TW200822260A - Visual inspection apparatus and visual inspection method - Google Patents
Visual inspection apparatus and visual inspection method Download PDFInfo
- Publication number
- TW200822260A TW200822260A TW096136196A TW96136196A TW200822260A TW 200822260 A TW200822260 A TW 200822260A TW 096136196 A TW096136196 A TW 096136196A TW 96136196 A TW96136196 A TW 96136196A TW 200822260 A TW200822260 A TW 200822260A
- Authority
- TW
- Taiwan
- Prior art keywords
- inspection
- wafer
- unit
- parameter
- condition
- Prior art date
Links
- 238000011179 visual inspection Methods 0.000 title claims abstract description 23
- 238000000034 method Methods 0.000 title claims abstract description 11
- 238000007689 inspection Methods 0.000 claims abstract description 92
- 230000002093 peripheral effect Effects 0.000 claims abstract description 55
- 238000003384 imaging method Methods 0.000 claims abstract description 13
- 238000012545 processing Methods 0.000 claims description 47
- 238000012360 testing method Methods 0.000 claims description 29
- 230000007547 defect Effects 0.000 claims description 13
- 239000013078 crystal Substances 0.000 claims description 5
- 238000005520 cutting process Methods 0.000 claims description 2
- 241000255925 Diptera Species 0.000 claims 1
- 230000008859 change Effects 0.000 abstract description 18
- 230000008569 process Effects 0.000 abstract description 8
- 235000012431 wafers Nutrition 0.000 description 61
- 230000006870 function Effects 0.000 description 20
- 238000005286 illumination Methods 0.000 description 10
- 238000001179 sorption measurement Methods 0.000 description 8
- 238000010586 diagram Methods 0.000 description 5
- 238000003825 pressing Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 230000007246 mechanism Effects 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000012937 correction Methods 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 229920001971 elastomer Polymers 0.000 description 1
- 239000000806 elastomer Substances 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 238000004898 kneading Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000012795 verification Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/9501—Semiconductor wafers
- G01N21/9503—Wafer edge inspection
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2006268478A JP2008089351A (ja) | 2006-09-29 | 2006-09-29 | 外観検査装置及び外観検査方法 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TW200822260A true TW200822260A (en) | 2008-05-16 |
Family
ID=39260790
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW096136196A TW200822260A (en) | 2006-09-29 | 2007-09-28 | Visual inspection apparatus and visual inspection method |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US20080079932A1 (enExample) |
| JP (1) | JP2008089351A (enExample) |
| CN (1) | CN101158649A (enExample) |
| TW (1) | TW200822260A (enExample) |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102007024525B4 (de) * | 2007-03-19 | 2009-05-28 | Vistec Semiconductor Systems Gmbh | Vorrichtung und Verfahren zur Bewertung von Defekten am Randbereich eines Wafers |
| JP2010002216A (ja) * | 2008-06-18 | 2010-01-07 | Kobelco Kaken:Kk | 端面観察装置 |
| US20110199480A1 (en) * | 2009-07-09 | 2011-08-18 | Camtek Ltd. | Optical inspection system using multi-facet imaging |
| US8786850B2 (en) * | 2012-10-29 | 2014-07-22 | Kla-Tencor Corporation | Illumination energy management in surface inspection |
| US10127523B2 (en) | 2013-03-20 | 2018-11-13 | Lifetime Brands, Inc. | Method and apparatus for mobile quality management inspections |
| CN105472252B (zh) * | 2015-12-31 | 2018-12-21 | 天津远度科技有限公司 | 一种无人机获取图像的系统及方法 |
| TWI628428B (zh) * | 2016-12-16 | 2018-07-01 | 由田新技股份有限公司 | 多視角影像擷取裝置、及其多視角影像檢測設備 |
| CN108508031A (zh) * | 2017-02-28 | 2018-09-07 | 上海微电子装备（集团）股份有限公司 | 一种双面检测装置及检测方法 |
| CN114088724B (zh) * | 2021-11-20 | 2023-08-18 | 深圳市北科检测科技有限公司 | 一种显示屏边缘缺陷检测装置 |
| CN114113140B (zh) * | 2021-11-26 | 2023-07-07 | 深圳市北科检测科技有限公司 | 一种多工位led灯板检测装置 |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100416791B1 (ko) * | 2001-03-19 | 2004-01-31 | 삼성전자주식회사 | 반도체 웨이퍼 검사용 현미경장치 및 그 검사방법 |
| JP3629244B2 (ja) * | 2002-02-19 | 2005-03-16 | 本多エレクトロン株式会社 | ウエーハ用検査装置 |
| JP2004227671A (ja) * | 2003-01-23 | 2004-08-12 | Tdk Corp | 光記録媒体製造装置 |
-
2006
- 2006-09-29 JP JP2006268478A patent/JP2008089351A/ja not_active Withdrawn
-
2007
- 2007-09-27 CN CNA2007101616576A patent/CN101158649A/zh active Pending
- 2007-09-28 TW TW096136196A patent/TW200822260A/zh unknown
- 2007-09-28 US US11/906,072 patent/US20080079932A1/en not_active Abandoned
Also Published As
| Publication number | Publication date |
|---|---|
| CN101158649A (zh) | 2008-04-09 |
| US20080079932A1 (en) | 2008-04-03 |
| JP2008089351A (ja) | 2008-04-17 |
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