US20100303650A1 - Current leadthrough for a vacuum pump - Google Patents

Current leadthrough for a vacuum pump Download PDF

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Publication number
US20100303650A1
US20100303650A1 US12/675,219 US67521908A US2010303650A1 US 20100303650 A1 US20100303650 A1 US 20100303650A1 US 67521908 A US67521908 A US 67521908A US 2010303650 A1 US2010303650 A1 US 2010303650A1
Authority
US
United States
Prior art keywords
circuit board
vacuum
casing
vacuum pump
pump according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
US12/675,219
Other languages
English (en)
Inventor
Heinrich Englaender
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Oerlikon Leybold Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oerlikon Leybold Vacuum GmbH filed Critical Oerlikon Leybold Vacuum GmbH
Assigned to OERLIKON LEYBOLD VACUUM GMBH reassignment OERLIKON LEYBOLD VACUUM GMBH ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: ENGLAENDER, HEINRICH
Publication of US20100303650A1 publication Critical patent/US20100303650A1/en
Abandoned legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D25/00—Pumping installations or systems
    • F04D25/02—Units comprising pumps and their driving means
    • F04D25/06—Units comprising pumps and their driving means the pump being electrically driven
    • F04D25/0693—Details or arrangements of the wiring
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/08—Sealings
    • F04D29/083—Sealings especially adapted for elastic fluid pumps

Definitions

  • the present invention relates to a vacuum pump comprising a vacuum-tight casing accommodating a motor and a pump rotor, and further comprising a current feedthrough including a circuit board.
  • Vacuum pumps in the form of turbomolecular pumps comprise a rotor which is configured to rotate at very high rotational numbers and thus is adapted to generate a high vacuum.
  • the rotor and the motor for driving the rotor are supported in magnetic bearings.
  • a vacuum prevails, usually in the range below 10 mbar.
  • the current feedthrough devices for the motor and for the vacuum bearings are provided in a vacuum-tight arrangement on the casing.
  • EP 1 757 825 A1 describes a vacuum pump wherein the current feedthrough into the casing comprises a circuit board.
  • An inner side of the circuit board is arranged in abutment on the casing with interposition of a sealing means, and an outer side is arranged in abutment on an outer vacuum cover with interposition of a further sealing means, said vacuum cover closing the casing in a vacuum-tight manner.
  • the traces of the circuit board are guided through the gap between the two sealing means.
  • the circuit board comprises a projecting portion arranged externally of the casing and provided with a connector. A further connector is arranged in contact with the traces within the casing.
  • the vacuum pump according to the present invention is defined by claim 1 .
  • Said vacuum pump is provided with a circuit board having a first sealing means and a second sealing means arranged thereon, the first sealing means and the second sealing means being positioned with a lateral displacement relative to each other so that a partial region of the circuit board is on its outer side subjected to the atmospheric pressure and is on its inner side subjected to the generated vacuum.
  • An advantage herein resides in that said partial region which is exposed to a pressure difference and does not laterally extend beyond the wall of the casing, can be used to connect electric conductors to the board. Due to the lateral displacement of the sealing means relative to each other, a space is created within the wall contour which will be available for connection of external lines. Consequently, this obviates the need for the circuit board to extend beyond the outer contour of the casing. In that wall portion of the circuit board where the pressure difference is effective, it is the circuit board itself that forms the wall of the pump. Deflection in this partial region is prevented because the circuit board is given support by abutment on the front-side end of the wall of the casing.
  • the vacuum cover forming the vacuum closure of the casing is arranged within a protective cover and is movable relative thereto.
  • the possibility of movement vertically to the plane of the cover will allow for the sealing means to be pressed into position.
  • the vacuum cover is held in place by the pressure difference acting on it and is only loosely positioned by the protective cover.
  • the protective cover serves for avoiding damage to the vacuum cover and the circuit board. Apart from this function, the protective cover is useful as a support for a plug connection of the external electric lines leading to the circuit board.
  • the protective cover includes a positioning means for positioning the vacuum cover but, on the other hand, does permit the vacuum cover to undergo reactions to the existing pressure difference. Alternatively, it is possible to form the vacuum cover integrally with the protective cover.
  • FIG. 1 is a partly sectional longitudinal view of the casing of a vacuum pump, illustrating a first embodiment of the current feedthrough, and
  • FIG. 2 is a view of a second embodiment of the current feedthrough wherein the circuit board is additionally provided with electric components.
  • FIG. 1 the casing 10 of a turbomolecular pump is illustrated. Located within casing 10 are a motor and a pump rotor. Casing 10 is provided with a pump inlet 11 on one of its ends and with a pump outlet 12 on its circumference. At said pump inlet 11 , the vacuum is generated. Said pump outlet 12 can lead to the atmosphere or to a pre-vacuum pump.
  • a planar end face 14 is arranged at the rear end of an annular wall 13 of the casing.
  • End face 14 is formed with a groove accommodating an annular first sealing means 15 shaped as an O-ring.
  • a circuit board 16 Arranged in abutment on end face 14 is a circuit board 16 consisting of a body of insulating material provided with traces (not shown) on one or both of its sides. Such circuit boards are also referred to as “printed circuits”.
  • Circuit board 16 is arranged in sealing abutment on sealing means 15 .
  • an opening 17 is formed in the board for pressure compensation.
  • Circuit board 16 has an inner side 18 facing towards the interior chamber of the pump, and an outer side 19 facing away from the interior chamber. Said inner side 18 is arranged in abutment with the first sealing means 15 .
  • a vacuum cover 20 is set against the outer side 19 of the circuit board.
  • the vacuum cover comprises an annular groove with a second sealing means 21 held therein.
  • this sealing means is an annular sealing in the form of an O-ring.
  • the second sealing means 21 has a smaller opening diameter than the first sealing means 15 .
  • annular partial region 22 which is exposed to the existing pressure difference since its outer side is subjected to the atmospheric pressure and its inner side is subjected to the vacuum.
  • a balanced pressure prevails in the region enclosed by the second sealing means 21 , i.e. the vacuum in the interior of the casing will in this region act on the vacuum cover 20 .
  • vacuum cover 20 is pressed in the direction toward wall 13 under the effect, of the atmospheric pressure.
  • protective cover 23 On its front-side end, casing 10 is closed by a protective cover 23 which has no sealing function.
  • Protective cover 23 includes a hollow space 24 for accommodating the vacuum cover 20 , and a positioning means 25 , formed as a stepped shoulder, for positioning the vacuum cover 20 .
  • the protective cover serves for protection of the vacuum cover as well as the circuit board and the elements connected thereto.
  • electric lines 26 extend into the interior of the casing. These lines can be power supply lines or also control or signal lines. The lines are connected to the conductor lines of the circuit board by soldering or plug attachment.
  • External electric conductors 27 are soldered or plugged to the outer side 19 of circuit board 16 . Said conductors 27 are guided through the interior space 24 to a plug device 28 configured as an electrical multiple plug. Plug device 28 serves for connection of an external cable. The device is located on a side wall of protective cover 23 but could also be located on the rear surface.
  • Circuit board 16 does not laterally project beyond side wall 13 .
  • the partial region 22 between the sealing means 15 and 21 is provided as a connection region for the electric conductors 27 .
  • the embodiment according to FIG. 2 is different from the embodiment according to FIG. 1 only in that the circuit board 16 is additionally provided with electrical components 30 , such as e.g. resistors, capacitors, processors or memory devices.
  • the components 30 can be passive and active components alike.
  • vacuum cover 20 includes a recess which is enclosed by the edge supporting the sealing means 21 .
  • said recess 31 serves for accommodation of the components 30 fastened to the outer side 19 of the circuit board.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
US12/675,219 2007-08-30 2008-08-28 Current leadthrough for a vacuum pump Abandoned US20100303650A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE202007012070U DE202007012070U1 (de) 2007-08-30 2007-08-30 Stromdurchführung einer Vakuumpumpe
DE202007012070.2 2007-08-30
PCT/EP2008/061335 WO2009027485A1 (fr) 2007-08-30 2008-08-28 Passage de courant dans une pompe à vide

Publications (1)

Publication Number Publication Date
US20100303650A1 true US20100303650A1 (en) 2010-12-02

Family

ID=40091786

Family Applications (1)

Application Number Title Priority Date Filing Date
US12/675,219 Abandoned US20100303650A1 (en) 2007-08-30 2008-08-28 Current leadthrough for a vacuum pump

Country Status (10)

Country Link
US (1) US20100303650A1 (fr)
EP (1) EP2183486A1 (fr)
JP (1) JP5456674B2 (fr)
KR (1) KR101497901B1 (fr)
CN (1) CN101796302B (fr)
CA (1) CA2695506A1 (fr)
DE (1) DE202007012070U1 (fr)
RU (1) RU2010111847A (fr)
TW (1) TW200909688A (fr)
WO (1) WO2009027485A1 (fr)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20120141254A1 (en) * 2009-08-28 2012-06-07 Edwards Japan Limited Vacuum pump and member used for vacuum pump
US8961105B2 (en) 2010-07-07 2015-02-24 Shimadzu Corporation Vacuum pump
IT201700040835A1 (it) * 2017-04-12 2017-07-12 Agilent Tech Inc A Delaware Corporation Pompa da vuoto provvista di un passante elettrico da vuoto migliorato
EP3431769A1 (fr) * 2017-07-21 2019-01-23 Pfeiffer Vacuum Gmbh Pompe à vide
CN109996965A (zh) * 2016-12-28 2019-07-09 埃地沃兹日本有限公司 真空泵以及应用于该真空泵的连接器、控制装置
US11215187B2 (en) * 2016-10-21 2022-01-04 Edwards Japan Limited Vacuum pump, and waterproof structure and control apparatus applied to vacuum pump

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102009031983A1 (de) * 2009-07-06 2011-01-13 Lti Drives Gmbh An eine Vakuumpumpe anschließbare elektrische Verbindungseinheit
FR2962602B1 (fr) * 2010-07-08 2013-08-30 Mecanique Magnetique Sa Procede et dispositif de liaison electrique a traversee etanche entre deux milieux differents
EP2631486B1 (fr) * 2010-10-19 2015-09-23 Edwards Japan Limited Pompe à vide
KR101848529B1 (ko) * 2010-10-19 2018-04-12 에드워즈 가부시키가이샤 진공 펌프
DE202013009657U1 (de) * 2013-10-31 2015-02-03 Oerlikon Leybold Vacuum Gmbh Vakuumpumpe
DE102017105248A1 (de) 2017-03-13 2018-09-13 Pfeiffer Vacuum Gmbh Vakuumpumpe mit Platine als Vakuumdurchführung
CN107887721B (zh) * 2017-11-03 2019-12-13 珠海格力电器股份有限公司 磁悬浮轴承的接线结构及压缩机及空调
EP3626971B1 (fr) * 2019-08-30 2022-05-11 Pfeiffer Vacuum Gmbh Pompe à vide

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5061193A (en) * 1988-12-23 1991-10-29 Lucas Industries Public Limited Company Electrical connection arrangement and method of providing an electrical connection
US5971725A (en) * 1996-10-08 1999-10-26 Varian, Inc. Vacuum pumping device
US6793466B2 (en) * 2000-10-03 2004-09-21 Ebara Corporation Vacuum pump
US6991439B2 (en) * 2002-03-13 2006-01-31 Boc Edwards Technologies Limited Vacuum pump
US20070237650A1 (en) * 2006-04-07 2007-10-11 Pfeiffer Vacuum Gmbh Vacuum pump with control unit
US20080231128A1 (en) * 2005-08-24 2008-09-25 Mecos Traxler Ag Magnetic Bearing Device With an Improved Vacuum Feedthrough
US7436093B2 (en) * 2003-10-16 2008-10-14 Societe De Mecanique Magnetique Turbomolecular vacuum pump
US7588444B2 (en) * 2006-02-01 2009-09-15 Nidec Corporation Busbar unit, electric motor and electrohydraulic power steering system furnished with the busbar unit, and method of manufacturing the busbar unit

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4038394A1 (de) * 1990-12-01 1992-06-04 Bosch Gmbh Robert Anordnung zur dichten durchfuehrung eines leiters durch die wand eines gehaeuses
JP4661278B2 (ja) * 2005-03-10 2011-03-30 株式会社島津製作所 ターボ分子ポンプ
DE102006036493A1 (de) * 2006-08-04 2008-02-21 Oerlikon Leybold Vacuum Gmbh Vakuumpumpe

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5061193A (en) * 1988-12-23 1991-10-29 Lucas Industries Public Limited Company Electrical connection arrangement and method of providing an electrical connection
US5971725A (en) * 1996-10-08 1999-10-26 Varian, Inc. Vacuum pumping device
US6793466B2 (en) * 2000-10-03 2004-09-21 Ebara Corporation Vacuum pump
US6991439B2 (en) * 2002-03-13 2006-01-31 Boc Edwards Technologies Limited Vacuum pump
US7436093B2 (en) * 2003-10-16 2008-10-14 Societe De Mecanique Magnetique Turbomolecular vacuum pump
US20080231128A1 (en) * 2005-08-24 2008-09-25 Mecos Traxler Ag Magnetic Bearing Device With an Improved Vacuum Feedthrough
US7588444B2 (en) * 2006-02-01 2009-09-15 Nidec Corporation Busbar unit, electric motor and electrohydraulic power steering system furnished with the busbar unit, and method of manufacturing the busbar unit
US20070237650A1 (en) * 2006-04-07 2007-10-11 Pfeiffer Vacuum Gmbh Vacuum pump with control unit

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20120141254A1 (en) * 2009-08-28 2012-06-07 Edwards Japan Limited Vacuum pump and member used for vacuum pump
US8961105B2 (en) 2010-07-07 2015-02-24 Shimadzu Corporation Vacuum pump
US11215187B2 (en) * 2016-10-21 2022-01-04 Edwards Japan Limited Vacuum pump, and waterproof structure and control apparatus applied to vacuum pump
CN109996965A (zh) * 2016-12-28 2019-07-09 埃地沃兹日本有限公司 真空泵以及应用于该真空泵的连接器、控制装置
EP3564534A4 (fr) * 2016-12-28 2020-08-12 Edwards Japan Limited Pompe à vide et raccord et dispositif de commande appliqués à une pompe à vide
US11081845B2 (en) * 2016-12-28 2021-08-03 Edwards Japan Limited Vacuum pump, and connector and control device applied to vacuum pump
IT201700040835A1 (it) * 2017-04-12 2017-07-12 Agilent Tech Inc A Delaware Corporation Pompa da vuoto provvista di un passante elettrico da vuoto migliorato
EP3431769A1 (fr) * 2017-07-21 2019-01-23 Pfeiffer Vacuum Gmbh Pompe à vide

Also Published As

Publication number Publication date
RU2010111847A (ru) 2011-10-10
TW200909688A (en) 2009-03-01
CA2695506A1 (fr) 2009-03-05
KR101497901B1 (ko) 2015-03-03
DE202007012070U1 (de) 2009-01-08
KR20100058524A (ko) 2010-06-03
JP2010537122A (ja) 2010-12-02
JP5456674B2 (ja) 2014-04-02
CN101796302A (zh) 2010-08-04
WO2009027485A1 (fr) 2009-03-05
CN101796302B (zh) 2012-06-27
EP2183486A1 (fr) 2010-05-12

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Legal Events

Date Code Title Description
AS Assignment

Owner name: OERLIKON LEYBOLD VACUUM GMBH, GERMANY

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNOR:ENGLAENDER, HEINRICH;REEL/FRAME:023991/0061

Effective date: 20100208

STCB Information on status: application discontinuation

Free format text: ABANDONED -- FAILURE TO PAY ISSUE FEE