200840785 (1) 九、發明說明 【發明所屬之技術領域】 本發明，是有關將液晶顯示器（LCD )操作板、等離 子顯示器（PDP )等的扁平操作板顯示器（FPD )所使用 — 的大型且薄的玻璃基板的薄板狀材料由非接觸進行搬運用 ^ 的薄板狀材料搬運裝置。 【先前技術】 液晶顯示器、等離子顯示器等的扁平操作板顯示器的 玻璃基板因爲即使稍爲的損傷或灰塵也會深深地影響品質 ，所以這種玻璃基板的搬運，要求玻璃基板的表面不會損 傷或異物附著且保持玻璃基板接近平面形狀地沿著預定的 搬運面（通道線）平滑地進行搬運。 另一^方面’液晶顯不器用的玻璃基板的尺寸漸漸大型 化，例如第 8世代是 W2200mmxL2500mm，第 9世代是 W2400mmxL2800mm，相比於其厚度爲〇·5〜0.7mm程度 是非常地薄。因此，將玻璃基板水平搬運時，不只其外周 端部，不支撐內側的部分的話中央部會過大地垂下。 此玻璃基板的搬運裝置，是儘可能均等地支撐玻璃基 板全面’保持接近平面的形狀進行搬運，這種搬運裝置之 一，已知使用在上面部形成多數的給氣孔的空氣載置台將 玻璃基板浮上並由空氣的壓力驅動由非接觸進行搬運的搬 運裝置（例如日本特開平1 0- 1 391 60號公報、日本特開平 1 1 - 2 6 8 8 3 0號公報、日本特開平i丨_ 2 6 8 8 3 1號公報參照） -5- 200840785 (2) 又，已知在玻璃基板的寬度方向的中央附近設置空氣 載置台抑制玻璃基板的中央部的垂下，在與玻璃基板的搬 運方向垂直的寬度方向的兩端附近由複數滾子支撐並將5皮 璃基板朝預定的搬運方向驅動的搬運裝置（例如日本特開 2003-63643號公報、日本特開2005-29359號公報參照） 〇 又，在空氣載置台中，從工場的清淨空氣的設備或具 備鼓風機的給氣設備加壓的空氣是通過配管供給。 如此，藉由使用由非接觸支撐玻璃基板的空氣載置台 ，騷音、塵、玻璃基板的表面的損傷等的問題就難發生， 可以實現零件點數少的搬運裝置。 本申請人，已提案日本特願2006-276392號（未被公 開），其是沿著玻璃基板的通道線朝其長度方向及寬度方 向配設複數空氣載置台，藉由從這些空氣載置台的上面供 給的空氣，將玻璃基板浮上，且對於配置於通道線的寬度 方向兩側的送出滾子，將玻璃基板的寬度方向兩端，藉由 從下方吸引氣流的吸引部吸引，由此，使玻璃基板的寬度 方向兩端接觸送出滾子地搬運的薄板狀材料搬運裝置。 【發明內容】 (本發明所欲解決的課題） 如上述，本申請人提案的薄板狀材料搬運裝置的玻璃 基板尺寸是第5〜第7世代的，即非大型的情況無問題， -6 - 200840785 (3) 但是在第8世代或是第9世代的超大型尺寸的玻璃基板的 搬運時，玻璃基板的通道線中央部會過大地朝上方浮起或 垂下而使彎曲顯著。 另一方面，爲了提高FPD的生産性，要求玻璃基板 ' 的搬運速度高速化，最近爲分速5 0m。這種高速搬運下， — 玻璃基板就這樣彎曲移動的話，會承受上揚力或下降力， 而產生風箏揚起現象（Kite Flying Effect)，如前述，玻 φ 璃基板爲〇.5mm的薄的情況中，就成爲非常容易破損的 狀態。 本發明的課題爲提供一種薄板狀材料搬運裝置及方法 ，即使將超大型尺寸的玻璃基板高速搬運的情況也可以抑 制通道線寬度方向中央部過大彎曲。 (用以解決課題的手段） 本發明人等發現，藉由調節朝寬度方向複數配置的空 φ 氣載置台組件中的至少寬度方向中央位置的從空氣載置台 組件的空氣供給量，就可以如上述抑制玻璃基板的過大彎 曲。 即，藉由以下各實施例可以解決上述課題。 (1 ) 一種薄板狀材料搬運裝置，其特徵爲，將複數 空氣載置台組件並設於薄板狀材料的通道線方向及與通道 線垂直的寬度方向，前述空氣載置台組件，是具有：對於 前述薄板狀材料的下面供給氣體並將該薄板狀材料非接觸 地支撐用的空氣載置台、及將前述正壓的氣體供給至該空 200840785 (4) 氣載置台用的正壓發生裝置，前述的複數空氣載置台組件 之中，至少通道線寬度方向中央位置的空氣載置台組件， 是具備供給量控制裝置，其可調節來自前述正壓發生裝置 的氣體的供給量。 ' (2 )如（1 )的薄板狀材料搬運裝置，其中，在具備 ' 前述供給量控制裝置的空氣載置台組件之中的至少一部分 的上方位置，設置供偵知搬運中的前述薄板狀材料的從前 φ 述通道線的高度方向的偏離量的高度感測器，前述供給量 控制裝置，是依據前述高度感測器的偵知訊號，降低前述 高度方向的偏離量地調節氣體的供給量。 (3 )如（2)的薄板狀材料搬運裝置，其中，前述高 度感測器是安裝於前述空氣載置台組件中的通道線寬度方 向的側面。 (4 )如（1 )至（3 )項中任一項薄板狀材料搬運裝 置，其中，前述正壓發生裝置，是由風扇的旋轉速度可變 φ 的鼓風機所構成，前述供給量控制裝置，是由前述鼓風機 旋轉速度調節開關所構成。 (5 ) —種薄板狀材料的搬運方法，是從空氣載置台 的上面供給正壓的空氣，將薄板狀材料從前述空氣載置台 的上面由浮上狀態沿著通道線進行搬運，具有：在前述通 道線的寬度方向的至少中央位置，偵知前述薄板狀材料的 從前述通道線的高度的偏離量的過程；及依據偵知前述偏 離量，增減前述空氣的供給量，降低該偏離量的過程。 (6 )如（5 )的薄板狀材料的搬運方法，其中，前述 -8- 200840785 (5) 通道線上的薄板狀材料的對於搬運方向垂直的寬度方向的 兩端附近部分，是藉由負壓從下方吸引而接觸送出滾子。 (發明之效果） * 依據本發明，即使超大型尺寸的玻璃基板，也可以抑 ' 制通道線寬度方向中央部的大的浮上或垂下防止其彎曲。 因此，高速搬運成爲可能。 【實施方式】 以下參照圖面詳細說明本發明的較佳實施例。 如第1圖、第2圖所示，本發明的第1實施例的薄板 狀材料搬運裝置10，是具備：將例如大型的LCD用的玻 璃基板（薄板狀材料）1 2由非接觸浮上支撐用的複數空 氣載置台組件14 ( II-II線在沿著4基：14A〜14D )、及 具有由通道線（搬運面）P的寬度方向兩端接觸玻璃基板 φ 1 2的下面將玻璃基板1 2朝預定的搬運方向驅動用的複數 送出滾子（驅動構件）16之驅動組件1 8、及配置於送出 滾子1 6的附近將負壓供給至玻璃基板1 2的下面將玻璃基 板12朝送出滾子16的方向推迫用的吸引組件20、及前 述空氣載置台組件14之中安裝於空氣載置台組件14A〜 1 4C的高度感測器2 1 ( 2 1 A〜2 1 C )、及氣體的供給量控 制裝置23 (23A〜23C;第3圖參照）。 如第2圖所示，空氣載置台22爲略平坦的略直方體 的箱狀體，其上面部26形成對於玻璃基板1 2的下面供給 ~ 9 - 200840785 (6) 空氣用的複數給氣孔26A。 又，空氣載置台22，是通道線p方向較長的略直方 體。在此實施例中，8基的空氣載置台組件1 4是朝通道 線P的方向配置2列（行），朝寬度方向配置4列（行） * 。在此，爲了辨別朝寬度方向配置的4基的空氣載置台組 ' 件14，從第2圖的左朝右方向對於空氣載置台組件分別 附加符號 14A、14B、14C、14D，又，對應於這些的高度 φ 感測器附加符號2 1 A〜2 1 C (空氣載置台組件1 4 D未設置 高度感測器）’對於氣體的供給量控制裝置附加符號23A 〜23D，對於正壓發生裝置附加符號24a〜24D。 空氣載置台22的上面部26，具體而言，厚度是〇.5 〜3 mm的板材。上面部2 6的材料可以使用不銹鋼、鋁、 各種合金％。 正壓發生裝置24，是具備風扇28及馬達29的鼓風 機’設置於空氣載置台22的下側，直結於空氣載置台22 φ 。又，如第4圖所示，在本第1實施例中，對於各空氣載 置台22使2台的正壓發生裝置24朝搬運方向分離設置。 在空氣載置台22的上面部26及正壓發生裝置24之 間設置過濾器3 0。更詳細的話過濾器3 〇是設在空氣載置 台2 2中的上面部2 6的下方附近。過濾器3 〇的材料可以 使用例如與無塵室的空氣過濾用的 HEPA ( High200840785 (1) IX. Description of the Invention [Technical Field of the Invention] The present invention relates to a large and thin body for use in a flat panel display (FPD) using a liquid crystal display (LCD) operation panel, a plasma display (PDP), or the like. The thin plate-shaped material of the glass substrate is a thin plate-shaped material conveying device that performs non-contact transportation. [Prior Art] The glass substrate of a flat panel display such as a liquid crystal display or a plasma display has a strong influence on quality even if it is slightly damaged or dusted. Therefore, the glass substrate is required to be transported without damage to the surface of the glass substrate. Or the foreign matter adheres and the glass substrate is conveyed smoothly along a predetermined conveyance surface (channel line) while maintaining the planar shape. The size of the glass substrate for the liquid crystal display device is gradually increasing, for example, the eighth generation is W2200mmxL2500mm, and the ninth generation is W2400mmxL2800mm, which is extremely thin compared to the thickness of 〇·5 to 0.7 mm. Therefore, when the glass substrate is conveyed horizontally, not only the outer peripheral end portion but also the inner portion is not supported, and the central portion is dripped excessively. In the conveyance device of the glass substrate, the glass substrate is supported as uniformly as possible to maintain the shape of the glass substrate. In one of the conveyance devices, it is known to use an air placement table in which a plurality of air holes are formed in the upper surface portion. A transport device that is transported by non-contact is driven by the pressure of the air (for example, Japanese Patent Laid-Open Publication No. Hei 01-391-061, Japanese Patent Application Laid-Open No. Hei 1 1 - 2 6 8 8 3 0, and Japanese Special Edition i丨_ (2) In the vicinity of the center in the width direction of the glass substrate, it is known that the air mounting table is provided to suppress the hanging of the center portion of the glass substrate and the conveyance direction of the glass substrate. A conveyance device that is supported by a plurality of rollers in the vicinity of the both ends in the width direction and that drives the five-glass substrate in a predetermined conveyance direction (for example, JP-A-2003-63643, JP-A-2005-29359) Moreover, in the air mounting table, the air pressurized from the equipment of the clean air of the factory or the air supply apparatus provided with the air blower is supplied through the piping. As described above, by using the air mounting table that supports the glass substrate without contact, problems such as noise, dust, and damage to the surface of the glass substrate are less likely to occur, and a conveying device having a small number of parts can be realized. The present applicant has proposed Japanese Patent Application No. 2006-276392 (not disclosed), which is provided with a plurality of air mounting tables along the channel line of the glass substrate in the longitudinal direction and the width direction thereof, by means of the air mounting table. The air supplied from above is floated on the glass substrate, and the both ends of the width direction of the glass substrate are sucked by the suction portion that sucks the airflow from the lower side of the feeding roller disposed on the both sides in the width direction of the channel line. Both ends of the glass substrate in the width direction contact the sheet-shaped material conveying device that conveys the roller. [Problems to be Solved by the Invention] As described above, the glass substrate size of the thin plate-shaped material conveying device proposed by the present applicant is the fifth to seventh generations, that is, the case of non-large size is not problematic, -6 - 200840785 (3) However, when the ultra-large-size glass substrate of the 8th generation or the ninth generation is transported, the center portion of the channel line of the glass substrate is excessively floated upward or suspended to make the bending remarkable. On the other hand, in order to improve the productivity of FPD, the conveyance speed of the glass substrate 'requires speeding up, and the recent speed is 50 m. Under such high-speed handling, if the glass substrate is bent and moved in this way, it will withstand the upward force or the downward force, and the Kite Flying Effect will occur. As described above, the glass substrate is thin. In it, it becomes a state that is very easy to break. An object of the present invention is to provide a thin plate-shaped material conveying apparatus and method capable of suppressing excessive bending of a central portion in a width direction of a channel line even when a glass substrate of an ultra-large size is transported at a high speed. (Means for Solving the Problem) The inventors of the present invention have found that by adjusting the air supply amount from the air stage assembly at the center position of at least the width direction of the air φ air bearing table assembly disposed in plural in the width direction, The above suppresses excessive bending of the glass substrate. That is, the above problems can be solved by the following embodiments. (1) A thin plate-shaped material conveying device characterized in that a plurality of air placing table assemblies are provided in a channel line direction of a thin plate-like material and a width direction perpendicular to a channel line, and the air placing table assembly has: The air placing table for supplying the gas to the lower surface of the thin plate-shaped material and supporting the thin plate-shaped material in a non-contact manner, and the positive pressure generating device for supplying the positive pressure gas to the air 200840785 (4), the aforementioned positive pressure generating device Among the plurality of air stage assemblies, at least the air stage unit at the center in the width direction of the channel line is provided with a supply amount control device that can adjust the supply amount of the gas from the positive pressure generating device. (2) The thin plate-shaped material conveying device according to (1), wherein the thin plate-shaped material for detecting conveyance is provided at a position above at least a part of the air placing table assembly including the supply amount control device In the height sensor of the amount of deviation from the height direction of the channel line, the supply amount control means adjusts the supply amount of the gas by reducing the amount of deviation in the height direction based on the detection signal of the height sensor. (3) The thin plate material conveying device according to (2), wherein the height sensor is a side surface of a width direction of the passage line that is attached to the air placing table assembly. (4) The thin plate material conveying device according to any one of (1) to (3) wherein the positive pressure generating device is constituted by a blower whose rotational speed of the fan is variable by φ, and the supply amount control device It is composed of the aforementioned blower rotation speed adjustment switch. (5) A method of transporting a thin plate-shaped material by supplying a positive pressure air from an upper surface of an air mounting table, and transporting the thin plate-shaped material from a top surface of the air placing table along a channel line in a floating state; a process of detecting at least a central portion of the width direction of the channel line from the height of the channel line; and detecting or increasing the amount of supply of the air to reduce the amount of deviation process. (6) The method of conveying a thin plate-shaped material according to (5), wherein the portion of the thin plate-shaped material on the channel line of the above-mentioned -8-200840785 (5) in the width direction perpendicular to the conveying direction is by a negative pressure Attracted from below and contacted to send the roller. (Effects of the Invention) According to the present invention, even in a glass substrate having an extremely large size, it is possible to prevent a large floating or hanging of the center portion in the width direction of the channel line from being bent. Therefore, high-speed handling becomes possible. [Embodiment] Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the drawings. As shown in FIG. 1 and FIG. 2, the thin plate-shaped material conveying device 10 according to the first embodiment of the present invention includes a glass substrate (thin-plate material) for a large LCD, for example, which is supported by non-contact floating. The plurality of air stage assemblies 14 (II-II lines are along the 4 bases: 14A to 14D), and the glass substrate having the glass substrate φ 1 2 at both ends in the width direction of the channel line (transport surface) P 1 2, the drive unit 18 of the plurality of feed rollers (drive member) 16 for driving in a predetermined conveyance direction, and the vicinity of the feed roller 16 are supplied with a negative pressure to the lower surface of the glass substrate 1 2 to the glass substrate 12 The suction unit 20 for guiding the direction in which the roller 16 is fed and the height sensor 2 1 ( 2 1 A to 2 1 C ) attached to the air stage units 14A to 14C among the air stage units 14 And gas supply amount control device 23 (23A to 23C; see Fig. 3). As shown in Fig. 2, the air mounting table 22 is a slightly flat, substantially rectangular box-shaped body, and the upper surface portion 26 is formed to supply a plurality of air supply holes 26A for the lower surface of the glass substrate 1 2 . . Further, the air stage 22 is a substantially rectangular body in which the channel line p direction is long. In this embodiment, the 8-base air stage assembly 14 is arranged in two rows (rows) in the direction of the channel line P and four columns (rows) * in the width direction. Here, in order to identify the four-base air stage group 14 disposed in the width direction, symbols 14A, 14B, 14C, and 14D are attached to the air stage components from the left-to-right direction of FIG. 2, and corresponding to These height φ sensors are attached with symbols 2 1 A to 2 1 C (the air stage assembly 1 4 D is not provided with a height sensor). For the gas supply amount control device, symbols 23A to 23D are attached, for the positive pressure generating device. Additional symbols 24a~24D. The upper surface portion 26 of the air stage 22, specifically, a sheet having a thickness of 〇.5 to 3 mm. The material of the upper surface portion 26 can be made of stainless steel, aluminum, or various alloys. The positive pressure generating device 24 is provided on the lower side of the air placing table 22 by a blower unit ??? a fan 28 and a motor 29, and is connected to the air placing table 22 φ. Further, as shown in Fig. 4, in the first embodiment, the two positive pressure generating devices 24 are separated from each other in the transport direction for each of the air placing tables 22. A filter 30 is provided between the upper surface portion 26 of the air placing table 22 and the positive pressure generating device 24. More specifically, the filter 3 is disposed near the lower portion of the upper surface portion 26 of the air stage 2 2 . The material of the filter 3 can be used, for example, HEPA for air filtration with a clean room.
Efficiency Particulate Air Filter)或 ULPA( Ultra LowEfficiency Particulate Air Filter) or ULPA ( Ultra Low
Penetration Air Filter)同樣的材料。 在空氣載置台22中的上面部26及過濾器30之間設 -10 - 200840785 (7) 置網狀物構件3 2。網狀物構件3 2，是由線徑爲0.1〜 1 . 5mm的金屬絲狀或是線狀的構件以預定之間距編成的結 構。網狀物構件3 2的材料，具體而言可以使用不銹鋼、 ί呂、各種合金、樹脂等。 吸引組件20，是位於通道線Ρ的寬度方向兩端的空 氣載置台組件1 4的更外側。 各吸引組件20是略平坦的箱狀體，其上面部34形成 對於玻璃基板12的下面供給負壓用的複數吸引孔34Α， 在箱內設有由例如風扇構成的負壓發生裝置20Α，使上面 部34配置於寬度方向兩側的空氣載置台組件1 4的上面部 26及驅動組件1 8的送出滾子1 6之間。 驅動組件1 8，是使寬度方向的兩端接觸玻璃基板1 2 地在8台的空氣載置台組件1 4的寬度方向兩側設置一對 〇 送出滾子1 6，是於搬運方向以適宜間距複數設置。 各送出滾子1 6，是具備：接觸玻璃基板12的下面的滾子 部1 6Α及比其更寬度方向外側的凸緣部1 6Β，並與無圖示 的旋轉驅動源連結。又，在本第1實施例中驅動組件1 8 ，是使送出滾子16的滾子部16A的上端比空氣載置台22 的上面部26的上面的玻璃基板12的浮上量只高出數mm 程度。此高度，是成爲通道線P的高度的基準。 高度感測器21A〜21C，是安裝於對應的空氣載置台 22 A〜22 C的第2圖中右側的側面上部的光感測器，可以 偵知出其正上位置的搬運中的玻璃基板1 2的下面的高度 -11 - 200840785 (8) ，例如從通道線P的高度的偏離量或是從空氣載置台22 的上面部26的高度。 正壓發生裝置24A〜24D中的風扇28將驅動用的馬 達29，是作成旋轉速度可變，前述供給量控制裝置23 A ^ 〜23D，是依據高度感測器21 A〜21C上方位置的從通道 * 線P的玻璃基板高度訊號，或是來自外部的手動操作’例 如將風扇的旋轉數，可以階段地變更微弱、弱、中、強、 φ 最強等的鼓風機旋轉速度調節開關。 這些供給量控制裝置23 A〜23D，是在薄板狀材料搬 運裝置1 0的外側面，在此，在驅動組件1 8的外側面，分 別整批設置配列於通道線P的寬度方向的4基的空氣載置 台組件。 接著，藉由薄板狀材料搬運裝置1 〇說明玻璃基板1 2 的搬運過程。 首先，供給量控制裝置23是設定成，若來自高度感 φ 測器2 1的輸出訊號是比玻璃基板1 2的通道線P高的情況 時，抑制對應的正壓發生裝置24中的風扇的旋轉速度， 又，若相反地，比通道線P低的情況時，增大旋轉速度。 藉由薄板狀材料搬運裝置1 0搬運玻璃基板1 2時，各 高度感測器2 1 A〜2 1 C，是偵知其正上的玻璃基板1 2的下 面的高度，將其偵知訊號輸出至供給量控制裝置23 A〜 23C。 又，供給量控制裝置23 D是設定成，當預先使玻璃 基板1 2由吸引組件20吸引時，可以接觸驅動組件1 8的 -12- 200840785 (9) 送出滾子1 6程度的空氣供給量。 如上述供給量控制裝置2 3 A〜2 3 C，當高度感測器 21A〜21C是輸出來自玻璃基板12的通道線P的高度過大 的訊號時，是抑制對應的正壓發生裝置24 A〜24C的空氣 ' 供給量，其相反的情況時因爲增大空氣供給量，所以被搬 ' 運中的玻璃基板12可維持通道線P的寬度方向幾乎均一 的高度，即直平面狀態。 φ 特別是，在此實施例，玻璃基板12的通道線P的寬 度方向兩端部因爲是藉由吸引組件20的負壓被推迫至吸 引送出滾子1 6，所以寬度方向兩端部的高度一定，以其 爲基準，藉由使玻璃基板1 2的通道線P中央位置附近的 搬運時中的高度均一，不只可將玻璃基板1 2呈直平面狀 地搬運，也可以使其搬運高度一定。 又，薄板狀材料搬運裝置1 〇，因爲空氣載置台組件 14具備正壓發生裝置24，所以不需要清淨空氣的設備或 φ 具備鼓風機的給氣設備等的外部的給氣設備的配管，正壓 發生裝置24因爲直結於空氣載置台22，所以也不需要供 連結正壓發生裝置24及空氣載置台22用的配管’且’從 正壓發生裝置24供給的空氣可以效率佳地送出至空氣載 置台22的上方。 因此，設備用的空間小。又，因爲不使用工場的清淨 空氣所以可期待經營成本的降低。 又，因爲在空氣載置台22的上面部26及正壓發生裝 置2 4之間設置過濾器3 0 ’所以對於玻璃基板1 2的下面 -13- 200840785 (10) 在可以供給已除去異物的清淨空氣。特別是，過濾器3 0 因爲設在空氣載置台22中的上面部26的下側附近’所以 異物除去隨後的清淨的空氣可確實供給至玻璃基板1 2的 下面。 • 又，薄板狀材料搬運裝置10，因爲具備將玻璃基板 • 1 2朝送出滾子1 6的方向推迫用的吸引組件20，所以玻璃 基板1 2及送出滾子1 6的抵接力提高，可以增大玻璃基板 φ 1 2及送出滾子1 6的摩擦力。由此，可以抑制玻璃基板1 2 及送出滾子1 6的滑動。 因此，使浮上於空氣載置台22上的玻璃基板1 2的下 面的高度及送出滾子16的滾子部16A的上端成爲等同高 度地設置驅動組件1 8，將玻璃基板1 2保持接近平面的形 狀，也可抑制玻璃基板1 2及送出滾子1 6的滑動，玻璃基 板12及送出滾子16的摩擦力因爲大，所以送出滾子16 的旋轉的加速度及減速度可設定較大，可期待搬運效率提 • 高。 又，薄板狀材料搬運裝置1 〇，因爲是使驅動組件1 8 接觸玻璃基板1 2的下面將玻璃基板1 2朝搬運方向驅動， 所以與只由空氣的壓力附與驅動力的搬運裝置比較的話， 因爲只供給供支撐玻璃基板1 2用的空氣即可，所以可期 待成裝置的製造成本的降低，同時因爲少的空氣的供給量 就足夠，所以可抑制無塵室內的空氣的亂流。進一步，因 爲不需要空氣的複雜的控制，所以構造簡單。 上述實施例中，雖在空氣載置台組件14A〜14C的側 -14- 200840785 (11) 面設置高度感測器2 1 A〜2 1 C，但是本發明不限定於此， 高度感測器，只有設在通道線P的寬度方向中央部的至少 1基（奇數基的情況；偶數基的情況是中央2基）的空氣 載置台組件也可以，又，未設置局度感測器的情況也適用 〇 • 即，本發明的薄板狀材料搬運裝置的設定時，以目視 使玻璃基板1 2的搬運時的高度成爲均一的方式，調整組 φ 裝供給量控制裝置23A〜23D，之後，只要玻璃基板12的 厚度或大小未變更，正壓發生裝置24 A〜24D的空氣供給 量就可以維持與幾乎設定時同樣。 但是，驅動正壓發生裝置24的電源的電壓的變動， 或驅動風扇用的馬達29的輸出變動等容易發生的情況時 ，如上述調整設置高度感測器2 1即可。 進一步，上述的高度感測器21，雖是偵知玻璃基板 12的高度，但是高度感測器21作爲玻璃基板1 2的有無 φ 的偵知感測器，就可以利用於薄板狀材料搬運裝置1 〇的 節能運轉。 即，正壓發生裝置24，在玻璃基板12搬運時停止的 話對於節能較佳，但是因爲使用風扇馬達，所以玻璃基板 ' 1 2的搬運再開時從停止狀態旋轉至一定速度爲止會產生 時間遲延。 此實施例的正壓發生裝置2 4，是在玻璃基板1 2未搬 運時成爲最低的旋轉速度來達成節能效果，藉由高度感測 器2 1偵知出玻璃基板1 2的先端時隨時提高旋轉速度的話 -15- 200840785 (12) ，幾乎不會產生時間遲滯。 又，在第1圖的實施例中，供給量控制裝置23 A〜 23D，雖是整批設置於薄板狀材料搬運裝置1 〇的通道線p 兩側位置的驅動組件1 8的外側面，但是在不需要頻繁進 ' 行供給量控制裝置23 A〜23D的操作的情況時，設於對應 的空氣載置台組件14A〜14D也可以。 又，前述實施例的薄板狀材料搬運裝置10雖具備8 φ 基空氣載置台組件14，但是依據玻璃基板12的長度、寬 度等具備7基以下的空氣載置台組件也可以，具備9基以 上的空氣載置台組件也可以。 又，空氣載置台組件1 4雖是搬運方向較長的形狀， 但是玻璃基板1 2的長度，依據寬度等例如空氣載置台組 件14是搬運方向的長度及寬度方向的長度等同形狀也可 以，寬度方向較長的形狀也可以。 進一步，空氣載置台組件14，雖分別具備2台的正 φ 壓發生裝置24，但是例如依據空氣載置台組件的形狀等 在各空氣載置台組件只具備1台正壓發生裝置也可以，具 備3台以上的正壓發生裝置也可以。 又，在前述實施例中，正壓發生裝置24、負壓發生 裝置20A，雖是具備風扇的構造，但是正壓發生裝置、負 壓發生裝置的構造不特別限定，採用例如離心型等的其他 的渦輪型的構造或容積型的構造的正壓發生裝置、負壓發 生裝置也可以。 進一步，在前述實施例中，薄板狀材料搬運裝置10 -16- 200840785 (13) ’雖是具備包含複數送出滾子（驅動構件）1 6的驅動組 件1 8，但是具備包含例如皮帶（驅動構件）的驅動組件 的結構也可以。又，具備並設驅動用的滾子及皮帶的驅動 組件的結構也可以。 ^ 又，省略驅動組件，朝搬運方向噴射空氣地傾斜空氣 載置台的給氣孔地形成於上面板’空氣載置台是由噴射的 空氣驅動被搬運物也可以。又，空氣載置台是由供給的空 φ 氣驅動被搬運物的情況時，省略吸引組件也可以。 又，從空氣載置台組件1 4供給至玻璃基板1 2的下面 的氣體雖是空氣，但是將例如氮氣體、稀有氣體等的其他 的氣體供給至玻璃基板1 2的下面也可以。 又，前述實施例，雖是供搬運玻璃基板1 2用，但是 對於面積，板厚比較薄的薄板狀材料的話，其他的材料的 搬運也適用本發明。例如，金屬薄板狀材料、樹脂的薄板 狀材料等的容易產生撓曲的材料的搬運的情況可適用。 [產業上的利用可能性] 本發明，是液晶顯示器，可以使用於等離子顯示器等 的扁平操作板顯示器的大型且薄的玻璃基板的薄板狀材料 的搬運。 【圖式簡單說明】 [弟1圖]本發明的實施例的薄板狀材料搬運裝置的整 體結構的槪要立體圖。 -17· 200840785 (14) [第2圖]第1圖的II-II線的擴大剖面圖。 [第3圖]同薄板狀材料搬運裝置的控制系統的方塊圖 〇 [第4圖]第1圖的IV-IV線的剖面圖。 ^ 【主要元件符號說明】 P :通道線（搬運面） φ 1 〇 :薄板狀材料搬運裝置 1 2 :玻璃基板（薄板狀材料） 1 4 :空氣載置台組件 14A〜14D ··空氣載置台組件 1 6 :送出滾子（驅動構件） 16A :滾子部 16B :凸緣部 1 8 :驅動組件 φ 20 :吸引組件 20A :負壓發生裝置 2 1 :高度感測器 2 1 A〜2 1 C :高度感測器 22 :空氣載置台 22A〜22C :空氣載置台 23 :供給量控制裝置 23A〜23D :供給量控制裝置 24 :正壓發生裝置 18- 200840785 (15) 24A〜24D :正壓發生裝置 2 6 :上面部 26A :給氣孔 28 :風扇 2 9 :馬達 • 3 0 :過濾器 32 :網狀物構件 赢 3 4 :上面部 3 4 A :吸引孔Penetration Air Filter) The same material. A mesh member 3 2 is disposed between the upper surface portion 26 and the filter 30 in the air placing table 22, -10 - 200840785 (7). The mesh member 32 is a structure in which a wire-like or linear member having a wire diameter of 0.1 to 1.5 mm is formed at a predetermined interval. As the material of the mesh member 32, specifically, stainless steel, lyon, various alloys, resins, or the like can be used. The suction unit 20 is located on the outer side of the air stage assembly 14 at both ends in the width direction of the channel line. Each of the suction units 20 is a slightly flat box-shaped body, and the upper surface portion 34 forms a plurality of suction holes 34 for supplying a negative pressure to the lower surface of the glass substrate 12, and a negative pressure generating device 20A made of, for example, a fan is provided in the box. The upper surface portion 34 is disposed between the upper surface portion 26 of the air stage assembly 14 on both sides in the width direction and the delivery roller 16 of the drive unit 18. The drive unit 18 is provided with a pair of 〇 feed rollers 16 on both sides in the width direction of the eight air table assemblies 14 in the width direction at both ends in contact with the glass substrate 1 2 at a suitable pitch in the conveyance direction. Complex settings. Each of the feed rollers 16 is provided with a roller portion 16 6 that is in contact with the lower surface of the glass substrate 12 and a flange portion 16 6 that is wider than the outer side in the width direction, and is coupled to a rotary drive source (not shown). Further, in the first embodiment, the drive unit 18 is such that the upper end of the roller portion 16A that feeds the roller 16 is only a few mm higher than the floating amount of the glass substrate 12 on the upper surface of the upper surface portion 26 of the air mounting table 22. degree. This height is the reference for the height of the channel line P. The height sensors 21A to 21C are light sensors attached to the upper side of the right side in the second drawing of the corresponding air placing tables 22 A to 22 C, and can detect the glass substrate being conveyed at the upper position. The height -11 - 200840785 (8) of the lower side of 1 2 is, for example, the amount of deviation from the height of the passage line P or the height of the upper surface portion 26 of the air stage 22 . The fan 28 of the positive pressure generating devices 24A to 24D drives the motor 29 to be rotationally variable, and the supply amount control devices 23 A to 23D are based on the positions above the height sensors 21 A to 21C. Channel* The glass substrate height signal of line P, or manual operation from the outside, such as the number of rotations of the fan, can be changed stepwise to change the blower speed adjustment switch of weak, weak, medium, strong, φ strongest. These supply amount control devices 23 A to 23D are on the outer side surface of the thin plate-shaped material conveying device 10, and here, on the outer side surface of the drive unit 18, four groups arranged in the width direction of the channel line P are provided in batches. Air stage assembly. Next, the conveyance process of the glass substrate 1 2 is demonstrated by the thin-plate material conveyance apparatus 1 。. First, the supply amount control device 23 is set such that when the output signal from the height sense detector 21 is higher than the channel line P of the glass substrate 12, the fan in the corresponding positive pressure generating device 24 is suppressed. The rotational speed, if conversely, is lower than the channel line P, the rotational speed is increased. When the glass substrate 1 2 is transported by the thin plate-shaped material conveying device 10, each height sensor 2 1 A to 2 1 C detects the height of the lower surface of the glass substrate 12 which is directly above, and detects the signal. The output is supplied to the supply amount control devices 23 A to 23C. Further, the supply amount control device 23 D is set such that when the glass substrate 12 is sucked by the suction unit 20 in advance, the air supply amount of the roller unit 16 can be contacted with the drive unit 18 from -12 to 200840785 (9). . When the height sensors 21A to 21C are signals having an excessively large height from the channel line P of the glass substrate 12, the supply amount control devices 2 3 A to 2 3 C suppress the corresponding positive pressure generating device 24 A to In the case of the air supply amount of 24C, in the opposite case, since the air supply amount is increased, the glass substrate 12 being transported can maintain a substantially uniform height in the width direction of the channel line P, that is, a straight plane state. In particular, in this embodiment, both ends in the width direction of the passage line P of the glass substrate 12 are urged to the suction and delivery roller 1 by the negative pressure of the suction unit 20, so that both ends in the width direction are The height is constant, and the height of the glass substrate 12 in the vicinity of the center position of the channel line P is uniform, so that the glass substrate 12 can be transported in a straight plane shape or the height can be transported. for sure. Further, in the thin plate-shaped material conveying device 1A, since the air placing table assembly 14 is provided with the positive pressure generating device 24, it is not necessary to clean the air, or the piping of the external air supply device such as the air supply device including the air blower, and the positive pressure. Since the generating device 24 is directly attached to the air placing table 22, the piping for connecting the positive pressure generating device 24 and the air placing table 22 is not required, and the air supplied from the positive pressure generating device 24 can be efficiently sent to the air load. Above the table 22. Therefore, the space used by the device is small. In addition, since the clean air of the factory is not used, the operating cost can be expected to decrease. Further, since the filter 3 0 ' is provided between the upper surface portion 26 of the air mounting table 22 and the positive pressure generating device 24, the lower surface of the glass substrate 1 2-13-200840785 (10) can be supplied with the removal of foreign matter. air. In particular, since the filter 30 is disposed near the lower side of the upper surface portion 26 of the air placing table 22, the cleaned air of the foreign matter can be surely supplied to the lower surface of the glass substrate 1 2 . In addition, since the thin plate-shaped material conveying device 10 has the suction unit 20 for pushing the glass substrate 1 to the direction in which the roller 16 is fed, the contact force between the glass substrate 1 2 and the delivery roller 16 is improved. The frictional force of the glass substrate φ 1 2 and the feed roller 16 can be increased. Thereby, the sliding of the glass substrate 1 2 and the feeding roller 16 can be suppressed. Therefore, the height of the lower surface of the glass substrate 12 floating on the air stage 22 and the upper end of the roller portion 16A of the delivery roller 16 are equidistantly provided with the drive unit 18, and the glass substrate 12 is kept close to the plane. The shape can also suppress the sliding of the glass substrate 1 2 and the feeding roller 16 , and the frictional force of the glass substrate 12 and the feeding roller 16 can be set large, so that the acceleration and deceleration of the rotation of the feeding roller 16 can be set large. Look forward to the high efficiency of handling. Further, since the thin plate-shaped material conveying device 1 is driven by the driving unit 18 contacting the lower surface of the glass substrate 12 in the conveying direction, it is compared with a conveying device that is only driven by the pressure of air and the driving force. Since only the air for supporting the glass substrate 12 is supplied, it is expected to reduce the manufacturing cost of the apparatus, and since the supply amount of air is small, it is possible to suppress the turbulent flow of the air in the clean room. Further, since the complicated control of the air is not required, the structure is simple. In the above embodiment, the height sensors 2 1 A to 2 1 C are provided on the side 14 - 200840785 (11) of the air stage components 14A to 14C, but the present invention is not limited thereto, and the height sensor, It is also possible to provide at least one base (in the case of an odd base; in the case of an even base, the center 2 base) of the center portion of the channel line P in the width direction, and also the case where the locality sensor is not provided. In the setting of the thin plate-shaped material conveying device of the present invention, the height of the glass substrate 12 during transportation is visually adjusted, and the group φ supply amount control devices 23A to 23D are adjusted. The thickness or size of the substrate 12 is not changed, and the air supply amount of the positive pressure generating devices 24 A to 24D can be maintained as in the case of almost setting. However, when the fluctuation of the voltage of the power source for driving the positive pressure generating device 24 or the fluctuation of the output of the motor 29 for driving the fan is likely to occur, the height sensor 2 may be adjusted as described above. Further, the above-described height sensor 21 detects the height of the glass substrate 12, but the height sensor 21 serves as a detecting sensor for the presence or absence of φ of the glass substrate 12, and can be used for a thin plate-shaped material conveying device. 1 节能 energy-saving operation. In other words, the positive pressure generating device 24 is preferably energy-saving when the glass substrate 12 is stopped. However, since the fan motor is used, a time lag occurs when the glass substrate '12 is re-opened from the stopped state to a constant speed. The positive pressure generating device 24 of this embodiment achieves an energy saving effect at the lowest rotational speed when the glass substrate 12 is not transported, and is improved by the height sensor 2 1 detecting the tip end of the glass substrate 12 Rotation speed -15- 200840785 (12), almost no time lag. Further, in the embodiment of Fig. 1, the supply amount control devices 23 A to 23D are provided on the outer side surfaces of the drive unit 18 at the positions on both sides of the passage line p of the thin plate-shaped material conveying device 1 整, but When it is not necessary to frequently perform the operations of the supply amount control devices 23 A to 23D, they may be provided to the corresponding air placing table assemblies 14A to 14D. In addition, the thin plate-shaped material conveying device 10 of the above-described embodiment includes the 8 φ-based air placing table assembly 14 , but may have an air placing table assembly of 7 or less depending on the length and width of the glass substrate 12 , and may have 9 or more bases. The air stage assembly is also available. Further, although the air placing table assembly 14 has a long conveying direction, the length of the glass substrate 12 may be equal to the length of the air placing table assembly 14 in the conveying direction and the length in the width direction depending on the width, and the like. Longer shapes are also available. Further, the air stage assembly 14 includes two positive pressure generating devices 24, respectively. For example, the air mounting table assembly may be provided with only one positive pressure generating device depending on the shape of the air mounting table assembly. A positive pressure generating device above the stage is also available. In the above-described embodiment, the positive pressure generating device 24 and the negative pressure generating device 20A have a structure including a fan. However, the structure of the positive pressure generating device and the negative pressure generating device is not particularly limited, and other types such as a centrifugal type are used. A positive pressure generating device or a negative pressure generating device of a turbine type structure or a volume type structure may be used. Further, in the above-described embodiment, the thin plate-shaped material conveying device 10-16-200840785 (13) 'has a drive assembly 1 8 including a plurality of feed rollers (drive members) 16 but is provided with, for example, a belt (drive member) The structure of the drive component is also possible. Further, a configuration may be adopted in which a drive unit for driving the roller and the belt is provided. Further, the drive unit is omitted, and the air supply hole of the air placement stage is formed on the upper panel by injecting air in the conveyance direction. The air stage may be driven by the jetted air. Further, when the air placing table drives the object to be transported by the supplied air φ gas, the suction unit may be omitted. Further, the gas supplied from the air stage assembly 14 to the lower surface of the glass substrate 1 2 is air, but another gas such as a nitrogen gas or a rare gas may be supplied to the lower surface of the glass substrate 1 2 . Further, in the above-described embodiment, the glass substrate 12 is used for transporting. However, in the case of a thin plate-shaped material having a relatively small thickness and a small thickness, the present invention is also applicable to the transportation of other materials. For example, it is possible to apply a material such as a thin metal plate material or a thin resin material such as a resin which is likely to cause deflection. [Industrial Applicability] The present invention is a liquid crystal display which can be used for transporting a thin plate-shaped material of a large and thin glass substrate of a flat operation panel display such as a plasma display. BRIEF DESCRIPTION OF THE DRAWINGS [Brief 1] A perspective view of the overall structure of a thin plate-shaped material conveying device according to an embodiment of the present invention. -17· 200840785 (14) [Fig. 2] An enlarged cross-sectional view taken along line II-II of Fig. 1. [Fig. 3] A block diagram of a control system of a thin plate-shaped material conveying device 第 [Fig. 4] A cross-sectional view taken along line IV-IV of Fig. 1 . ^ [Description of main component symbols] P : Channel line (transport surface) φ 1 〇: Thin plate material handling device 1 2 : Glass substrate (thin plate material) 1 4 : Air stage assembly 14A to 14D · Air table assembly 1 6 : Feed roller (drive member) 16A : Roller portion 16B : Flange portion 18 : Drive unit φ 20 : Suction assembly 20A : Negative pressure generating device 2 1 : Height sensor 2 1 A to 2 1 C : Height sensor 22 : Air mounting tables 22A to 22C : Air mounting table 23 : Supply amount control devices 23A to 23D : Supply amount control device 24 : Positive pressure generating device 18 - 200840785 (15) 24A to 24D : Positive pressure generation Device 2 6 : Upper face 26A : Air supply hole 28 : Fan 2 9 : Motor • 3 0 : Filter 32 : Mesh member wins 3 4 : Upper face 3 4 A : Suction hole