TW200845332A - Package substrate and its solder pad - Google Patents

Package substrate and its solder pad Download PDF

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Publication number
TW200845332A
TW200845332A TW096115961A TW96115961A TW200845332A TW 200845332 A TW200845332 A TW 200845332A TW 096115961 A TW096115961 A TW 096115961A TW 96115961 A TW96115961 A TW 96115961A TW 200845332 A TW200845332 A TW 200845332A
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Taiwan
Prior art keywords
solder
substrate
pad
layer
resist layer
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TW096115961A
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English (en)
Inventor
Li-Chih Fang
Ronald Iwata
Wen-Jeng Fan
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Powertech Technology Inc
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Priority to TW096115961A priority Critical patent/TW200845332A/zh
Priority to JP2007170255A priority patent/JP2008277720A/ja
Priority to US11/824,448 priority patent/US20080272489A1/en
Publication of TW200845332A publication Critical patent/TW200845332A/zh

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    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/30—Assembling printed circuits with electric components, e.g. with resistor
    • H05K3/32—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
    • H05K3/34—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by soldering
    • H05K3/3452—Solder masks
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
    • H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
    • H01L23/498—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
    • H01L23/49838—Geometry or layout
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L24/02—Bonding areas ; Manufacturing methods related thereto
    • H01L24/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
    • H01L24/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/02—Bonding areas; Manufacturing methods related thereto
    • H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
    • H01L2224/0401—Bonding areas specifically adapted for bump connectors, e.g. under bump metallisation [UBM]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/02—Bonding areas; Manufacturing methods related thereto
    • H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
    • H01L2224/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
    • H01L2224/0554—External layer
    • H01L2224/0555—Shape
    • H01L2224/05552—Shape in top view
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/02—Bonding areas; Manufacturing methods related thereto
    • H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
    • H01L2224/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
    • H01L2224/0554—External layer
    • H01L2224/05599—Material
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L24/10—Bump connectors ; Manufacturing methods related thereto
    • H01L24/15—Structure, shape, material or disposition of the bump connectors after the connecting process
    • H01L24/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/00014—Technical content checked by a classifier the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01004—Beryllium [Be]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01005—Boron [B]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01006—Carbon [C]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01029—Copper [Cu]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01033—Arsenic [As]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/013—Alloys
    • H01L2924/014—Solder alloys
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10—Details of semiconductor or other solid state devices to be connected
    • H01L2924/11—Device type
    • H01L2924/14—Integrated circuits
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/09—Shape and layout
    • H05K2201/09818—Shape or layout details not covered by a single group of H05K2201/09009 - H05K2201/09809
    • H05K2201/099—Coating over pads, e.g. solder resist partly over pads
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/10—Details of components or other objects attached to or integrated in a printed circuit board
    • H05K2201/10613—Details of electrical connections of non-printed components, e.g. special leads
    • H05K2201/10621—Components characterised by their electrical contacts
    • H05K2201/10734—Ball grid array [BGA]; Bump grid array

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  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Geometry (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Electric Connection Of Electric Components To Printed Circuits (AREA)
  • Wire Bonding (AREA)

Description

200845332 九、發明說明： 【發明所屬之技術領域】 本發明係有關一種球柵陣列（Ball Grid Array，BGA)基 板^寸別是一種具有防鐸層界定（Solder Mask Define，SMD) 鮮墊设计以供植設銲球之封裝基板結構。 【先前技術】 在一般BGA半導體封裝件中，通常需利用一基板作為 晶片承載件，以便於基板之一側設置晶片並使晶片與基板上 之導電結構電性連接，且基板之另一側植設有複數個銲球與 V包結構電性連接，進而藉由銲球與一印刷電路板銲接，使 晶片經由導電結構及銲球而與印刷電路板形成電性連接關 係。 請參閱第la圖，基板1〇主要包括一芯層12及一防銲 層14,芯層12上形成有導電結構（圖中未示）及與導電結構連 接之銲墊16，以供藉由銲墊接合銲球，其中銲墊可區分為 SMD録塾與非防銲層界定（N〇ne s〇lderMask Define ，NSMD) 在干墊，如第la圖所示之銲墊即為一 SMD銲墊16，其中銲墊 16尺寸大於防銲層η上之開口 2〇，以藉由開口 2〇界定銲墊 16之暴露面積；如第lb圖所示，當將具有smd銲墊16設 計之封裝體2與印刷電路板3進行電性連接時，係藉由焊球 18與印刷電路板3上之銲墊16對位接合，其中由於銲球18 與銲墊16的接觸面積較小，會造成封裝體於板層級的溫度循 環測試(Board Level Temperature Cycling Test，Board TCT)結 果不佳，易導致銲球18與銲墊16的接合面間，或是幾何尺 寸不連續處發生應力集中，而產生裂損（crack)。 5 200845332 而NSMD銲墊係指銲墊μ之周邊不被防銲層14覆蓋， 如第2a圖所示，即銲墊16之表面及銲墊16周邊之部分芯層 12藉由開口 20露出，以利銲球μ之接合；當BGA封裝件 採用NSMD銲墊16時，雖然於銲球18與銲墊16間具有較 佳之TCT結果，但如第2b圖所示，當封裝體承受外在應力 時’ NSMD銲墊16因沒有防銲層加以覆蓋，容易與芯層12 分離，而同樣造成訊號線路裂損（crack)。 美國專利第6,201，305號案與台灣專利1234838號案即 在針對提出一種NSMD銲墊之結構設計，以改善銲墊與芯層 的分離現象；在美國專利第6,201，305號中，係使銲墊具有 多數呈輻射狀排列之臂部的海星形狀，並於防銲層上設計一 圓形開口，使臂部的外端受到防銲層覆蓋，而銲墊中央區域、 臂部内端與二相鄰臂部間的部分芯層露出，使銲球得同時與 露出的部分銲墊與部分芯層接觸，除增加接觸面積之外，亦 不易與芯層分離；而台灣專利1234838號即利用上述概念， 在if墊上開δ又多個中空部分，使銲墊外端受到防銲層覆蓋， 而銲墊的内端與經由中空部分所露出的部分芯層則同時與銲 球接觸，以增加銲球的接觸面積。 然而，上述美國專利第6,2〇1，3〇5號案與台灣專利 1234838號係皆在針對NSMD銲墊進行改良，在製程上皆須 針對銲墊的形狀先進行複雜且困難之蝕刻製程。 【發明内容】 為了解決上述問題’本發明目的之—係提供—種半導體晶 片封裝基減其銲⑽構，藉由圖㈣㈣之設計可增加銲塾與 球的接觸面積並改善黏著效果。 〃 6 200845332 /本發明目的之一係提供一種半導體晶片封裝基板及其銲墊結 構，係利用防銲層之圖案化開Π設計定義出圖案化銲墊，可有 效改善銲墊與銲球_著狀況與封裝品質。 ^ 本發明目的之一係提供一種半導體晶片封裝基板及其銲墊 ^構’可強化銲塾與銲球的黏著效果使封裝元件具備有較佳 之TCT測試結果。 ^ 本發明目的之一係提供一種半導體晶片封裝基板及其銲墊 、、’-構’係利用防銲層之圖案化開口設計定義出圖案化辉塾，其 ^，防銲層之圖案化開口係利用一般微影技術即可完成無須 領外製程’具有製作簡單之優點。 曰 為了達到上述目的，本發明之一實施例提供一種半導體 曰曰片封I基板，包括：一芯層；一導電結構設置於芯層之一表 面上，以及一絕緣層覆蓋於導電結構上，其中絕緣層具有至 v圖案化開口；圖案化開口係暴露部份導電結構作為一圖 >、、干墊，以及圖案化開口包括一中央部及複數個翼部自中 央部周緣向外延伸。 勹本發明之另一實施例提供一種防銲層界定之銲墊結構， 包括·一中央區；以及複數翼面區自令央部周緣向外延伸。 以下糟由具體實施例配合所附的圖式詳加說明，當更容易瞭解 本發明之目的、技_容、_及其所達成之功效。 【實施方式】 社播Γ參閱第3a圖及第3b圖，分別為本發明—實施例封裝基板 =圖與其AA、線段剖視圖，如圖所示，此封裝基板包 層30; -導電結構32係設置於芯層％之一表面上， 夺迅、、、。構32預設有作為銲塾的端部；—絕緣層，例如一防 7 200845332 銲層34，覆蓋於芯層30表面以遮蓋導電結構32，防銲層34 上形成有至少一圖案化開口 36，使開口 36的位置與端部的 位置對應，其中開口 36包括一中央部361及複數翼部 (wing)362自中央部361周緣向外延伸，以便藉由中央部361 及翼部362界定端部的暴露區域，此外露之端部即供作為銲 墊38，以便與銲球（圖中未示）進行接合。 接續上述說明，中央部361係為一圓形孔，翼部362係 呈圓弧形，翼部362的數目可為二個或多個且以對稱的分佈 關係與中央部361連接，此具有中央部361及翼部362的開 口 36係使用一般封裝基板防銲層製作方式，以微影技術經曝 光與顯影而形成；又芯層30之材質主要為環氧樹脂、聚亞醯 胺樹脂、BT(bismaleimide triazine)樹脂、FR4 樹脂或 FR5 樹 脂，導電結構32係由銅薄膜壓合於芯層30表面且經蝕刻等 圖案化製程所形成之一圖案化金屬層。 在本發明中，由於防銲層之開孔具有圓形中央部及周緣 翼部的設計，使由防銲層之開口所界定之銲墊38如第4圖所 示，包括一圓形之中央區381，以及連接中央區381周緣之 複數個呈圓弧形的翼面區382，翼面區382係對稱分佈於於 中央區381周緣，此種具有翼面區382之銲墊38的設計將可 額外增加銲墊38與銲球的接觸面積，以增加銲墊38與銲球 的黏著效果，進而具有較佳之封裝品質；同時，藉由銲墊38 之翼面區382的設計，亦可具有較佳之TCT測試結果。 另一方面，在本發明中，由於銲墊的形狀係由防銲層之 開口所界定，在製程上僅需對防銲層進行一般微影技術即可 形成，製作簡單，使本發明同時具備有製程簡單且可有效改 善銲墊與銲球的黏著效果之優點。 8 200845332 以上所述之實施例僅係為說明本發明之技術思想及特 點，其目的在使熟習此項技藝之人士能夠瞭解本發明之内容 並據以實施，當不能以之限定本發明之專利範圍，即大凡依 本發明所揭示之精神所作之均等變化或修飾，仍應涵蓋在本 發明之專利範圍内。 【圖式簡單說明】 第la圖及第ib圖所示分別為習知SMD銲墊接設有銲球之剖視圖及 其板層級封裝示意圖。 第2a圖及第2b圖所示分別為習知NSMD銲墊接設有銲球之剖視圖 及其裂損示意圖。 第如圖及第3b圖所示分別為本發明一實施例封裝基板之俯視圖 與其AA線段剖視圖。 第4圖所示為本發明一實施例防銲層界定之銲墊結構示咅圖。 【主要元件符號說明】 2 封裝體 3 印刷電路板 10 基板 芯層 防銲層 14 200845332 20 開口 30 芯層 32 導電結構 34 防銲層 36 開口 361 中央部 362 翼部 38 録塾 381 中央區 382 翼面區

Claims (1)

  1. 200845332 十、申請專利範圍： 1· -種半導體晶片封裝基板，包含： 一芯層； 一^電結構，係設置於該芯層之一表面上丨以及 一絕緣層，係覆蓋於該導電結構上，其中 該絕緣層具有至少一圖案化開口； 銲塾該化開口係暴露部份該導電結構作為一圖案化 •亥圖案化開口係包括—中央咅 A^ 央部周緣向外延伸。 炅数们真4自该中 n: i所述之半導體晶片 為一圖案化金屬層。 、T 結構係 3·如請求項丨所述之半導體晶 一防銲層。 了衣基板其中，該絕緣層係為 4·如請求項丨所述之半導體晶片 佈於該中央部周緣。 衣基板，其中，該翼部係對稱分 5·如請求項】所述之半導體晶片 形。 衣基板其中，该中央部係為圓 6·如請求項丨所述之半導體晶 形。 訂衣基板，其令，該翼部係為圓弧 7· —種防銲層界定之銲墊結構，包含·· 一中央區；以及 複數翼面區，係自該中央F田&人， Q 天區周緣向外延伸。 8. 如靖求項7所述之防銲層界定之銲墊結 … 區係對稱分佈於該中央區周緣。 八_，该複數翼面 9. 如請求項7所述之防銲層界定 呈圓形。 干1^口構其中，該中央區係 =广頁7所述之防銲層界定之銲 呈圓弧形。 丹丹T，该異面區係
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