TWI472467B - Liquid-ejecting bearings for transport of glass sheets - Google Patents

Liquid-ejecting bearings for transport of glass sheets Download PDF

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TWI472467B
TWI472467B TW101129567A TW101129567A TWI472467B TW I472467 B TWI472467 B TW I472467B TW 101129567 A TW101129567 A TW 101129567A TW 101129567 A TW101129567 A TW 101129567A TW I472467 B TWI472467 B TW I472467B
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Taiwan
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bearing
glass sheet
average
orifice
liquid
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TW101129567A
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Chinese (zh)
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TW201302587A (en
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Gautam Narendra Kudwa
Weiwei Luo
Yoshihiro Nakamura
Tetsuzou Yamada
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Corning Inc
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Description

玻璃片運送之液體射出軸承Liquid injection bearing for glass sheet transport

本發明係關於運送玻璃片之方法以及裝置,該玻璃片例如使用作為液晶顯示器(LCD)製造中之基板。更特別地,本發明係關於運送玻璃片而不會機械接觸玻璃片之主要表面。The present invention relates to a method and apparatus for transporting a glass sheet, for example, used as a substrate in the manufacture of a liquid crystal display (LCD). More particularly, the present invention relates to the transport of glass sheets without mechanical contact with the major surfaces of the glass sheets.

製造液晶顯示器基板的處理過程包括數個步驟,在這期間玻璃片必須在不會傷害到玻璃片主表面的條件下被支撐和運送,尤其不會損傷到顯示器元件譬如薄膜電晶體和色彩濾波器形成其上的玻璃片品質表面。例如,在基板製造處理期間,玻璃片需要切割成適當大小,邊緣研磨,沖洗,和包裝運送,或者提供到顯示器製造商。在執行這些步驟時,不只玻璃片需要在站之間運送,在有些情況下在一個步驟期間玻璃片也需要轉動(旋轉)。The process of fabricating a liquid crystal display substrate includes several steps during which the glass sheet must be supported and transported without damaging the major surface of the glass sheet, particularly without damaging display elements such as thin film transistors and color filters. A glass sheet quality surface formed thereon. For example, during the substrate fabrication process, the glass sheets need to be cut to size, edge-grinded, rinsed, and packaged, or supplied to the display manufacturer. In performing these steps, not only the glass sheets need to be transported between stations, but in some cases the glass sheets also need to be rotated (rotated) during one step.

當玻璃片的大小從1公尺長度成長到大於2公尺,而沒有相對應的厚度增加時,玻璃片的橫向堅硬度也明顯減低。同時,傳輸速度需求不是維持固定就是增加。因此,傳輸液晶顯示器玻璃基板目前存在的問題可描述為試著以高速且不觸碰玻璃片主表面移動機械性質不像衛生紙的大型玻璃片。When the size of the glass sheet grows from 1 meter length to more than 2 meters, and the corresponding thickness increases, the lateral stiffness of the glass sheet is also significantly reduced. At the same time, the transmission speed requirement is either fixed or increased. Therefore, the current problems of transporting liquid crystal display glass substrates can be described as attempting to move large glass sheets whose mechanical properties are not like toilet paper at high speed and without touching the main surface of the glass sheet.

本發明藉由提供非接觸的軸承對至少一個有圖樣的玻 璃片主表面射出液體(譬如水),在傳輸期間以穩定玻璃片的速率以減少玻璃片橫向運動亦即玻璃片和傳輸方向正交的方向移動而解決這個問題。以此種方式,可以高速安全地傳輸大而薄的玻璃片。The present invention provides at least one patterned glass by providing a non-contact bearing The main surface of the glazing film ejects a liquid (such as water) to solve this problem during the transfer at a rate that stabilizes the glass sheet to reduce the lateral movement of the glass sheet, that is, the direction in which the glass sheet and the transport direction are orthogonal. In this way, large and thin glass sheets can be transported safely and at high speed.

依據第一項,本發明提供以實質上垂直的方向運送玻璃片(13)的方法,該方法包括:(a)提供可移動的運送帶(2)設計用來接觸玻璃片(13)的邊緣並以運送速度移動玻璃片(13);(b)提供非接觸的軸承(3)設計用來射出液體(40)到玻璃片(13)主表面的一部份;和(c)以移動的運送帶(2)接觸玻璃片(13)的邊緣以運送速度移動玻璃片(13),一方面從非接觸的軸承(3)射出液體(40)到玻璃片(13)主表面的一部份;其中非接觸的軸承(3)包括多個流孔(22),射出液體(40)到玻璃片(13)主表面的一部份,而此方法至少具有下列一種特性:(i)從非接觸的軸承(3)射出液體(40)的速度,在流孔(22)上的平均值範圍是100-800毫升/分鐘/流孔;或(ii)流孔(22)的平均水平間距範圍是20-25公釐;或(iii)流孔(22)的平均尺寸(D0)在1.0-4.5公釐範圍。According to a first aspect, the invention provides a method of transporting a glass sheet (13) in a substantially vertical direction, the method comprising: (a) providing a movable transport belt (2) designed to contact the edge of the glass sheet (13) And moving the glass sheet (13) at a transport speed; (b) providing a non-contact bearing (3) designed to eject a portion of the liquid (40) to the major surface of the glass sheet (13); and (c) moving The conveyor belt (2) contacts the edge of the glass sheet (13) to move the glass sheet (13) at a transport speed, and on the one hand, ejects the liquid (40) from the non-contact bearing (3) to a part of the main surface of the glass sheet (13). Wherein the non-contact bearing (3) includes a plurality of orifices (22) for ejecting the liquid (40) to a portion of the major surface of the glass sheet (13), and the method has at least one of the following characteristics: (i) The speed at which the contact bearing (3) emits the liquid (40), the average value over the orifice (22) ranges from 100 to 800 ml/min/flow orifice; or (ii) the average horizontal spacing of the orifice (22) It is 20-25 mm; or (iii) the average size (D0) of the orifice (22) is in the range of 1.0-4.5 mm.

依據本發明第二項,本發明提供以實質上垂直的方向運送玻璃片(13)的方法,其包括:(a)提供可移動的運送帶(2),設計用來接觸玻璃片(13)的邊緣以及以運送速度移動玻璃片(13);(b)射出液體(40)到玻璃片(13)主表面的 上端部份;和(c)射出液體(40)到玻璃片(13)主表面的下端部份;以及其中:(i)上端部份為垂直地位於下端部份上方;和(ii)每單位時間射出到上端部份的液體(40)量超過每單位時間射出到下端部份的液體(40)量。According to a second aspect of the invention, the invention provides a method of transporting a glass sheet (13) in a substantially vertical direction, comprising: (a) providing a movable transport belt (2) designed to contact the glass sheet (13) Edge and moving the glass sheet (13) at the transport speed; (b) ejecting the liquid (40) to the main surface of the glass sheet (13) And (c) ejecting the liquid (40) to a lower end portion of the main surface of the glass sheet (13); and wherein: (i) the upper end portion is vertically above the lower end portion; and (ii) each unit The amount of liquid (40) that is ejected to the upper end portion of time exceeds the amount of liquid (40) that is ejected to the lower end portion per unit time.

依據本發明第三項,本發明提供非接觸軸承(3)以使用於運送玻璃片(13),軸承(3)具有多個流孔(22)之前端表面(20),前端表面(20)面對玻璃片(13)以及流孔(22)射出液體(40)朝向玻璃片(13)之主要表面於使用軸承(3)期間,其中:(a)流孔(22)分佈於前端表面(20)上以形成至少一列(23,24,25),其在軸承(3)使用期間方向為水平地;以及(b)流孔(22)具有平均水平間距P,其滿足下列關係:20≦P≦55,其中P單位為mm。According to a third aspect of the invention, the invention provides a non-contact bearing (3) for transporting a glass sheet (13) having a plurality of orifices (22) front end surface (20), front end surface (20) Facing the glass sheet (13) and the orifice (22), the liquid (40) is directed toward the main surface of the glass sheet (13) during use of the bearing (3), wherein: (a) the orifice (22) is distributed on the front end surface ( 20) to form at least one column (23, 24, 25) which is horizontal during use of the bearing (3); and (b) the orifice (22) has an average horizontal spacing P which satisfies the following relationship: 20 ≦ P≦55, where P is mm.

本發明上述各項簡單說明所使用之參考數目只作為方便讀者以及並不預期以及並不應該視為限制本發明之範圍。更特別地,人們了解先前一般說明以及下列詳細說明只是本發明之範例以及預期提供概念或架構以了解本發明之原理以及特性。The above description of the various embodiments of the present invention is intended to be a In particular, it is to be understood that the foregoing general description,

本發明其他特性及優點揭示於下列說明,以及部份可由說明清楚瞭解,或藉由實施下列說明以及申請專利範圍以及附圖而明瞭。所包含附圖在於提供更進一步瞭解本發明,以及在此加入作為發明說明書之一部份。附圖顯示出本發明不同的實施例及隨同詳細說明以解釋本發明之原理及操作。Other features and advantages of the invention will be apparent from the description and appended claims. The accompanying drawings are included to provide a further understanding of the invention and are incorporated herein as part of the description. The drawings illustrate various embodiments of the invention, and are in the

如以上所討論的,本發明提供以垂直或接近垂直方向運送玻璃片的非接觸,可用來射出液體的軸承。軸承射出(分配)液體(譬如水)到玻璃片主表面的一部份。射出的液體最好是水,雖然如果需要的話也可使用其他液體。液體可包括一種或以上的添加劑譬如殺生物劑以避免在使用回收水的情況下細菌孳生。As discussed above, the present invention provides a non-contact bearing that can be used to eject liquid in a vertical or nearly vertical direction. The bearing emits (distributes) a liquid (such as water) to a portion of the main surface of the glass sheet. The liquid to be ejected is preferably water, although other liquids may be used if desired. The liquid may include one or more additives such as biocides to avoid bacterial growth in the case of using recycled water.

玻璃片最好可適合用在平板顯示器譬如液晶顯示器的基板製造上。目前,平板顯示器製造商可提供的最大基板是Gen 10基板,尺寸是2850mmx3050mmx0.7mm。The glass sheet is preferably suitable for use in the manufacture of substrates for flat panel displays such as liquid crystal displays. Currently, the largest substrate available to flat panel display manufacturers is the Gen 10 substrate, which measures 2850mm x 3050mm x 0.7mm.

這裡描述的非接觸軸承可以和這種基板一起使用,也可以和未來發展的更大型基板,以及過去發展的較小型基板一起使用。The non-contact bearings described herein can be used with such substrates, as well as larger substrates for future development, as well as smaller substrates that have been developed in the past.

圖1顯示的是使用非接觸可用來射出液體的軸承3來運送玻璃片13的裝置10代表性實施範例。如圖中所示,軸承3陣列是由支撐31支撐。接著支撐再由平台49支撐,此平台包括腳輪7用來輸送裝置到製造工廠的不同定點。Figure 1 shows a representative embodiment of a device 10 for transporting a glass sheet 13 using a non-contact bearing 3 that can be used to eject liquid. As shown in the figure, the array of bearings 3 is supported by supports 31. The support is then supported by a platform 49 that includes casters 7 for transporting the device to different points of the manufacturing plant.

在任何特定應用使用的非接觸軸承個數以及各個軸承的長度都是根據所要運送玻璃片的大小而定,譬如在Gen 10基板的例子較佳的實施範例使用大約10個軸承,每個軸承長度約1.5公尺。當然也可依需要使用較多或較少的軸承,以及較長和較短的軸承。例如,假使 要運送的玻璃片是相對於橫向的直式定向就可使用較多的軸承。一般而言,當使用軸承陣列時,軸承最好有範圍在50-150公釐範圍的垂直高度,而軸承間垂直間隔最好在200-400公釐範圍。The number of non-contact bearings used in any particular application and the length of each bearing are based on the size of the glass piece to be transported. For example, in the preferred embodiment of the Gen 10 substrate, approximately 10 bearings are used, each bearing length. About 1.5 meters. Of course, more or fewer bearings can be used as needed, as well as longer and shorter bearings. For example, if The glass piece to be transported is a straight bearing with respect to the lateral direction to use more bearings. In general, when bearing arrays are used, the bearings preferably have a vertical height in the range of 50-150 mm, and the vertical spacing between the bearings is preferably in the range of 200-400 mm.

如圖1所示,支撐31可以在垂直方向固定軸承,或離垂直的某一角度譬如離垂直1-20度範圍的角度(如這裡使用的,"實質上垂直定位"一詞是指離垂直0到20度範圍之間的定位)。一般最好是垂直定位。As shown in Figure 1, the support 31 can be fixed in the vertical direction, or at an angle from vertical, such as from 1 to 20 degrees from vertical (as used herein, the term "substantially vertically positioned" refers to the vertical. Positioning between 0 and 20 degrees). It is generally best to position vertically.

如圖1所示,平台49包括像是V型或U型皮帶的運送帶2以嚙合玻璃片13的底部邊緣。例如,運送帶利用電動馬達(未顯示出)以所需的運送速度驅動玻璃片。運送速度是根據特定的應用而定。運送速度最好是等於或大於15公尺/分鐘。例如,運送速度可以是在15到22公尺/分鐘的範圍,雖說如果需要的話也可使用較慢的速度譬如降到7公尺/分鐘的速度。As shown in Figure 1, the platform 49 includes a conveyor belt 2 such as a V-shaped or U-shaped belt to engage the bottom edge of the glass sheet 13. For example, the conveyor belt drives the glass sheet at a desired transport speed using an electric motor (not shown). Shipping speed is based on the specific application. The transport speed is preferably equal to or greater than 15 meters per minute. For example, the transport speed can be in the range of 15 to 22 meters per minute, although slower speeds such as down to 7 meters per minute can be used if desired.

圖10顯示代表液體射出軸承3的前表面20(面對玻璃片的面)。如同圖中看到的,前表面包括多個流孔22在這個例子安排成三列23,24,25,每一列有相同數目的流孔,而且相鄰列的流孔是垂直對齊。而且在這個圖中,流孔有均勻的大小(即均勻的直徑D0)。這種安排在執行上是很成功的,但如果需要的話也可以使用很多種變化的安排。作為代表性的例子,液體射出軸承可包括大約三列的流孔,各個不同的列可以有不同個數的流孔,相鄰列的流孔可交錯排列而不是垂直對齊,因此流孔的大 小和有些或所有流孔間的水平間隔(間距)可以有不同的值。或者,流孔不一定需要是圓形的,在那種情況下流孔的大小不再是流孔的直徑,而是其最大橫截面的尺寸。Figure 10 shows the front surface 20 (the face facing the glass sheet) representing the liquid injection bearing 3. As seen in the figure, the front surface includes a plurality of orifices 22 arranged in this example into three columns 23, 24, 25, each column having the same number of orifices, and the orifices of adjacent columns being vertically aligned. Also in this figure, the orifices have a uniform size (i.e., a uniform diameter D0). This arrangement is very successful in implementation, but many different arrangements can be used if needed. As a representative example, the liquid injection bearing may include approximately three rows of orifices, each of which may have a different number of orifices, and the orifices of adjacent columns may be staggered rather than vertically aligned, thus the orifice is large The horizontal spacing (pitch) between small and some or all of the orifices can have different values. Alternatively, the orifice does not necessarily need to be circular, in which case the orifice size is no longer the diameter of the orifice but the size of its largest cross section.

在使用期間,軸承3的流孔連接到加壓的液體來源。例如可使用幫浦讓加壓液體從貯存器到充氣部將液體分配到各個流孔,譬如透過彈性管道連接到軸承背面流孔的入口端。各式各樣業界可取得的裝備是熟悉此項技術的人所知的可用來提供加壓的液體。或者,如果需要的話也可建構專屬的裝置。During use, the orifice of the bearing 3 is connected to a source of pressurized liquid. For example, a pump can be used to distribute the pressurized liquid from the reservoir to the plenum to distribute the liquid to the respective orifices, such as through an elastomeric conduit to the inlet end of the orifice at the back of the bearing. A wide variety of equipment available in the industry are known to those skilled in the art to provide pressurized liquid. Alternatively, a dedicated device can be constructed if needed.

可以只在玻璃片的一面使用非接觸的軸承(請見圖2的實線),也可以置放在玻璃片的兩面(請見圖2的實線和虛線),根據玻璃片所要執行的運作而定。在基板製造處理期間譬如切割成適當大小,玻璃片旋轉,玻璃片運送,玻璃片研磨和玻璃片沖洗步驟可使用軸承來支撐和運送玻璃片。這些使用軸承的例子和其他應用可在美國專利申請案公告US2007/0271756號看到,其內容在這裡也全部併入參考。Non-contact bearings can be used on only one side of the glass sheet (see solid line in Figure 2) or on both sides of the glass sheet (see solid and dashed lines in Figure 2), depending on the operation to be performed on the glass sheet. And set. During the substrate manufacturing process, such as cutting to an appropriate size, glass sheet rotation, glass sheet transport, glass sheet grinding and glass sheet rinsing steps, bearings can be used to support and transport the glass sheets. Examples of such use of bearings and other applications are described in U.S. Patent Application Publication No. US 2007/0271756, the disclosure of which is incorporated herein in its entirety.

在使用期間,從軸承射出的液體形成支撐玻璃片的薄膜,使其不會接觸軸承的正表面。更特別的是,軸承利用局部的加速流產生負壓,因而是一股吸力,在運送期間針對觸軸固定玻璃片。圖3到7說明了這個現象。During use, the liquid ejected from the bearing forms a film that supports the glass sheet so that it does not contact the front surface of the bearing. More specifically, the bearing utilizes a localized acceleration flow to create a negative pressure, and thus a suction force that secures the glass sheet for the touch shaft during transport. Figures 3 through 7 illustrate this phenomenon.

在這些圖中,100是高正壓地區(液體注入點),110是局部加速液體正切於玻璃表面產生的負壓地區,而120是周邊的低正壓地區。為了說明的目的,圖中顯示的正 負壓地區是以單一個流孔計算出而不含周圍的流孔。圖3到7每塊圖中顯示的區域是50mmx50mm。所執行的計算是使用業界可取得的流體動力學程式,售自ANSYS,Inc.(Canonsburg,PA)公司,商標為FLUENT。當然,也可使用其他非商業的程式來執行圖3到7的計算,以及這裡討論的其他計算。In these figures, 100 is a region of high positive pressure (liquid injection point), 110 is a region of negative pressure generated by locally accelerating liquid tangential to the surface of the glass, and 120 is a region of low positive pressure surrounding. For the purpose of illustration, the figure shows positive The negative pressure area is calculated from a single orifice without the surrounding orifice. The area shown in each of Figures 3 to 7 is 50 mm x 50 mm. The calculations performed were performed using an industry-available fluid dynamics program sold by ANSYS, Inc. (Canonsburg, PA) under the trademark FLUENT. Of course, other non-commercial programs can also be used to perform the calculations of Figures 3 through 7, as well as other calculations discussed herein.

圖3到7顯示正負壓分佈的各種組合:1)流孔的流出端和基板表面之間的間隔,和2)通過流孔的流速。表1提出所用的特定值,以及基板表面上的總整體壓力(總力)。正的總力意味著玻璃片被推離流孔(從軸承推開),而負的總力意味著玻璃片被推向流孔(吸引到軸承)。Figures 3 through 7 show various combinations of positive and negative pressure distributions: 1) the spacing between the outflow end of the orifice and the surface of the substrate, and 2) the flow rate through the orifice. Table 1 presents the specific values used, as well as the total overall pressure (total force) on the surface of the substrate. A positive total force means that the glass piece is pushed away from the orifice (pushing away from the bearing), while the negative total force means that the glass piece is pushed toward the orifice (attracted to the bearing).

如圖3到7和表1所示,各種流孔到基板間隔和流速的組合可達到正負淨力。尤其,這些資料顯示縮小的間隔可達到正力(推開力),而較大的間隔可達到負力(吸引力)。於是,在沒有被拖進或推離流孔的玻璃片可以找到一平衡點(平衡間隔)。如果流孔到玻璃片之間的間隔小於平衡間隔,玻璃片就會被推離流孔朝向平衡點。如果流孔到玻璃片之間的間隔大於平衡間隔,玻璃片就會被拖回流孔,朝向平衡點。以這種方式流孔到玻璃片之間的間隔就會在平衡間隔附近徘迴。As shown in Figures 3 through 7 and Table 1, the combination of various orifice to substrate spacing and flow rates achieves positive and negative net forces. In particular, these data show that the reduced interval can reach a positive force (push open force), while a larger interval can reach a negative force (attractive force). Thus, a balance point (equilibrium interval) can be found in the glass piece that has not been pulled in or pushed away from the orifice. If the spacing between the orifices and the glass sheets is less than the equilibrium spacing, the glass sheets are pushed away from the orifices toward the equilibrium point. If the spacing between the orifice and the glass sheet is greater than the equilibrium spacing, the glass piece will be dragged back to the equilibrium point. In this way, the spacing between the orifices and the glass sheets will be rounded off around the equilibrium interval.

尤其,當玻璃片運送越過流孔時,流孔到玻璃片之間的間隔就會徘迴在平衡間隔附近。這種運送會導致玻璃片和流孔之間的間隔隨著時間改變,這是由於1)移動玻璃片的振動,及/或2)玻璃片彎曲,波浪,翹曲,或其他 玻璃片的非平坦表面特性。因為藉由從流孔射出液體所施加到玻璃片的淨力會改變平衡點的符號,而流孔到玻璃片間隔的這些變化可藉由設定流孔參數來提供,包括液體的流速,產生平衡點的值以及平衡點兩邊的吸引/推離力,儘管流孔到玻璃片之間間隔不可避免的變化,可在軸承上固定玻璃片。In particular, as the glass sheet is transported across the orifice, the spacing between the orifice and the sheet of glass will wander around the equilibrium interval. This transport can cause the spacing between the glass sheet and the orifice to change over time due to 1) vibration of the moving glass sheet and/or 2) glass sheet bending, waves, warping, or other Non-flat surface characteristics of glass sheets. Because the net force applied to the glass sheet by ejecting liquid from the orifice changes the sign of the equilibrium point, and these variations in orifice-to-glass spacing can be provided by setting the orifice parameters, including the flow rate of the liquid, creating a balance The value of the point and the attraction/push off force on both sides of the balance point, although the inevitable change in the spacing between the flow hole and the glass piece, the glass piece can be fixed on the bearing.

圖3到7顯示單一流孔的資料。事實上,單一流孔不會產生足夠的力量在射出液體的軸承上固定移動的玻璃片。因而,可使用流孔陣列。大致而言,一般用在運送玻璃片的是射出液體的軸承的陣列,譬如彼此互相放置(請見圖1和圖2)的兩個或以上射出液體的軸承,尤其當玻璃片的大小增加時。每個射出液體的軸承有自己的流孔陣列,如果想要的話可以所有軸承都相同,也可以軸承之間不相同。Figures 3 through 7 show data for a single orifice. In fact, a single orifice does not generate enough force to hold the moving glass piece on the bearing that ejects the liquid. Thus, an array of orifices can be used. In general, generally used in the transport of glass sheets is an array of bearings that eject liquid, such as two or more liquid-emitting bearings placed one upon another (see Figures 1 and 2), especially when the size of the glass sheets increases. . Each fluid-emitting bearing has its own array of orifices, all of which can be identical if desired, or different between bearings.

我們發現玻璃片上流孔陣列的效應是實質上比單一流孔的效應複雜。同樣地,我們也發現射出液體的軸承陣列顯示比單一射出液體的軸承更複雜的行為。為了研究這些效應,我們使用圖8和圖9顯示的裝置型態來執行實驗。在這些圖中,13是玻璃片,2是玻璃片運送帶,3是射出液體的軸承,14是力量轉換器,15是位置感測器,18是轉換器/感測器支撐,17是轉換器和感測器的引線,而16是紀錄轉換器和感測器輸出的裝置。We have found that the effect of the array of orifices on the glass sheet is substantially more complex than the effect of a single orifice. Similarly, we have also found that bearing arrays that eject liquid exhibit more complex behavior than bearings that eject liquid. To investigate these effects, we performed the experiments using the device types shown in Figures 8 and 9. In these figures, 13 is a glass piece, 2 is a glass piece conveyor belt, 3 is a liquid-emitting bearing, 14 is a power converter, 15 is a position sensor, 18 is a converter/sensor support, 17 is a conversion And the leads of the sensor, while 16 is the device that records the converter and sensor output.

圖10顯示用來實驗的代表性射出液體的軸承3。除了軸承的結構,圖中也顯示在實驗期間改變的參數,亦即 平均間距參數P,在玻璃移動方向流孔之間圓心到圓心的平均間隔,和平均流孔大小參數,在這個例子,特別是流孔的平均直徑D0。Figure 10 shows a representative injection of liquid bearing 3 for experimentation. In addition to the structure of the bearing, the figure also shows the parameters that changed during the experiment, ie The average spacing parameter P, the average spacing from the center of the circle to the center of the orifice in the direction of movement of the glass, and the average orifice size parameter, in this example, in particular the average diameter D0 of the orifice.

圖11是施加到玻璃片以千帕(kPa)為單位的平均壓力圖以軸承流孔陣列的一個流孔對射出液體的軸承前表面和玻璃片之間以公釐(mm)為單位的間隔(或者說在流孔出口端和玻璃片之間,因為流孔出口端通常和軸承表面齊平)。在這個圖中以及圖12到14,正壓代表軸承和玻璃片之間的推離力,而負壓代表吸引力。這個圖的陰影線部分表示軸承的運作視窗,亦即使用軸承可以可靠執行玻璃片高速運送的壓力對間隔曲線部分。Figure 11 is an average pressure diagram applied to the glass sheet in kilopascals (kPa). The spacing between the front surface of the bearing and the glass sheet in one millimeter (mm) between one of the orifice pairs of the bearing orifice array (Or between the outlet end of the orifice and the glass piece, because the outlet end of the orifice is usually flush with the bearing surface). In this figure and in Figures 12 to 14, positive pressure represents the push-off force between the bearing and the glass sheet, while negative pressure represents the attractive force. The hatched portion of this figure represents the operating window of the bearing, that is, the use of bearings to reliably perform the pressure-to-space curve portion of the high speed transport of the glass sheet.

使用圖8和圖9顯示的裝置型態和圖10顯示的軸承型態可以廣泛範圍的參數決定壓力對間隔曲線。從這些實驗的結果,我們發現關鍵參數是:1)流孔之間的平均水平間距,2)平均流孔的大小,3)通過流孔的平均流速,在每一種情況,平均是指軸承所有流孔的平均。我們更進一步發現,這些參數特定範圍的值產生圖11中顯示的實際運作視窗型態。圖12,13,14分別顯示出說明此範圍平均水平間距,平均流孔大小,和平均流速的代表性資料。Using the device type shown in Figures 8 and 9 and the bearing pattern shown in Figure 10, the pressure versus spacing curve can be determined over a wide range of parameters. From the results of these experiments, we found that the key parameters are: 1) the average horizontal spacing between the orifices, 2) the average orifice size, and 3) the average flow rate through the orifice, in each case, the average refers to the bearing The average of the orifices. We have further found that the specific range of values of these parameters produces the actual operational window pattern shown in Figure 11. Figures 12, 13, and 14 show representative data illustrating the average horizontal spacing, average orifice size, and average flow rate for this range, respectively.

如圖12所示的15公釐平均水平間距(實心三角形資料點),在玻璃片驅近軸承表面時,在玻璃片上產生令人無法接受的大推離力。因此,由於吸引力不足以限制住玻璃片,玻璃片會容易飛離軸承。換句話說,65公釐的平 均水平節距(x資料點)會產生不足的推離力,在使用期間由於和軸承接觸,無法保證玻璃片不會受到傷害。The 15 mm average horizontal spacing (solid triangle data points) shown in Figure 12 produces an unacceptably large lift force on the glass sheet as the glass sheet is driven closer to the bearing surface. Therefore, since the attraction is not sufficient to limit the glass piece, the glass piece can easily fly away from the bearing. In other words, 65 mm flat The average horizontal pitch (x data point) will produce insufficient pushing force, and the glass piece will not be damaged due to contact with the bearing during use.

43公釐的平均水平間距(空心正方形資料點)和30毫米的平均水平間距(空心菱形資料點)都可產生所需的壓力對間隔曲線,30公釐的平均水平間距又比43公釐的好一些,這是因為30公釐間距推離壓力和至少一些吸引壓力的量比43公釐間距的還大。根據這些和類似的資料,決定了平均水平間距應該在20到55公釐的範圍,最好在25到50公釐的範圍,更好在30到40公釐的範圍(譬如大約35公釐),在每一種情況,端點的值也包括在範圍內。An average horizontal spacing of 43 mm (open square data points) and an average horizontal spacing of 30 mm (open diamond data points) all produce the required pressure versus spacing curve, with an average horizontal spacing of 30 mm and a diameter of 43 mm. Better, this is because the 30 mm pitch push-off pressure and at least some of the suction pressure are larger than the 43 mm pitch. Based on these and similar data, it is determined that the average horizontal spacing should be in the range of 20 to 55 mm, preferably in the range of 25 to 50 mm, more preferably in the range of 30 to 40 mm (for example, about 35 mm). In each case, the value of the endpoint is also included in the range.

圖13顯示的是平均流孔大小的參數。在這例子中,我們發現5公釐的平均流孔大小(實心三角形資料點)在小的軸承對玻璃片間隔產生太小的推離壓力,而0.5公釐的平均流孔大小(x資料點)則產生太大的推離壓力。Figure 13 shows the parameters for the average orifice size. In this example, we found that the average orifice size of 5 mm (solid triangle data points) produced too little push-off pressure on the glass spacer spacing for small bearings, and an average orifice size of 0.5 mm (x data points) ) produces too much push-off pressure.

3公釐的平均流孔大小(空心正方形資料點)和1.4公釐的平均流孔大小(空心菱形資料點)都可產生所需的壓力對間隔曲線,1.4公釐的平均流孔大小又比3公釐大小的好一些,這是因為1.4公釐的平均流孔大小推離壓力和吸引壓力的量比3公釐大小的還大。根據這些和類似的資料,決定了平均流孔大小應該在1.0到4.5公釐的範圍,最好在1.0到3.5公釐的範圍,更好在1.25到2.25公釐的範圍,在每一種情況,端點的值也包括在範圍內The average orifice size of 3 mm (open square data points) and the average orifice size of 1.4 mm (open diamond data points) all produce the required pressure-to-space curve, with an average orifice size of 1.4 mm. The size of 3 mm is better because the average orifice size of 1.4 mm is pushed away from the pressure and the amount of suction pressure is larger than 3 mm. Based on these and similar data, it is determined that the average orifice size should be in the range of 1.0 to 4.5 mm, preferably in the range of 1.0 to 3.5 mm, more preferably in the range of 1.25 to 2.25 mm, in each case, The value of the endpoint is also included in the range

圖14顯示的是平均流速。在這例子中,我們發現900 公釐/分鐘/流孔的平均流速(實心三角形資料點,14.3)在小的軸承對玻璃間隔產生太大的推離壓力,而80公釐/分鐘/流孔的平均流速(x資料點,14.4)則產生太小的推離壓力。Figure 14 shows the average flow rate. In this example, we found 900 The average flow rate per mm/min/flow orifice (solid triangle data points, 14.3) produces too much push-off pressure on the glass spacing in small bearings, and an average flow rate of 80 mm/min/flow orifice (x data points, 14.4) Produces too little push-off pressure.

350公釐/分鐘/流孔的平均流速(空心正方形資料點,14.2)和190公釐/分鐘/流孔的平均流速(空心菱形資料點,14.1)比350公釐/分鐘/流孔的平均流速好,這是因為較低的平均流速意味著較少的液體消耗,因此也意味著需要較小較便宜的裝置來供應液體。根據這些和類似的資料決定了平均流速應該在100到800公釐/分鐘/流孔平均流速的範圍,最好在125到300的範圍,更好在150到190的範圍,在每一種情況,端點的值也包括在範圍內。Average flow rate of 350 mm/min/flow orifice (open square data point, 14.2) and average flow rate of 190 mm/min/flow orifice (open diamond data point, 14.1) than 350 mm/min/flow orifice average The flow rate is good because the lower average flow rate means less liquid consumption and therefore means that a smaller, less expensive device is needed to supply the liquid. Based on these and similar data, the average flow rate should be in the range of 100 to 800 mm/min/average flow rate, preferably in the range of 125 to 300, more preferably in the range of 150 to 190, in each case, The value of the endpoint is also included in the range.

每種關鍵參數亦即平均水平間距,平均流孔大小,和平均流速都對系統提供有益於系統以及因而對一些應用,只有一種或兩種參數在以上的討論範圍。大致而言,平均流速參數是最重要的,接下來依序是水平間距,流孔大小之參數。Each of the key parameters, namely the average horizontal spacing, the average orifice size, and the average flow rate, are beneficial to the system and thus for some applications, only one or two parameters are discussed above. In general, the average flow rate parameter is the most important, followed by the horizontal spacing, the size of the orifice size.

在很多應用上,平均水平間距,平均流孔大小和平均流速最好都在以上指定的範圍,更好是在以上最好的範圍,再更好是在以上更好的範圍。在保持這種方式時,圖12,13,和14顯示的資料是其他兩個圖形"空心菱形"的參數值。因此,就圖12而言,平均流孔大小是1.4公釐,平均流速是190公釐/分鐘/流孔,而就圖13而言平 均水平間距是30公釐,平均流速是190公釐/分鐘/流孔,至於圖14平均水平間距是30公釐,平均流孔大小是1.4公釐。In many applications, the average horizontal spacing, average orifice size, and average flow rate are preferably within the ranges specified above, more preferably in the above preferred range, and even better in the above preferred range. While maintaining this mode, the data shown in Figures 12, 13, and 14 are the parameter values for the other two figures "open diamonds". Therefore, with respect to Figure 12, the average orifice size is 1.4 mm, and the average flow rate is 190 mm/min/runhole, while in Figure 13, it is flat. The average horizontal spacing is 30 mm and the average flow rate is 190 mm/min/via. As for Figure 14, the average horizontal spacing is 30 mm and the average orifice size is 1.4 mm.

除了平均水平間距,平均流孔大小和平均流速的參數,施加到玻璃片主表面的總力,亦即在整個主表面的壓力最好是在-0.6牛頓到+0.6牛頓的範圍內,這裡端點的值也包括在範圍內。當玻璃片和軸承之間的距離改變時,總力量也會隨時間改變,但最好保持在以上的範圍。總力量最好是一個測得的值,但也可以是使用流體動態學軟體做系統模擬所計算的值,譬如以上討論的FLUENT程式。總力量的範圍可以用來做為選擇流孔個數,大小,和流速時有用的參考。尤其當選擇流孔流速時,最好是選擇產生負壓但以系統其他參數(譬如總流孔個數,流孔間隔和流孔大小)來看,不會過度的速率,亦即最好是總力量小於或等於上述範圍的上限。In addition to the average horizontal spacing, average orifice size and average flow rate parameters, the total force applied to the major surface of the glass sheet, that is, the pressure across the major surface is preferably in the range of -0.6 Newtons to +0.6 Newtons. The value of the point is also included in the range. When the distance between the glass sheet and the bearing changes, the total force also changes over time, but it is best to remain in the above range. The total force is preferably a measured value, but it can also be a value calculated using a fluid dynamics software for system simulation, such as the FLUENT program discussed above. The total force range can be used as a useful reference for selecting the number, size, and flow rate of the orifice. Especially when selecting the flow rate of the orifice, it is better to choose to generate negative pressure, but in terms of other parameters of the system (such as the total number of orifices, orifice spacing and orifice size), there is no excessive rate, that is, preferably The total force is less than or equal to the upper limit of the above range.

我們發現上述範圍的平均水平間距,平均流孔大小,和平均流速在玻璃片和軸承前表面之間的間隔中以控制的變化量提供有效的玻璃片運送。尤其,當非接觸射出液體的軸承有100-800毫升/分鐘流孔範圍的平均流速,1.0-4.5毫米範圍的平均流孔大小,和20到55公釐範圍的平均水平間距,以15公尺/分鐘的運送速度來測試,使用的玻璃模數是73GPa為度是2公尺長,2公尺高,0.7公釐厚,在軸承前表面上的所有點,玻璃片和軸承前表面之間的時間平均間隔範圍是在500-1000微米,而軸 承前表面上的所有點,時間平均尖峰到尖峰間隔的變化不超過100微米。這種相對於平均間隔的小變化意味著不可忽略在玻璃運送期間,玻璃片任何部份接觸軸承的可能性。也意味著不可忽略玻璃片變成和軸承脫離的可能性。We have found that the average horizontal spacing, average orifice size, and average flow rate for the above ranges provide effective glass sheet transport with controlled variations in the spacing between the glass sheet and the bearing front surface. In particular, when the non-contact liquid-emitting bearing has an average flow rate in the range of 100-800 ml/min orifice, an average orifice size in the range of 1.0-4.5 mm, and an average horizontal spacing in the range of 20 to 55 mm, at 15 m. /min transport speed to test, the glass modulus used is 73GPa is 2 meters long, 2 meters high, 0.7 mm thick, at all points on the front surface of the bearing, between the glass piece and the front surface of the bearing The average time interval is in the range of 500-1000 microns, while the axis For all points on the front surface, the time-average peak-to-spike interval does not vary by more than 100 microns. This small change from the average spacing means that the possibility of any part of the glass sheet contacting the bearing during glass transport cannot be ignored. It also means that the possibility of the glass sheet becoming detached from the bearing cannot be ignored.

如以上註明的,當使用越多流孔時,情況會變的越複雜,而且當使用流孔陣列時,情況也會變的越複雜。圖15和16顯示我們發現的軸承之間交互作用。As noted above, the more complex the orifice is used, the more complex the situation becomes, and the more complex the situation becomes when using a orifice array. Figures 15 and 16 show the interactions between the bearings we found.

在圖15中,3個軸承3U,3M和3L對著玻璃片13射出液體40。如箭頭41所示,事實上從軸承3U射出的液體,會和從軸承3M射出的液體交互作用,而從軸承3M射出的液體(以及一些從軸承3U射出的液體)會和從軸承3L射出的液體交互作用。尤其,我們發現當這3個軸承是相同的流速時,玻璃片13和軸承前表面之間的間隔在軸承3M和軸承3L中是大於軸承3U,其中軸承3L的間隔是最大的。(請記得因為玻璃片13很薄,因此是高彈性的,所以雖然軸承3U,3M和3L可垂直對齊,但玻璃片的下方部分還是可能屈曲離開軸承3M和軸承3L產生較大的間隔)。In Fig. 15, three bearings 3U, 3M and 3L project liquid 40 against the glass sheet 13. As indicated by the arrow 41, in fact, the liquid ejected from the bearing 3U interacts with the liquid ejected from the bearing 3M, and the liquid ejected from the bearing 3M (and some of the liquid ejected from the bearing 3U) and the ejected from the bearing 3L. Liquid interaction. In particular, we have found that when the three bearings are of the same flow rate, the spacing between the glass sheet 13 and the front surface of the bearing is greater than the bearing 3U in the bearing 3M and the bearing 3L, wherein the spacing of the bearings 3L is the largest. (Remember that since the glass piece 13 is very thin, it is highly elastic, so although the bearings 3U, 3M and 3L can be vertically aligned, the lower portion of the glass piece may still be bent away from the bearing 3M and the bearing 3L to produce a larger interval).

圖16是量化兩個軸承的系統,譬如圖15的軸承3M和3L。圖16的水平軸顯示通過軸承3L的平均流速,而垂直軸則畫出軸承3L前表面和玻璃片之間的間隔。實心菱形資料點顯示流經軸承3L的零間隔,也就是說F M=0。如圖所示,到玻璃片的間隔會隨著通過軸承3L的平 均流速增加而增加。Figure 16 is a system for quantifying two bearings, such as bearings 3M and 3L of Figure 15. The horizontal axis of Figure 16 shows the average flow rate through the bearing 3L, while the vertical axis shows the spacing between the front surface of the bearing 3L and the glass sheet. The solid diamond data points show the zero interval through the bearing 3L, that is to say F M=0. As shown, the spacing to the glass piece will follow the level of the bearing 3L. The average flow rate increases and increases.

空心菱形資料點顯示通過軸承3M的200公釐/分鐘/流孔的平均流速效應。更者,軸承3L和玻璃片之間的間隔會隨著通過軸承3L的平均流速而增加,但所有的值現在則是向上移到較大的間隔。據此,為了維持玻璃片和軸承陣列中所有軸承之間相等的間隔,軸承的運作參數及/或物理性質就必須是不同的。尤其,軸承的運作參數及/或物理性質就必須是不同的,以使下方軸承射出液體的量小於上方軸承射出液體的量。這可以各種方式達成。The open diamond data points show the average flow rate effect through the bearing 3M of 200 mm/min/flow. Moreover, the spacing between the bearing 3L and the glass sheet increases with the average flow rate through the bearing 3L, but all values now move up to a larger interval. Accordingly, in order to maintain an equal spacing between all of the bearings in the glass sheet and the bearing array, the operational parameters and/or physical properties of the bearings must be different. In particular, the operational parameters and/or physical properties of the bearings must be different so that the amount of liquid exiting the lower bearing is less than the amount of liquid ejected from the upper bearing. This can be done in a variety of ways.

例如,可降低下方軸承的平均液體流速。舉例而言,通過軸承3M的200公釐/分鐘/流孔的平均流速,和通過軸承3L的150公釐/分鐘/流孔的平均流速加起來就可在軸承3L和玻璃片之間產生實質上相同的間隔作為單獨通過軸承3L的250公釐/分鐘/流孔的平均流速。同樣的資料也可在3個或以上使用的軸承中產生,降低通過下方軸承的平均流速,在所有軸承中產生軸承到玻璃片相當均勻的間隔。(請注意,在有些應用中,最好是有不相同的間隔,依據本項說明,這可藉由調整不同軸承的平均流速來達成。)For example, the average liquid flow rate of the lower bearing can be reduced. For example, the average flow rate through the bearing 3M of 200 mm / min / orifice, and the average flow rate through the bearing 3L of 150 mm / min / orifice can add up to the essence between the bearing 3L and the glass piece The same interval is taken as the average flow rate of 250 mm/min/flow through the bearing 3L alone. The same information can be generated in three or more bearings, reducing the average flow rate through the lower bearing, resulting in a fairly uniform spacing of the bearing to the glass in all bearings. (Note that in some applications it is best to have different spacings, which can be achieved by adjusting the average flow rate of the different bearings according to this instruction.)

作為使用不同流速的另一種選擇,軸承的物理性質可以是不同的。例如,下方軸承的平均水平間距可以做的比上方軸承的大,及/或平均流孔大小可以做的比較小。 在很多應用中,物理性質的方式比流速的方式好,因為可避免透過各個軸承個別控制/監控液體流的需要。As an alternative to using different flow rates, the physical properties of the bearings can be different. For example, the average horizontal spacing of the lower bearings can be made larger than the upper bearing, and/or the average orifice size can be made smaller. In many applications, the physical properties are better than the flow rate because the need to individually control/monitor the flow of liquid through each bearing can be avoided.

從以上我們可看到,所提供射出液體的軸承可成功地以高速,譬如15公尺/分鐘和以上的速度,運送彈性玻璃片,譬如LCD基板。為了達成這個結果,軸承的運作參數和物理性質要滿足一項,最好是全部下列的條件:(a)軸承流孔的平均流速是在100-800公釐/分鐘/流孔的範圍;(b)流孔的平均水平間距是在20-55公釐的範圍;(c)流孔的平均尺寸是在1.0-4.5公釐的範圍。藉由這些條件,在以15公尺/分鐘速度通過的LCD基板和射出液體的軸承面之間間隔的時間平均尖峰到尖峰的變化就可減少到小於100微米,因此降低軸承無法控制基板或基板撞到軸承的機會。From the above we can see that the supplied liquid bearing can successfully transport flexible glass sheets, such as LCD substrates, at high speeds, such as 15 meters per minute and above. In order to achieve this result, the operating parameters and physical properties of the bearing are to be satisfied, preferably all of the following conditions: (a) the average flow velocity of the bearing orifice is in the range of 100-800 mm / min / orifice; b) The average horizontal spacing of the orifices is in the range of 20-55 mm; (c) the average size of the orifices is in the range of 1.0-4.5 mm. With these conditions, the time-averaged peak-to-peak variation between the LCD substrate passing through at a speed of 15 meters per minute and the bearing surface of the liquid exiting can be reduced to less than 100 microns, thus reducing the bearing's inability to control the substrate or substrate. The chance of hitting the bearing.

本發明上述所說明實施例能夠作許多變化及改變而並不會脫離本發明之精神及原理。預期所有這些改變及變化包含於所揭示範圍內以及本發明受到下列申請專利範圍保護。The above-described embodiments of the present invention are capable of many changes and modifications without departing from the spirit and scope of the invention. All such changes and modifications are intended to be included within the scope of the disclosure and the invention is protected by the following claims.

例如下列各項之任何一項或多項可具體實施於本發明 之中。For example, any one or more of the following items may be specifically implemented in the present invention. Among them.

項目1:一種以實質上垂直的方向運送玻璃片的方法,該方法包括:(a)提供可移動的運送帶,其設計用來接觸玻璃片的邊緣並以運送速度移動玻璃片;(b)提供非接觸的軸承,其設計用來射出液體到玻璃片主表面的一部份;和(c)以移動的運送帶接觸玻璃片的邊緣以運送速度移動玻璃片,一方面從非接觸的軸承射出液體到玻璃片主表面的一部份;其中非接觸的軸承包括多個流孔,射出液體到玻璃片主表面的一部份,而此方法至少具有下列一種特性:(i)從非接觸的軸承射出液體的速度在流孔上的平均值範圍是100-800毫升/分鐘/流孔;或(ii)流孔的平均水平間距範圍是20-25公釐;或(iii)流孔的平均尺寸在1.0-4.5公釐範圍。Item 1: A method of transporting a glass sheet in a substantially vertical direction, the method comprising: (a) providing a movable transport belt designed to contact an edge of the glass sheet and moving the glass sheet at a transport speed; (b) Providing a non-contact bearing designed to eject liquid to a portion of the major surface of the glass sheet; and (c) moving the glass sheet at a transport speed by contacting the edge of the glass sheet with a moving conveyor belt, on the one hand from a non-contact bearing Ejecting a portion of the liquid onto a major surface of the glass sheet; wherein the non-contacting bearing includes a plurality of orifices for ejecting liquid to a portion of the major surface of the glass sheet, and the method has at least one of the following characteristics: (i) from non-contact The average speed of the bearing to eject the liquid in the orifice is in the range of 100-800 ml / min / orifice; or (ii) the average horizontal spacing of the orifice is in the range of 20-25 mm; or (iii) the orifice The average size is in the range of 1.0-4.5 mm.

項目2:項目1之方法,其中方法具有特徵(i)。Item 2: The method of item 1, wherein the method has the feature (i).

項目3:項目2之方法,其中液體由非接觸軸承射出於流孔上平均流量在125-300毫升/分鐘/流孔。Item 3: The method of item 2, wherein the liquid is sprayed by the non-contact bearing out of the orifice with an average flow rate of 125-300 ml/min/flow.

項目4:項目2之方法,其中液體由非接觸軸承射出於流孔上平均流量在150-190毫升/分鐘/流孔。Item 4: The method of item 2, wherein the liquid is sprayed by the non-contact bearing out of the orifice at an average flow rate of 150-190 ml/min/flow.

項目5:項目1-4之任何一項方法,其中方法具有特徵(ii)。Item 5: The method of any of items 1-4, wherein the method has the feature (ii).

項目6:項目5之方法,其中流孔平均水平間距在25-50毫米範圍內。Item 6: The method of item 5, wherein the average horizontal spacing of the orifices is in the range of 25-50 mm.

項目7:項目5之方法,其中流孔平均水平間距在30-40毫米範圍內。Item 7: The method of item 5, wherein the average horizontal spacing of the orifices is in the range of 30-40 mm.

項目8:項目1-7之任何一項方法,其中方法具有特徵(iii)。Item 8: The method of any of items 1-7, wherein the method has the feature (iii).

項目9:項目8之方法,其中流孔平均尺寸在1.0-3.5毫米範圍內。Item 9: The method of item 8, wherein the average orifice size is in the range of 1.0 to 3.5 mm.

項目10:項目8之方法,其中流孔平均尺寸在1.25-2.25毫米範圍內。Item 10: The method of item 8, wherein the average orifice size is in the range of 1.25-2.25 mm.

項目11:項目1-10之任何一項方法,其中方法具有特徵(i)及(ii)。Item 11: Any of the methods of item 1-10, wherein the method has features (i) and (ii).

項目12:項目1-10之任何一項方法,其中方法具有特徵(i)及(iii)。Item 12: Any of the methods of item 1-10, wherein the method has features (i) and (iii).

項目13:項目1-10之任何一項方法,其中方法具有特徵(i),(ii)及(iii)。Item 13: The method of any of items 1-10, wherein the method has characteristics (i), (ii) and (iii).

項目14:項目1-13之任何一項方法,其中方法更進一步具有下列特徵:施加於片狀物主要表面之總力量在-0.6牛頓至+0.6牛頓範圍內。Item 14. The method of any of items 1-13, wherein the method further has the feature that the total force applied to the major surface of the sheet ranges from -0.6 Newtons to +0.6 Newtons.

項目15:項目1-14之任何一項方法,其中方法更進一步具有下列特徵:當運送模數為73GPa以及尺寸為2米長,2米高,及0.7mm厚之玻璃片時,對於運送速度等於15米/分鐘在前端面上所有點處軸承前端面與運送玻璃片間之時間平均間隔為500-1000微米以及在前端面上所有點處間隔之時間平均尖峰至尖峰變化並不大於100微米。Item 15: The method of any of items 1-14, wherein the method further has the following characteristics: when the transport modulus is 73 GPa and the size is 2 m long, 2 m high, and 0.7 mm thick glass, the transport speed is equal to At 15 m/min, the average time between the front end face of the bearing and the transport glass at all points on the front face is 500-1000 microns and the average peak-to-spike variation at all points on the front face is no more than 100 microns.

項目16:以實質上垂直的方向運送玻璃片的方法,其包括:(a)提供可移動的運送帶,設計用來接觸玻璃片的 邊緣以及以運送速度移動玻璃片;(b)射出液體到玻璃片主表面的上端部份;和(c)射出液體到玻璃片主表面的下端部份;以及其中:(i)上端部份為垂直地位於下端部份上方;和(ii)每單位時間射出到上端部份的液體量超過每單位時間射出到下端部份的液體量。Item 16: A method of transporting a glass sheet in a substantially vertical direction, comprising: (a) providing a movable transport belt designed to contact the glass sheet Edge and moving the glass sheet at a transport speed; (b) ejecting the liquid to the upper end portion of the main surface of the glass sheet; and (c) ejecting the liquid to the lower end portion of the main surface of the glass sheet; and wherein: (i) the upper end portion is Vertically above the lower end portion; and (ii) the amount of liquid that is ejected to the upper end portion per unit time exceeds the amount of liquid that is ejected to the lower end portion per unit time.

項目17:項目16之方法,其中:(a)液體使用上端非接觸軸承射出到上端部份,其包含平均水平間距P U多個流孔;(b)液體使用下端非接觸軸承射出到下端部份,其包含平均水平間距P L多個流孔;以及(c)P U及P L滿足下列關係:P L>P U。Item 17: The method of item 16, wherein: (a) the liquid is sprayed to the upper end portion using the upper end non-contact bearing, and includes a plurality of orifices having an average horizontal spacing PU; (b) the liquid is injected to the lower end portion using the lower end non-contact bearing , which includes a plurality of orifices with an average horizontal spacing PL; and (c) PU and PL satisfy the following relationship: PL>PU.

項目18:項目17之方法,其中:上端非接觸軸承以及下端非接觸軸承為非接觸軸承陣列之任何兩個相鄰構件。Item 18. The method of item 17, wherein: the upper non-contact bearing and the lower non-contact bearing are any two adjacent members of the non-contact bearing array.

項目19:一種使用於運送玻璃片之非接觸軸承,其具有多個流孔之前端表面,前端表面面對玻璃片以及流孔射出液體朝向玻璃片之主要表面於使用軸承期間,其中:(a)流孔分佈於前端表面上以形成至少一列,其在軸承使用期間方向為水平地;以及(b)流孔具有平均水平間距P,其滿足下列關係:20≦P≦55,其中P單位為mm。Item 19: A non-contact bearing for transporting a glass sheet having a plurality of orifice front end surfaces, the front end surface facing the glass sheet and the orifice exposing the liquid toward the main surface of the glass sheet during use of the bearing, wherein: The orifices are distributed on the front end surface to form at least one column that is horizontal during use of the bearing; and (b) the orifice has an average horizontal spacing P that satisfies the following relationship: 20 ≦ P ≦ 55, where P units are Mm.

項目20:項目19之非接觸軸承,其中流孔具有平均尺寸在1.0-4.5mm範圍內。Item 20: The non-contact bearing of item 19, wherein the orifice has an average size in the range of 1.0-4.5 mm.

2‧‧‧運送帶2‧‧‧Transportation belt

3‧‧‧軸承3‧‧‧ Bearing

7‧‧‧腳輪7‧‧‧ casters

10‧‧‧裝置10‧‧‧ device

13‧‧‧玻璃片13‧‧‧Stainless glass

14‧‧‧力量轉換器14‧‧‧Power Converter

15‧‧‧位置感測器15‧‧‧ position sensor

16‧‧‧輸出裝置16‧‧‧Output device

17‧‧‧引線17‧‧‧ lead

18‧‧‧支撐18‧‧‧Support

20‧‧‧前表面20‧‧‧ front surface

22‧‧‧流孔22‧‧‧Rout

23,24,25‧‧‧流孔列23,24,25‧‧‧Routing columns

31‧‧‧支撐31‧‧‧Support

40‧‧‧液體40‧‧‧Liquid

41‧‧‧箭頭41‧‧‧ arrow

49‧‧‧平台49‧‧‧ platform

100‧‧‧高正壓地區100‧‧‧High positive pressure area

110‧‧‧負壓地區110‧‧‧negative pressure area

120‧‧‧低正壓地區120‧‧‧Low positive pressure area

圖1及2為玻璃片傳送裝置之示意圖,其採用一個陣列非接觸射出液體軸承。圖1為前視圖以及圖2為側視圖。1 and 2 are schematic views of a glass sheet transfer apparatus employing an array of non-contact injection liquid bearings. 1 is a front view and FIG. 2 is a side view.

圖3至圖7顯示出各種流孔至玻璃片間距以及液體流量藉由液體流出流孔玻璃片上產生壓力分佈之計算曲線圖。表1揭示出圖3至圖3使用特定參數。Figures 3 through 7 show a graph of the calculation of the pressure distribution across the glass sheets from the flow of the orifices and the flow of liquid through the liquid orifice. Table 1 reveals that Figures 3 through 3 use specific parameters.

圖8和圖9是使用非接觸射出液體的軸承來運送玻璃片的裝置示意圖用以測試各種參數的效應。圖8為前視圖以及圖9為側視圖。Figures 8 and 9 are schematic views of a device for transporting a glass sheet using a non-contact injection liquid bearing to test the effects of various parameters. Figure 8 is a front view and Figure 9 is a side view.

圖10顯示出非接觸射出液體軸承之前表面。Figure 10 shows the surface before the non-contact injection of the liquid bearing.

圖11是在玻璃片和非接觸射出液體的軸承(x軸)前表面之間,玻璃片(y軸)表面以千帕(kPa)為單位的壓力/流孔對以公釐(mm)為單位的間隔圖。這個圖的陰影線部分顯示軸承的運作視窗。Figure 11 is a pressure/flow hole pair in millimeters (kPa) of the glass sheet (y-axis) surface between the glass sheet and the front surface of the non-contact liquid-emitting bearing (x-axis). The interval diagram of the unit. The hatched portion of this figure shows the operating window of the bearing.

圖12是在玻璃片和非接觸射出液體的軸承(x軸)前表面之間,玻璃片(y軸)表面以千帕(kPa)為單位的壓力/流孔對以公釐(mm)為單位的間隔圖表,平均水平間距是15,30,43和65公釐。Figure 12 is a pressure/flow orifice pair in millimeters (kPa) between the glass sheet and the front surface of the non-contact liquid-emitting bearing (x-axis). The interval chart for the unit, the average horizontal spacing is 15, 30, 43 and 65 mm.

圖13是在玻璃片和非接觸射出液體的軸承(x軸)前表面之間,玻璃片(y軸)表面以千帕(kPa)為單位的壓力/流孔對以公釐(mm)為單位的間隔圖表,平均流孔尺寸是0.5,1.4,3.0以及5.0mm。Figure 13 is a pressure/flow orifice pair in millimeters (kPa) of the surface of the glass sheet (y-axis) between the glass sheet and the non-contact liquid-emitting bearing (x-axis). The interval chart for the unit, the average orifice size is 0.5, 1.4, 3.0 and 5.0 mm.

圖14是在玻璃片和非接觸射出液體的軸承(x軸)前表面之間,玻璃片(y軸)表面以千帕(kPa)為單位的壓力/流孔對以公釐(mm)為單位的間隔圖表,平均流速是80,190,350和900公釐/分鐘/流孔。Figure 14 is a pressure/flow hole pair in millimeters (kPa) of the glass sheet (y-axis) surface between the glass sheet and the front surface of the non-contact liquid-emitting bearing (x-axis). The interval chart for the unit, the average flow rate is 80, 190, 350 and 900 mm / min / orifice.

圖15是顯示非接觸射出液體的軸承陣列的各個軸承之間交互作用的示意圖。Figure 15 is a schematic view showing the interaction between the respective bearings of the bearing array of the non-contact ejection liquid.

圖16是以零和200公釐/分鐘/流孔通過兩個軸承上方軸承的平均流速,在玻璃片和非接觸射出液體的軸承(y軸)前表面之間以公釐(mm)為單位的間隔對通過兩個非接觸射出液體的軸承(x軸)的下方軸承以公釐/分鐘/流孔為單位平均流速的圖。Figure 16 is the average flow rate through the bearings above the two bearings at zero and 200 mm/min/flow, in millimeters (mm) between the glass sheet and the front surface of the non-contact liquid-emitting bearing (y-axis) The interval is the average flow rate in mm/min/perforation of the lower bearing through the two non-contacting liquid-emitting bearings (x-axis).

2‧‧‧運送帶2‧‧‧Transportation belt

3‧‧‧軸承3‧‧‧ Bearing

13‧‧‧玻璃片13‧‧‧Stainless glass

14‧‧‧力量轉換器14‧‧‧Power Converter

15‧‧‧位置感測器15‧‧‧ position sensor

16‧‧‧輸出裝置16‧‧‧Output device

17‧‧‧引線17‧‧‧ lead

18‧‧‧支撐18‧‧‧Support

Claims (2)

一種用以運送一玻璃片之非接觸的軸承,包括一前端面,該前端面具有多個流孔,於使用該軸承期間,該前端面面向該玻璃片且該些流孔朝該玻璃面之一主表面射出液體,其中:(a)該些流孔係分布於該前端面上,以於使用該軸承期間形成水平取向之至少一排;以及(b)該些流孔具有一平均水平間距P,該平均水平間距P滿足下列關係:20≦P≦55,其中P之單位為mm。A non-contact bearing for transporting a glass sheet, comprising a front end surface having a plurality of flow holes, the front end surface facing the glass sheet and the flow holes facing the glass surface during use of the bearing a major surface ejecting liquid, wherein: (a) the orifices are distributed on the front end surface to form at least one row of horizontal orientation during use of the bearing; and (b) the orifices have an average horizontal spacing P, the average horizontal pitch P satisfies the following relationship: 20 ≦ P ≦ 55, where P is in mm. 依據申請專利範圍第1項之非接觸的軸承,其中該些流孔具有範圍為1.0-4.5 mm的一平均尺寸。A non-contact bearing according to the first aspect of the patent application, wherein the orifices have an average size ranging from 1.0 to 4.5 mm.
TW101129567A 2009-04-23 2009-09-29 Liquid-ejecting bearings for transport of glass sheets TWI472467B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US12/428,672 US8047354B2 (en) 2008-09-26 2009-04-23 Liquid-ejecting bearings for transport of glass sheets

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Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3734567A (en) * 1971-01-25 1973-05-22 Bangor Punta Operations Inc Air conveyor for flat thin articles
US20050011229A1 (en) * 2002-12-05 2005-01-20 Peter Lisec Device for securing material plates, such as glass sheets, during the working thereof

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7077019B2 (en) * 2003-08-08 2006-07-18 Photon Dynamics, Inc. High precision gas bearing split-axis stage for transport and constraint of large flat flexible media during processing
JP4629007B2 (en) * 2006-08-08 2011-02-09 株式会社日本設計工業 Air plate for sheet material conveyance and sheet material conveyance device
JP4753313B2 (en) * 2006-12-27 2011-08-24 東京エレクトロン株式会社 Substrate processing equipment

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3734567A (en) * 1971-01-25 1973-05-22 Bangor Punta Operations Inc Air conveyor for flat thin articles
US20050011229A1 (en) * 2002-12-05 2005-01-20 Peter Lisec Device for securing material plates, such as glass sheets, during the working thereof

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TW201038459A (en) 2010-11-01
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