US20100303650A1 - Current leadthrough for a vacuum pump - Google Patents
Current leadthrough for a vacuum pump Download PDFInfo
- Publication number
- US20100303650A1 US20100303650A1 US12/675,219 US67521908A US2010303650A1 US 20100303650 A1 US20100303650 A1 US 20100303650A1 US 67521908 A US67521908 A US 67521908A US 2010303650 A1 US2010303650 A1 US 2010303650A1
- Authority
- US
- United States
- Prior art keywords
- circuit board
- vacuum
- casing
- vacuum pump
- pump according
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
- F04D17/08—Centrifugal pumps
- F04D17/16—Centrifugal pumps for displacing without appreciable compression
- F04D17/168—Pumps specially adapted to produce a vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D25/00—Pumping installations or systems
- F04D25/02—Units comprising pumps and their driving means
- F04D25/06—Units comprising pumps and their driving means the pump being electrically driven
- F04D25/0693—Details or arrangements of the wiring
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/08—Sealings
- F04D29/083—Sealings especially adapted for elastic fluid pumps
Definitions
- the present invention relates to a vacuum pump comprising a vacuum-tight casing accommodating a motor and a pump rotor, and further comprising a current feedthrough including a circuit board.
- Vacuum pumps in the form of turbomolecular pumps comprise a rotor which is configured to rotate at very high rotational numbers and thus is adapted to generate a high vacuum.
- the rotor and the motor for driving the rotor are supported in magnetic bearings.
- a vacuum prevails, usually in the range below 10 mbar.
- the current feedthrough devices for the motor and for the vacuum bearings are provided in a vacuum-tight arrangement on the casing.
- EP 1 757 825 A1 describes a vacuum pump wherein the current feedthrough into the casing comprises a circuit board.
- An inner side of the circuit board is arranged in abutment on the casing with interposition of a sealing means, and an outer side is arranged in abutment on an outer vacuum cover with interposition of a further sealing means, said vacuum cover closing the casing in a vacuum-tight manner.
- the traces of the circuit board are guided through the gap between the two sealing means.
- the circuit board comprises a projecting portion arranged externally of the casing and provided with a connector. A further connector is arranged in contact with the traces within the casing.
- the vacuum pump according to the present invention is defined by claim 1 .
- Said vacuum pump is provided with a circuit board having a first sealing means and a second sealing means arranged thereon, the first sealing means and the second sealing means being positioned with a lateral displacement relative to each other so that a partial region of the circuit board is on its outer side subjected to the atmospheric pressure and is on its inner side subjected to the generated vacuum.
- An advantage herein resides in that said partial region which is exposed to a pressure difference and does not laterally extend beyond the wall of the casing, can be used to connect electric conductors to the board. Due to the lateral displacement of the sealing means relative to each other, a space is created within the wall contour which will be available for connection of external lines. Consequently, this obviates the need for the circuit board to extend beyond the outer contour of the casing. In that wall portion of the circuit board where the pressure difference is effective, it is the circuit board itself that forms the wall of the pump. Deflection in this partial region is prevented because the circuit board is given support by abutment on the front-side end of the wall of the casing.
- the vacuum cover forming the vacuum closure of the casing is arranged within a protective cover and is movable relative thereto.
- the possibility of movement vertically to the plane of the cover will allow for the sealing means to be pressed into position.
- the vacuum cover is held in place by the pressure difference acting on it and is only loosely positioned by the protective cover.
- the protective cover serves for avoiding damage to the vacuum cover and the circuit board. Apart from this function, the protective cover is useful as a support for a plug connection of the external electric lines leading to the circuit board.
- the protective cover includes a positioning means for positioning the vacuum cover but, on the other hand, does permit the vacuum cover to undergo reactions to the existing pressure difference. Alternatively, it is possible to form the vacuum cover integrally with the protective cover.
- FIG. 1 is a partly sectional longitudinal view of the casing of a vacuum pump, illustrating a first embodiment of the current feedthrough, and
- FIG. 2 is a view of a second embodiment of the current feedthrough wherein the circuit board is additionally provided with electric components.
- FIG. 1 the casing 10 of a turbomolecular pump is illustrated. Located within casing 10 are a motor and a pump rotor. Casing 10 is provided with a pump inlet 11 on one of its ends and with a pump outlet 12 on its circumference. At said pump inlet 11 , the vacuum is generated. Said pump outlet 12 can lead to the atmosphere or to a pre-vacuum pump.
- a planar end face 14 is arranged at the rear end of an annular wall 13 of the casing.
- End face 14 is formed with a groove accommodating an annular first sealing means 15 shaped as an O-ring.
- a circuit board 16 Arranged in abutment on end face 14 is a circuit board 16 consisting of a body of insulating material provided with traces (not shown) on one or both of its sides. Such circuit boards are also referred to as “printed circuits”.
- Circuit board 16 is arranged in sealing abutment on sealing means 15 .
- an opening 17 is formed in the board for pressure compensation.
- Circuit board 16 has an inner side 18 facing towards the interior chamber of the pump, and an outer side 19 facing away from the interior chamber. Said inner side 18 is arranged in abutment with the first sealing means 15 .
- a vacuum cover 20 is set against the outer side 19 of the circuit board.
- the vacuum cover comprises an annular groove with a second sealing means 21 held therein.
- this sealing means is an annular sealing in the form of an O-ring.
- the second sealing means 21 has a smaller opening diameter than the first sealing means 15 .
- annular partial region 22 which is exposed to the existing pressure difference since its outer side is subjected to the atmospheric pressure and its inner side is subjected to the vacuum.
- a balanced pressure prevails in the region enclosed by the second sealing means 21 , i.e. the vacuum in the interior of the casing will in this region act on the vacuum cover 20 .
- vacuum cover 20 is pressed in the direction toward wall 13 under the effect, of the atmospheric pressure.
- protective cover 23 On its front-side end, casing 10 is closed by a protective cover 23 which has no sealing function.
- Protective cover 23 includes a hollow space 24 for accommodating the vacuum cover 20 , and a positioning means 25 , formed as a stepped shoulder, for positioning the vacuum cover 20 .
- the protective cover serves for protection of the vacuum cover as well as the circuit board and the elements connected thereto.
- electric lines 26 extend into the interior of the casing. These lines can be power supply lines or also control or signal lines. The lines are connected to the conductor lines of the circuit board by soldering or plug attachment.
- External electric conductors 27 are soldered or plugged to the outer side 19 of circuit board 16 . Said conductors 27 are guided through the interior space 24 to a plug device 28 configured as an electrical multiple plug. Plug device 28 serves for connection of an external cable. The device is located on a side wall of protective cover 23 but could also be located on the rear surface.
- Circuit board 16 does not laterally project beyond side wall 13 .
- the partial region 22 between the sealing means 15 and 21 is provided as a connection region for the electric conductors 27 .
- the embodiment according to FIG. 2 is different from the embodiment according to FIG. 1 only in that the circuit board 16 is additionally provided with electrical components 30 , such as e.g. resistors, capacitors, processors or memory devices.
- the components 30 can be passive and active components alike.
- vacuum cover 20 includes a recess which is enclosed by the edge supporting the sealing means 21 .
- said recess 31 serves for accommodation of the components 30 fastened to the outer side 19 of the circuit board.
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Applications Or Details Of Rotary Compressors (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE202007012070U DE202007012070U1 (de) | 2007-08-30 | 2007-08-30 | Stromdurchführung einer Vakuumpumpe |
DE202007012070.2 | 2007-08-30 | ||
PCT/EP2008/061335 WO2009027485A1 (fr) | 2007-08-30 | 2008-08-28 | Passage de courant dans une pompe à vide |
Publications (1)
Publication Number | Publication Date |
---|---|
US20100303650A1 true US20100303650A1 (en) | 2010-12-02 |
Family
ID=40091786
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US12/675,219 Abandoned US20100303650A1 (en) | 2007-08-30 | 2008-08-28 | Current leadthrough for a vacuum pump |
Country Status (10)
Country | Link |
---|---|
US (1) | US20100303650A1 (fr) |
EP (1) | EP2183486A1 (fr) |
JP (1) | JP5456674B2 (fr) |
KR (1) | KR101497901B1 (fr) |
CN (1) | CN101796302B (fr) |
CA (1) | CA2695506A1 (fr) |
DE (1) | DE202007012070U1 (fr) |
RU (1) | RU2010111847A (fr) |
TW (1) | TW200909688A (fr) |
WO (1) | WO2009027485A1 (fr) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20120141254A1 (en) * | 2009-08-28 | 2012-06-07 | Edwards Japan Limited | Vacuum pump and member used for vacuum pump |
US8961105B2 (en) | 2010-07-07 | 2015-02-24 | Shimadzu Corporation | Vacuum pump |
IT201700040835A1 (it) * | 2017-04-12 | 2017-07-12 | Agilent Tech Inc A Delaware Corporation | Pompa da vuoto provvista di un passante elettrico da vuoto migliorato |
EP3431769A1 (fr) * | 2017-07-21 | 2019-01-23 | Pfeiffer Vacuum Gmbh | Pompe à vide |
CN109996965A (zh) * | 2016-12-28 | 2019-07-09 | 埃地沃兹日本有限公司 | 真空泵以及应用于该真空泵的连接器、控制装置 |
US11215187B2 (en) * | 2016-10-21 | 2022-01-04 | Edwards Japan Limited | Vacuum pump, and waterproof structure and control apparatus applied to vacuum pump |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102009031983A1 (de) * | 2009-07-06 | 2011-01-13 | Lti Drives Gmbh | An eine Vakuumpumpe anschließbare elektrische Verbindungseinheit |
FR2962602B1 (fr) * | 2010-07-08 | 2013-08-30 | Mecanique Magnetique Sa | Procede et dispositif de liaison electrique a traversee etanche entre deux milieux differents |
EP2631486B1 (fr) * | 2010-10-19 | 2015-09-23 | Edwards Japan Limited | Pompe à vide |
KR101848529B1 (ko) * | 2010-10-19 | 2018-04-12 | 에드워즈 가부시키가이샤 | 진공 펌프 |
DE202013009657U1 (de) * | 2013-10-31 | 2015-02-03 | Oerlikon Leybold Vacuum Gmbh | Vakuumpumpe |
DE102017105248A1 (de) | 2017-03-13 | 2018-09-13 | Pfeiffer Vacuum Gmbh | Vakuumpumpe mit Platine als Vakuumdurchführung |
CN107887721B (zh) * | 2017-11-03 | 2019-12-13 | 珠海格力电器股份有限公司 | 磁悬浮轴承的接线结构及压缩机及空调 |
EP3626971B1 (fr) * | 2019-08-30 | 2022-05-11 | Pfeiffer Vacuum Gmbh | Pompe à vide |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5061193A (en) * | 1988-12-23 | 1991-10-29 | Lucas Industries Public Limited Company | Electrical connection arrangement and method of providing an electrical connection |
US5971725A (en) * | 1996-10-08 | 1999-10-26 | Varian, Inc. | Vacuum pumping device |
US6793466B2 (en) * | 2000-10-03 | 2004-09-21 | Ebara Corporation | Vacuum pump |
US6991439B2 (en) * | 2002-03-13 | 2006-01-31 | Boc Edwards Technologies Limited | Vacuum pump |
US20070237650A1 (en) * | 2006-04-07 | 2007-10-11 | Pfeiffer Vacuum Gmbh | Vacuum pump with control unit |
US20080231128A1 (en) * | 2005-08-24 | 2008-09-25 | Mecos Traxler Ag | Magnetic Bearing Device With an Improved Vacuum Feedthrough |
US7436093B2 (en) * | 2003-10-16 | 2008-10-14 | Societe De Mecanique Magnetique | Turbomolecular vacuum pump |
US7588444B2 (en) * | 2006-02-01 | 2009-09-15 | Nidec Corporation | Busbar unit, electric motor and electrohydraulic power steering system furnished with the busbar unit, and method of manufacturing the busbar unit |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE4038394A1 (de) * | 1990-12-01 | 1992-06-04 | Bosch Gmbh Robert | Anordnung zur dichten durchfuehrung eines leiters durch die wand eines gehaeuses |
JP4661278B2 (ja) * | 2005-03-10 | 2011-03-30 | 株式会社島津製作所 | ターボ分子ポンプ |
DE102006036493A1 (de) * | 2006-08-04 | 2008-02-21 | Oerlikon Leybold Vacuum Gmbh | Vakuumpumpe |
-
2007
- 2007-08-30 DE DE202007012070U patent/DE202007012070U1/de not_active Expired - Lifetime
-
2008
- 2008-08-22 TW TW097132018A patent/TW200909688A/zh unknown
- 2008-08-28 US US12/675,219 patent/US20100303650A1/en not_active Abandoned
- 2008-08-28 EP EP08803341A patent/EP2183486A1/fr not_active Withdrawn
- 2008-08-28 WO PCT/EP2008/061335 patent/WO2009027485A1/fr active Application Filing
- 2008-08-28 JP JP2010522377A patent/JP5456674B2/ja not_active Expired - Fee Related
- 2008-08-28 KR KR1020107004593A patent/KR101497901B1/ko not_active IP Right Cessation
- 2008-08-28 RU RU2010111847/06A patent/RU2010111847A/ru unknown
- 2008-08-28 CN CN200880104979XA patent/CN101796302B/zh not_active Expired - Fee Related
- 2008-08-28 CA CA2695506A patent/CA2695506A1/fr not_active Abandoned
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5061193A (en) * | 1988-12-23 | 1991-10-29 | Lucas Industries Public Limited Company | Electrical connection arrangement and method of providing an electrical connection |
US5971725A (en) * | 1996-10-08 | 1999-10-26 | Varian, Inc. | Vacuum pumping device |
US6793466B2 (en) * | 2000-10-03 | 2004-09-21 | Ebara Corporation | Vacuum pump |
US6991439B2 (en) * | 2002-03-13 | 2006-01-31 | Boc Edwards Technologies Limited | Vacuum pump |
US7436093B2 (en) * | 2003-10-16 | 2008-10-14 | Societe De Mecanique Magnetique | Turbomolecular vacuum pump |
US20080231128A1 (en) * | 2005-08-24 | 2008-09-25 | Mecos Traxler Ag | Magnetic Bearing Device With an Improved Vacuum Feedthrough |
US7588444B2 (en) * | 2006-02-01 | 2009-09-15 | Nidec Corporation | Busbar unit, electric motor and electrohydraulic power steering system furnished with the busbar unit, and method of manufacturing the busbar unit |
US20070237650A1 (en) * | 2006-04-07 | 2007-10-11 | Pfeiffer Vacuum Gmbh | Vacuum pump with control unit |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20120141254A1 (en) * | 2009-08-28 | 2012-06-07 | Edwards Japan Limited | Vacuum pump and member used for vacuum pump |
US8961105B2 (en) | 2010-07-07 | 2015-02-24 | Shimadzu Corporation | Vacuum pump |
US11215187B2 (en) * | 2016-10-21 | 2022-01-04 | Edwards Japan Limited | Vacuum pump, and waterproof structure and control apparatus applied to vacuum pump |
CN109996965A (zh) * | 2016-12-28 | 2019-07-09 | 埃地沃兹日本有限公司 | 真空泵以及应用于该真空泵的连接器、控制装置 |
EP3564534A4 (fr) * | 2016-12-28 | 2020-08-12 | Edwards Japan Limited | Pompe à vide et raccord et dispositif de commande appliqués à une pompe à vide |
US11081845B2 (en) * | 2016-12-28 | 2021-08-03 | Edwards Japan Limited | Vacuum pump, and connector and control device applied to vacuum pump |
IT201700040835A1 (it) * | 2017-04-12 | 2017-07-12 | Agilent Tech Inc A Delaware Corporation | Pompa da vuoto provvista di un passante elettrico da vuoto migliorato |
EP3431769A1 (fr) * | 2017-07-21 | 2019-01-23 | Pfeiffer Vacuum Gmbh | Pompe à vide |
Also Published As
Publication number | Publication date |
---|---|
RU2010111847A (ru) | 2011-10-10 |
TW200909688A (en) | 2009-03-01 |
CA2695506A1 (fr) | 2009-03-05 |
KR101497901B1 (ko) | 2015-03-03 |
DE202007012070U1 (de) | 2009-01-08 |
KR20100058524A (ko) | 2010-06-03 |
JP2010537122A (ja) | 2010-12-02 |
JP5456674B2 (ja) | 2014-04-02 |
CN101796302A (zh) | 2010-08-04 |
WO2009027485A1 (fr) | 2009-03-05 |
CN101796302B (zh) | 2012-06-27 |
EP2183486A1 (fr) | 2010-05-12 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
AS | Assignment |
Owner name: OERLIKON LEYBOLD VACUUM GMBH, GERMANY Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNOR:ENGLAENDER, HEINRICH;REEL/FRAME:023991/0061 Effective date: 20100208 |
|
STCB | Information on status: application discontinuation |
Free format text: ABANDONED -- FAILURE TO PAY ISSUE FEE |