TW200909688A - Current feedthrough for a vacuum pump - Google Patents

Current feedthrough for a vacuum pump Download PDF

Info

Publication number
TW200909688A
TW200909688A TW097132018A TW97132018A TW200909688A TW 200909688 A TW200909688 A TW 200909688A TW 097132018 A TW097132018 A TW 097132018A TW 97132018 A TW97132018 A TW 97132018A TW 200909688 A TW200909688 A TW 200909688A
Authority
TW
Taiwan
Prior art keywords
vacuum
circuit board
pump
vacuum pump
housing
Prior art date
Application number
TW097132018A
Other languages
English (en)
Chinese (zh)
Inventor
Heinrich Englaender
Original Assignee
Oerlikon Leybold Vacuum Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oerlikon Leybold Vacuum Gmbh filed Critical Oerlikon Leybold Vacuum Gmbh
Publication of TW200909688A publication Critical patent/TW200909688A/zh

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D25/00—Pumping installations or systems
    • F04D25/02—Units comprising pumps and their driving means
    • F04D25/06—Units comprising pumps and their driving means the pump being electrically driven
    • F04D25/0693—Details or arrangements of the wiring
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/08—Sealings
    • F04D29/083—Sealings especially adapted for elastic fluid pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
TW097132018A 2007-08-30 2008-08-22 Current feedthrough for a vacuum pump TW200909688A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE202007012070U DE202007012070U1 (de) 2007-08-30 2007-08-30 Stromdurchführung einer Vakuumpumpe

Publications (1)

Publication Number Publication Date
TW200909688A true TW200909688A (en) 2009-03-01

Family

ID=40091786

Family Applications (1)

Application Number Title Priority Date Filing Date
TW097132018A TW200909688A (en) 2007-08-30 2008-08-22 Current feedthrough for a vacuum pump

Country Status (10)

Country Link
US (1) US20100303650A1 (fr)
EP (1) EP2183486A1 (fr)
JP (1) JP5456674B2 (fr)
KR (1) KR101497901B1 (fr)
CN (1) CN101796302B (fr)
CA (1) CA2695506A1 (fr)
DE (1) DE202007012070U1 (fr)
RU (1) RU2010111847A (fr)
TW (1) TW200909688A (fr)
WO (1) WO2009027485A1 (fr)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102009031983A1 (de) * 2009-07-06 2011-01-13 Lti Drives Gmbh An eine Vakuumpumpe anschließbare elektrische Verbindungseinheit
JP5785494B2 (ja) * 2009-08-28 2015-09-30 エドワーズ株式会社 真空ポンプ及び真空ポンプに使用される部材
JP5353838B2 (ja) * 2010-07-07 2013-11-27 株式会社島津製作所 真空ポンプ
FR2962602B1 (fr) * 2010-07-08 2013-08-30 Mecanique Magnetique Sa Procede et dispositif de liaison electrique a traversee etanche entre deux milieux differents
US9534506B2 (en) * 2010-10-19 2017-01-03 Edwards Japan Limited Reducing the influence of thermal expansion of connector pins on a substrate in a vacuum pump
WO2012053270A1 (fr) * 2010-10-19 2012-04-26 エドワーズ株式会社 Pompe à vide
DE202013009657U1 (de) * 2013-10-31 2015-02-03 Oerlikon Leybold Vacuum Gmbh Vakuumpumpe
JP6753759B2 (ja) * 2016-10-21 2020-09-09 エドワーズ株式会社 真空ポンプ及び該真空ポンプに適用される防水構造、制御装置
JP6912196B2 (ja) * 2016-12-28 2021-08-04 エドワーズ株式会社 真空ポンプ及び該真空ポンプに適用されるコネクタ、制御装置
DE102017105248A1 (de) 2017-03-13 2018-09-13 Pfeiffer Vacuum Gmbh Vakuumpumpe mit Platine als Vakuumdurchführung
IT201700040835A1 (it) * 2017-04-12 2017-07-12 Agilent Tech Inc A Delaware Corporation Pompa da vuoto provvista di un passante elettrico da vuoto migliorato
EP3431769B1 (fr) * 2017-07-21 2022-05-04 Pfeiffer Vacuum Gmbh Pompe à vide
CN107887721B (zh) 2017-11-03 2019-12-13 珠海格力电器股份有限公司 磁悬浮轴承的接线结构及压缩机及空调
EP3626971B1 (fr) * 2019-08-30 2022-05-11 Pfeiffer Vacuum Gmbh Pompe à vide

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB8830057D0 (en) * 1988-12-23 1989-02-22 Lucas Ind Plc An electrical connection arrangement and a method of providing an electrical connection
DE4038394A1 (de) * 1990-12-01 1992-06-04 Bosch Gmbh Robert Anordnung zur dichten durchfuehrung eines leiters durch die wand eines gehaeuses
IT1288737B1 (it) * 1996-10-08 1998-09-24 Varian Spa Dispositivo di pompaggio da vuoto.
US6793466B2 (en) * 2000-10-03 2004-09-21 Ebara Corporation Vacuum pump
JP2003269367A (ja) * 2002-03-13 2003-09-25 Boc Edwards Technologies Ltd 真空ポンプ
FR2861142B1 (fr) * 2003-10-16 2006-02-03 Mecanique Magnetique Sa Pompe a vide turbo moleculaire
JP4661278B2 (ja) * 2005-03-10 2011-03-30 株式会社島津製作所 ターボ分子ポンプ
ATE483114T1 (de) * 2005-08-24 2010-10-15 Mecos Traxler Ag Magnetlagereinrichtung mit verbesserter gehäusedurchführung bei vakuum
US7588444B2 (en) * 2006-02-01 2009-09-15 Nidec Corporation Busbar unit, electric motor and electrohydraulic power steering system furnished with the busbar unit, and method of manufacturing the busbar unit
DE102006016405B4 (de) * 2006-04-07 2024-08-01 Pfeiffer Vacuum Gmbh Vakuumpumpe mit Antriebsgerät
DE102006036493A1 (de) * 2006-08-04 2008-02-21 Oerlikon Leybold Vacuum Gmbh Vakuumpumpe

Also Published As

Publication number Publication date
JP5456674B2 (ja) 2014-04-02
US20100303650A1 (en) 2010-12-02
KR101497901B1 (ko) 2015-03-03
KR20100058524A (ko) 2010-06-03
DE202007012070U1 (de) 2009-01-08
CN101796302B (zh) 2012-06-27
CN101796302A (zh) 2010-08-04
WO2009027485A1 (fr) 2009-03-05
CA2695506A1 (fr) 2009-03-05
JP2010537122A (ja) 2010-12-02
EP2183486A1 (fr) 2010-05-12
RU2010111847A (ru) 2011-10-10

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