TW200806110A - Automatic implantation device for chip component - Google Patents

Automatic implantation device for chip component Download PDF

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Publication number
TW200806110A
TW200806110A TW95124715A TW95124715A TW200806110A TW 200806110 A TW200806110 A TW 200806110A TW 95124715 A TW95124715 A TW 95124715A TW 95124715 A TW95124715 A TW 95124715A TW 200806110 A TW200806110 A TW 200806110A
Authority
TW
Taiwan
Prior art keywords
implant
box
electromagnetic
automatic
wafer
Prior art date
Application number
TW95124715A
Other languages
English (en)
Chinese (zh)
Other versions
TWI309145B (enrdf_load_stackoverflow
Inventor
Jen-Chang Jeng
Original Assignee
Eastern Standard Technology Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Eastern Standard Technology Corp filed Critical Eastern Standard Technology Corp
Priority to TW95124715A priority Critical patent/TW200806110A/zh
Publication of TW200806110A publication Critical patent/TW200806110A/zh
Application granted granted Critical
Publication of TWI309145B publication Critical patent/TWI309145B/zh

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  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
TW95124715A 2006-07-06 2006-07-06 Automatic implantation device for chip component TW200806110A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW95124715A TW200806110A (en) 2006-07-06 2006-07-06 Automatic implantation device for chip component

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW95124715A TW200806110A (en) 2006-07-06 2006-07-06 Automatic implantation device for chip component

Publications (2)

Publication Number Publication Date
TW200806110A true TW200806110A (en) 2008-01-16
TWI309145B TWI309145B (enrdf_load_stackoverflow) 2009-04-21

Family

ID=44766234

Family Applications (1)

Application Number Title Priority Date Filing Date
TW95124715A TW200806110A (en) 2006-07-06 2006-07-06 Automatic implantation device for chip component

Country Status (1)

Country Link
TW (1) TW200806110A (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI657985B (zh) * 2018-01-26 2019-05-01 鴻勁精密股份有限公司 電子元件承載器之整平機構及其應用之作業分類設備
KR102780425B1 (ko) * 2019-12-31 2025-03-14 한국알박(주) 기판용 마그넷 클램프

Also Published As

Publication number Publication date
TWI309145B (enrdf_load_stackoverflow) 2009-04-21

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