TWI339639B - - Google Patents

Info

Publication number
TWI339639B
TWI339639B TW096125253A TW96125253A TWI339639B TW I339639 B TWI339639 B TW I339639B TW 096125253 A TW096125253 A TW 096125253A TW 96125253 A TW96125253 A TW 96125253A TW I339639 B TWI339639 B TW I339639B
Authority
TW
Taiwan
Application number
TW096125253A
Other languages
Chinese (zh)
Other versions
TW200840785A (en
Inventor
Noriyuki Nagura
Tsutomu Matsushita
Setsuji Yumiba
Shigemi Chiba
Original Assignee
Nihon Sekkei Kogyo Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Sekkei Kogyo Co Ltd filed Critical Nihon Sekkei Kogyo Co Ltd
Publication of TW200840785A publication Critical patent/TW200840785A/en
Application granted granted Critical
Publication of TWI339639B publication Critical patent/TWI339639B/zh

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
    • B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
    • B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/04—Arrangements of vacuum systems or suction cups
    • B65G2249/045—Details of suction cups suction cups
TW096125253A 2007-04-10 2007-07-11 Sheet material conveying device and method TW200840785A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007102595A JP2008260591A (en) 2007-04-10 2007-04-10 Sheet-like material conveying device and method

Publications (2)

Publication Number Publication Date
TW200840785A TW200840785A (en) 2008-10-16
TWI339639B true TWI339639B (en) 2011-04-01

Family

ID=39983368

Family Applications (1)

Application Number Title Priority Date Filing Date
TW096125253A TW200840785A (en) 2007-04-10 2007-07-11 Sheet material conveying device and method

Country Status (4)

Country Link
JP (1) JP2008260591A (en)
KR (1) KR100900381B1 (en)
CN (1) CN101284602A (en)
TW (1) TW200840785A (en)

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010232472A (en) * 2009-03-27 2010-10-14 Dainippon Screen Mfg Co Ltd Substrate transfer device and substrate processing apparatus
TWI449653B (en) * 2009-04-03 2014-08-21 Oiles Industry Co Ltd Non - contact delivery device
FI126760B (en) * 2010-01-11 2017-05-15 Glaston Services Ltd Oy Method and apparatus for supporting and heating glass sheets with a hot gas pad
JP5081261B2 (en) * 2010-02-24 2012-11-28 東京エレクトロン株式会社 Coating device
JP5604940B2 (en) * 2010-03-31 2014-10-15 株式会社Ｉｈｉ Levitation transfer device
JP5088591B2 (en) * 2010-04-15 2012-12-05 株式会社ダイフク Plate-shaped body transfer device
TW201207250A (en) * 2010-04-30 2012-02-16 Tae Sung Eng Co Ltd Air supplying apparatus
JP5615164B2 (en) * 2010-12-27 2014-10-29 テソン エンジニアリング カンパニー リミテッド Air supply device
JP5485928B2 (en) * 2011-03-09 2014-05-07 東京エレクトロン株式会社 Substrate floating transfer device and substrate processing apparatus
KR101330820B1 (en) * 2012-01-16 2013-11-15 주식회사 태성기연 Apparatus for transferring of glass panel
JP5486030B2 (en) * 2012-02-15 2014-05-07 東京エレクトロン株式会社 Coating device
KR101187006B1 (en) * 2012-04-24 2012-09-28 이재성 Noncontact conveying plate for large area panel
CN104245547B (en) * 2012-04-26 2016-07-27 株式会社Ihi Conveyer device
JP5915358B2 (en) * 2012-04-26 2016-05-11 株式会社Ihi Transport device
JP6033593B2 (en) * 2012-07-18 2016-11-30 東レエンジニアリング株式会社 Substrate transfer device
WO2014132339A1 (en) * 2013-02-26 2014-09-04 株式会社Ihi Transfer apparatus
JP2016161007A (en) 2015-02-27 2016-09-05 株式会社日本製鋼所 Gas flotation workpiece support device and non-contact workpiece support method
JP6605871B2 (en) * 2015-08-03 2019-11-13 東レエンジニアリング株式会社 Substrate floating transfer device
CN106005877A (en) * 2016-06-08 2016-10-12 宜兴市富胜机械有限公司 Air blowing and sucking conveying device of material receiving machine
CN106185325A (en) * 2016-08-25 2016-12-07 芜湖东旭光电科技有限公司 A kind of air-floating apparatus, air supporting control method and glass substrate conveying device
CN108423465A (en) * 2018-06-04 2018-08-21 广东顺德华焯机械科技有限公司 A kind of LED light strip slitting equipment
JP7171360B2 (en) * 2018-10-19 2022-11-15 伸和コントロールズ株式会社 AIR CONDITIONING DEVICE, SUBSTRATE FLOATING TRANSFER UNIT INCLUDING AIR CONDITIONING DEVICE, AND SUBSTRATE FLOATING TRANSFER AIR SUPPLY METHOD
CN112959741A (en) * 2021-03-04 2021-06-15 涡阳县利达塑料包装制品有限公司 Reliable and stable plastic woven bag conveying device
CN114014015B (en) * 2021-11-16 2022-09-06 秦皇岛玻璃工业研究设计院有限公司 Conveying line and conveying method for sheet glass cold end production

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI226303B (en) * 2002-04-18 2005-01-11 Olympus Corp Substrate carrying device
KR100523039B1 (en) * 2003-11-11 2005-10-24 삼성전자주식회사 Substrate conveyor

Also Published As

Publication number Publication date
TW200840785A (en) 2008-10-16
KR20080092213A (en) 2008-10-15
CN101284602A (en) 2008-10-15
JP2008260591A (en) 2008-10-30
KR100900381B1 (en) 2009-06-02

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