200410887 (1) 玖、發明說明 【發明所屬之技術領域】 本發明有關於液晶顯示（L C D )面板、電獎顯示面板 (PDP )等之使用於平面板顯示之大型且薄之玻璃基板、 裝飾用金屬薄板、金屬箔上層疊高分子薄膜之層疊材等之 大型薄板材之搬送方法及裝置。 【先前技術】 大型之L C D用玻璃基板係尺寸有，例如7 5 0 m m χ 9 5 0mm厚度爲0.7mm、與大小相比薄度非常薄，在最近之 將來可能再大型化到 ]2 0 0 m m χ 1 5 0 0 m m、或 1 4 0 0 m m x 1 7 0 0 m m 〇 將上述之大型之玻璃基板水平地搬送時，如果不支承 其寬度方向之兩端以及寬度方向之中央部時該玻璃基板會 垂下，惟此種玻璃‘基板係特別的被要求搬送裝置係不得接 觸於除了其外周端部之其他部份。 因此提案有例如專利文獻1、2、3等所揭示之使用氣 體而使基板漂浮（浮上）、以非接觸地予以搬送之技術。 專利文獻1、日本專利公報特開平1 0 — 1 3 9 1 6 0號 專利文獻2、日本專利公報特開平〗1 — 2 6 8 8 3 0號 專利文獻3、日本專利公報特開平1 1 — 2 6 8 8 3 1號 (2) (2)200410887 惟如上述之搬送裝置係，由複數之噴嘴噴出壓縮空氣 等，且，藉由複雜的控制該噴出方向、噴出及停止由而使 基板漂浮（浮上來），由而搬送於目的之方向，所以製造 成本及運轉成本非常的變高，同時例如在於淨化室內時， 由於從複數之噴嘴噴出比較高的壓力之空氣等，由而具有 在於淨化室內會發生氣流之亂流之問題。 又，爲了解決上述問題，例如水平地配置多孔質陶瓷 板從該下側送入空氣，藉此而在於搬送之玻璃基板與多孔 質陶瓷板之間形成流體膜，由而使玻璃基板漂浮（浮起來 )° 惟，此種多孔質陶瓷板非常高價，具有增大製造成本 之問題。 再者也可以考慮以搬送滾子列之下方接觸支承大型薄 板狀材之寬度方向之寬度方向緣端，同時由形成於面板之 多數之氣體噴出孔噴出氣體，而在於面板與大型薄板狀材 之間’形成由靜壓氣體所成之流體膜，且藉由上述搬送滾 子列來實施搬送。惟此時乃需要設置多數之氣體噴出孔， 會使製造成本增大，又由於從此處之氣體之噴出量會變大 ’因而具有不但運轉成本變高，同時成爲在於淨化室內之 氣體之紊亂（亂流）之原因之問題。 本發明係鑑於上述之先前技術之問題而創作，提供一 種不需要設置多數之氣體噴出孔由而成本低，且氣體之噴 出量少，不會在於淨化室內發生氣體之亂流之大型薄板狀 材之搬送方法及裝置爲目的。 (3) (3)200410887 (解決問題之手段） 本方法之發明乃：沿著搬送路地配置，具有與欲搬送 之大型薄板狀材之搬送方向成直交之寬度方向之尺寸爲小 之寬度之平滑之背面板，對於該背面板，由上側蓋上上述 大型薄板狀材，且對於從上述背面板溢出於上述寬度方向 之上述大型薄板狀材之寬度方向之端部，從該背面側對於 該大型薄板狀材之背面與上述背面板之間，斜方向地噴吹 氣流，在於兩者之間形成流體膜，而以上述大型薄板狀材 對於背面板非接觸地，且沿著該背面板予以搬送爲其特徵 之大型薄板材之搬送方法來達成上述目的者。 又，將上述背面板配置於水平，以搬送滾子從下方支 承該從背面板而溢出於寬度方向之上述大型薄板狀材之寬 度方向之兩端緣，且予以搬送亦可以。 又，對於上述大型薄板狀材之從上述背面板而溢出於 寬度方向之部份之背面地，從上述背面板之寬度方向兩端 近傍之外側而朝向寬度方向內側且朝向上方地噴吹氣流亦 可以。 又，將上述背面板以該上端側之自鉛直面傾斜5〜1 0° 狀地予之設置，同時，對於該背面板而從斜上方覆蓋上述 大型薄板狀材，且以搬送手段支承該大型薄板狀材，同時 予以搬送亦可以。 再者，對於上述大型薄板狀材之從上述背面板而溢出 於上方之部份之背面、與上述背面板之上端緣之間之位置 -6 - (4) (4)200410887 ，而由斜朝向下方地吹噴氣流亦可以。 再者，又將上述背面板之寬Wt對於上述大型薄板狀 材之寬w S而設定於 ^200410887 (1) Description of the invention [Technical field to which the invention belongs] The present invention relates to large and thin glass substrates used for flat panel displays, such as liquid crystal display (LCD) panels, electric award display panels (PDP), and for decoration Method and device for conveying large-scale thin plates such as metal sheets and metal foils laminated with polymer films. [Previous technology] Large LCD glass substrates are available in sizes such as 750 mm x 950 mm with a thickness of 0.7 mm and a thinner thickness compared to the size. In the near future, the size may be increased to 2 0 0 mm χ 1 500 mm, or 1 400 mm x 1 700 mm. When the large glass substrates described above are transported horizontally, if the two ends in the width direction and the center in the width direction are not supported, the glass The substrate will hang down, but this glass' substrate is specifically required to be transported without touching any part other than its outer peripheral end. For this reason, there have been proposed technologies such as those disclosed in Patent Documents 1, 2, and 3, which use a gas to float (float) a substrate and transport it in a non-contact manner. Patent Document 1, Japanese Patent Gazette No. 10 — 1 3 9 1 6 0 Patent Document 2, Japanese Patent Gazette No. JP 1 1 2 6 8 8 3 Patent Document 3, Japanese Gazette No. JP 1 1 — 2 6 8 8 3 No. 1 (2) (2) 200410887 Only the above-mentioned conveying device is used to eject compressed air from a plurality of nozzles, and the substrate is floated by complicatedly controlling the ejection direction, ejection and stopping (Floating up), so that it is transported in the direction of the purpose, so the manufacturing cost and operating cost are very high. At the same time, for example, when cleaning the room, because a relatively high pressure air is sprayed from a plurality of nozzles, it has the purpose of purifying. The problem of turbulence of airflow occurs in the room. In order to solve the above-mentioned problem, for example, a porous ceramic plate is arranged horizontally to send air from the lower side, thereby forming a fluid film between the glass substrate and the porous ceramic plate to be conveyed, thereby floating the glass substrate (floating Up) ° However, such porous ceramic plates are very expensive and have the problem of increasing manufacturing costs. Furthermore, it is conceivable that the widthwise edge of the large thin plate-shaped material is supported by contacting the lower part of the roller row, and the gas is ejected from most gas ejection holes formed in the panel. A fluid film made of a static pressure gas is formed in between, and conveyance is performed by the above-mentioned conveyance roller row. However, at this time, it is necessary to provide a large number of gas ejection holes, which will increase the manufacturing cost, and because the amount of gas ejected from there will increase, it will not only increase the operating cost, but also become a disorder in purifying the gas in the room ( Turbulence). The present invention was created in view of the problems of the prior art described above, and provides a large thin plate-like material that does not need to provide a large number of gas ejection holes, and has a low cost and a small amount of gas ejection, and does not lie in the turbulent flow of gas in the purification room The purpose is to transfer the method and device. (3) (3) 200410887 (means for solving the problem) The invention of this method is: smoothing the width of a small width, which is arranged along the conveying path and has a width direction that is orthogonal to the conveying direction of the large thin plate material to be conveyed. For the back panel, the large sheet-like material is covered from the upper side, and the width direction end of the large sheet-like material overflowing from the back plate to the width direction is provided from the back side to the large-scale sheet. Between the back surface of the thin plate-shaped material and the above-mentioned back plate, airflow is sprayed obliquely to form a fluid film therebetween, and the large-sized thin plate-shaped material is non-contacted to the back plate and is conveyed along the back plate. A method for conveying a large-sized thin plate with its characteristics to achieve the above purpose. Further, the back plate may be arranged horizontally, and both ends of the width direction of the large thin plate-shaped material overflowing from the back plate to the width direction may be supported by a conveying roller from below, and may be conveyed. In addition, for the back surface of the large thin plate-shaped material that overflows from the back plate in the width direction, the airflow is also blown from the near side of the two ends of the back plate in the width direction toward the inner side and upward. can. Moreover, the back plate is provided in such a manner that the upper end side is inclined from a vertical plane by 5 to 10 °. At the same time, the back plate is covered with the large-scale thin plate material from an obliquely upward direction, and the large-scale plate is supported by a conveying means. It is also possible to transport a thin plate-like material at the same time. Furthermore, the position between the back surface of the large thin plate-shaped material that overflowed from the back plate and the upper edge of the back plate and the upper edge of the back plate is -6-(4) (4) 200410887, and it is oriented obliquely. It is also possible to blow a jet stream from below. Furthermore, the width Wt of the back plate is set to ^ for the width w S of the large-sized thin plate-shaped material.
Ws/6 ^ Wt ^ Ws/2之範圍亦可以。 本發明之裝置乃藉由具有： 一背面板，該背面板係沿著搬送面地被配置，且配置 於該搬送面之包含斜下方之下方，而該表面係平滑，該直 交於搬送方向之寬度方向之尺寸係小於欲搬送之大型薄板 狀材之寬度，及 --搬送手段，該搬送手段係配置於該背面板之寬度方 向外側之至少一方，支承上述大型薄板狀材之寬度方向之 至少一方之端緣，可以沿著上述搬送面地實施搬送’及 一噴嘴，該噴嘴係，配置於上述背面板之寬度方向之 至少一方之端緣近傍，對於沿著上述背面板而由上述搬送 手段所支承之上述大型薄板狀材之背面而對於寬度方向內 側、斜方向地可以吹噴氣流而構成之大型薄板狀材之搬送 裝置而達成上述目的。 又上述搬送面及背面板係水平狀’上述搬送手段係配 置於上述背面板之寬度方向兩側，支承上述大型薄板狀材 之寬度方向兩端緣，用於賦予搬送力之搬送滾子列亦可以 〇 又，上述噴嘴乃，沿著上述背面板之寬度方向兩側緣 ，在於上述搬送方向以適當間隔，且從比上述搬送面之下 側位置而對於上述背面板之寬度方向側端緣之上側角部’ -7- (5) 200410887 朝斜上方地予以配置亦可以。 又，上述搬送面及背面板係對於鉛直面成5 °〜1 0 °傾 斜狀地予以設置， 上述搬送手段係設置於上述搬送面之下端位置，而支 承搬送面上之大型薄板狀材之下端緣且予以搬送亦可以。The range of Ws / 6 ^ Wt ^ Ws / 2 is also possible. The device of the present invention is provided with: a back plate, which is arranged along the conveying surface, and is disposed below the conveying surface, including diagonally below, and the surface is smooth, and the surface is orthogonal to the conveying direction. The dimension in the width direction is smaller than the width of the large thin plate-like material to be transported, and the conveying means is arranged on at least one side of the back side in the width direction and supports at least one of the width direction of the large thin plate-shaped material. One end edge can be conveyed along the conveyance surface and a nozzle which is arranged near at least one end edge in the width direction of the back plate, and is conveyed by the conveyance means along the back plate. The above-mentioned object is achieved by a conveying device for a large-sized thin plate-shaped material supported by the back surface of the large-sized thin plate-shaped material and capable of blowing air jets inward in the width direction and obliquely. The conveying surface and the back plate are horizontal. The conveying means are arranged on both sides in the width direction of the back plate, and support the ends of the large thin plate-shaped material in the width direction. It may be possible that the nozzles are located along the widthwise side edges of the back plate, at an appropriate interval in the conveying direction, and from the position below the conveying surface to the widthwise side end edges of the back plate. Upper corners' -7- (5) 200410887 It is also possible to arrange them diagonally upward. In addition, the conveying surface and the back plate are inclined at 5 ° to 10 ° from the vertical surface. The conveying means is provided at the lower end position of the conveying surface and supports the lower end of the large thin plate-shaped material on the conveying surface. It is also possible to transport it.
又，上述噴嘴係，沿著上述背面板之上側端緣近傍， 在於搬送方向以適當間隔，且朝向該上側端緣之搬送面側 之角部近傍地予以配設亦可以。 又，上述背面板之表面粗糙度Hm ax爲低於100 #， 最好低於1 0 //亦可以。The nozzles may be arranged near the upper end edge of the back plate at appropriate intervals in the conveying direction and near the corners on the conveying surface side of the upper end edge. The surface roughness Hm ax of the back plate is less than 100 #, and preferably less than 1 0 //.
在本發明中，將大型薄板狀材覆蓋於由平滑面所形成 之背面板，以搬送手段支承從背面板所溢出之寬度方向端 部，且從背面板之端緣部對於背面板與大型薄板狀材之間 吹入氣體，而一面以非接觸的支承一面以上述搬送手段來 搬送，因而低成本’且不會有氣流之亂流，亦可防止粉塵 之飛散或發生。 【實施方式】 下面參照附圖詳細的說明本發明之實施形態之例子。 如第1圖、第2圖所示，有關於本發明之實施形態之 第1例之大型薄板狀材之搬送裝置1 〇係以從鉛直面5 ° 〜1 〇 °之傾斜面爲搬送面1 4地將大型薄板狀材（下面簡稱 基板）]2以搬送滾子列1 6來支承其下端緣1 2 A而搬送者 ，而在於上述搬送面]4上之相當於基板1 2之上下方向之 -8- (6) (6)200410887 中央部之位置，沿著搬送面]4，連續地設置，該搬送方 向之長度較長且與直交於搬送方向之寬度方向之尺寸係小 於基板1 2之寬度之背面板]8，藉由此背面板】2而將基 板1. 2之上述中央部1 2B非接觸且由斜下側而支承地予以 構成。 上述背面板1 8乃，如上述，於搬送方向長之板狀體 ，而具有與上述搬送面14平行且鄰接之平滑面20。 沿著上述背面板1 8之上側端緣18 A，且搬送方向適 當間隔地設有氣體吹出噴嘴2 2。 這些氣體吹出噴嘴22係於上述上側端緣1 8 A之近傍 ，與它平行且於搬送方向連續地予以配置，由在於送氣管 24上，以適當間隔地設置之氣體噴出孔所構成。 上述基體吹出噴嘴22係，如於第3圖放大顯示，由 上述搬送面而比較靠近於背面板〗8側（圖上係右側）位 置而朝向於上述上側端緣1 8 A之搬送面1 4側之稍爲上側 位置，又朝向斜下方向地吹噴氣體（例如空氣），由而在 於上述平滑面2 0與基板1 2之間形成，使該基板1 2之中 央部B不接觸於平滑面20程度地稍微可離開之流體膜f (詳細後述之）。 上述搬送面1 4係更詳細的說，如第2圖所示，對於 該與搬送方向成平行之鉛直面之傾斜角度0係被設定爲 5。< 0 ‘ 10〇， 上述背面板1 8係配置於上述搬送面1 4上之上述基板 ]2之背面側， (7) (7)200410887 又上述搬送滾子列1 6乃沿著搬送面〗4之下端地排列 裝置了複數之搬送滾子1 7者。各搬送滾子1 7係，該旋轉 軸1 7 A係對於水平面傾斜有角度0 ，且與上述搬送面〗斗 成直交地予以配置。又此搬送滾子1 7係具備有，可以接 觸於由支承基板1 2之背面板1 8而溢出於下方之部份之下 δ而緣1 2 A之背面側之大直徑之領環部]7 B，換言之構成爲 階梯滾子。 第1圖、第2圖之符號D表示，在於上述各搬送滾 子1 7每一個地，配置於其下側及各搬送滾子1 7間之適當 位置之抽吸噴嘴。該抽吸噴嘴]9乃介著一條集合吸氣管 1 9 A而賦加了負壓，抽吸該與搬送滾子1 7之接觸而由基 板1 2之下端緣1 2 A發生之微麈，並予以排出。 上述搬送滾子1 7之除了上端部，抽吸噴嘴]9，集合 吸氣管係收容於延伸於搬送方向之四角筒狀箱2 1內，而 使內部之微塵不致於漏出於外側。 上述背面板1 8之上下方向之寬度wt係被設定爲： 對於基板12之上下方向之寬Ws而成爲：In the present invention, a large thin plate-like material is covered on a back plate formed of a smooth surface, and a widthwise end portion overflowing from the back plate is supported by a conveyance means, and the back plate and the large thin plate are supported from an end edge portion of the back plate. Gas is blown between the shaped materials, and is conveyed by the above-mentioned conveying means while being supported by non-contact, so it is low-cost 'and there is no turbulent flow of airflow, and dust can be prevented from scattering or occurring. [Embodiment] An example of an embodiment of the present invention will be described in detail below with reference to the drawings. As shown in FIG. 1 and FIG. 2, the large-scale thin-plate-shaped material conveying device 1 according to the first example of the embodiment of the present invention uses an inclined surface 5 ° to 100 ° from the vertical surface as the conveying surface 1. 4 large-scale thin plate-shaped materials (hereinafter referred to as the substrate)] 2 are transported by a roller row 16 to support the lower end edge 1 2 A, and are on the above-mentioned conveying surface] 4 correspond to the substrate 1 2 up and down direction No. 8- (6) (6) 200410887 The position of the central part is set continuously along the conveying surface] 4, and the length of the conveying direction is longer and the dimension of the width direction orthogonal to the conveying direction is smaller than the substrate 1 2 The width of the back plate] 8 is configured by the back plate] 2 so that the above-mentioned central portion 12B of the substrate 1.2 is non-contact and is supported by the obliquely lower side. The back plate 18 is, as described above, a plate-like body that is long in the conveyance direction, and has a smooth surface 20 that is parallel to and adjacent to the conveyance surface 14. Gas blowing nozzles 22 are provided along the upper end edge 18A of the back plate 18 at appropriate intervals in the conveying direction. These gas blowing nozzles 22 are arranged near the above-mentioned upper end edge 18 A, are arranged in parallel with it and continuously in the conveying direction, and are composed of gas blowing holes provided in the air pipe 24 at appropriate intervals. The above-mentioned substrate blowing nozzle 22 is, as enlargedly shown in FIG. 3, the above-mentioned conveying surface is relatively close to the back plate 8 side (the right side in the figure) and faces the conveying surface 1 8 A of the upper end edge 1 4 The side is slightly upward, and gas (such as air) is blown toward the obliquely downward direction, so that it is formed between the above-mentioned smooth surface 20 and the substrate 12, so that the central portion B of the substrate 12 does not contact the smooth surface. The fluid film f (surface which will be described in detail later) that the surface 20 is slightly detachable. More specifically, the conveying surface 14 is set to 5 as shown in Fig. 2 with respect to the vertical angle of the vertical plane parallel to the conveying direction. < 0 '10, the rear plate 18 is the rear side of the substrate disposed on the transfer surface 14], (7) (7) 200410887, and the transfer roller row 16 is along the transfer surface 〖4 A plurality of transport rollers 17 are arranged at the lower end. Each of the transfer rollers 17 series, and the rotary shaft 17A series are inclined at an angle of 0 to the horizontal plane, and are arranged orthogonally to the transfer surface. The conveying roller 17 is provided with a large-diameter collar ring portion that can contact the back plate 18 of the support substrate 12 and overflow below the portion δ and the back side of the edge 1 2 A] 7 B, in other words constituted as a step roller. Symbols D in Figs. 1 and 2 indicate suction nozzles which are arranged at the appropriate positions below the respective transport rollers 17 and between the respective transport rollers 17 in each of the aforementioned transport rollers 17. The suction nozzle] 9 is provided with a negative pressure through a collection suction pipe 19 A, and sucks the contact with the transfer roller 17 and the micro-pump that occurs from the lower edge 1 2 A of the substrate 12 And drain it. Except for the above-mentioned conveying rollers 17 except for the upper end and the suction nozzles] 9, the collection suction pipe is housed in a rectangular cylindrical box 21 extending in the conveying direction so that the internal dust does not leak out. The width wt of the back plate 18 in the up-down direction is set as follows: For the width Ws in the up-down direction of the substrate 12, it becomes:
Ws/6 $ Wt ^ Ws/2 之範圍。 對於上述送氣管24而如第3圖所示由鼓風機3 2介著 過濾器42而由風導軟管44例如供給比較低壓之空氣，由 上述多數之氣體噴出噴嘴22噴出。 上述氣體噴出噴嘴22之直徑及在於送氣管24上之搬 送方向之節距乃，只要使自該處所噴出之空氣，能夠在於 基板1 2之背面與平滑面2 〇之表面之間可以形成薄的流體 -10- (8) (8)200410887 膜下就足夠，所以、與噴出大量之空氣藉由動壓氣體而使 基板1 2漂浮起來之情形做比較，很小就可以。 對於此實施形態例之搬送裝·置1 〇而例如以搬送機器 人等由上方搬入基板1 2、或從搬送方向上游側，以運送 機等搬入基板1 2。而此時，從氣體吹出噴嘴24噴出氣體 ，就使氣體進入於背面板1 8與平滑面2 0之間，在此處形 成流體膜F。 又形成此流體膜F之氣流乃從背面板1 8之下側端緣 1 8 B與基板1 2之間流出於下方。 此時上述流體膜F之厚度乃，只要能阻止基板1 2之 接觸於背面板1 8之平滑面2 0之程度就夠，所以雖然從吹 出噴嘴2 2所噴出之氣體之量係微小量，仍然可以維持基 板1 2對於背面板1 8而非接觸狀。 又，從氣體噴出噴嘴22噴出之氣體係通過上述背面 板1 8與基板1 2之間，自該背面板1 8之下端緣1 8 B之位 置朝下方向地噴出。 所以本搬送裝置1 〇係被設置於淨化室內時，得與淨 化室內之朝下流動之氣流方向相一致，在於淨化室內不會 發生氣流之紊亂，所以不會構成捲起微細之塵埃降低淨化 度。 再者，由於從氣體吹出噴嘴22所噴出之氣體量少， 因此不會發生基板1 2之過度地從背面板1 8浮起，在於搬 送中呈顯不穩定之狀態，基板1 2係可以安定地維持於搬 送面。 -11 - 200410887 Ο) 再者，搬送滾子]7之旋轉軸]7A係對於水平面被傾 斜角度β ，所以對於基板1 2之下端緣]2 A成爲垂直狀， 由而可以安定地支承該下端緣1 2 A，且以領環部1 7來抑 制下端緣1 2 A橫向滑移，由而可限制搬送中之基板1 2之 從搬送面1 4之偏移。 而且基板1 2之搬送係，藉由搬送滾子列1 6來支承該 基板12之下端緣12A，且賦予搬送力來實施，所以從氣 體吹出噴嘴2 2所供給之氣體乃只擔負形成流體膜F，使 基板1 2不接觸於平滑面20之功能，不需要發生搬送力。 所以從氣體吹出噴嘴2 2所噴出之氣體之量及壓力乃 ，與先前之藉由動壓氣體之搬送裝置比較時，比較少且低 壓也可以。 又，搬送滾子列1 6乃將支承基板1 2之負載之相當之 部份，惟由於基板1 2係薄板狀，每一搬送滾子1 7所擔負 之負載少，所以得以微小之搬送力就可以沿著搬送面14 來搬送基板1 2，同時可以減少由與搬送滾子1 7之接觸所 致之下端緣1 2 A之損傷。 按，沿著搬送面1 4地在於搬送方向長長地形成上述 背面板時，由基板1 2之非通過中之位置之氣體吹出噴嘴 2 2而有無效用地氣體流出之情形，惟由於從氣體吹出噴 嘴2 2之吹出量係微小量，所以不致於發生大部份之氣體 之從沒有基板1 2之位置流出，由而構成在於基板1 2與平 滑面2 0之間無法形成流體膜F之虞。 又，使基板1 2與平滑面2 0之間之流體之速度爲高於 (10) (10)200410887 一定値時，會發生由高速氣流所致之負壓，於是基板〗2 乃不接觸於背面板1 8之平滑面20之程度地被吸引，由而 可以將基板1 2安定地維持於搬送面1 4上。 又，流體膜F之最小之厚度係由平滑面2 0之表面粗 糙度所決定。換言之，平滑面2 0之粗糙度愈小，愈能將 流體膜F變薄也能抑制與基板1 2之接觸，如果表面之凹 凸大時，使流體膜F之厚度大於該凹凸、或者會接觸於基 板12。 所以表面之粗糙度高於一定値時，需要增大氣體之供 給量由而增大流體膜F之厚度才行。惟此限界係，平滑面 20之粗糙度Hmax小於100 //，最好小於1〇 a。Ws / 6 $ Wt ^ Ws / 2. A relatively low-pressure air is supplied to the air supply pipe 24 from a blower 32 through a filter 42 as shown in FIG. 3 through a filter 42, and is ejected from most of the gas ejection nozzles 22 described above. The diameter of the above-mentioned gas ejection nozzle 22 and the pitch in the conveying direction on the air pipe 24 are such that as long as the air ejected therefrom, a thin film can be formed between the rear surface of the substrate 12 and the surface of the smooth surface 20. Fluid -10- (8) (8) 200410887 is sufficient under the membrane, so it can be small compared to the case where a large amount of air is ejected to float the substrate 12 by the dynamic pressure gas. For this embodiment, the substrates 1 2 are transported and placed by a robot or the like from above, or the substrates 12 are transported from the upstream side by a conveyor or the like. At this time, when the gas is ejected from the gas blowing nozzle 24, the gas enters between the back plate 18 and the smooth surface 20, and a fluid film F is formed here. The air flow forming the fluid film F flows out from between the lower end edge 18B of the back plate 18 and the substrate 12 below. At this time, the thickness of the fluid film F is sufficient to prevent the substrate 12 from coming into contact with the smooth surface 20 of the back plate 18, so although the amount of gas emitted from the blowing nozzle 22 is a small amount, It is still possible to maintain the substrate 12 in contact with the back plate 18 instead of the contact shape. The gas system ejected from the gas ejection nozzle 22 is ejected downwardly from the position of the lower edge 18 B of the back plate 18 through the back plate 18 and the substrate 12. Therefore, when the conveying device 10 is installed in a clean room, it must be consistent with the downward air flow direction in the clean room. The reason is that the air flow will not be disturbed in the clean room, so it will not form rolled up fine dust and reduce the degree of purification. . In addition, since the amount of gas emitted from the gas blowing nozzle 22 is small, the substrate 12 does not float excessively from the back plate 18, and it is in a unstable state during transportation, and the substrate 12 can be stable. The ground is maintained on the conveying surface. -11-200410887 Ο) Furthermore, the rotation axis of the conveying roller] 7] 7A is tilted to the horizontal plane by an angle β, so it is perpendicular to the lower edge of the substrate 1 2], so that the lower end can be stably supported The edge 1 2 A, and the collar ring portion 17 are used to suppress the lateral slip of the lower edge 1 2 A, so that the deviation of the substrate 12 from the conveying surface 14 during transportation can be restricted. In addition, the transport system of the substrate 12 is implemented by supporting the lower end edge 12A of the substrate 12 by a transport roller row 16 and applying a transport force. Therefore, the gas supplied from the gas blowing nozzle 22 is only responsible for forming a fluid film. F. The function of preventing the substrate 12 from coming into contact with the smooth surface 20 does not require a transfer force. Therefore, the amount and pressure of the gas ejected from the gas blowing nozzle 22 are relatively low and low pressure when compared with the previous conveying device using dynamic pressure gas. In addition, the transfer roller row 16 is a considerable portion of the load supporting the substrate 12. However, since the substrate 12 is a thin plate, each transfer roller 17 has a small load, so a small transfer force can be obtained. It is possible to carry the substrate 12 along the carrying surface 14 while reducing damage to the lower edge 1 2 A caused by the contact with the carrying roller 17. When the back panel is formed long along the conveying surface 14 in the conveying direction, gas from the non-passing position of the substrate 12 is blown out of the nozzle 22 and there is a case where the gas is ineffective, but the The blow-out amount of the blow-out nozzle 22 is a small amount, so that most of the gas does not flow out from the position where the substrate 12 is not provided, so that the fluid film F cannot be formed between the substrate 12 and the smooth surface 20. Yu. In addition, if the speed of the fluid between the substrate 12 and the smooth surface 20 is higher than (10) (10) 200410887, a negative pressure caused by high-speed airflow will occur at a certain rate, so the substrate 2 is not in contact with The smooth surface 20 of the back plate 18 is attracted to the extent that the substrate 12 can be stably maintained on the conveying surface 14. The minimum thickness of the fluid film F is determined by the surface roughness of the smooth surface 20. In other words, the smaller the roughness of the smooth surface 20, the thinner the fluid film F can be, and the contact with the substrate 12 can be suppressed. If the surface unevenness is large, the thickness of the fluid film F is larger than the unevenness, or it will contact.于 Substrate 12. Therefore, when the surface roughness is higher than a certain value, it is necessary to increase the supply amount of the gas to increase the thickness of the fluid film F. However, the limit is that the roughness Hmax of the smooth surface 20 is less than 100 //, preferably less than 10 a.
此Hmax小且平滑面20波浪狀小時，雖然流體膜F 之厚度非常薄，仍然可以使基板1 2與平滑面2 0非接觸也 〇 又，抽吸噴嘴1 9，係可以抽吸例如在於淨化室內， 沿著基板1 2而流下之氣體內所含之浮遊微塵，由基板1 2 之端緣，特別是由下端緣1 2 A與搬送滾子列1 6之接觸所 發生之屑片而予以排出。 上述搬送裝置10乃由：在於搬送面14之上下方向中 央位置之在於水平方向成一列之背面板1 8及支承下端緣 1 2A之搬送滾子列1 6、以及氣體吹出噴嘴22所構成爲例 ，惟本發明並不侷限於此，只要能使背面板係與基板1 2 之寬度方向中央部1 2B與平滑面形成非接觸者就可以。又 在於其他位置設置另外之背面板也可以，又做爲搬送力賦 -13 - (11) (11)200410887 予手段之搬送滾子列係改用其他之運送機等之搬送手段亦 可以。 再者，在於上述搬送裝置1 0中，如將搬送面1 4設定 成爲近乎錯直面之角度就可以使搬送裝置1 0之裝置面積 減少，且在於背面板1 8之基板1 2之支承負載會減少。 所以傾斜角愈小，本發明之效果乃愈大，惟將搬送面 1 4設爲近於垂直狀，即很難將基板1 2維持於搬送面1 4。 所以傾斜角之最小値以超過5 °爲宜。又傾斜角過大時即 裝置面積之減少量少，而形成流體膜F所需之氣體之消費 量也會增大，所以傾斜角之限度設爲1 〇°。 下面說明，如第4圖所示之搬送面係水平時之本發明 之實施形態之第2例之搬送裝置3 0。 本搬送裝置30乃，例如將大型之PDP用之基板12， 沿著搬送面 3 4水平狀地予以搬送者。由：配置於搬送面 34之與搬送方向成直交之寬度方向中央部位置之在搬送 方向地長狀之水平之背面板3 6、及於搬送面3 4之寬度方 向兩端位置而配置於搬送方向之在寬度方向成一對之搬送 滾子列38A，38B、及沿著上述背面板36之寬度方向兩端 緣3 6 A、3 6 B，於搬送方向適當間隔地配置之氣體吹出噴 嘴32A、32B所構成。 上述背面板3 6之上面係成爲水平之平滑面3 7。 又，如第4圖、第5圖所示，上述基板1 2乃比背面 板3 6而該與搬送方向成直交之方向之寬度大’在於從背 面板36而溢出於寬度方向兩側之側端緣1 3 A，1 3 B而由 -14 - (12) 200410887 上述一對之搬送滾子3 8 A，3 8 B所支承。第4圖、第 中之符號3 9係表示構成上述搬送滾子列3 8 a，3 8 B 送滾子。 上述氣體吹出噴嘴3 2 A，3 2 B係由形成在沿著上 面板3 6之寬度方向兩端緣3 6 A，3 6 B之外側地被配 送氣管3 1 A，3 1 B上之，適當間隔地形成於搬送方向 體噴出孔（氣體吹出孔）所構成。 又，氣體吹出噴嘴3 2 A，3 2 B乃，如第6圖所示 於上述背面板36之寬度方向兩端緣36A，36B之上 角度、與在該上方之沿著搬送面34而被搬送之基板1 背面之間隙地，從斜下方且朝向背面板3 6之寬度方 央側地噴吹氣體者。 本發明之此實施例之搬送裝置3 0中，噴吹於背 3 6之平滑面3 7與基板1 2之背面之間之氣體（空氣 構成流體膜F，而從此流體膜下而氣體係從基板1 2 送方向之前後端而流出。 對於上述送氣管31A，31B，如第5圖所示，由 機40介由過濾器42，由導風軟管44供給比較低壓 氣。 對於本實施形態之例之搬送裝置3 0，例如藉由 之搬送機器人，從上方搬入基板1 2，或藉由運送機 送方向上游搬入基板1 2等。而此時由氣體吹出噴嘴 ，32B吹出預定壓力之氣體。 如此構成之結果’吹出（噴吹出）之氣體乃由背 5圖 之搬 述背 置之 之氣 ，對 側之 2之 向中 面板 )係 之搬 鼓風 之空 叉狀 由搬 32A 面板 -15- (13) (13)200410887 3 6之寬度方向兩端緣3 6 A，3 6B之上側角部、與基板]2 之背面之交叉部而進入於該背面與平滑面3 7之間形成流 體膜F。 再者，基板1 2之搬送乃’由流體膜F而使基板I 2之 寬度方向中央部漂浮（浮起來）之狀態下，以搬送滾子列 38A，3 8B支承該基板12之寬度方向’且賦予搬送力，所 以由上述氣體吹出噴嘴32 A，32B所供給之氣體乃只是形 成流體膜F，而使基板1 2不接觸於背面板3 6而己，不需 要產生搬送力。 所以由氣體吹出噴嘴32A，32B所噴出之空氣量及壓 力乃，與先前之藉由氣體之搬送裝置比較之下很少，且低 壓亦可以。又搬送滾子列3 8 A，3 8 B乃由於基板1 2之負 載之相當多之部份係由上述背面板3 6所支承，因此以微 小之搬送力就可以沿著搬送面3 4地予以搬送。 再者，由於作用於搬送滾子列3 8 A，3 8 B之負載少因 而其反力而作用於基板12之寬度方向之兩端之力量亦少 ，不會從該基板12發生歪變。 上述之搬送裝置30乃由：在於搬送面34之寬度方向 中央位置之一枚背面板3 6、及寬度方向兩端之一對搬送 滾子列3 8 A ’ 3 8B所構成，惟本發明乃不侷限於此構成， 該背面板乃，只要能至少使搬送面14之寬度方向中央部 漂浮（浮起）之效用就可以。又在於其他位置設置另外之 背面板也可以。 做爲搬送力賦予手段之搬送滾子列乃，改爲運送機等 •16- (14) (14)200410887 其他之搬送手段亦可以，視其必要變更其寬度方向位置亦 可以。 在於上述之各實施形態之例中，背面板係單純之具有 平滑面之板狀體，所以低成本.地簡單的可以製造。 又’氣體吹出卩貝卩角乃’只要能對於被搬送而來之基板 1 2與背面板之端部之間吹入氣體，形成氣體膜就可以， 其孔之方向、大小等之設計自由度很大。 再者，與藉由動壓氣體之先前之漂浮搬送手段比較時 ，由於只供給來自鼓風機之低壓氣體就足夠，所以可以大 幅度地降低包含鼓風機之裝置之製造成本，又由於不需要 氣體吹出噴嘴之複雜之控制，由而構造簡單。 又，上述之實施形態之例係用於搬送P D P用之玻璃 基板者，惟本發明並不侷限於此，亦可適用於與面積比較 而板厚之薄之所謂”薄”之薄板狀材之搬送者。所以可以適 用於金屬薄板、樹脂薄板等容易發生撓曲之材料之搬送。 又，形成流體膜之氣體係不限於空氣、氮氣、稀有氣 體等也可以。 (發明之效果） 本發明乃由於如上述地予以構成，所以具有，低成本 ’且不會引起淨化室內等空氣之紊亂（亂流），可以安定 地搬送大型玻璃基板等薄板狀材之優異實用效果。 【圖式簡單說明】 -17- (15) (15)200410887 第1圖表示本發明之實施形態第]例之搬送裝置之正 面圖。 第2圖表示第1圖之搬送裝置之側面圖。 第3圖表示放大第1圖之搬送裝置之要部之剖面圖。 第4圖表示本發明之實施形態第2例之搬送裝置之剖 面圖。 第5圖表示本發明之實施形態第2例之搬送裝置之平 面圖。 第6圖表示放大之實施形態第2例之搬送裝置之要部 之剖面圖。 元件對照表 1 〇 :搬送裝置 1 2 :大型薄板狀材（基板） 12A :下端緣 12B:上下方向之中央部 1 4 :搬送面 1 6 :搬送滾子列 1 7 :搬送滾子 17A :旋轉軸 17B :領環部 1 8 :背面板 ]8 A :上側端緣 18B :下側端緣 -18 - (16)200410887 F :流體膜 1 9 :抽吸噴嘴 19A :集合吸氣管 2 0 ·平滑面 2 1 :四角筒狀箱 2 2 :噴嘴 24 :送氣管 3 0 :搬送裝置 31A，31B:送氣管 3 2 :鼓風機 32A，32B :氣體吹出噴嘴 3 4 :搬送面 3 6 :背面板 36A，36B :寬度方向端緣 3 7 I平滑面This Hmax is small and the smooth surface is wavy for 20 hours. Although the thickness of the fluid film F is very thin, the substrate 12 can still be in non-contact with the smooth surface 20, and the suction nozzle 19 can be sucked, for example, for purification. In the room, the floating dust contained in the gas flowing down along the substrate 12 is obtained from the chip edge of the substrate 12, especially the chip caused by the contact between the lower edge 1 2 A and the transfer roller row 16. discharge. The above-mentioned conveying device 10 is constituted by a rear plate 18 positioned in a row in a horizontal direction at a central position of the conveying surface 14 in a horizontal direction, a conveying roller row 16 supporting a lower end edge 12A, and a gas blowing nozzle 22 as an example. However, the present invention is not limited to this, as long as the back plate system and the widthwise central portion 12B of the substrate 12 can form a non-contact person with the smooth surface. It is also possible to install another back panel in another position, and it can also be used as a conveying force. -13-(11) (11) 200410887 The transfer roller row of the means can be changed to another means such as a conveyor. Furthermore, in the above-mentioned conveying device 10, if the conveying surface 14 is set to an angle that is almost straight, the device area of the conveying device 10 can be reduced, and the supporting load of the substrate 12 of the back plate 18 can be reduced. cut back. Therefore, the smaller the inclination angle is, the greater the effect of the present invention is. However, setting the conveying surface 14 to a nearly vertical shape means that it is difficult to maintain the substrate 12 on the conveying surface 14. Therefore, the minimum inclination angle should be more than 5 °. When the inclination angle is too large, the reduction of the device area is small, and the consumption of gas required to form the fluid film F also increases. Therefore, the limit of the inclination angle is set to 10 °. Next, as shown in Fig. 4, the conveying device 30 of the second example of the embodiment of the present invention when the conveying surface is horizontal will be described. The present conveying device 30 is, for example, a person who conveys a large-sized PDP substrate 12 horizontally along the conveying surface 34. It is arranged on the conveying surface 34 at the center of the width direction perpendicular to the conveying direction, and the horizontal back plate 3 6 elongated in the conveying direction, and at the two ends of the conveying surface 34 in the width direction, and is disposed on the conveying surface. In the width direction, the roller rows 38A, 38B are paired, and the gas blow-out nozzles 32A, which are arranged at appropriate intervals in the conveying direction along the widthwise ends 3 6 A, 3 6 B of the back plate 36, 32B. The upper surface of the back plate 36 is a horizontal smooth surface 37. As shown in FIG. 4 and FIG. 5, the substrate 12 is larger than the back plate 36 and the width in the direction orthogonal to the conveying direction is “the side that overflows from the back plate 36 on both sides in the width direction” The edges 1 3 A, 1 3 B are supported by -14-(12) 200410887. The pair of rollers 3 8 A, 3 8 B. The reference numerals 3 and 9 in Figs. 4 and 4 indicate the 3 8 a and 3 8 B rollers constituting the above-mentioned transfer roller rows. The above-mentioned gas blowing nozzles 3 2 A, 3 2 B are formed on the gas pipes 3 1 A, 3 1 B, which are formed on the outer sides of the both end edges 3 6 A, 3 6 B along the width direction of the upper panel 36, It is comprised by being formed in the conveyance direction body ejection hole (gas ejection hole) at appropriate intervals. Further, the gas blowing nozzles 3 2 A, 3 2 B are, as shown in FIG. 6, at an angle above the widthwise end edges 36A, 36B of the back plate 36 and along the conveying surface 34 above the edges. A person who blows gas from the gap of the back surface of the transported substrate 1 toward the center of the width of the back plate 36 from diagonally downward. In the conveying device 30 of this embodiment of the present invention, the gas (air constitutes the fluid film F is sprayed between the smooth surface 37 of the back 36 and the back surface of the substrate 12), and the gas system is from below the fluid film. The substrate 12 flows out from the front and rear ends in the feed direction. As shown in FIG. 5, the air supply pipes 31A and 31B are supplied with relatively low-pressure air from the machine 40 through the filter 42 and the air guide hose 44. For example, the transfer device 30 is used to transfer a substrate 12 from above by a robot, or to transfer a substrate 12 upstream from a conveyor direction. At this time, a gas is blown out by a gas blowing nozzle and 32B blows a predetermined pressure of gas. As a result of this constitution, the gas that is blown out (blow-out) is carried by the back 5 of the figure, and the opposite side of the 2 is directed to the middle panel). 15- (13) (13) 200410887 3 The widthwise end edges 3 6 A, 3 6B above the side corners, and the intersection of the back surface of the substrate] 2 enter between the back surface and the smooth surface 37 Fluid film F. In addition, the substrate 12 is conveyed in a state where the center of the width direction of the substrate I 2 is floated (floated) by the fluid film F, and the width direction of the substrate 12 is supported by the transfer roller rows 38A and 38B. Moreover, since the conveying force is provided, the gas supplied from the gas blowing nozzles 32 A and 32B only forms the fluid film F, so that the substrate 12 does not contact the back plate 36 and does not need to generate the conveying force. Therefore, the amount of air and pressure ejected by the gas blowing nozzles 32A and 32B are small compared with the previous gas conveying device, and low pressure is also possible. The roller rows 3 8 A and 3 8 B are transported because a considerable part of the load of the substrate 12 is supported by the above-mentioned back plate 36, so it can be transported along the transport surface 3 4 ground with a small transport force. To be transported. In addition, since the load acting on the transport roller rows 3 8 A and 3 8 B is small, the reaction force on the two ends in the width direction of the substrate 12 is also small, and distortion does not occur from the substrate 12. The above-mentioned conveying device 30 is composed of one back plate 36 at the central position in the width direction of the conveying surface 34 and one pair of conveying roller rows 3 8 A '3 8B at both ends in the width direction. However, the present invention is The back panel is not limited to this configuration, and the back panel may have the effect of floating (lifting) at least the center portion in the width direction of the conveying surface 14. It is also possible to provide another back panel at another position. The transfer roller row used as the transfer force imparting means is changed to a conveyor, etc. • 16- (14) (14) 200410887 Other transfer methods are also available, and the width position may be changed if necessary. In the examples of the above embodiments, the back plate is a simple plate-shaped body having a smooth surface, so it can be manufactured at low cost and easily. Also, "gas blowing out 卩 贝 卩 角 乃" as long as the gas can be blown between the substrate 12 and the end of the back plate to be transported to form a gas film, the degree of freedom in the direction and size of the holes can be designed Great. Furthermore, compared with the previous floating conveyance method using dynamic pressure gas, since only the low-pressure gas from the blower is sufficient, the manufacturing cost of the device including the blower can be greatly reduced, and the gas is not required to blow out the nozzle. The complex control is simple to construct. In addition, the example of the above-mentioned embodiment is used for conveying glass substrates for PDP, but the present invention is not limited to this, and can also be applied to a so-called "thin" thin plate-like material having a thinner plate thickness compared with the area. Transporter. Therefore, it can be applied to the transportation of materials that are prone to deflection, such as metal sheets and resin sheets. The gas system forming the fluid film is not limited to air, nitrogen, and rare gases. (Effects of the Invention) The present invention is structured as described above, so it has a low cost and does not cause disturbance (turbulent flow) of air such as clean rooms, and it can be used for stable transportation of large plate substrates such as large glass substrates. effect. [Brief description of the drawings] -17- (15) (15) 200410887 Fig. 1 shows a front view of a conveying device according to a first embodiment of the present invention. Fig. 2 is a side view of the conveying device of Fig. 1. Fig. 3 is a cross-sectional view showing a main part of the conveying device in Fig. 1 enlarged. Fig. 4 is a sectional view of a conveying device according to a second example of the embodiment of the present invention. Fig. 5 is a plan view of a transfer device according to a second example of the embodiment of the present invention. Fig. 6 is a cross-sectional view of a main part of a conveying device in a second example of an enlarged embodiment. Component comparison table 1 〇: conveying device 1 2: large thin plate-shaped material (substrate) 12A: lower end edge 12B: central part in the vertical direction 1 4: conveying surface 1 6: conveying roller row 1 7: conveying roller 17A: rotating Shaft 17B: Collar part 1 8: Back panel] 8 A: Upper end edge 18B: Lower end edge -18-(16) 200410887 F: Fluid film 1 9: Suction nozzle 19A: Collecting suction pipe 2 0 Smooth surface 2 1: Quadrilateral cylindrical box 2 2: Nozzle 24: Air supply pipe 3 0: Transfer device 31A, 31B: Air supply pipe 3 2: Blower 32A, 32B: Gas blow-out nozzle 3 4: Transfer surface 36 6: Rear panel 36A , 36B: Width end edge 3 7 I smooth surface
3 8 A，3 8 B :搬送滾子列 3 9 :搬送滾子 4 0 :鼓風機 4 2 :過濾器 44 :風導軟管 -19 -3 8 A, 3 8 B: Transfer roller row 3 9: Transfer roller 4 0: Blower 4 2: Filter 44: Air guide hose -19-