TW200738401A - Method of detaching platelike substance and apparatus therefor - Google Patents

Method of detaching platelike substance and apparatus therefor

Info

Publication number
TW200738401A
TW200738401A TW095145708A TW95145708A TW200738401A TW 200738401 A TW200738401 A TW 200738401A TW 095145708 A TW095145708 A TW 095145708A TW 95145708 A TW95145708 A TW 95145708A TW 200738401 A TW200738401 A TW 200738401A
Authority
TW
Taiwan
Prior art keywords
platelike
absorption
substance
absorption sheet
detaching
Prior art date
Application number
TW095145708A
Other languages
English (en)
Chinese (zh)
Other versions
TWI362308B (ja
Inventor
Yasunari Ikuta
Takeo Suzuki
Original Assignee
Asahi Glass Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asahi Glass Co Ltd filed Critical Asahi Glass Co Ltd
Publication of TW200738401A publication Critical patent/TW200738401A/zh
Application granted granted Critical
Publication of TWI362308B publication Critical patent/TWI362308B/zh

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B41/00—Component parts such as frames, beds, carriages, headstocks
    • B24B41/06—Work supports, e.g. adjustable steadies
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B41/00—Component parts such as frames, beds, carriages, headstocks
    • B24B41/005—Feeding or manipulating devices specially adapted to grinding machines
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q3/00—Devices holding, supporting, or positioning work or tools, of a kind normally removable from the machine
    • B23Q3/02—Devices holding, supporting, or positioning work or tools, of a kind normally removable from the machine for mounting on a work-table, tool-slide, or analogous part
    • B23Q3/06—Work-clamping means
    • B23Q3/08—Work-clamping means other than mechanically-actuated
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)
TW095145708A 2006-01-11 2006-12-07 Method of detaching platelike substance and apparatus therefor TW200738401A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006004053A JP5307970B2 (ja) 2006-01-11 2006-01-11 大型ガラス基板の剥離方法及びその装置

Publications (2)

Publication Number Publication Date
TW200738401A true TW200738401A (en) 2007-10-16
TWI362308B TWI362308B (ja) 2012-04-21

Family

ID=38256127

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095145708A TW200738401A (en) 2006-01-11 2006-12-07 Method of detaching platelike substance and apparatus therefor

Country Status (4)

Country Link
JP (1) JP5307970B2 (ja)
KR (1) KR101213522B1 (ja)
TW (1) TW200738401A (ja)
WO (1) WO2007080714A1 (ja)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI400166B (zh) * 2009-08-31 2013-07-01 Asahi Glass Co Ltd Stripping device
TWI417939B (zh) * 2009-02-06 2013-12-01 Asahi Glass Co Ltd A manufacturing method of an electronic device, and a peeling device for the same
TWI452382B (zh) * 2010-04-30 2014-09-11 Lg Display Co Ltd 平面顯示裝置之製造設備與製造方法
TWI654654B (zh) 2014-05-03 2019-03-21 日商半導體能源研究所股份有限公司 疊層體的基板分離設備
CN110794598A (zh) * 2018-08-01 2020-02-14 夏普株式会社 面板的剥离方法、显示面板的制造方法、以及捕捉治具

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014179355A (ja) * 2011-07-04 2014-09-25 Asahi Glass Co Ltd ガラス基板の剥離方法及びその装置
JP2013052998A (ja) * 2011-09-06 2013-03-21 Asahi Glass Co Ltd 剥離装置、及び電子デバイスの製造方法
JP6003675B2 (ja) * 2013-01-25 2016-10-05 旭硝子株式会社 基板の剥離装置及び剥離方法並びに電子デバイスの製造方法
JP6083749B2 (ja) * 2013-07-08 2017-02-22 浜井産業株式会社 ワーク剥離装置および剥離方法
KR102165162B1 (ko) 2014-03-12 2020-10-14 삼성디스플레이 주식회사 기판 박리 장치 및 이를 이용한 소자 제조 방법
KR102322479B1 (ko) 2015-02-25 2021-11-05 삼성디스플레이 주식회사 기판 분리장치
CN106710442B (zh) * 2015-10-21 2021-01-22 京东方科技集团股份有限公司 背光源分离设备
KR102437535B1 (ko) 2016-11-15 2022-08-30 코닝 인코포레이티드 기판을 처리하는 방법
KR102560167B1 (ko) * 2018-10-04 2023-07-25 코닝 인코포레이티드 디본딩 서포트 장치 및 이를 이용한 디본딩 방법
CN109926913B (zh) * 2019-04-24 2024-04-16 蚌埠中光电科技有限公司 一种浮法tft-lcd玻璃面研磨取片装置
CN109926912A (zh) * 2019-04-24 2019-06-25 蚌埠中光电科技有限公司 一种浮法tft-lcd玻璃面研磨吸附垫滚筒贴片装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2991110B2 (ja) * 1996-05-01 1999-12-20 日本電気株式会社 基板吸着保持装置
JP2000084844A (ja) * 1998-09-17 2000-03-28 Asahi Glass Co Ltd 板状体の剥離方法及びその装置
JP4103123B2 (ja) * 1998-09-18 2008-06-18 旭硝子株式会社 板状体の剥離方法及びその装置
JP2004195607A (ja) * 2002-12-19 2004-07-15 Mitsubishi Paper Mills Ltd 板状部材の研磨方法

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI417939B (zh) * 2009-02-06 2013-12-01 Asahi Glass Co Ltd A manufacturing method of an electronic device, and a peeling device for the same
TWI400166B (zh) * 2009-08-31 2013-07-01 Asahi Glass Co Ltd Stripping device
TWI452382B (zh) * 2010-04-30 2014-09-11 Lg Display Co Ltd 平面顯示裝置之製造設備與製造方法
US8858859B2 (en) 2010-04-30 2014-10-14 Lg Display Co., Ltd. Apparatus and method of fabricating flat panel display device
TWI654654B (zh) 2014-05-03 2019-03-21 日商半導體能源研究所股份有限公司 疊層體的基板分離設備
CN110794598A (zh) * 2018-08-01 2020-02-14 夏普株式会社 面板的剥离方法、显示面板的制造方法、以及捕捉治具
CN110794598B (zh) * 2018-08-01 2022-07-05 夏普株式会社 捕捉治具

Also Published As

Publication number Publication date
TWI362308B (ja) 2012-04-21
KR20080079240A (ko) 2008-08-29
JP2007185725A (ja) 2007-07-26
WO2007080714A1 (ja) 2007-07-19
KR101213522B1 (ko) 2012-12-18
JP5307970B2 (ja) 2013-10-02

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees