TW200736143A - Apparatus and method for transferring a glass substrate - Google Patents

Apparatus and method for transferring a glass substrate

Info

Publication number
TW200736143A
TW200736143A TW095146785A TW95146785A TW200736143A TW 200736143 A TW200736143 A TW 200736143A TW 095146785 A TW095146785 A TW 095146785A TW 95146785 A TW95146785 A TW 95146785A TW 200736143 A TW200736143 A TW 200736143A
Authority
TW
Taiwan
Prior art keywords
glass substrate
gas
transferring
ejected
ejection holes
Prior art date
Application number
TW095146785A
Other languages
Chinese (zh)
Other versions
TWI327552B (en
Inventor
Hoon Kim
Original Assignee
Advanced Display Proc Eng Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Advanced Display Proc Eng Co filed Critical Advanced Display Proc Eng Co
Publication of TW200736143A publication Critical patent/TW200736143A/en
Application granted granted Critical
Publication of TWI327552B publication Critical patent/TWI327552B/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G53/00—Conveying materials in bulk through troughs, pipes or tubes by floating the materials or by flow of gas, liquid or foam
    • B65G53/34—Details
    • B65G53/40—Feeding or discharging devices
    • B65G53/42—Nozzles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G43/00—Control devices, e.g. for safety, warning or fault-correcting
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/068—Stacking or destacking devices; Means for preventing damage to stacked sheets, e.g. spaces
    • B65G49/069—Means for avoiding damage to stacked plate glass, e.g. by interposing paper or powder spacers in the stack
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G53/00—Conveying materials in bulk through troughs, pipes or tubes by floating the materials or by flow of gas, liquid or foam
    • B65G53/34—Details
    • B65G53/66—Use of indicator or control devices, e.g. for controlling gas pressure, for controlling proportions of material and gas, for indicating or preventing jamming of material
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2207/00—Indexing codes relating to constructional details, configuration and additional features of a handling device, e.g. Conveyors
    • B65G2207/40—Safety features of loads, equipment or persons
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/02—Controlled or contamination-free environments or clean space conditions

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Nonlinear Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Computer Hardware Design (AREA)
  • Optics & Photonics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Surface Treatment Of Glass (AREA)

Abstract

There is provided an apparatus and method for transferring a glass substrate. The apparatus includes a gas-supplying unit supplying gas, an ejection plate with a plurality of ejection holes through which the gas is ejected, and a blocking plate blocking locally the gas ejected from the plurality of ejection holes. According to the present invention, it is made possible to prevent the glass substrate to be contaminated with particles because the glass substrate is not transferred through the physical contact with any unit such as a roller. Furthermore, the glass substrate does not slope during transfer because the gas continues to suspend the glass substrate in the air.
TW095146785A 2005-12-16 2006-12-14 Apparatus and method for transferring a glass substrate TWI327552B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020050124359A KR101213991B1 (en) 2005-12-16 2005-12-16 Substrate conveyer and substrate conveying method

Publications (2)

Publication Number Publication Date
TW200736143A true TW200736143A (en) 2007-10-01
TWI327552B TWI327552B (en) 2010-07-21

Family

ID=38165095

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095146785A TWI327552B (en) 2005-12-16 2006-12-14 Apparatus and method for transferring a glass substrate

Country Status (3)

Country Link
KR (1) KR101213991B1 (en)
CN (1) CN1982179B (en)
TW (1) TWI327552B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102583992A (en) * 2010-11-04 2012-07-18 康宁股份有限公司 Methods and apparatus for guiding flexible glass ribbons

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5396695B2 (en) * 2007-06-29 2014-01-22 株式会社Ｉｈｉ Levitation unit and levitating transfer device
JP5223615B2 (en) * 2008-11-20 2013-06-26 株式会社Ｉｈｉ Method and apparatus for detecting floating conveyance state of thin plate
CN102530555A (en) * 2011-11-08 2012-07-04 彩虹（合肥）液晶玻璃有限公司 Non-contacting and bearing against handling method of A side of liquid crystal glass substrate
JP6560198B2 (en) * 2014-05-12 2019-08-14 株式会社日本製鋼所 Laser annealing apparatus, continuous conveyance path for laser annealing treatment, and laser annealing treatment method
CN107108304B (en) * 2014-11-17 2020-12-22 康宁公司 Ultrasonic near-field thermal glass delivery and formation
KR101726058B1 (en) * 2015-07-21 2017-04-12 주식회사 포스코 fluid blowing roller unit for steel sheet
CN105424876A (en) * 2015-11-04 2016-03-23 中国直升机设计研究所 Calibrating device for fire extinguishing agent concentration measuring system
CN105424542A (en) * 2015-11-04 2016-03-23 中国直升机设计研究所 Calibrating method used for fire extinguishing agent concentration measuring system
CN105712045B (en) * 2016-04-27 2017-12-12 京东方科技集团股份有限公司 Transmission equipment
KR20180023413A (en) * 2016-08-26 2018-03-07 세메스 주식회사 Apparatus for transferring a substrate
JP7201808B2 (en) * 2019-06-28 2023-01-10 Hoya株式会社 Glass plate manufacturing method and magnetic disk manufacturing method
CN110911335B (en) * 2019-11-13 2022-05-31 深圳市华星光电半导体显示技术有限公司 Air-float supporting platform
CN110670070A (en) * 2019-11-19 2020-01-10 江苏上达电子有限公司 Design method of liquid floating spraying disc

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3975057A (en) * 1975-02-06 1976-08-17 The Motch & Merryweather Machinery Company Stopping device for air conveyor
US4462720A (en) * 1978-10-02 1984-07-31 Precision Metal Fabricators, Inc. Air table system
FR2534243B1 (en) * 1982-10-11 1986-02-14 Saint Gobain Vitrage PROCESS FOR THE TRANSPORT OF GLASS SHEETS CARRIED TO THEIR DEFORMATION TEMPERATURE, ITS APPLICATION TO BOMBING AND DEVICE FOR ITS IMPLEMENTATION
US5222840A (en) * 1991-06-21 1993-06-29 The Stolle Corporation Double plenum air conveyor/accumulator
US5478173A (en) * 1993-06-24 1995-12-26 Simplimatic Engineering Company Damperless controlled speed air conveyor
JP3718014B2 (en) * 1996-11-01 2005-11-16 東レエンジニアリング株式会社 Plate-shaped material transfer device and non-contact transfer line
JPH11268830A (en) 1998-03-19 1999-10-05 Toray Eng Co Ltd Air flow conveying cell
JP4183525B2 (en) 2003-02-14 2008-11-19 シーケーディ株式会社 Thin plate support device
DE10394251D2 (en) * 2003-04-03 2006-03-02 Univ Hannover Device for generating a predetermined orientation

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102583992A (en) * 2010-11-04 2012-07-18 康宁股份有限公司 Methods and apparatus for guiding flexible glass ribbons
CN102583992B (en) * 2010-11-04 2015-03-11 康宁股份有限公司 Methods and apparatus for guiding flexible glass ribbons

Also Published As

Publication number Publication date
KR101213991B1 (en) 2012-12-20
TWI327552B (en) 2010-07-21
CN1982179B (en) 2012-08-08
KR20070063942A (en) 2007-06-20
CN1982179A (en) 2007-06-20

Similar Documents

Publication Publication Date Title
TW200736143A (en) Apparatus and method for transferring a glass substrate
WO2008087796A1 (en) Holding apparatus and holding method
TW200943454A (en) Apparatus for treating substrate
EP2195827A4 (en) Showerhead, substrate processing apparatus including the showerhead, and plasma supplying method using the showerhead
TW200721316A (en) Substrate processing apparatus, cooling gas feed nozzle and method for manufacturing semiconductor device
SG143241A1 (en) Substrate support and lithographic process
TW200717629A (en) Apparatus for removing foreign material from substrate and method for removing foreign material from substrate
TW200746230A (en) Developing treatment apparatus and developing treatment method
TW200617208A (en) Gas distributor and apparatus using the same
WO2006034130A3 (en) Apparatus and process for surface treatment of substrate using an activated reactive gas
IL192072A0 (en) Device, system and method for the surface treatment of substrates
WO2007112454A3 (en) Apparatus and method for processing substrates using one or more vacuum transfer chamber units
TW200802543A (en) Cluster tool for epitaxial film formation
WO2007130909A3 (en) Uv assisted thermal processing
TW200802563A (en) Liquid processing apparatus
TW200737333A (en) Substrate treatment apparatus and substrate treatment method
TW200629008A (en) Liquid removing apparatus, exposure apparatus and device manufacturing method
TW200741850A (en) Apparatus and method for etching a substrate
TW200625387A (en) System for cleaning a surface using cryogenic aerosol and fluid reactant
WO2009104918A3 (en) Apparatus and method for processing substrate
TW200638098A (en) Treatment system
WO2012036499A3 (en) Thin film deposition apparatus
SG148971A1 (en) Substrates and methods of using those substrates
EP1986471A4 (en) Light-emitting device, method for manufacturing light-emitting device, and substrate processing apparatus
TW200503097A (en) Method and apparatus for removing a target layer from a substrate using reactive gases

Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees