CN1810608A - Substrate transferring apparatus - Google Patents
Substrate transferring apparatus Download PDFInfo
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- CN1810608A CN1810608A CN 200610002994 CN200610002994A CN1810608A CN 1810608 A CN1810608 A CN 1810608A CN 200610002994 CN200610002994 CN 200610002994 CN 200610002994 A CN200610002994 A CN 200610002994A CN 1810608 A CN1810608 A CN 1810608A
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- substrate
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- air injection
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Abstract
Disclosed herein is a substrate transferring apparatus. The apparatus comprises air injection modules, which serve to float a substrate, and can be independently attached to or detached from the substrate transferring apparatus. Thus, even if any one of the air injection modules is damaged, the substrate is prevented from falling because other air injection modules serve to continuously float the substrate. Furthermore, with such a construction, the air injection modules have an advantage in view of maintenance.
Description
Technical field
The present invention relates to a kind of substrate transferring apparatus that is used to transmit platy substrate.
Background technology
The recent development of information techenology has caused the widespread use of device for display of message, and to its demand also sustainable growth.Existing multiple device for display of message in the prior art, its scope from traditional CRT monitoring device to flat-panel monitor, such as Liquid Crystal Display (LCD) (LCD), Plasmia indicating panel (PDP) and light-emitting diode (OLED) etc.Especially LCD, thus because of its practical importance of using growing.Especially, because volume is little, light weight, advantage such as low in energy consumption, the application of LCD is growing, can overcome the shortcoming of traditional monitor such as CRT monitoring device and as the substitute of traditional monitor.
In the production process of this type of flat panel display equipment, process the thin substrate of glass that a thickness is about 0.7mm.Especially, when a thin and wide substrate of glass is sent to respective handling during the stage, carry out different processing.Simultaneously, because flat panel display equipment needs quite high precision, even a small flaw also can have a strong impact on the quality of flat panel display equipment.Like this, when producing flat panel display equipment, its quality management is extremely important, to prevent damaging substrate surface in other operation that transmits substrate and manufacturing flat-panel devices.
On this meaning, for the substrate transferring apparatus that is used for the flat-panel devices production process, researched and developed substantially not with the substrate surface direct contact to avoid damaging the substrate transferring apparatus of substrate.Especially, prior art mainly uses a kind of being designed to transmit the substrate transferring apparatus that is in the floating condition substrate with air.More particularly, described substrate transferring apparatus so moves: the roller of substrate transferring apparatus contacts with its very narrow part in the substrate both sides, and rotate to transmit substrate, simultaneously air-injection nozzle perpendicular to substrate comprise middle section on interior quite big surface and injection air so that substrate float, thereby allow stably to transmit wide substrate.
Yet, owing to needing a pump, this type of air floating type substrate transferring apparatus provide high pressure air that substrate is floated, and also need conduit that pump is connected to the body of substrate transferring apparatus, so this substrate transferring apparatus complex structure causes manufacturing cost to increase.Especially, because the face area of flat panel display equipment increases recently, also need more high-capacity pump, this also makes more difficult to the management of conduit.
In addition, prior art is badly in need of a kind of substrate transferring apparatus, thereby this equipment can be common to the substrate that transmits different size by according to size of foundation base this equipment being carried out suitable adjusting.
Summary of the invention
The present invention is used to address the above problem, and an object of the present invention is to provide a kind of substrate transferring apparatus that is suitable for transmitting effectively large-area substrates.
According to an aspect of the present invention, above-mentioned and other purpose can reach by a kind of substrate transferring apparatus is provided, described substrate transferring apparatus is used for along continuous straight runs and transmits the substrate that is placed on it, this equipment comprises: a pair of delivery roller device, a described roller devices preset distance parallel to each other and spaced apart, and move in the horizontal direction substrate to rotate with the mode that the substrate both sides all contact; A plurality of air injection modules, described each air injection modules is placed between the described a pair of delivery roller device and the preset distance that is spaced apart from each other, be suitable for upwards towards the middle section injection air of substrate and substrate is floated, each air injection modules is detachably connected on the substrate transferring apparatus, and its position can be moved.
According to a further aspect in the invention, a kind of substrate transferring apparatus is provided, described substrate transferring apparatus is used for along continuous straight runs and transmits the substrate that remains on heeling condition, this equipment comprises: a substrate moving-member, and these parts can rotate and along continuous straight runs moves this substrate with the following end in contact of described sloping base; And a plurality of air injection modules, described each air injection modules be in tilted layout with respect to the substrate moving-member and towards the substrate injection air to float the substrate that is in heeling condition.
Description of drawings
From detailed description considered in conjunction with the accompanying drawings hereinafter, will more be expressly understood above-mentioned and other purpose and feature of the present invention, in described accompanying drawing:
Fig. 1 is a block diagram, shows the substrate transferring apparatus according to first embodiment of the present invention;
Fig. 2 is a viewgraph of cross-section, shows the structure according to the air injection modules of the substrate transferring apparatus of first embodiment;
Fig. 3 shows one and is used for substrate is loaded in according to the operation on the substrate transferring apparatus of first embodiment;
Fig. 4 shows the buffer component according to the substrate transferring apparatus of first embodiment;
Fig. 5 shows the operation according to a pair of delivery roller equipment in the substrate transferring apparatus of first embodiment;
Fig. 6 is a viewgraph of cross-section, shows the substrate transferring apparatus according to second embodiment of the invention;
Fig. 7 is a front elevation, shows by the substrate that substrate transferring apparatus transmitted according to second embodiment; And
Fig. 8 is a partial cross-sectional view, shows the substrate transferring apparatus according to second embodiment.
The specific embodiment
Describe preferred implementation of the present invention below with reference to the accompanying drawings in detail.
Embodiment 1
As shown in Figure 1, the substrate transferring apparatus 1 according to first embodiment comprises a pair of delivery roller device 10, a plurality of air injection modules 20, reaches a plurality of substrate loading and unloading passages 30.
The two ends direct contact of described a pair of delivery roller device 10 and substrate S, thereby and rotation along continuous straight runs transmission substrate S.For substrate is transmitted by described a pair of delivery roller device 10 under the very narrow part in substrate both sides and described a pair of delivery roller device 10 contacted situations, delivery roller device 10 is spaced apart as far as possible far in the horizontal direction.At this moment, delivery roller device 10 is rotated by the driver element of keeping apart (figure does not show).Here, to keep apart be in order to prevent that issuable particulate is towards substrate diffusion and stained substrate in delivery roller device 10 rotates for described driver element and described a pair of delivery roller device 10.Particularly, as shown in Figure 1, each driver element is arranged in the enclosure space of external box of microvave 12, and keeps apart with the delivery roller device 10 that is associated, contact substrate S.Can be formed with breather port (figure does not show) on the external box of microvave 12, can aspirate the in-to-in air and it is discharged to the outside by this breather port.
Substrate transferring apparatus 1 according to present embodiment comprises a plurality of air injection modules 20.In other words, as shown in Figure 1, between a pair of delivery roller device, a plurality of air injection modules 20 are spaced apart with a preset distance each other.Say that on this meaning the larger area substrate will cause air injection modules 20 numbers to increase, and will cause air injection modules 20 decreased number than the substrate of small size.And according to present embodiment, when substrate transferring apparatus 1 comprised a plurality of air injection modules 20, air injection modules 20 was spaced apart with a preset distance each other.Thereby, between two air injection modules 20, formed predetermined space.According to present embodiment, these spaces are as substrate load/unload passage 30, and this substrate load/unload passage 30 is used for being loaded into substrate on the substrate transferring apparatus or unloading the substrate that is positioned on the substrate transferring apparatus 1.As shown in Figure 3, the manipulator A that each substrate load/unload passage 30 makes the substrate outside being placed in transmit automation (figure does not show) can enter described space, and rises or the reduction manipulator in this space when substrate being loaded on the substrate transferring apparatus 1 or unloading the substrate that is arranged on the substrate transferring apparatus 1.That is to say that after the manipulator A that is placed with substrate S thereon entered relevant substrate load/unload passage 30, manipulator A reduced therein, and substrate S is placed on the delivery roller device 10, then manipulator A returns to its initial position.To carry out aforesaid operations by reverse procedure during by manipulator A unloading substrate S.
According to present embodiment, substrate transferring apparatus also comprises a buffer component 40 that is arranged in each load/unload passage 30.Buffer component 40 is used for that the lower surface by support base S prevents substrate collision air injection modules 20 when the substrate S that floated by air injection modules 20 falls.Thereby, can rise or reduce buffer component 40 and interfere with manipulator A avoiding.In the process that transmits substrate S, the height of buffer component 40 is between the lower surface of the upper surface of air injection modules 20 and the substrate of floating.
Say that on this meaning according to present embodiment, buffer component 40 comprises a substrate contact portion 42, an impact absorbing section 44 and a lifting element.Substrate contact portion 42 has constituted the top of buffer component 40, and with the lower surface direct contact of substrate S.Substrate contact portion 42 is spherical so that the area of contact minimum of itself and substrate S.Because substrate contact portion 42 is spherical, substrate contact portion 42 contacts with substrate S point, thereby an advantage is provided: with the area of contact minimum of substrate S.Preferably, substrate contact portion 42 is made by extensible material, be used for absorb the impact that is applied to substrate S when substrate S contacts.
Lifting element is used for rising or reducing substrate contact portion 42.Based on this purpose, lifting element is connected to the bottom of substrate contact portion 42 to rise or reduction substrate contact portion 42.
Impact absorbing section 44 is inserted to an adapter shaft, and this adapter shaft connects substrate contact portion 42 and lifting element, and is used to absorb the impact that is applied to substrate contact portion 42.That is to say that as shown in Figure 4, impact absorbing section 44 forms an elastic element that is inserted to adapter shaft, wherein adapter shaft between substrate contact portion 42 and lifting element, thereby substrate contact portion 42 is remained on a predetermined altitude.
Simultaneously, preferably, each air injection modules 20 is detachably connected to substrate transferring apparatus 1, and its position-movable in substrate transferring apparatus.This class formation makes air injection modules 20 to pull down or to be connected to substrate transferring apparatus 1 from substrate transferring apparatus 1 independently, and substrate transferring apparatus has the advantage that can adjust air injection modules 20 numbers according to the size of substrate S.
In addition, preferably, the distance between the delivery roller device 10 is adjustable.Structure thus, when an air injection modules 20 when this equipment is pulled down, a delivery roller device 10 moves towards another delivery roller device 10, as shown in Figure 5, thereby reduces distance between the delivery roller device 10.The feasible distance that can adjust between the described delivery roller device 10 of this class formation, substrate transferring apparatus can have adjustment according to the size of its substrate that transmits, thereby, can be common to substrate according to equipment of the present invention with different size.
Embodiment 2
As shown in Figure 6, the substrate transferring apparatus 100 according to second embodiment comprises a substrate movable part 110 and a plurality of air injection modules 120.According to second embodiment, substrate transmits with heeling condition rather than horizontality, to reduce the floor area of substrate transferring apparatus 100.At this, substrate with a predetermined angle tilt and is transmitted rather than upright transmission, thereby has higher stability when guaranteeing to transmit substrate.When transmitting substrate with a predetermined angle incline ground, substrate is supported by a plurality of air injection modules 120 that are positioned at the one side.This makes substrate stably to transmit and can not fall, and reduce the space that substrate transferring apparatus 100 occupies in the clean room.
Substrate moving-member 110 is used for that along continuous straight runs moves substrate when substrate is remained on obliquity.According to second embodiment, substrate moving-member 110 comprises a plurality of rollers, the following side contacts of these rollers and tilted-putted substrate S, and mobile substrate S.At this, as shown in Figure 6, according to second embodiment, for the downside that prevents substrate S breaks away from contact surface with roller, the periphery of roller stretches out.
Next, as shown in Figure 6, along arranging air injection modules 120 with respect to substrate moving-member 110 bevelled directions, and keep substrate S bevelled simultaneously on even keel guide this substrate.In other words, air injection modules 120 is used for: keeping substrate S to be in respect to vertical direction slight bevelled state with when avoiding falling, on even keel guides this substrate.At this moment, according to second embodiment, each jet module 120 also is detachably connected to substrate transferring apparatus 100, and its position can be moved.Air injection modules 120 in second embodiment and the air injection modules in first embodiment have same configuration, and its repeating part is no longer described at this.
In addition, as shown in Figure 8, each default passage 130 can be used as the space of placing buffer component 140.In other words, buffer component 140 is arranged in each default passage 130, and buffer component 140 can rise or reduction with respect to substrate when substrate support is on air injection modules 120.Buffer component 140 is used for: when the substrate S that floated by air injection modules 120 fell, the lower surface by support base S prevented substrate collision air injection modules 120.Thereby, can rise or reduce buffer component 140 with respect to substrate and can be used for other device so that preset passage 130, and when default passage 130 is used for other device, buffer component 140 is in a height between the lower surface of the upper surface of air injection modules 120 and the substrate of floating, and suspends herein.
Simultaneously, construct, no longer it is repeated in this description at this because the buffer component 140 in second embodiment has identical volume with buffer component 140 in first embodiment.
Simultaneously, preferably, each air injection modules 120 of foundation second embodiment is detachably connected to substrate transferring apparatus 100.This class formation makes air injection modules 120 to pull down or to be connected to substrate transferring apparatus 100 from substrate transferring apparatus 100 independently, and this has the advantage that can adjust the air injection modules number according to the size of substrate.
Very clear from the above description, a favourable aspect of the present invention is that it can transmit large-area substrate and compressing pump or conduit that need not be extra, and can not damage substrate.
And, according to the present invention,, substrate transferring apparatus is common to various substrates with different size thereby can changing its structure by the size according to the transmission substrate.
In addition, according to the present invention, air injection modules can be detachably connected on the substrate transferring apparatus, thereby, even any one air injection modules is damaged, can prevent that still substrate from falling, because other air injection modules continues to make this substrate to float.And this class formation makes air injection modules have advantage aspect safeguarding.
In addition, substrate transferring apparatus can stably transmit stably to transmit in by blast injection method support base and be under the heeling condition a little but not the vertically substrate under the state, thereby prevents that substrate from suffering damage in the process that transmits.
It will be appreciated that, be exemplary to the description of described embodiment and accompanying drawing, and the present invention is limited by incidental claim.And those of ordinary skill in the art can be understood that under the situation that does not depart from the illustrated scope of the invention of subsidiary claim and spirit, various modifications, increase or alternative to be arranged.
Claims (16)
1. a substrate transferring apparatus is used for along continuous straight runs and transmits substrate mounted thereto, and this equipment comprises:
The delivery roller device of a pair of parallel to each other and preset distance of being separated by, this delivery roller device is to rotate and mobile in the horizontal direction substrate with the mode that the both sides of substrate all contact;
A plurality of air injection modules, described air injection modules is arranged between the described a pair of delivery roller device and the preset distance that is spaced apart from each other, described air injection modules is suitable for upwards towards the middle section injection air of substrate and substrate is floated, each air injection modules is detachably connected on the substrate transferring apparatus, and its position can be moved.
2. equipment as claimed in claim 1, wherein each air injection modules comprises:
One is used for upwards the air blower of blowing towards substrate;
One filter element, this filter element are arranged on the air blower top to filter the impurity in the air blower institute blow out air;
One breaker plate, this breaker plate are positioned at described filter element top and are spaced from a preset distance, the injection thereby the feasible air that passes filter element can make progress equably; With
One cushion space, this cushion space is enclosed between filter element and the breaker plate, passes the air of filter element thereby scatter.
3. equipment as claimed in claim 1, further comprise: be arranged on the buffer component between the air injection modules, described buffer component also can rise between jet module or descend therebetween, thereby the buffer component rise is higher than air injection modules and support base when substrate is fallen.
4. equipment as claimed in claim 3, wherein each described buffer component comprises a substrate contact portion that contacts with substrate and an impact absorbing section, and this impact absorbing section is connected to the bottom of substrate contact portion and absorbs the impact that is applied on the substrate contact portion.
5. equipment as claimed in claim 4, wherein said substrate contact portion is made by extensible material.
6. equipment as claimed in claim 5, wherein said substrate contact portion are spherical.
7. equipment as claimed in claim 6, wherein the distance between the delivery roller device is adjustable.
8. substrate transferring apparatus, this equipment are used for along continuous straight runs and transmit a substrate that remains on heeling condition, and this equipment comprises:
One rotatable substrate moving-member, it contacts the downside of described sloping base and along continuous straight runs moves described substrate; With
A plurality of air injection modules, it is placed with a direction of tilt with respect to described substrate moving-member and towards the substrate injection air and the substrate that is under the heeling condition is floated.
9. equipment as claimed in claim 8, wherein said substrate moving-member comprises the roller of a plurality of preset space lengths that are spaced apart from each other.
10. equipment as claimed in claim 9, wherein each described air injection modules is detachably connected to substrate transferring apparatus, and its position can be moved.
11. equipment as claimed in claim 10, wherein each described air injection modules comprises:
One is used for upwards the air blower of blowing towards substrate;
One filter element, its top that is arranged on air blower is to filter the impurity in the air blower institute blow out air;
One breaker plate, this breaker plate are positioned at the top of described filter element and are spaced from a preset distance, the injection thereby the feasible air that passes filter element can make progress equably; With
One cushion space, this cushion space is enclosed between filter element and the breaker plate, passes the air of filter element thereby scatter.
12. equipment as claimed in claim 11, wherein said air injection modules are arranged to the row of a plurality of preset distances that are spaced apart from each other, thereby form default passage between each row.
13. equipment as claimed in claim 12, also comprise: be arranged on the buffer component between the air injection modules, described buffer component rises with respect to the substrate that is arranged in each default passage or descends, thereby the buffer component rise is higher than air injection modules and support base when substrate is fallen.
14. equipment as claimed in claim 13, wherein each described buffer component comprises: a substrate contact portion that contacts with substrate; One impact absorbing section, this impact absorbing section is connected to the bottom of substrate contact portion and absorbs the impact that is applied on the substrate contact portion; And one be connected to the bottom of impact absorbing section and rise or reduce the lifting element of substrate contact portion and impact absorbing section.
15. equipment as claimed in claim 14, wherein said substrate contact portion is made by extensible material.
16. equipment as claimed in claim 15, wherein said substrate contact portion are spherical.
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
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KR1020050007162 | 2005-01-26 | ||
KR20050007162 | 2005-01-26 | ||
KR1020050024001 | 2005-03-23 |
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CN1810608A true CN1810608A (en) | 2006-08-02 |
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CN 200610002994 Pending CN1810608A (en) | 2005-01-26 | 2006-01-26 | Substrate transferring apparatus |
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Cited By (14)
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WO2011026295A1 (en) * | 2009-09-03 | 2011-03-10 | 东莞宏威数码机械有限公司 | Vacuum substrate conveying system |
CN101306756B (en) * | 2007-05-14 | 2011-07-20 | 细美事有限公司 | Substrate transporting apparatus and substrate guide unit for use therein |
CN102219116A (en) * | 2010-04-15 | 2011-10-19 | 株式会社太星技研 | Sheet glass conveying device |
CN101121466B (en) * | 2006-08-08 | 2012-01-04 | 株式会社日本设计工业 | Air table for conveying sheet material and conveyer with the same |
CN102560443A (en) * | 2011-12-31 | 2012-07-11 | 汉能科技有限公司 | Processing chamber transmission and control system |
CN102849462A (en) * | 2011-06-30 | 2013-01-02 | Sfa工程股份有限公司 | Device used for conveying substrate |
CN103350904A (en) * | 2013-06-20 | 2013-10-16 | 深圳市华星光电技术有限公司 | Conveying device for glass substrates |
WO2015000192A1 (en) * | 2013-07-02 | 2015-01-08 | 深圳市华星光电技术有限公司 | Air floatation guide wheel conveyer for liquid crystal panel |
CN104649015A (en) * | 2013-11-20 | 2015-05-27 | 东丽工程株式会社 | Substrate floating device |
CN108249168A (en) * | 2018-03-21 | 2018-07-06 | 本田汽车零部件制造有限公司 | Positioning device and blanking palletizing system |
CN108423433A (en) * | 2018-03-12 | 2018-08-21 | 昆山国显光电有限公司 | substrate transfer system |
CN108750669A (en) * | 2018-05-07 | 2018-11-06 | 芜湖良匠机械制造有限公司 | A kind of high-precision glass substrate conveying device of roller type |
CN109768187A (en) * | 2017-12-04 | 2019-05-17 | 常州市知豆信息科技有限公司 | A kind of automated production oled panel manufacturing equipment |
CN113697435A (en) * | 2021-09-13 | 2021-11-26 | 东莞市智茂自动化设备有限公司 | PCB transmission method and system based on through hole crossing state |
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2006
- 2006-01-26 CN CN 200610002994 patent/CN1810608A/en active Pending
Cited By (21)
Publication number | Priority date | Publication date | Assignee | Title |
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CN101121466B (en) * | 2006-08-08 | 2012-01-04 | 株式会社日本设计工业 | Air table for conveying sheet material and conveyer with the same |
CN101306756B (en) * | 2007-05-14 | 2011-07-20 | 细美事有限公司 | Substrate transporting apparatus and substrate guide unit for use therein |
CN101648649B (en) * | 2009-09-03 | 2012-10-10 | 东莞宏威数码机械有限公司 | Vacuum basal plate transmitting system |
WO2011026295A1 (en) * | 2009-09-03 | 2011-03-10 | 东莞宏威数码机械有限公司 | Vacuum substrate conveying system |
CN102219116A (en) * | 2010-04-15 | 2011-10-19 | 株式会社太星技研 | Sheet glass conveying device |
CN102849462B (en) * | 2011-06-30 | 2015-04-15 | Sfa工程股份有限公司 | Device used for conveying substrate |
CN102849462A (en) * | 2011-06-30 | 2013-01-02 | Sfa工程股份有限公司 | Device used for conveying substrate |
CN102560443A (en) * | 2011-12-31 | 2012-07-11 | 汉能科技有限公司 | Processing chamber transmission and control system |
CN103350904A (en) * | 2013-06-20 | 2013-10-16 | 深圳市华星光电技术有限公司 | Conveying device for glass substrates |
WO2014201725A1 (en) * | 2013-06-20 | 2014-12-24 | 深圳市华星光电技术有限公司 | Conveying device for glass substrate |
US9527674B2 (en) | 2013-07-02 | 2016-12-27 | Shenzhen China Star Optoelectronics Technology Co., Ltd. | Transmission device with air-float guide wheel of the liquid crystal display panel |
WO2015000192A1 (en) * | 2013-07-02 | 2015-01-08 | 深圳市华星光电技术有限公司 | Air floatation guide wheel conveyer for liquid crystal panel |
CN104649015A (en) * | 2013-11-20 | 2015-05-27 | 东丽工程株式会社 | Substrate floating device |
CN104649015B (en) * | 2013-11-20 | 2018-12-11 | 东丽工程株式会社 | Substrate floating device |
CN109768187A (en) * | 2017-12-04 | 2019-05-17 | 常州市知豆信息科技有限公司 | A kind of automated production oled panel manufacturing equipment |
CN109768187B (en) * | 2017-12-04 | 2021-06-18 | 深圳市柯达科电子科技有限公司 | Automatic change production and use OLED panel manufacture equipment |
CN108423433A (en) * | 2018-03-12 | 2018-08-21 | 昆山国显光电有限公司 | substrate transfer system |
CN108249168A (en) * | 2018-03-21 | 2018-07-06 | 本田汽车零部件制造有限公司 | Positioning device and blanking palletizing system |
CN108249168B (en) * | 2018-03-21 | 2024-04-30 | 本田汽车零部件制造有限公司 | Positioning device and blanking stacking system |
CN108750669A (en) * | 2018-05-07 | 2018-11-06 | 芜湖良匠机械制造有限公司 | A kind of high-precision glass substrate conveying device of roller type |
CN113697435A (en) * | 2021-09-13 | 2021-11-26 | 东莞市智茂自动化设备有限公司 | PCB transmission method and system based on through hole crossing state |
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