TW200804828A - Probe and probe assembly - Google Patents

Abstract

To provide a probe assembly capable of exchanging a probe and suitable for narrow pitch array. The probe assembly is composed of a plurality of probes each of which is composed of a support, a belt-like fixing part, and a needle tip which is extending from the end of the fixing part with narrower width than that of the fixing part. For detachably supporting each probe, the width direction of the fixing part of the probe is vertically supported under the support oppositely and parallel to the support by slender supports which pass through the fixing part in a thickness direction. On the mutually opposite faces of neighboring probes of the fixing part insulation films are provided for partially covering the each opposite face of the probe in the mutually shifted region.

Description

[Technical Field] The present invention relates to a probe assembly for use in inspection of a flat object to be inspected, for example, a liquid crystal display panel, and a probe suitable for use in the probe assembly. [Prior Art] As one of the probe assemblies used for inspection of a flat object to be inspected, for example, a liquid crystal display panel, there is a contact member formed by disposing a ceramic insulator in a plate shape. These conductive plates and the ribs are disposed so as to be integrated with each other in a region other than the ends of the respective contacts in a state of being overlapped (Patent Document No.). Further, there is a plurality of probes (contact members having a V-shaped mounting portion (central region) and a plurality of probes extending from the front end and the rear end of the mounting portion to the front and the rear, respectively) The second needle head) is integrated in the same plate needle assembly, and is supported by the support body through the support rods (Patent Document 2). According to the probe assembly disclosed in the patent document, since each of the conductive plates as the contact is made of a ceramic insulator, it is resistant to each other on the gas, and is integrated by the resin material, thereby providing each of them. A probe assembly having a small pitch of electrical insulation between the contacts. However, since each probe (contact) is made of a resin material, the probe cannot be replaced (individually replaced. Further, according to the probe set disclosed in Patent Document 2, since each of the blade types The probe is not integrated with the resin material, but is supported by a support rod that runs through the probe of the 200804828. Therefore, the damaged probe can be detached from the support rod and replaced with a normal probe. In order to prevent electrical contact between adjacent probes, the probe is attempted to cover both sides of the probe with an insulating film made of an electrically insulating resin so that the insulating film is interposed between adjacent probes. In the probe assembly disclosed in Patent Document 2, since the thickness of the insulating film provided in each probe has reached a thickness of approximately 1 〇 #瓜 on one side of the probe, it is intended to have, for example, 15//W. When the arrangement pitch of the probes of the thickness dimension is arranged correspondingly, the thickness of the insulating film covering both sides of the probe may hinder the correspondence of the small arrangement pitch of the probes. Therefore, it is considered that the probes are not covered with the insulating film. On both sides, with a protective film Covering one side of one side of the adjacent probes neatly arranged. However, if a substantially full area of one side is covered by the protective film, a large surface stress i due to the protective film may be generated between the other surface and the other surface. Therefore, the probes are warped in the thickness direction. When the warpage becomes large, an error occurs in the needle position of each probe, and it is difficult to measure it correctly. [Patent Document 1] 曰本特开平Japanese Patent Publication No. 6-17475 (Patent Document 2) Japanese Laid-Open Patent Publication No. Hei No. 132-853

Accordingly, the object of the present invention is to provide a probe assembly which is suitable for a small arrangement pitch probe assembly probe and a replaceable probe and which is suitable for a small arrangement pitch. The probe of the present invention has a belt-shaped mounting portion and a belt-shaped needle 6 200804828 head extending from the end portion of the mounting portion and having a width smaller than the width dimension of the women's department of the 兮忠省省, characterized in that : - a partially covered insulating film, =::: formed with the -: the exposed surface of the insulating film from the - surface is formed with a cover and the probe of the present invention: the insulation of the domain membrane. The board + insulating film covers the entire surface of the system - ', and his area is exposed from the insulating film. Further, the insulating film is not exposed by the insulating film. And :::: another: the ground cover, the other area is the insulation film of the other side to cover and

The μ side is formed in such a manner that the region in which the insulating film is exposed corresponds to the region. Because of this, the probe of the present invention is only one of the two sides, and the entire surface of the probe is not covered by the film. Therefore, the strong surface stress caused by the insulating film to warp the probe does not act on either side of the probe, so that the desired curvature of the probe caused by the insulating film can be prevented and prevented. The probe is shorted. Further, as described above, since the insulating film on the other surface is formed to cover a region corresponding to a region exposed from the insulating film on the one surface, among the plurality of probes having the one surface and the other surface, By arranging the one surface of one probe close to the other faces of the other probes, the insulating films formed on the opposing faces of the two probes can be misaligned and can be shifted from each other. overlapping. As a result, since the two probes can be overlapped by substantially maintaining the interval between the thicknesses of the insulating film between the two probes, they can be arranged at a small pitch corresponding to the distance between the two probes. One half of one side of the probe may be covered to form an insulating film, and the other half of the other side may be covered to form an insulating film. Thereby, an insulating film region covering one half of the one surface of the probe can be formed on one side of the mounting portion of the probe, and the other insulating film region covering the other half of the one surface can be formed on the other surface corresponding to the other half of the surface of the 200804828. By the insulating film, one half of the one side and the other half of the other side corresponding to the other side of the one side are respectively formed along the long side of the mounting portion

The plurality of insulating film regions extending in the width direction of the VL (four) knives are spaced apart from each other. Further, the insulating film can form a plurality of strip-shaped insulating film regions extending in the longitudinal direction of the mounting portion at intervals in the longitudinal direction of the mounting portion and extending in the width direction of the mounting portion, and can be nj On the other side, a V-shaped insulating film region extending in the width direction of the mounting portion is formed between the surface of the watch and the surface of the watch boat. ρ又' can also partially cover the surface of the insulating film and make the other surface: the outgoing surface instead of forming an insulating film on both sides as described above. In this case, the entire surface is not covered with the insulating film, so that the warpage caused by the ruthenium film is not caused by the ruthenium film. "Brothers can be formed by the 5 hai insulating film on the - face" along the mounting: 2: a plurality of strip-shaped insulating film regions which are spaced apart from each other and extend in the width direction of the mounting portion, respectively. The insulating film region dispersed in a dot shape may be formed on the surface, and a strip-shaped insulating film region may be formed instead of the insulating film region. The probe assembly of the present invention includes a plurality of probes and has a strip shape. The support body, the extension of the life and the horse ^ " 卩 and the end of the installation of the end of the dream of Qiu Xiu 丨 丨 丨 visibility of the size of the needle head, in the direction of the visibility of the clothing 4 is lower and lower, Make the installation part opposite to 200804828

The lower side of the support body and the # M sound side a. and the slender support 捍, Wei self-strict direction, the teeth of the probe, the Λ Λ 尽 尽 尽 尽 尽 尽 尽 尽 尽 尽 尽 尽 尽 尽 尽 尽 尽 尽 尽 尽 尽 尽The portions facing each other may be formed with an insulating film partially covering the probe and the tenth aligning surface at least in the region where the mounting pin is offset. According to the probe assembly of the present invention, the two adjacent probes are aligned with the respective insulating films of the phase-to-face, and are made perpendicular to each other, so that the two probes can be substantially accompanied by each other. The overlap of the thickness of the insulating film is maintained as early as 1 Baye, so that the two probes overlap. Indirect distance configuration. In this case, the small space corresponding to the two probes is X. Since the probe is not integrally integrated with the resin, the helical cups of the probes are supported in a detachable manner, so that the probe can be easily For example, the defective needle is replaced with a normal one. In the probe assembly, 'the insulating film may partially cover the opposing faces of the adjacent probes' and the entire surface of the other face may be the exposed surface. - one of the slit rods disposed along the longitudinal direction of the support rod may be disposed at the edge portion of the support body and may be spaced apart from each other by the longitudinal direction of the slit rod and the cutter is opened downwardly' A plurality of slit slots are formed by the needle protruding from the slit rod to the head of the cymbal needle of the cymbal. By arranging the slit rod ', it is possible to surely prevent the needle portion of the adjacent probe from being directly short-circuited. Therefore, in this case, it is not necessary to form an insulating film on the needle portions on both sides of the probe. According to the present invention, as described above, since the strong surface stress of the vehicle which causes the warpage of the probe is not applied to the probe by the insulating film, it is possible to surely prevent the warpage of the probe caused by the insulating film in 200804828. Moreover, the area of the insulating film does prevent electrical shorting between adjacent probes. The area of the insulating film is not repeatedly formed in the opposite faces of the adjacent probes. Therefore, since the interval between the thicknesses of the single insulating film can be substantially maintained between the opposing pins, and the two probes can be alternately overlapped, the probe can be disposed at a small pitch. [Embodiment]

Fig. 1 is a plan view showing an inspection apparatus 12 in which a plurality of probe assemblies 1 of the present invention are assembled. Figure! An example of the inspection device 12 used for the energization test of the rectangular liquid crystal display panel 14 is shown. The inspection device 12 has an inspection table 16 provided with a rectangular opening 16a similar in shape to the liquid crystal display panel 14 but smaller than the liquid crystal display panel 14. The liquid crystal display panel is placed on the inspection table 16 so as to cover the rectangular opening π 16a so as to pass through the rectangular opening 16a of the inspection table i6 and receive the backlight from the back surface. The probe table 16 is provided with probe greens 18 (18a, 18b) extending along the long sides of one side of the rectangular opening 16a and the short sides of the one side, and can be arranged in a plurality of edges arranged on the surface of the liquid crystal display panel 14 in a neat manner. The electrode assembly (not shown) forms an electrically connected probe assembly 10 which is supported by each probe base 18 via a support mechanism 2''. As shown in FIG. 2, each of the support mechanisms 20 detachably supports the corresponding probe assemblies 1'' so that the needles of the plurality of probes 22, which are respectively provided in the probe assembly ι, are directed toward the liquid crystal. The display panel 14 is protruded. - The probe 22 of each probe assembly H) is held in such a manner that the needles are in contact with each other via the support mechanisms 20 so as to be in contact with the electrode pads corresponding to the edges of the liquid crystal display panel 14 respectively. LCD panel "Bottom; strip. 200804828 % The support mechanism of the same configuration as the support mechanism 20 is disclosed in, for example, Japanese Patent Laid-Open Publication No. 2004-191064. As shown in FIGS. 2 and 3, the probe assembly 10 supported by each of the support mechanisms 20 includes a probe card 24 that is detachably attached by the support mechanism 20, and is disposed on the probe card. A plurality of the probes 22 below. Further, as shown in FIG. 3, the 'needle assembly 10' is provided for attaching the probe 22 to one of the support pins 26 (26a, 26b) of the pin plate 24, and to the far side of the support body. One of the lower faces 24a of the needle-punching plate 24 is formed of a pair of slit bars 28 (28a, 28b) and a probe plate 24 made of a metal material covered with an insulating film. Further, a pair of slit bars 28 (28a, 28b) are made of, for example, a ceramic insulating material. The support member 26 (26a, 26b) is also constructed of an insulating material such as a rod-shaped ceramic, as is conventional. The probe card, i.e., the lower surface 24a of the support body 24, has a rectangular shape as a whole, and one side of the 纟il edge 30a is disposed on the liquid crystal display panel 14 along the edge of the liquid crystal display panel 14. A slit rod 28a is disposed along the front edge 30a of the lower surface 24a of the support body 24, and is fixed to the lower surface 24a of the branch body by the upper surface of the slit rod. Further, the slit rod 28b is disposed along the rear edge 30b of the lower surface 24a of the support body 24 and is bluntly fixed to the lower surface 2 of the support body 24 so as to be spaced apart from the slit rod 28a. Slot grooves 32a and 32b are formed on the lower surface of each of the slit bars 28a and 28b so as to match the number of the probes 22, and are spaced apart from each other in the longitudinal direction of each of the slit bars 28a and 2b. Each of the slit grooves 32a and 32b extends across the corresponding slit bars 28a and 28b in the width direction thereof and is opened at the lower side. 11 200804828 The slit grooves 32a and 32b corresponding to the pair of slit bars 28a and #μ^28b are arranged side by side in order to receive the corresponding probes 22. Each of the probes 22 disposed under the lower surface 24a of the support body 24 is formed of a plate-shaped conductive member as shown in FIG. 3, and has a visibility dimension w and a central region functioning in the same direction as the long direction. The strip-shaped mounting portion 34 and a pair of needle-shaped head portions 36 (36a, 36b) extending from the front end and the rear end of the mounting portion toward the front and the rear respectively. The mounting portion 34 of each probe 22 is a pair of support rods, and a pair of guide holes 38 (38a, 38b) are formed. - the guide holes 38 (38a, called the attachment portions 34) are disposed at intervals in the longitudinal direction, and are respectively formed at the both end portions of the attachment portion through the attachment portion 34. The respective needle heads 36a on one side are attached from the attachment portion The lower end portion of the long end of 34 is extended forward, and the respective needle heads 36b of the other side w are extended rearward from the upper edge portion of the other end of the attachment portion 34. Each of the needle heads 36 (36a, 36b) has The width dimension is smaller than the width dimension w of the mounting portion 34. The probe 22' is connected to the slit groove 32a corresponding to the slit rod 28a of the side by the needle head portion of the same side, and the other side needle The portion of the slit groove 32b corresponding to the slit rod 28b of the other side is disposed at a distance from the lower surface of the support body 24 at a distance from the lower surface of the support body 24: the probes 22 are spaced and aligned with each other The guide holes 38 & 3813 of each mounting portion μ are arranged in parallel, and the respective support rods 26 are connected to the guide holes 38 (38a, 38b) arranged in a neat manner. 26 (26a, 26b) is supported at both ends by a pair of side covers 40 fixed on both sides of the deburring and cutting basket 24 (refer to 2), each of the probes 22 is held by the support rods 26 (26a, 26b) arranged in parallel with the slit rods 12 200804828 ♦ 28b) in a predetermined posture on the lower side of the support body 24. The needle head 36b on the other side is such that the guide head 42b protrudes from the slit rod 28b toward the rear of the support body 24 after being formed at the rear end of the needle head. Since the rear needle 42b is connected to the circuit board 46 (fixed to the support support) The probes corresponding to the lower surface of the support plate 44 of the mechanism 20 are connected to the tester body (not shown) via the circuit board 46. The needle 42b, in the illustrated example, is used to prevent The hole 48a of the guide piece 48 that is in erroneous contact with the circuit board 46 is connected to the connection pad. The needle head portion 36a of the one side of the probe 22 is formed before the tip end of the needle head, and the policy head 42a is directed from the front side of the slit bar 28a. Further, in the illustrated example, the rear edge portion of the slit groove 32a of the slit rod 28a is formed with a segment portion 5A for defining the flat step surface 5A. Further, the segment portion 5 is used for Defining a step surface 5〇a located above the top surface of the slit groove 32a. Also, the probe 22 Between the mounting portion 34 and the needle head portion 36a of the one side, _ is formed with a segment portion 52 for defining a flat step surface 52a opposed to the step surface 50a. The needle head portion 3 is abutted on both sides 5〇a, 52a. The needle does not abut against the top surface of the slit groove 32a, and the needle of the needle head is 42a from the slit rod 28a in a state where the area except the step surface 5〇a is spaced apart from the needle head 36a. The front edge protrudes obliquely downward and is held. Therefore, when the needle cymbal 36a of the one side of each probe 22 of the probe assembly (7) is pressed against the electrode pad corresponding to the liquid crystal display panel 14, it acts on each probe. The pressing portion of the needle 42a of the needle 22 is subjected to a reaction force by the step surface 5〇a of the segment portion 13 200804828 of the slit rod 28a opposed to the step surface 52a of the needle head portion 36a, so that the step surface has rigidity. The role of the fulcrum. Further, each of the needle head portions 36a is allowed to elastically deform the needles until it abuts against a region other than the step of the slit groove ® 50a. ^ The probes 22 are pressed against the electrode pads corresponding to the liquid crystal display panel 14 by the overdriving force corresponding to the amount of elastic deformation. The rigid fulcrum 50a and the segment 52 may not be included. However, in order to reduce the overdriving force acting on the support rods 26 (26a, 26b) and to prevent the branch 26 (26a, 26b) H (four) from causing the deflection of the butt, it is preferable to provide a rigid fulcrum as described above. In the inspection apparatus 12 in which the probe assembly 10 of the present invention is assembled, the needles 42a provided in the respective probe assemblies 1 and 4 of the respective probe assemblies 1 are pressed against the liquid crystal.

The f-pole corresponding to the display panel 14 is displayed. In this case, since each of the probes U is subjected to bending deformation due to elasticity, and the over-twisting power generated by the bending deformation is connected to the 亥 靡 5 5 5 , , , , , The pad is indeed connected to the tester body via the plate needle assembly 10. In this case, in order to prevent electrical short circuits between adjacent probes 22, as shown in Figs. 4 and 5, 'on both sides of each of the probes 22 in the form of a plate, refer to Fig. 5), from the probe The long side direction is viewed in the region half of the area - 54a, and the area 54b located on the opposite side of the side from the side of the half is viewed from the longitudinal direction of the probe #22. The insulating film regions covered by the peripheral films 56 and 58 or the capacitor-reducing holes 60a to 60b which are omitted in FIG. 3 for the simplified drawing are shown in FIGS. 4, 5, and hereinafter. The capacitance reducing holes 60a and _ are used to reduce the static capacitance between the adjacent probes 22, thereby reducing the crosstalk between the pulse shaped signals. Referring to Fig. 4 and Fig. 5, the probes of the probes 22 except the front needle 42a *b, the probe 22 of the needle head 36a of the 2a' pattern of the probe 22, the true side ^ The edge formed by the needle is covered by the insulating film 56, and the half (10) is covered by the film 56. The other cover of this face 22& 13 does not have an insulating film 56, so that the other half (10) including the rear needle 42b is exposed. The other side - the side of the needle head 36b, the second needle = the other side of the 22, except the rear needle 42b, along the other side of the needle formed by the needle head, the length of the probe 22, the other half (54b) ' is covered by the insulating film 58. In this case, the other half (54a) is not covered by the insulating film W, and therefore includes: the half of the needle (four) 36a formed by the policy head ( (5 butterfly = other = needle 22' as shown by the circle 5) ...not to be aligned with the other face 22b of the wearer 2' and to support the support rods 26 (26a, 26b) as one of the aforementioned through bodies (38a, 38b): in this case, adjacent The region of the insulating film covered by the surface 22a of each of the probes 22 is opposed to the exposed area other than the other surface of the adjacent probes 22, 2b, 22, and the peripheral film 58. The adjacent exposed cows: the exposed areas other than the insulating film 50 of the one side 22a are opposed to the insulating film area covered by the insulating film 58 of the other surface 22b of the phase T22. When the 22a and the surface 22b are arranged opposite to each other, the adjacent probe 15 200804828, the needle 22-series insulating film 56, and the FB u-blade J are located at the opposite faces 22a and 22b which are shifted from each other (he domains 54a and 54b. According to the opposite surface of the probe assembly probe 22, the insulating film 56 and the (four) direction formed in the adjacent two recrystallized gates are not formed, and the two are The spacing between the needles 22 substantially maintains the thickness of the single or the , or 58 so that the two probes 22 overlap. Therefore, 'there can be arranged at a small pitch corresponding to the two probes 22. For this small pitch, 闰< In the embodiment of Fig. 6, when the probe 22 has a size of, for example, 20 // m, and the insulating films 56 and 58 respectively have a thickness of 10, 〇30 is shown. The arrangement pitch Ρ becomes about 'the probe 22 because it does not cover the entire surface of the a: 22b with the insulating film 乂 or only the surface of the probe 22, so the probe 22 is not caused by the surface of the insulating film. In addition, since the material is not integrally integrated with the resin, and each needle is detachably supported on the branch #26, it is possible to easily replace the probe 22 such as the defect into As shown in Fig. 6 and Fig. 7, the portion corresponding to the partition walls 32A and 32d (see Fig. 3) of the slit bars 28 (28a, 28b) can be exposed from the insulating film 56 or 58. Fig. 8 is an enlarged view showing that the other side of the slit rod is exposed from the insulating film formed on the other side (4) of the other surface 22b of the probe 22, The relationship of the portion 58a. Since the partition wall portion of the slit rod is interposed between the needle head portions 36b of the adjacent probes 22, the short-circuit portion prevents the short-circuit of the partition portion corresponding to the partition wall portion. The insulating film of this region 58a may not be required. The portion 5Μ corresponding to the partition wall of the slit rod 28& is also the same as that of Fig. 6). Also, a pair of slit rods 28 (28 & 28b) are disposed. At this time, the insulating films %, 58 of the needle head 36 (36a, 36b) are not required. However, in order to ensure more reliable insulation between the probes η, it is preferable to have the face 22 ϋ W and the other half 54b of the other face 22b, including the needle head 36 (36a, 36b), as described above, with an insulating film 56, 58 to cover.

In the example shown in Fig. 9 and Fig. 1(), a plurality of insulating film regions of a strip shape composed of an insulating film % are formed in one half 54a of one side of the probe 22. Further, the other half 54b of the other surface is formed with a plurality of insulating film regions which are formed in a ▼ shape by the insulating film 58. Each of the strip-shaped insulating film regions (56 58) is formed at intervals in the longitudinal direction of the women's wear portion 34, and is elongated in the width direction w of the mounting portion 34, respectively. By forming each of the insulating film regions (56, 58) into a strip shape, the influence of the surface stress caused by the insulating films 56, 58 on the probe 22 can be reduced. Moreover, the amount of material used for the insulating films 56, 58 can be reduced. As shown in Fig. 11 and Fig. 12, the strip-shaped insulating films 56, 58 can be uniformly dispersed in the longitudinal direction of the body portion 34 in the face and the other side, and the insulating film 56, 58 can be concentrated. The other half 54b of one surface 22 & 54a of the probe 22 and the other surface 22b of the other surface 22b. In the example shown in Figs. 11 and 12, the probes are formed from the one half 54a of the probe 22 to the other half 54b so as to be spaced apart from each other in the longitudinal direction of the probe 亦, that is, the longitudinal direction of the mounting portion 34. A strip-shaped insulating film 56 is provided. Further, on the other side of the probe 22, the same hole 17 200804828 is formed with a plurality of strip-shaped insulating films 58 from the half-54a of the probe 22 to the other half (10). 〇 flz is formed by Φ 22a! The bain film 56 is formed in a region where the insulating film $^ is formed between the other surface 22b), and the insulating film π is formed on the other surface in a region between the insulating film 58 (formed on the one surface 22a). Thereby, the insulating film 56 is formed on the one surface 22a to form a strip-shaped insulating film region extending in the width direction of the mounting portion 34, and on the other surface 22b, the region corresponding to the insulating film region on the one surface "a" is formed along the mounting portion. The strip-shaped insulating film region extending in the width direction W of 34. Therefore, the insulating films 56 and 58 formed by the opposing faces 22a and 22b of the adjacent two probes 22 are not opposed to each other. As shown in FIG. 13 and FIG. 14, a strip-shaped insulating film may be formed on any of the two faces 22 & 2 of the probe 22, and an insulating film may not be formed on the other surface to make it The entire surface is an exposed surface. In the example of the drawing, the insulating film is not formed on the surface 2. The entire surface is exposed to the ❶ phase, and the other surface 2 隔开 is formed in the longitudinal direction of the mounting portion 34. In the above-described example, the strip-shaped insulating film of the above-mentioned embodiment is formed by forming an insulating film on either one of the two faces 22a and 22b of the probe 22, and covering the other surface of the other surface with the insulating film, The strong surface stress generated by the insulating film acts on one side of the probe, and the probe is produced due to the difference in surface stress. However, as shown in FIG. 13 and FIG. 14, by forming the insulating film 58 formed on the other s 22b into a strip shape, since the entire surface of the other 22b is not covered by the insulating film 58, It is ensured that the exposed surface of the edge film 80804828 is on the one side' and prevents a large warpage of the probe 22. Therefore, even if such an insulating film 58 does not cause the probe 22 to warp, and The interval between the adjacent two probes 22 for substantially maintaining the thickness of the single insulating film = and the two probes 22 can be overlapped, so that it can be disposed at a small pitch corresponding to the two probes 22.

Further, the blade is formed with an insulating film on either side of the both faces 22a and 22b of the probe 22, and an insulating film is formed on the other surface thereof. As shown in Fig. 15, the insulating film 58 can be dispersed in a dot shape (2) By dispersing the dot-like insulating m 58, such that the probe 22 is not generated, the interval between the thicknesses of the single-insulating film 58 is substantially maintained between the adjacent two probes U, so that the two pins are separated. Therefore, it can be arranged at a small pitch corresponding to the two probes 22. The present invention is not limited to the above embodiments, and various modifications can be made without departing from the spirit and scope of the invention. A plan view showing a part of an inspection apparatus for a liquid crystal display panel (an example of an electrical remote connection in which the probe assembly of the present invention is assembled). FIG. 2 is a view showing an assembly shown in FIG. A front view of one of the plurality of probe assemblies of the inspection device. Fig. 3 is a partial cross-sectional view of the probe assembly taken along the line ̄τττ τττ & ^ % and lull of Fig. 2. Fig. 4 is detailed A front view showing the probe schematically shown in Fig. 3. Fig. 5 is a layered state A top view of the probe shown in Fig. 4 is shown.

200804828 Fig. 6 is a partial cross-sectional view showing the relationship between the probe shown in Fig. 6 and Fig. 5 and Fig. 8 showing the probe shown in Fig. 6 in another example of the present invention. The solid 9 series shows another example of the present invention, and the probe shown in FIG. 9 is related to the probe shown in FIG. 9. The other embodiment of the present invention is shown in FIG. FIG. 13 is a view showing another example of the present invention and FIG. 14 showing the probe shown in FIG. 13. FIG. 5 is a view showing another example of the present invention and the same as the main component symbol description. Figure. The same picture. • Partially identical to the slit rod. 1 the same picture. 1 the same picture. 5 the same picture. The same figure. 5 the same picture. The same figure. 10 Probe assembly 22 Probes 22a, 22b Probe face 24 Support body 26 (26a, 26b) Support rod 28 (28a, 28b) Slot rod 34 Mounting portion 36 (36a, 36b) Needle head 54a Probe Another 56, 58 insulating film 20 of the 54b probe

Claims (1)

200804828 Patent application scope: a wooden needle having a belt-shaped mounting portion and a belt-shaped portion extending from an end portion of the mounting portion and having a width smaller than a width dimension of the mounting portion, wherein: An insulating film covering the surface of the probe is formed on the surface of the probe, and an insulating film covering the region corresponding to the region where the insulating film is exposed from the one surface is formed in the probe H. For example, the application of the (four) surrounding probe, wherein the insulating film forms an insulating film region covering one half of the one side, and the other surface covers the other half corresponding to the other half of the one side. 3. The insulating film region. The probe according to claim 2, wherein the insulating film is formed on the mounting portion along one half of the one surface and the other half of the other surface corresponding to the other half of the one surface. a plurality of insulating film regions extending in the longitudinal direction of the mounting portion with a gap therebetween. The longitudinal direction of the distal mounting portion is spaced apart from each other and spaced apart from each other. a plurality of strip-shaped insulating film regions extending in the width direction, and a band-shaped insulating film region extending in a region corresponding to the insulating film region of the one surface (7) extending in a width dimension of the mounting portion. The probe includes a strip-shaped mounting portion and a strip-shaped needle head extending from an end portion of the mounting portion and having a width smaller than a width dimension of the mounting portion, wherein one of the four wooden needles is configured to Covered with a partially covered insulating film, 21 200804828 The other side of the other side is the exposed surface. 6. The probe of claim 5, wherein the insulating film, : is prepared: the long side direction of the ampoule a plurality of strip-shaped insulating film regions which are spaced apart from each other and spaced apart in a direction of 1 degree of the ampule portion. The probe of the first aspect of the invention, wherein the film system is dispersed in a dot shape The insulating film region, a probe assembly, comprising: a support; a complex (four) probe having a strip-shaped mounting portion and extending from the mounting portion and having a width smaller than the mounting The width of the needle head is such that the width direction of the mounting portion is in the up-and-down direction, and the side is disposed side by side to the support body; and the elongated support rod is inserted through the probe from the thickness direction. Anja extends to support each of the probes to be detachable, and is cut into the support, the support, and the probes are opposite to each other, at least the mounting portions are opposite each other ^ = ^ ' are staggered from each other The region is formed with an insulating film that partially covers each of the opposing surface portions. 9. A probe assembly, comprising: a support body; a plurality of probes having a strip-shaped mounting portion and the mounting portion a needle (4) extending and having a width smaller than a width dimension of the mounting portion, wherein the mounting portion is in a vertical direction, and is disposed adjacent to the lower side of the support body and arranged side by side; and, 22 200804828 The support rods are self-extending to support each of the probes in a σ-segmented manner, and the adjacent probes are opposite to each other and are supported on the support body; the covered insulating film covers, another, In the surface system - is the partial surface which faces the entire surface of the exposed surface. 1) The probe assembly of claim 8 or 9, wherein the slit rod is disposed at an edge of the support along a longitudinal direction of the support rod, and the slit is disposed in the slit The longitudinal direction of the rod is spaced apart from each other at intervals, and has a plurality of slit grooves for receiving the needle head of the probe so that the needle tip protrudes from the slit rod. XI, β-type: such as the next page. twenty three