TW200918989A - Substrate appearance inspection apparatus - Google Patents

Substrate appearance inspection apparatus Download PDF

Info

Publication number
TW200918989A
TW200918989A TW097133240A TW97133240A TW200918989A TW 200918989 A TW200918989 A TW 200918989A TW 097133240 A TW097133240 A TW 097133240A TW 97133240 A TW97133240 A TW 97133240A TW 200918989 A TW200918989 A TW 200918989A
Authority
TW
Taiwan
Prior art keywords
substrate
speed
unit
inspection
illumination
Prior art date
Application number
TW097133240A
Other languages
English (en)
Chinese (zh)
Inventor
Makoto Nishizawa
Original Assignee
Olympus Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Corp filed Critical Olympus Corp
Publication of TW200918989A publication Critical patent/TW200918989A/zh

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1306—Details
    • G02F1/1309—Repairing; Testing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8803—Visual inspection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N2021/9513—Liquid crystal panels

Landscapes

  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • General Health & Medical Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Nonlinear Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
TW097133240A 2007-09-27 2008-08-29 Substrate appearance inspection apparatus TW200918989A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007251481A JP2009080088A (ja) 2007-09-27 2007-09-27 基板外観検査装置

Publications (1)

Publication Number Publication Date
TW200918989A true TW200918989A (en) 2009-05-01

Family

ID=40517101

Family Applications (1)

Application Number Title Priority Date Filing Date
TW097133240A TW200918989A (en) 2007-09-27 2008-08-29 Substrate appearance inspection apparatus

Country Status (4)

Country Link
JP (1) JP2009080088A (enExample)
KR (1) KR20090033031A (enExample)
CN (1) CN101398396A (enExample)
TW (1) TW200918989A (enExample)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011055432A1 (ja) * 2009-11-04 2011-05-12 ダックエンジニアリング株式会社 ワーク検査装置
KR20140022064A (ko) * 2011-05-10 2014-02-21 아사히 가라스 가부시키가이샤 투광성 판상체의 미소 결점의 검사 방법 및 투광성 판상체의 미소 결점의 검사 장치
JP5854501B2 (ja) * 2011-11-17 2016-02-09 東レエンジニアリング株式会社 自動外観検査装置
CN102706887B (zh) * 2012-05-18 2014-09-24 华中科技大学 一种rfid天线检测设备及其应用
CN103543162B (zh) * 2013-11-05 2015-11-04 中国矿业大学 一种半导体片材的表面缺陷及厚度检测方法及装置
CN104568973A (zh) * 2015-02-09 2015-04-29 京东方科技集团股份有限公司 一种基板检测装置及方法
JP6666101B2 (ja) * 2015-09-30 2020-03-13 日東電工株式会社 長尺状偏光子の検査方法
CN106370674A (zh) * 2016-08-29 2017-02-01 武汉华星光电技术有限公司 一种玻璃基板的检测装置及检测方法
CN108469437B (zh) * 2018-03-16 2021-06-11 河北视窗玻璃有限公司 浮法玻璃的缺陷检测方法及装置
CN110783223B (zh) * 2018-07-24 2024-04-16 泰克元有限公司 电子部件处理设备用拍摄装置
CN108872256A (zh) * 2018-09-13 2018-11-23 广东中航特种玻璃技术有限公司 一种在线检测玻璃原片杂质的方法
CN112888531B (zh) * 2018-12-11 2023-04-14 本田技研工业株式会社 工件检查装置和工件检查方法
JP2021096699A (ja) * 2019-12-18 2021-06-24 三菱電機株式会社 飛行ルート学習装置、条件修正装置及び飛行ルート決定装置
EP4100727A1 (en) * 2020-02-05 2022-12-14 Smartex Europe, Unipessoal Lda. Systems and methods for defect detection
JP7562597B2 (ja) * 2022-05-12 2024-10-07 キヤノン株式会社 識別装置

Also Published As

Publication number Publication date
CN101398396A (zh) 2009-04-01
KR20090033031A (ko) 2009-04-01
JP2009080088A (ja) 2009-04-16

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