TW200731663A - Manufacturing method of piezoelectric vibrating piece, piezoelectric vibrating piece, piezoelectric vibrator, oscillator, electronic equipment and radio-controlled timepiece - Google Patents

Manufacturing method of piezoelectric vibrating piece, piezoelectric vibrating piece, piezoelectric vibrator, oscillator, electronic equipment and radio-controlled timepiece

Info

Publication number
TW200731663A
TW200731663A TW095141707A TW95141707A TW200731663A TW 200731663 A TW200731663 A TW 200731663A TW 095141707 A TW095141707 A TW 095141707A TW 95141707 A TW95141707 A TW 95141707A TW 200731663 A TW200731663 A TW 200731663A
Authority
TW
Taiwan
Prior art keywords
vibrating piece
piezoelectric vibrating
manufacturing
piezoelectric
face
Prior art date
Application number
TW095141707A
Other languages
English (en)
Other versions
TWI401880B (zh
Inventor
Kiyoshi Aratake
Original Assignee
Seiko Instr Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Instr Inc filed Critical Seiko Instr Inc
Publication of TW200731663A publication Critical patent/TW200731663A/zh
Application granted granted Critical
Publication of TWI401880B publication Critical patent/TWI401880B/zh

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/21—Crystal tuning forks
    • H03H9/215—Crystal tuning forks consisting of quartz
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/0538—Constructional combinations of supports or holders with electromechanical or other electronic elements
    • H03H9/0542—Constructional combinations of supports or holders with electromechanical or other electronic elements consisting of a lateral arrangement
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/0595—Holders or supports the holder support and resonator being formed in one body
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/10—Mounting in enclosures
    • H03H9/1007—Mounting in enclosures for bulk acoustic wave [BAW] devices
    • H03H9/1014—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by a frame built on a substrate and a cap, the frame having no mechanical contact with the BAW device
    • H03H9/1021—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by a frame built on a substrate and a cap, the frame having no mechanical contact with the BAW device the BAW device being of the cantilever type
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
    • H03H2003/026—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks the resonators or networks being of the tuning fork type

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Oscillators With Electromechanical Resonators (AREA)
TW95141707A 2005-11-30 2006-11-10 壓電振動件，其製造方法，壓電振動器，振盪器，電子設備及無線電控制之時計 TWI401880B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005346399A JP4694953B2 (ja) 2005-11-30 2005-11-30 圧電振動片の製造方法、圧電振動片、圧電振動子、発振器、電子機器及び電波時計

Publications (2)

Publication Number Publication Date
TW200731663A true TW200731663A (en) 2007-08-16
TWI401880B TWI401880B (zh) 2013-07-11

Family

ID=38232134

Family Applications (1)

Application Number Title Priority Date Filing Date
TW95141707A TWI401880B (zh) 2005-11-30 2006-11-10 壓電振動件，其製造方法，壓電振動器，振盪器，電子設備及無線電控制之時計

Country Status (3)

Country Link
US (1) US7553609B2 (zh)
JP (1) JP4694953B2 (zh)
TW (1) TWI401880B (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI404330B (zh) * 2007-08-06 2013-08-01 Nihon Dempa Kogyo Co 音叉型水晶振動子及其頻率調整方法

Families Citing this family (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ES2326742T3 (es) * 2005-05-27 2009-10-19 Wavelight Laser Technologie Ag Lente intraocular.
JP4389924B2 (ja) * 2006-11-07 2009-12-24 エプソントヨコム株式会社 圧電デバイス
JP2009060478A (ja) * 2007-09-03 2009-03-19 Nippon Dempa Kogyo Co Ltd 圧電振動片の製造方法及び音叉型圧電振動片
JP4539708B2 (ja) 2007-11-02 2010-09-08 エプソントヨコム株式会社 圧電振動片、圧電振動子および加速度センサ
JP4533934B2 (ja) 2008-01-15 2010-09-01 エプソントヨコム株式会社 振動片及び振動子の製造方法
JP2009178780A (ja) * 2008-01-29 2009-08-13 Seiko Instruments Inc キャリア、ウエハ研磨装置、ウエハ研磨方法、圧電振動子の製造方法、圧電振動子、発振器、電子機器及び電波時計
JP2009182555A (ja) * 2008-01-30 2009-08-13 Seiko Instruments Inc 圧電振動片、圧電振動子、発振器、電子機器及び電波時計並びに圧電振動片の製造方法
JP5302545B2 (ja) * 2008-02-05 2013-10-02 株式会社タムラ製作所 圧電トランス
JP5445114B2 (ja) * 2009-03-02 2014-03-19 セイコーエプソン株式会社 振動片および発振器
JP5099385B2 (ja) * 2010-06-09 2012-12-19 セイコーエプソン株式会社 振動片及び振動子
JP5659585B2 (ja) * 2010-07-09 2015-01-28 セイコーエプソン株式会社 振動片、振動子、発振器及び電子機器
JP5617392B2 (ja) * 2010-07-09 2014-11-05 セイコーエプソン株式会社 振動片、振動子及び発振器
JP5912051B2 (ja) * 2012-02-20 2016-04-27 エスアイアイ・クリスタルテクノロジー株式会社 圧電振動片、圧電振動子、発振器、電子機器および電波時計
JP6200636B2 (ja) * 2012-07-26 2017-09-20 エスアイアイ・クリスタルテクノロジー株式会社 圧電振動片、圧電振動子、発振器、電子機器、及び電波時計
JP2014123911A (ja) 2012-12-21 2014-07-03 Daishinku Corp 音叉型水晶振動片
JP5742868B2 (ja) * 2013-04-11 2015-07-01 株式会社大真空 音叉型水晶振動片、及び水晶振動デバイス
KR101983148B1 (ko) * 2013-08-29 2019-08-28 삼성전기주식회사 압전 진동자용 압전편 및 그 제조 방법
JP6413316B2 (ja) * 2014-04-21 2018-10-31 セイコーエプソン株式会社 振動片の製造方法
JP2015015770A (ja) * 2014-10-09 2015-01-22 セイコーエプソン株式会社 屈曲振動片、振動子、発振器及び電子機器
JP6582501B2 (ja) * 2015-04-02 2019-10-02 セイコーエプソン株式会社 振動素子、振動子、電子機器および移動体
JP6623682B2 (ja) 2015-10-28 2019-12-25 セイコーエプソン株式会社 物理量検出振動片、物理量検出装置、電子機器および移動体
JP7300256B2 (ja) * 2018-10-31 2023-06-29 エスアイアイ・クリスタルテクノロジー株式会社 圧電振動片、及び圧電振動子
JP6816805B2 (ja) * 2019-10-25 2021-01-20 セイコーエプソン株式会社 振動素子、振動子、発振器、電子機器および移動体
JP7454964B2 (ja) * 2020-03-09 2024-03-25 エスアイアイ・クリスタルテクノロジー株式会社 圧電振動片、及び圧電振動子
JP2023065836A (ja) * 2021-10-28 2023-05-15 セイコーエプソン株式会社 振動素子の製造方法
JP2023082271A (ja) * 2021-12-02 2023-06-14 セイコーエプソン株式会社 振動素子の製造方法
JP2023085722A (ja) * 2021-12-09 2023-06-21 セイコーエプソン株式会社 振動素子の製造方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2000044092A1 (en) * 1999-01-20 2000-07-27 Seiko Epson Corporation Vibrator and electronic device with vibrator
US6939475B2 (en) * 2001-08-31 2005-09-06 Daishinku Corporation Etching method, etched product formed by the same, and piezoelectric vibration device, method for producing the same
JP2003258589A (ja) * 2002-02-26 2003-09-12 Seiko Epson Corp 圧電デバイスと圧電デバイスを利用した電波時計、及び圧電デバイスを利用した携帯電話装置ならびに圧電デバイスを利用した電子機器
JP4075833B2 (ja) * 2003-06-04 2008-04-16 セイコーエプソン株式会社 圧電振動ジャイロ素子、その製造方法、及び圧電振動ジャイロセンサ
JP3797355B2 (ja) * 2003-10-22 2006-07-19 セイコーエプソン株式会社 圧電振動子の製造方法
DE602004009204T2 (de) * 2004-12-20 2008-06-26 Eta Sa Manufacture Horlogère Suisse Wandler zur Winkelgeschwindigkeitsmessung

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI404330B (zh) * 2007-08-06 2013-08-01 Nihon Dempa Kogyo Co 音叉型水晶振動子及其頻率調整方法

Also Published As

Publication number Publication date
JP2007158386A (ja) 2007-06-21
US20070159029A1 (en) 2007-07-12
JP4694953B2 (ja) 2011-06-08
US7553609B2 (en) 2009-06-30
TWI401880B (zh) 2013-07-11

Similar Documents

Publication Publication Date Title
TW200731663A (en) Manufacturing method of piezoelectric vibrating piece, piezoelectric vibrating piece, piezoelectric vibrator, oscillator, electronic equipment and radio-controlled timepiece
CN102692867B (zh) 可移除声辐射膜,其组装方法,报时表套壳和音乐报时表
WO2006083880A3 (en) Method and device for improving oral health
ATE539455T1 (de) Positives aktives elektrodenmaterial, lithiumsekundärbatterie und herstellungsverfahren dafür
DE602006020560D1 (de) Aus kristallinem material hergestelltes analoganzeigeelement, mit einem anzeigeelement dieses typs ausgestattete uhr und herstellungsverfahren dafür
WO2000045617A3 (de) Hör-behandlungsgerät
WO2007137058A3 (en) Methods to reduce the minimum pitch in a pattern
DE502005007431D1 (de) Mehrfachreflexions-verzögerungsstrecke für einen laserstrahl sowie resonator bzw. kurzpulslaservorri
TW201136151A (en) Piezoelectric vibrator manufacturing method, oscillator, electronic device, and atomic timepiece
JP2016085190A5 (zh)
WO2006029367A3 (en) A personal mask test system
DE502004012041D1 (de) Energiefiltereinrichtung
JP4417809B2 (ja) 振動子の製造方法
CN103854633A (zh) 一种手摇式音乐盒
TW200705115A (en) Display device, method of manufacturing the same and mask for manufacturing the same
TW200711518A (en) Mask, mask manufacturing method, film forming method, electro-optic device manufacturing method, and electronic apparatus
EP1521362A3 (en) Method of producing surface acoustic wave device and the surface acoustic wave device
EP1569334A3 (en) Surface acoustic wave device
TW200603264A (en) Mask, method for producing the same, deposition method, electronic device, and electronic apparatus
JP5171551B2 (ja) 音叉型水晶振動素子の周波数調整方法
EP1447863A3 (en) Etching mask
TW200618062A (en) Solid immersion lens lithography
DE502006009385D1 (de) Vorrichtung zur Beeinflussung von Licht
EP1490495A4 (en) BONE GENERATION BY GENE THERAPY
DE60238147D1 (de) Verfahren zur selbstanordnung elektronischer schaltkreise und damit hergestellte schaltungen

Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees