed through the captured image includes an electrical characteristic inspection.   44. The inspection of the inspection object performed through the captured image includes inspection of whether or not foreign substances adhere to the inspection object and the shape of the transparent pattern and the colored pattern. The optical inspection method according to any one of the above. The optical inspection method according to claim 44, wherein the inspection object has the transparent pattern and the colored pattern formed on a transparent base plate. The inspection object is irradiated with the first and second lights in a state of being placed on a support unit,
46. The optical inspection method according to claim 45, wherein the support unit is provided with a surface on which the inspection object is placed subjected to a non-light coating process.   The optical inspection method according to claim 46, wherein the support unit is processed so that a surface on which the inspection object is placed is black.

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