1352056 (1) 九、發明說明 【發明所屬之技術領域】 本發明爲：以非接觸的方式，支承用於液晶顯示器（ LCD )面板、電漿顯示器（PDP )等平板顯示器（FPD ) 的大型薄玻璃基板之類的薄板狀材料的薄板狀材料運送用 氣動工作台、及具備上述薄板狀材料運送用氣動工作台的 薄板狀材料運送裝置。 【先前技術】 液晶顯示器、電漿顯示器等平板顯示器的玻璃基板， 即使是些微的傷痕或塵埃也會對品質產生極大的影響，故 在上述玻璃基板的運送中，爲了避免在玻璃基板的表面形 成損傷或附著異物，而必須在玻璃基板保持呈趨近於平面 之形狀的狀態下，沿著特定的運送面而平滑地運送》 一方面，液晶顯示器之玻璃基板的尺寸也愈趨大型化 φ ，舉例來說，第 8代的面板中，相較於 W2200mmx L2500mm的尺寸，厚度則爲0.5〜0.7mm左右，由於非常 的薄，因此在水平地運送玻璃基板時，不僅是玻璃基板的 外周端部而已，倘若較上述外周端部更内側的部分也未加 以支承的話，將導致中央部大量的下垂。 因此，玻璃基板的運送裝置，必須儘可能全面平均地 支承玻璃基板，並保持成趨近於平面的形狀而運送。 譬如，在運送面的運送方向、以及運送方向上之垂直 的寬度方向，以適當的間距設置複數個滾子，並利用該複 -5- (2) (2)1352056 數個滾子從下方支承玻璃基板而形成驅動的運送裝置，而 這樣的運送裝置早爲大眾所熟知。 然而，利用複數個滾子從下方支承玻璃基板並加以驅 動的運送裝置，由於隨著玻璃基板的大型化，導致滾子、 軸、軸承等構件數量及組裝步驟增加，而具有製造成本増 大的問題。不僅如此，更具有因構件數量的增加而導致維 修保養的成本大增的問題。此外，由於玻璃基板重複地與 滾子形成接觸與分離因而產生振動，因此產生噪音及塵埃 ，有使將導致玻璃基板的表面受損，因此具有：因滾子的 增加而容易更進一步產生噪音及塵埃的問題。此外，由於 軸的長形化所衍生的軸之真直度的降低及撓曲量的變大， 將導致滾子的迴轉精度降低，這點將容易導致噪音及塵埃 的產生，而具有容易導致玻璃基板表面受損的問題。 相對於此，採用在上表面板形成大量供氣孔的氣動工 作台而使玻璃基板上浮並利用空氣的壓力進行驅動，而以 非接觸的方式執行運送的運送裝置早爲大眾所熟知（譬如 ，請參考日本特開平10 — 1391 60號公報、曰本特開平11 一 268830號公報、日本特開平11-268831號公報）。 此外，在玻璃基板之寬度方向的中央附近設置氣動工 作台，並抑制玻璃基板之中央部的下垂，利用滾子從下方 支承玻璃基板於運送方向上之垂直寬度方向的兩端附近， 並驅動玻璃基板的運送裝置也早爲大眾所熟知（譬如，請 參考日本特開2003— 63643號公報、日本特開 2005 — 29359號公報）。 (3) 1352056 成本低且 1 0mm 左 孔噴射充 是在無塵 左右之清 右的供氣 ，明顯較 無塵室内 空氣的亂 於玻璃基 ，最好是 無塵室內 面板的氣 開 2004 - 樹脂、陶 眾所熟知 〇 紙等而噴 再者，氣動工作台的上表面板，多半是採用 容易取得的多孔金屬（Perforated Metal)等。 話雖如此，多孔金屬之孔的直徑通常爲1〜 右，當爲了使玻璃基板浮起而從上述尺寸的供氣 分的空氣時，具有空氣流速過快的問題。 更詳細的說，雖然玻璃基板的運送裝置大多 室内使用，但相對於無麈室中流速爲500mm/sec 浄空氣的下降氣流’由於從直徑爲1〜l〇mm左 孔所噴射之空氣的流速爲900〜2500mm/sec左右 無塵室之清浄空氣的下降氣流更快，而具有導致 產生空氣亂流（紊流）的問題。此外，由於上述 流（紊流），有時反而容易導致塵埃等異物附著 板。而爲了抑制無塵室内之空氣的亂流（紊流） 將氣動工作台所噴射之空氣的流速抑制成：低於 清浄空氣之下降氣流的流速。 相對於此，採用陶瓷等多孔質材料構成上表 動工作台早爲大眾所熟知（譬如，請參考曰本特 3071 52號公報）。 此外，在多孔金屬等上表面板的下方，設置 瓷等多孔質板材或布、紙等的氣動工作台也爲大 (譬如，請參考日本特開2004-345 744號公報） 如以上所述，藉由隔著多孔質的板材或布、 射空氣的方式，可使由供氣孔所噴射的空氣形成一致化的 氣流分佈，並抑制氣流的亂流（紊流）。 (4) (4)1352056 【發明內容】 〔發明所欲解決之課題〕 但是，採用陶瓷等多孔質材料構成上表面板的氣動工 作台；或在多孔金屬等的上表面板下方設置樹脂、陶瓷等 多孔質板材的氣動工作台，實際上由於樹脂、陶瓷等多孔 質板材的通氣阻抗甚大，而降低可噴出之空氣的流量，雖 然可抑制無塵室内之空氣的亂流（紊流），卻又具有上浮 量太小的問題。 更詳細地說，是具有以下的問題：當玻璃基板的上浮 量（玻璃基板與氣動工作台的上表面之間的間隙）降低至 0.1〜0.5 mm左右，很難確實地防止玻璃基板與氣動工作 台之間的接觸。此外，由於上浮量太小，在並列設置複數 台氣動工作台的場合中，必須使上述各上表面在極精確的 精度範圍形成一致的高度，而具有設置作業繁瑣且設置步 驟過多的問題。而爲了確實防止玻璃基板與氣動工作台之 間的接觸，上浮量最好爲1 mm以上。 此外，在多孔金屬等上表面板的下方設置布、紙等的 氣動工作台，不僅具有布、紙等的耐久性問題，還具有布 或紙成爲新的塵埃發生源的問題。 本發明是有鑑於上述問題所硏發的發明，本發明的目 的是提供一種：可在抑制無塵室内之空氣亂流（紊流）的 狀態下，獲得薄板狀材料之大量上浮量的薄板狀材料運送 用氣動工作台、及具備該薄板狀材料運送用氣動工作台的 -8- (5) 1352056 薄板狀材料運送裝置》 〔解決課題之手段〕 本發明可藉具備以下特徵的薄板狀材料運送用氣動工 作台來達成上述的目的，本發明的薄板狀材料運送用氣動 工作台具備：上表面板，該上表面板形成有複數個可對薄 板狀材料的下面供給氣體的供氣孔；和多孔質薄膜，該多 φ 孔質薄膜是設置於上表面板的下面並抵接於上表面板；及 網構件，該網構件是設置成從下方支承多孔質薄膜。 此外，本發明可藉具備以下特徵的薄板狀材料運送用 氣動工作台來達成上述的目的，本發明的薄板狀材料運送 用氣動工作台具備：上表面板，該上表面板形成有複數個 可對薄板狀材料的下面供給氣體的供氣孔；和多孔質薄膜 ，該多孔質薄膜是設置於上表面板的下面；及網構件，該 網構件是挾持於多孔質薄膜及上表面板之間而設置。 • 上述的薄板狀材料運送用氣動工作台，由於是透過多 孔質薄膜而由上表面板的供氣孔噴射空氣，因此與具備多 孔質板材的氣動工作台相同，可抑制氣流的亂流（紊流） 並由上表面板的供氣孔噴射空氣。此外，由於輕薄的多孔 質薄膜其通氣阻抗小於多孔質板材，故相較於採用多孔質 板材的場合，可增加從供氣孔所噴射的空氣流量。因此， 既可抑制無塵室内之空氣的亂流（紊流），又可獲得大量 的上浮量。不僅如此，多孔質薄膜更不會成爲塵埃的發生 源。 -9- (6) (6)1352056 此外，在多孔質薄膜設置於上表面板的下面並抵接於 上表面板的場合中，由於上表面板中未形成供氣孔的部分 與多孔質薄膜緊密地貼著，而使多孔質薄膜的開口面積儘 可能地縮小，而可抑制從上表面板的供氣孔所噴射之空氣 的流量，又由於可使多孔質薄膜下方的空氣壓力變得比較 高，也連帶地使供氣孔所噴射的空氣壓力變得比較高，如 此一來可獲得大量的上浮量。亦即，相較於薄板狀材料， 上述的構造可噴射壓力較高的空氣，因此適用於獲得大量 上浮量的高壓力型氣動工作台。 此外，由於上述的構造是將網構件設置於多孔質薄膜 的下面而可由下方支承多孔質薄膜，進而以網構件還補強 輕薄的多孔質薄膜，因此可提高多孔質薄膜的耐久性。 另外，在網構件被挾持於多孔質薄膜及上表面板之間 而設置的場合中’由於通氣通路是形成於上表面板未形成 供氣孔的部分與多孔質薄膜之間，故多孔質薄膜具有實質 上的大開口面積。因此，雖然供氣孔所噴射之空氣的壓力 變小’但由於可更近一步提高供氣孔所噴射之空氣的流量 ’故在該場合中也能獲的大量的上浮量。亦即，由於上述 的構造可噴射流量較薄板狀材料更高的空氣，故適合用於 可獲得大量上浮量的大流量型氣動工作台。 此外’雖然多孔質薄膜其下側的壓力高於上側，而被 彈推成突出於上表面板的供氣孔内，但由於網構件是設置 成被挾持於多孔質薄膜及上表面板之間，故可抑制多孔質 薄膜朝供氣孔内的突出。亦即，在該場合中可利用網構件 -10- (7) 1352056 對輕薄的多孔質薄膜形成補強，故能提高多孔質薄膜的耐 久性。 再者，網構件亦可設置於以下的兩個位置：設置於多 孔質薄膜下方，而從下方支承該多孔質薄膜的下側位置； 及被挾持多孔質薄膜及上表面板之間而設置的上側位置。 藉由上述的方式，可輕易地從上述的高壓力型氣動工 作台變更成大流量型的氣動工作台，以及可輕易地執行反 Φ 向的變更。 此外，在連通於上表面板之供氣孔的位置形成有通氣 孔的支承板，亦可設置於上表面板的下方，並挾持於多孔 質薄膜與網構件、或上表面板與支承板之間而設置。 上述的構成簡單且能簡化多孔質薄膜與網構件的設置 作業。此外，如上所述，將網構件的設置位置從上側位置 變更爲下側位置的作業、或反向變更的作業均可輕易地執 行。 • 此外，本發明是可藉由具備以上所描述的任一種薄板 狀材料運送用氣動工作台的薄板狀材料運送裝置，來達成 上述目的之發明。 〔發明的功效〕 根據本發明可實現：既可抑制無塵室内之空氣的亂流 (紊流），又可獲得大量之薄板狀材料的上浮量且可靠性 高的薄板狀材料運送用氣動工作台、及具備該薄板狀材料 運送用氣動工作台的薄板狀材料運送裝置。 -11 - (8) 1352056 【實施方式】 以下參考圖面對本發明較佳的實施形態進行詳細的說 明。 如第1圖所示’本發明第i實施形態的薄板狀材料運 送裝置10’是利用薄板狀材料運送用氣動工作台14並以 非接觸的方式’運送譬如大型LCD用玻璃基板（薄板狀 • 材料）12的裝置，而薄板狀材料運送用氣動工作台14的 構造中具有以上的特徵。 如第2圖所示，薄板狀材料運送用氣動工作台14具 有：上表面板18，該上表面板18形成有複數個用來對玻 璃基板12的下面供給氣體的供氣孔16;和多孔質薄膜20 ，該多孔質薄膜20是設置於上表面板18的下方而抵接於 上表面板18;及網構件22，該網構件22是設置成從下方 支承多孔質薄膜20。 φ 此外，於上表面板18的下方，在連通於上表面板18 之供氣孔16的位置設置著形成有通氣孔24的支承板26, 多孔質薄膜20與網構件22是設置成被挾持於上表面板18 與支承板2 6之間。 而薄板狀材料運送用氣動工作台14，是在面對玻璃基 板12之運送方向的垂直寬度方向上具備複數台（在本第1 實施形態中爲4台）。 薄板狀材料運送用氣動工作台14，爲略呈長方體的箱 體。 -12- (9) 1352056 上表面板18構成該箱體的上表面部。上表面板18, 具體來說是厚度爲0.5〜3mm的板材。而上表面板18的材 料可採用不鏽鋼、鋁、各種合金等。如第3圖所示，供氣 孔16是直徑爲6〜50mm的圓形，並以8〜100mm的節距 (中心與中心之間的節距）大量形成。 而在上表面板18，沿著其外周設有朝下方突出的側壁 部28。上表面板18及側壁部28，是從上方嵌合於上方形 φ 成開口的箱體之基部30的側壁部30A的外側，在側壁部 28，是利用鎖固構件32與側壁部30A形成鎖固。 多孔質薄膜20的厚度爲0.1〜3mm。如第4圖所象徵 地表示，在多孔質薄膜20是以20〜40%的氣孔率形成有 複數個平均孔徑爲10〜50μιη的細孔。多孔質薄膜20的材 料，具體來說可採用聚乙烯、聚烯烴等的各種樹脂。而多 孔質薄膜20，是外周部被挾持於基部30之側壁部30Α的 上端、與上表面板18的外周部之間而形成固定。 φ 網構件22是由：線徑爲0.1〜1.5mm的金屬絲狀或線 狀構件以特定的節距所編成。具體來說，網構件22的節 距爲0.25〜3mm，網構件22之各開口部的寬度是大於多 孔質薄膜20之微孔的平均孔徑，且小於供氣孔1 6的直徑 。具體來說，網構件22的材料可採用不鏽鋼、鋁、各種 合金等。 而網構件22是呈現：小於基部30的側壁部30A之内 周的形狀，並由支承板26從下方所支承。 支承板26是厚度爲0.5〜3mm的板材。通氣孔24與 -13- (10) (10)1352056 (1) IX. Description of the Invention [Technical Field of the Invention] The present invention is to support a large-scale thin film display (FPD) for a liquid crystal display (LCD) panel, a plasma display (PDP), etc. in a non-contact manner. A pneumatic table for transporting a thin plate-shaped material such as a thin plate-shaped material, and a thin plate-shaped material conveying device including the pneumatic table for transporting the thin plate-shaped material. [Prior Art] The glass substrate of a flat panel display such as a liquid crystal display or a plasma display has a great influence on the quality even if it is a slight flaw or dust. Therefore, in the transportation of the above glass substrate, in order to avoid formation on the surface of the glass substrate. Damage or adhesion of foreign matter, but must be smoothly transported along a specific transport surface while the glass substrate is maintained in a shape close to a plane. On the one hand, the size of the glass substrate of the liquid crystal display is also increased to size φ, For example, in the panel of the 8th generation, the thickness is about 0.5 to 0.7 mm compared to the size of W2200 mmx L2500 mm, and since it is very thin, when the glass substrate is horizontally transported, not only the outer peripheral end of the glass substrate is used. However, if the inner side portion of the outer peripheral end portion is not supported, a large amount of sagging of the center portion is caused. Therefore, the glass substrate transporting apparatus must support the glass substrate as uniformly as possible and carry it in a shape close to a plane. For example, a plurality of rollers are disposed at an appropriate pitch in the transport direction of the transport surface and the vertical width direction in the transport direction, and the plurality of rollers are supported from below by the plurality of rollers - 5 - (2) (2) 1352056 The glass substrate forms a driven transport device, and such a transport device is well known to the public. However, a carrier device that supports and drives a glass substrate from a plurality of rollers by a plurality of rollers causes an increase in the number of components such as rollers, shafts, bearings, and assembly steps as the size of the glass substrate increases, and has a problem of large manufacturing cost. . Not only that, but also the problem of increasing the cost of repair and maintenance due to an increase in the number of components. In addition, since the glass substrate is repeatedly brought into contact with and separated from the roller to generate vibration, noise and dust are generated, and the surface of the glass substrate is damaged. Therefore, it is easy to further generate noise due to an increase in the number of rollers. The problem of dust. In addition, the reduction of the true straightness of the shaft derived from the enlargement of the shaft and the increase in the amount of deflection will result in a decrease in the rotation accuracy of the roller, which will easily cause noise and dust, and will easily lead to the glass substrate. The problem of surface damage. On the other hand, a transporting device that performs floating in a non-contact manner by using a pneumatic table in which a large number of air supply holes are formed in the upper surface plate to float the glass substrate and is driven by the pressure of the air is known to the public (for example, please Japanese Laid-Open Patent Publication No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. No. Hei 11-268831. Further, a pneumatic table is provided in the vicinity of the center in the width direction of the glass substrate, and the center portion of the glass substrate is prevented from sagging, and the glass substrate is supported by the roller from below to the vicinity of both ends in the vertical direction in the transport direction, and the glass is driven. The substrate transporting device is also well known to the public (for example, please refer to Japanese Laid-Open Patent Publication No. 2003-63643 and Japanese Patent Laid-Open No. 2005-29359). (3) 1352056 Low cost and 10 0mm The left-hole jet charge is the air supply to the right of the dust-free air. It is obviously more chaotic than the dust-free indoor air. It is best to open the air in the clean room panel. 2004 - Resin The ceramics are familiar with the paper, etc., and the upper surface plate of the pneumatic table is mostly made of easily obtained porous metal (Perforated Metal). In other words, the diameter of the hole of the porous metal is usually from 1 to the right, and when the glass substrate is floated from the air of the above-mentioned size, the air flow rate is too fast. In more detail, although the glass substrate transporting device is mostly used indoors, the flow rate of the air flowing from the left hole with a flow rate of 500 mm/sec in the untwisted chamber is the flow rate of the air injected from the left hole having a diameter of 1 to 10 mm. The clean air of the clean room of about 900 to 2500 mm/sec is faster in descending air flow, and has a problem of causing turbulence (turbulence) of the air. Further, due to the above-described flow (turbulent flow), foreign matter such as dust may easily adhere to the plate. In order to suppress the turbulent flow (turbulent flow) of the air in the clean room, the flow rate of the air jetted by the pneumatic table is suppressed to be lower than the flow rate of the descending air flow of the clean air. On the other hand, the use of a porous material such as ceramics to form an upper surface stage has been well known to the public (for example, please refer to the bulletin 3071 52). In addition, a pneumatic table such as a porous plate material such as porcelain, or a pneumatic table such as cloth or paper is provided under the upper surface plate of a porous metal or the like (for example, refer to Japanese Laid-Open Patent Publication No. 2004-345744). By arranging the air through the porous plate or cloth and venting the air, the air jetted by the air supply holes can be uniformly distributed, and the turbulent flow (turbulent flow) of the air flow can be suppressed. (4) (4) 1352056 [Problems to be Solved by the Invention] However, a pneumatic table using an upper surface plate made of a porous material such as ceramics or a resin or ceramic under the upper surface plate of a porous metal or the like is provided. A pneumatic table such as a porous plate actually reduces the flow rate of the air that can be ejected due to the high ventilation resistance of the porous plate such as resin or ceramic, and although it can suppress the turbulent flow (turbulent flow) of the air in the clean room, It also has the problem that the floating amount is too small. More specifically, it has the following problem: when the floating amount of the glass substrate (the gap between the glass substrate and the upper surface of the pneumatic table) is reduced to about 0.1 to 0.5 mm, it is difficult to reliably prevent the glass substrate from working with the pneumatics. Contact between the stations. Further, in the case where the floating amount is too small, in the case where a plurality of pneumatic tables are arranged in parallel, it is necessary to form the above-mentioned upper surfaces at a uniform height within an extremely precise accuracy range, and there is a problem that the setting work is cumbersome and the setting steps are excessive. In order to prevent contact between the glass substrate and the pneumatic table, the amount of floating is preferably 1 mm or more. Further, a pneumatic table such as cloth or paper is provided below the upper surface plate such as porous metal, which not only has durability problems such as cloth and paper, but also has a problem that cloth or paper becomes a new source of dust. The present invention has been made in view of the above problems, and an object of the present invention is to provide a sheet-like shape in which a large amount of floating material of a thin plate-like material can be obtained while suppressing turbulent flow (turbulent flow) of air in a clean room. -8- (5) 1352056 thin plate-shaped material conveying device equipped with a pneumatic table for material transportation and a pneumatic table for conveying a thin plate-shaped material. [Means for Solving the Problem] The present invention can be transported by a thin plate material having the following characteristics The pneumatic table is used to achieve the above object, and the pneumatic table for transporting a thin plate material of the present invention comprises: an upper surface plate formed with a plurality of air supply holes for supplying a gas to the lower surface of the thin plate material; and a porous a multi-φ porous film which is disposed under the upper surface plate and abuts against the upper surface plate; and a mesh member which is provided to support the porous film from below. Further, the present invention can achieve the above object by a pneumatic table for transporting a thin plate-shaped material having the following features, and the pneumatic table for transporting a thin plate-shaped material of the present invention comprises: an upper surface plate, the upper surface plate being formed with a plurality of a gas supply hole for supplying a gas to the lower surface of the thin plate material; and a porous film which is disposed under the upper surface plate; and a mesh member which is held between the porous film and the upper surface plate Settings. • The above-mentioned pneumatic table for transporting a thin plate material is sprayed with air from the air supply hole of the upper surface plate through the porous film, so that the turbulent flow of the air flow can be suppressed as with the pneumatic table having the porous plate. ) and air is ejected from the air supply holes of the upper surface plate. Further, since the light-transparent porous film has a lower venting resistance than the porous plate, the flow rate of the air ejected from the air supply hole can be increased as compared with the case where the porous plate is used. Therefore, it is possible to suppress turbulent flow (turbulent flow) of the air in the clean room, and to obtain a large amount of floating amount. Not only that, but the porous film is not a source of dust. -9- (6) (6) 1352056 Further, in the case where the porous film is provided under the upper surface plate and abuts against the upper surface plate, since the portion of the upper surface plate where the air supply hole is not formed is tightly close to the porous film The surface area of the porous film is reduced as much as possible, and the flow rate of the air ejected from the air supply hole of the upper surface plate can be suppressed, and the air pressure under the porous film can be made relatively high, The air pressure ejected by the air supply holes is also relatively high, so that a large amount of floating amount can be obtained. That is, the above configuration can eject a higher pressure air than a thin plate material, and is therefore suitable for obtaining a high pressure type pneumatic table having a large amount of floating amount. Further, in the above-described structure, the mesh member is provided on the lower surface of the porous film, and the porous film can be supported from below, and the porous film can be reinforced by the mesh member. Therefore, the durability of the porous film can be improved. Further, in the case where the mesh member is held between the porous film and the upper surface plate, the porous film has a space formed between the portion where the upper surface plate is not formed with the air supply hole and the porous film. A substantial large opening area. Therefore, although the pressure of the air ejected by the air supply hole becomes small, "the flow rate of the air ejected by the air supply hole can be further increased", so that a large amount of floating amount can be obtained in this case. That is, since the above configuration can inject a higher air flow rate than the thin plate material, it is suitable for a large flow type pneumatic table which can obtain a large amount of floating amount. Further, although the porous film has a lower pressure on the lower side than the upper side and is projected into the air supply hole protruding from the upper surface plate, since the mesh member is disposed to be held between the porous film and the upper surface plate, Therefore, it is possible to suppress the protrusion of the porous film into the air supply hole. In other words, in this case, the mesh member -10-(7) 1352056 can be used to reinforce the thin and porous film, so that the durability of the porous film can be improved. Further, the mesh member may be disposed at two positions: a lower side of the porous film supported under the porous film; and a space between the porous film and the upper surface plate Upper position. According to the above-described manner, it is possible to easily change from the high-pressure type pneumatic work table described above to the high-flow type pneumatic work table, and the change in the reverse Φ direction can be easily performed. Further, a support plate having a vent hole formed at a position communicating with the air supply hole of the upper surface plate may be disposed under the upper surface plate and held between the porous film and the mesh member or between the upper surface plate and the support plate And set. The above-described configuration is simple and can simplify the installation work of the porous film and the mesh member. Further, as described above, the operation of changing the installation position of the mesh member from the upper position to the lower position or the operation of the reverse change can be easily performed. Further, the present invention is achieved by the thin plate-shaped material conveying device having the pneumatic table for transporting any of the above-described thin plate-shaped materials. [Effects of the Invention] According to the present invention, it is possible to achieve a pneumatic operation in which a large amount of thin plate-like material is turbulent (turbulent flow), and a large amount of thin plate-like material is floated and reliability is high. A table and a thin plate-shaped material conveying device including the pneumatic table for transporting the thin plate-shaped material. -11 - (8) 1352056 [Embodiment] Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the drawings. As shown in Fig. 1, the thin-plate-shaped material conveying device 10' according to the first embodiment of the present invention is a non-contact type of glass substrate (such as a large-sized LCD substrate) that is conveyed by a pneumatic table 14 for thin-plate-shaped material transportation. The device of the material 12 has the above features in the configuration of the pneumatic table 14 for sheet-shaped material conveyance. As shown in Fig. 2, the sheet-shaped material conveying pneumatic table 14 has an upper surface plate 18 formed with a plurality of air supply holes 16 for supplying a gas to the lower surface of the glass substrate 12, and a porous material. The film 20 is provided below the upper surface plate 18 to abut against the upper surface plate 18, and the mesh member 22 is provided to support the porous film 20 from below. Further, a support plate 26 having a vent hole 24 formed at a position communicating with the air supply hole 16 of the upper surface plate 18 is disposed below the upper surface plate 18, and the porous film 20 and the mesh member 22 are disposed to be held by Between the upper surface plate 18 and the support plate 26. On the other hand, the pneumatic table 14 for conveying a thin plate material has a plurality of stages (four in the first embodiment) in the vertical width direction facing the conveying direction of the glass substrate 12. The pneumatic table 14 for conveying a thin plate material is a box having a substantially rectangular parallelepiped shape. -12- (9) 1352056 The upper surface plate 18 constitutes an upper surface portion of the casing. The upper surface plate 18 is specifically a plate having a thickness of 0.5 to 3 mm. The material of the upper surface plate 18 may be stainless steel, aluminum, various alloys or the like. As shown in Fig. 3, the air supply holes 16 are circular in shape having a diameter of 6 to 50 mm, and are formed in a large number with a pitch of 8 to 100 mm (pitch between the center and the center). On the upper surface plate 18, a side wall portion 28 projecting downward is provided along the outer circumference thereof. The upper surface plate 18 and the side wall portion 28 are fitted to the outer side of the side wall portion 30A of the base portion 30 of the upper square φ opening, and the side wall portion 28 is formed by the locking member 32 and the side wall portion 30A. solid. The thickness of the porous film 20 is 0.1 to 3 mm. As shown in Fig. 4, the porous film 20 is formed with a plurality of pores having an average pore diameter of 10 to 50 μm at a porosity of 20 to 40%. As the material of the porous film 20, specifically, various resins such as polyethylene and polyolefin can be used. On the other hand, the porous film 20 is formed such that the outer peripheral portion is held between the upper end of the side wall portion 30' of the base portion 30 and the outer peripheral portion of the upper surface plate 18. The φ mesh member 22 is formed of a wire-like or linear member having a wire diameter of 0.1 to 1.5 mm at a specific pitch. Specifically, the pitch of the mesh member 22 is 0.25 to 3 mm, and the width of each opening portion of the mesh member 22 is larger than the average pore diameter of the micropores of the porous film 20 and smaller than the diameter of the gas supply hole 16. Specifically, the material of the mesh member 22 may be stainless steel, aluminum, various alloys or the like. The mesh member 22 is formed to have a shape smaller than the inner circumference of the side wall portion 30A of the base portion 30, and is supported by the support plate 26 from below. The support plate 26 is a plate material having a thickness of 0.5 to 3 mm. Vents 24 and -13- (10) (10)
1352056 上表面板的供氣孔相同，是直徑爲6〜50mm的 並以8〜1 0 〇 m m的節距（中心與中心之間的節距） 數個。支承板26的材料可採用不鏽鋼、鋁、各種 再者，在支承板26，沿著其外周設有朝下方突t 壁部34，並在側壁部34處嵌合於基部30之側壁吾 的内側。此外，在基部30設有從側壁部30A的内f 側突出的内周凸部3 0B，並由該内周凸部3 0B從下； 著支承板26的側壁部34。 此外，在基部30之底板部30C的中央附近，言 來導入空氣的導入孔30D。鼓風機或空氣壓縮機等白 單元42以及空氣過濾器44，是透過供氣管40而連主 入孔30D，而形成：經空氣過濾器44去除異物的2 是從上表面板18的供氣孔16朝上方噴射。 而薄板狀材料運送裝置10具備：用來將玻璃基 朝運送方向驅動的驅動單元46。 驅動單元46具有複數個滾子48，該複數個滾子 接於玻璃基板12的下面而朝運送方向驅動玻璃基板 上述的滾子48被配置在：被配置成複數台並列之薄 材料運送用氣動工作台14的寬度方向兩側，且複數 滾子48是以適當的間距設置在運送方向上。滾子48 :抵接於玻璃基板12下面的滾子部48Α;及設置在 子部48Α更位於寬度方向外側的凸緣部48β，且滾」 連接於圖面中未顯示的迴轉驅動源。而驅動單元46 a形， >成複 Γ金等 i的側 ；30A ]朝内 『支承 t有用 丨供氣 ¥於導 丨氣， 板12 48抵 12 ° 板狀 對的 具備 較滾 ? 48 被設 -14- (11) (11)1352056 置成：滾子48的滾子部4 8A上端較薄板狀材料運送用氣 動工作台14的上表面板18的上表面高數mm程度的高度 〇 其次，針對薄板狀材料運送裝置10的作用進行說明 〇 薄板狀材料運送裝置10，譬如可藉由擴大薄板狀材料 運送用氣動工作台14之上表面部16的開口面積比率等， 來降低位於薄板狀材料運送用氣動工作台14之空氣流路 的阻抗，而獲得玻璃基板12大量上浮量。 此外，由於輕薄的多孔質薄膜20其通氣阻抗小於多 孔質的板材，故相較於使用多孔質板材的場合，可提升從 上表面板18之供氣孔16所噴射之空氣的流量。因此，既 可抑制無塵室内之空氣的亂流（紊流），又可獲得大量的 上浮量。不僅如此，多孔質薄膜20也不會成爲塵埃的發' 生來源。 再者，由於多孔質薄膜20是設在上表面板18的下方 並抵接於上表面板18，因此上表面板18中未形成供氣孔 16的部分與多孔質薄膜20可形成緊密附著，並進可能縮 小多孔質薄膜20的開口面積，雖然可抑制從上表面板18 之供氣孔1 6所噴射之空氣的流量，但由於可提高多孔質 薄膜20下方之空氣的壓力，故從上表面板18的供氣孔16 所噴射之空氣的壓力也能提高，如此一來可獲得大量的上 浮量。亦即，本第1實施形態之薄板狀材料運送用氣動工 作台14的構造，由於可噴射較薄板狀材料之壓力更高的 -15- (12) (12)1352056 空氣’故適合獲得大量上浮量的高壓力型氣動工作台。 此外，由於本第1實施形態之氣動工作台14的構成 ’是將網構件22設置於多孔質薄膜20的下方而從下方支 承多孔質薄膜20，並由網構件22對輕薄的多孔質薄膜20 形成補強，故可提高多孔質薄膜20的耐久性。此外，由 於輕薄的多孔質薄膜20的通氣阻抗小於多孔質的板材， 故相較於使用多孔質板材的場合，可增加從上表面板18 的供氣孔1 6所噴射之空氣的流量。因此，既可抑制無塵 室内之空氣的亂流（紊流），亦可獲得大量的上浮量。不 僅如此，多孔質薄膜20也不會成爲塵埃的發生來源。 雖然薄板狀材料運送裝置10，是使驅動單元46的複 數個滾子48接觸於玻璃基板12的下面而將玻璃基板12 朝運送方向驅動，但由於薄板狀材料運送用氣動工作台14 是以非接觸的方式支承玻璃基板12，因此在與滾子48的 接觸部，降低作用於玻璃基板12的作用力，進而抑制因 與滾子48的接觸所產生的表面受損或異物的附著。 相較於利用空氣的壓力來作用驅動力的運送裝置，由 於只需供給支承玻璃基板12所需之低壓的空氣，這點也 有助於降低裝置的製造成本，不僅如此，由於不需要對氣 體作複雜的控制，故構造簡單。 如此一來，由於薄板狀材料運送裝置10可藉由薄板 狀材料運送用氣動工作台14而以大量的上浮量且非接觸 的方式支承玻璃基板12，故能防止玻璃基板12與薄板狀 材料運送用氣動工作台14之間的接觸，不僅如此’由於 -16- (13) 1352056 可抑制無塵室内之空氣的亂流（紊流），故玻璃基 的表面不易受損或者附著異物，因使可實現可靠性ί 送。 又由於可獲得玻璃基板12的大量上浮量，故當 設置複數台薄板狀材料運送用氣動工作台14之際， 表面部16之高度偏差的許容値如此的寬鬆，因此有 減少設置步驟。 φ 此外，薄板狀材料運送用氣動工作台14，是將在 於上表面板18之供氣孔16的位置形成有通氣孔24 承板26，設置於上表面板18的下方，並可藉由令多 薄膜20及網構件22被挾持於上表面板18與支承板 間的簡單構造，確實地固定多孔質薄膜20及網構件 且設置作業也容易。 接著，針對本發明的第2實施形態進行說明。 上述第1實施形態的薄板狀材料運送用氣動工作 φ 是形成網構件22可設置於以下的兩個位置：多孔質 20的下方而從下方支承多孔質薄膜20的下側位置、 持於多孔質薄膜20及上表面板18之間而設置的上側 。在上述的第1實施形態中，多孔質薄膜20是設置 表面板18的下面並抵接於上表面板18，而網構件22 置於下側位置而可從下方支承多孔質薄膜20 » 相對於此，如第5圖所示，本第2實施形態的特 :網構件22是被挾持於多孔質薄膜20及上表面板 間而設置於上側位置。由於其他的構造與上述的第1 U 12 的運 並列 其上 助於 油 遲適 的支 孔質 26之 22， 台14 薄膜 或挾 位置 在上 則設 徵爲 18之 實施 -17- (14) (14)1352056 形態相同，故構造相同的部分省略其說明。 如以上所述，由於網構件22是設置成挾持於多孔質 薄膜20及上表面板18之間，故如第6圖中所象徵性地顯 示，是在上表面板18中未形成供氣孔16的部分與多孔質 薄膜20之間形成通氣通路》因此，多孔質薄膜20之實質 的開口面積是大於上述第1實施形態。如此一來，雖然從 上表面板18的供氣孔16所噴射之空氣的壓力變小，但由 於可使供氣孔16所噴射之空氣的流量較上述第1實施形 態更進一步增大，因此本第2實施形態也與上述第1實施 形態相同，可獲得大量的上浮量。換言之，本第2實施形 態之薄板狀材料運送用氣動工作台14的構造，可噴射流 量較薄板狀材料更多的空氣，故適合獲得大量上浮量的大 流量型氣動工作台。 此外，多孔質薄膜20由於其下側的壓力高於上側， 而被彈推成朝上表面板18的供氣孔16内突出，但由於網 構件22被設成挾持於多孔質薄膜20及上表面板18之間 ，故可抑制多孔質薄膜2 0朝供氣孔1 6内的突出。換言之 ，即使是本第2實施形態，輕薄的多孔質薄膜20也藉由 網構件22而補強，故可提高多孔質薄膜20的耐久性。 再者，在上述第1及第2實施形態中，雖然由薄板狀 材料運送用氣動工作台14供給至玻璃基板12下面的氣體 爲空氣，但亦可對玻璃基板12的下面供給譬如：氮氣、 惰性氣體之類的其他氣體。 此外’在上記第1及第2實施形態中，雖然薄板狀材 -18- (15) (15)1352056 料運送裝置10是在寬度方向上具備4台薄板狀材料運送 用氣動工作台14，但亦可構成：對應於玻璃基板12的寬 度等而具備3台以下的薄板狀材料運送用氣動工作台，或 者具備5台以上的薄板狀材料運送用氣動工作台。 此外，在上記第1及第2實施形態中，雖然薄板狀材 料運送裝置10具備：具有複數個滾子48的驅動單元46, 但亦可構成具備：具有驅動用皮帶的驅動單元。或亦可構 成具備：倂設驅動用滾子與皮帶的驅動單元。此外，或亦 可構成：省略驅動單元，並使氣動工作台的供氣孔傾斜以 便於運送方向噴射空氣而形成上表面板，進而利用氣動工 作台所噴射的空氣來驅動被運送物。 此外，雖然上述第1及第2實施形態是用來運送玻璃 基板12的範例，但只要是相較於面積而板厚較薄，也就 是所謂的薄板狀材料的話，本發明也同樣適用於其他材料 的運送。舉例來說，也能適用於金屬薄板狀材料、樹脂之 薄板狀材料等容易彎折的材料的運送。 〔產業上的利用性〕 本發明可用於：如同液晶顯示器、電漿顯示器等平板 顯示器所採用之大型薄玻璃基板等薄板狀材料的運送。 【圖式簡單說明】 第1圖：顯示本發明之第1實施形態的薄扳狀材料運 送裝置，爲包含局部塊狀圖的前面圖。 -19- (16) 135-2056 第2圖：爲顯示第1圖中薄板狀材料運送裝置之薄板 狀材料運送用氣動工作台構造的剖面圖。 第3圖：爲顯示第1圖中薄板狀材料運送裝置之薄板 狀材料運送用氣動工作台構造的俯視圖。 第4圖：是放大顯示第1圖中薄板狀材料運送用氣動 工作台之多孔質薄膜周邊構造的剖面圖。 第5圖：爲顯示本發明第2實施形態的薄板狀材料運 φ 送用氣動工作台構造的剖面圖。 第6圖：是放大顯示第5圖中薄板狀材料運送用氣動 工作台之多孔質薄膜周邊構造的剖面圖。 【主要元件之符號說明】 1〇 :薄板狀材料運送裝置 12:玻璃基板（薄板狀材料） 14:薄板狀材料運送用氣動工作台 φ 1 6 :供氣孔 18 :上表面板 20 :多孔質薄膜 r 22 :網構件 24 :通氣孔 26 :支承板 28 :側壁部 30 :基部 3 0A :側壁部 -20- 1352056 •内周凸部 :底板部 :導入孔 締結構件 側壁部 供氣管 供氣單元 空氣過濾器 驅動單元 滾子 :滾子部 48B :凸緣部1352056 The upper surface plate has the same air supply holes, which are 6 to 50 mm in diameter and have a pitch of 8 to 10 〇 m m (pitch between center and center). The material of the support plate 26 may be stainless steel, aluminum or the like. In the support plate 26, a wall portion 34 is formed downward along the outer circumference thereof, and is fitted to the inner side of the side wall of the base portion 30 at the side wall portion 34. . Further, the base portion 30 is provided with an inner circumferential convex portion 30B that protrudes from the inner f side of the side wall portion 30A, and the inner circumferential convex portion 30B is driven downward from the side wall portion 34 of the support plate 26. Further, in the vicinity of the center of the bottom plate portion 30C of the base portion 30, an air introduction hole 30D is introduced. The white unit 42 such as a blower or an air compressor and the air filter 44 are connected to the main inlet hole 30D through the air supply pipe 40, and the air is removed from the air supply port 16 of the upper surface plate 18 by the air filter 44. Spray above. The thin plate-shaped material conveying device 10 is provided with a drive unit 46 for driving the glass base in the transport direction. The driving unit 46 has a plurality of rollers 48 that are connected to the lower surface of the glass substrate 12 and drive the glass substrate in the transport direction. The above-described rollers 48 are disposed in a plurality of thin materials for transporting pneumatics arranged in parallel. Both sides of the table 14 in the width direction, and the plurality of rollers 48 are disposed at an appropriate pitch in the conveying direction. The roller 48 is a roller portion 48A that abuts against the lower surface of the glass substrate 12, and a flange portion 48β that is disposed on the outer side in the width direction of the sub-portion 48, and is connected to a rotary drive source not shown in the drawing. The drive unit 46a is shaped, > is the side of the reclaimed gold, etc.; 30A] is facing inward, the support is used for the supply of air, and the plate 12 is offset by 12°. 14-(11) (11) 1352056 is disposed such that the upper end of the upper surface of the upper surface plate 18 of the pneumatic table 14 for the thin plate-shaped material transporting of the roller portion 48 8A of the roller 48 is a height of several mm. Next, the operation of the thin plate-shaped material conveying device 10 will be described. The thin plate-shaped material conveying device 10 can be reduced by, for example, expanding the ratio of the opening area of the upper surface portion 16 of the pneumatic table 14 for transporting the thin plate-shaped material. The material conveys the impedance of the air flow path of the pneumatic table 14 to obtain a large amount of floating amount of the glass substrate 12. Further, since the light-transmissive porous film 20 has a lower ventilation resistance than the porous plate, the flow rate of the air ejected from the air supply holes 16 of the upper surface plate 18 can be increased as compared with the case of using the porous plate. Therefore, it is possible to suppress turbulent flow (turbulent flow) of the air in the clean room, and to obtain a large amount of floating amount. Moreover, the porous film 20 does not become a source of dust. Further, since the porous film 20 is provided below the upper surface plate 18 and abuts against the upper surface plate 18, the portion of the upper surface plate 18 where the air supply holes 16 are not formed can be closely adhered to the porous film 20, and It is possible to reduce the opening area of the porous film 20, and it is possible to suppress the flow rate of the air ejected from the air supply holes 16 of the upper surface plate 18. However, since the pressure of the air under the porous film 20 can be increased, the upper surface plate 18 is removed from the upper surface plate 18. The pressure of the air injected by the air supply port 16 can also be increased, so that a large amount of floating amount can be obtained. In other words, the structure of the pneumatic table 14 for conveying a thin plate-shaped material according to the first embodiment is suitable for obtaining a large amount of floating because it can eject a relatively high pressure of -15-(12)(12)1352056 air of a thin plate-shaped material. A high pressure type pneumatic table. In the configuration of the pneumatic table 14 of the first embodiment, the mesh member 22 is disposed below the porous film 20 to support the porous film 20 from below, and the mesh member 22 is used to lightly and thinly form the porous film 20. Since the reinforcement is formed, the durability of the porous film 20 can be improved. Further, since the light-transmissive porous film 20 has a lower ventilation resistance than the porous plate material, the flow rate of the air ejected from the air supply holes 16 of the upper surface plate 18 can be increased as compared with the case where the porous plate material is used. Therefore, it is possible to suppress turbulent flow (turbulent flow) of the air in the clean room, and to obtain a large amount of floating amount. Not only that, the porous film 20 does not become a source of dust. The thin plate-shaped material conveying device 10 drives the glass substrate 12 in the conveying direction by bringing the plurality of rollers 48 of the driving unit 46 into contact with the lower surface of the glass substrate 12, but the pneumatic table 14 for conveying the thin plate-shaped material is not Since the glass substrate 12 is supported by the contact, the urging force acting on the glass substrate 12 is reduced at the contact portion with the roller 48, and the surface damage or the adhesion of foreign matter due to contact with the roller 48 is suppressed. Compared with the conveying device that uses the pressure of the air to act as the driving force, since it is only necessary to supply the low-pressure air required to support the glass substrate 12, this also contributes to lowering the manufacturing cost of the device, and not only because the gas is not required. Complex control, so the structure is simple. In this manner, since the thin plate-shaped material conveying device 10 can support the glass substrate 12 in a large amount of floating amount and non-contacting by the pneumatic table 14 for conveying the thin plate-shaped material, the glass substrate 12 and the thin plate-like material can be prevented from being transported. The contact between the pneumatic table 14 is not only the same as '-16-(13) 1352056 can suppress the turbulent flow (turbulent flow) of the air in the clean room, so the surface of the glass base is not easily damaged or foreign matter is attached. Reliability can be achieved. Further, since a large amount of floating amount of the glass substrate 12 can be obtained, when a plurality of pneumatic table 14 for conveying a thin plate-shaped material is provided, the tolerance of the height deviation of the surface portion 16 is so loose that the installation step is reduced. In addition, the pneumatic table 14 for conveying a thin plate-shaped material is formed with a vent hole 24 at a position of the air supply hole 16 of the upper surface plate 18, and is disposed below the upper surface plate 18, and can be The film 20 and the mesh member 22 are held between the upper surface plate 18 and the support plate, and the porous film 20 and the mesh member are reliably fixed, and the installation work is easy. Next, a second embodiment of the present invention will be described. In the pneumatic operation φ for transporting the thin plate-shaped material of the first embodiment, the mesh member 22 can be disposed at two positions below the porous material 20, and supports the lower position of the porous film 20 from below and held in the porous material. The upper side is provided between the film 20 and the upper surface plate 18. In the first embodiment described above, the porous film 20 is provided with the lower surface of the surface plate 18 and abuts against the upper surface plate 18, and the mesh member 22 is placed at the lower side to support the porous film 20 from below. As shown in Fig. 5, the mesh member 22 of the second embodiment is placed between the porous film 20 and the upper surface plate and is disposed at the upper position. Since the other constructions are parallel to the above-mentioned first U 12 operation, which contributes to the oil-poor branch hole 26, the 14 film or the crucible position is set to 18, and the implementation is -17- (14) (14) 1352056 has the same form, and therefore the same configuration is omitted. As described above, since the mesh member 22 is disposed to be held between the porous film 20 and the upper surface plate 18, as shown symbolically in Fig. 6, the air supply holes 16 are not formed in the upper surface plate 18. The air passage is formed between the portion and the porous film 20. Therefore, the substantial opening area of the porous film 20 is larger than that of the first embodiment. As a result, the pressure of the air ejected from the air supply holes 16 of the upper surface plate 18 is reduced, but the flow rate of the air ejected from the air supply holes 16 can be further increased as compared with the first embodiment. In the second embodiment, as in the first embodiment described above, a large amount of floating amount can be obtained. In other words, the structure of the pneumatic table 14 for transporting the thin plate-shaped material of the second embodiment can eject a larger amount of air than the thin plate-shaped material, so that it is suitable for obtaining a large-flow type pneumatic table having a large amount of floating amount. Further, the porous film 20 is projected to protrude into the air supply hole 16 of the upper surface plate 18 because the pressure on the lower side thereof is higher than the upper side, but the mesh member 22 is set to be held by the porous film 20 and the upper surface. Between the panels 18, the protrusion of the porous film 20 into the air supply holes 16 can be suppressed. In other words, even in the second embodiment, the lightweight porous film 20 is reinforced by the mesh member 22, so that the durability of the porous film 20 can be improved. Further, in the above-described first and second embodiments, the gas supplied to the lower surface of the glass substrate 12 by the pneumatic table 14 for conveying a thin plate-shaped material is air, but the lower surface of the glass substrate 12 may be supplied with, for example, nitrogen gas. Other gases such as inert gases. In the above-described first and second embodiments, the thin plate-shaped material -18-(15)(15)1352056 material transport device 10 is provided with four thin plate-shaped material transport pneumatic table 14 in the width direction, but In addition, three or less sheets of a pneumatic plate for conveying a thin plate material may be provided in accordance with the width of the glass substrate 12 or the like, or five or more pneumatic table for transporting a thin plate-shaped material may be provided. In the first and second embodiments, the thin plate material conveying device 10 includes the driving unit 46 having a plurality of rollers 48. However, the driving unit 46 may include a driving unit having a driving belt. Alternatively, the drive unit may be provided with a drive roller and a belt. In addition, it may be configured to omit the driving unit and tilt the air supply hole of the pneumatic table to facilitate the direction in which the air is ejected to form the upper surface plate, thereby driving the object to be transported by the air jetted by the pneumatic table. Further, although the first and second embodiments are examples for transporting the glass substrate 12, the present invention is equally applicable to other materials as long as the thickness is thinner than the area, that is, a so-called thin plate-shaped material. Delivery of materials. For example, it can also be applied to the transportation of easily bent materials such as a metal thin plate material or a resin sheet material. [Industrial Applicability] The present invention can be applied to transportation of a thin plate-like material such as a large-sized thin glass substrate used for a flat panel display such as a liquid crystal display or a plasma display. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a front view showing a thin plate-shaped material conveying device according to a first embodiment of the present invention, which is a partial block diagram. -19- (16) 135-2056 Fig. 2 is a cross-sectional view showing the structure of a pneumatic table for transporting a thin plate material in the thin plate material conveying device of Fig. 1. Fig. 3 is a plan view showing the structure of a pneumatic table for transporting a thin plate-shaped material in the thin plate-shaped material conveying device of Fig. 1. Fig. 4 is a cross-sectional view showing, in an enlarged manner, a structure around a porous film of a pneumatic table for transporting a thin plate-shaped material in Fig. 1. Fig. 5 is a cross-sectional view showing the structure of a pneumatic plate for transporting a thin plate material according to a second embodiment of the present invention. Fig. 6 is a cross-sectional view showing, in an enlarged manner, a structure around a porous film of a pneumatic table for transporting a thin plate-shaped material in Fig. 5. [Description of Symbols of Main Components] 1〇: Thin plate material conveying device 12: Glass substrate (thin plate material) 14: Pneumatic table for thin plate material transportation φ 1 6 : Air supply hole 18: Upper surface plate 20: Porous film r 22 : mesh member 24 : vent hole 26 : support plate 28 : side wall portion 30 : base portion 3 0A : side wall portion -20 - 1352056 • inner peripheral convex portion: bottom plate portion: introduction hole arranging member side wall portion air supply pipe air supply unit air filter Drive unit roller: roller portion 48B: flange portion