TW200730293A - XYθ moving carrier - Google Patents

XYθ moving carrier

Info

Publication number
TW200730293A
TW200730293A TW095142082A TW95142082A TW200730293A TW 200730293 A TW200730293 A TW 200730293A TW 095142082 A TW095142082 A TW 095142082A TW 95142082 A TW95142082 A TW 95142082A TW 200730293 A TW200730293 A TW 200730293A
Authority
TW
Taiwan
Prior art keywords
carrier
moving
supporting members
flat plate
carrier base
Prior art date
Application number
TW095142082A
Other languages
English (en)
Other versions
TWI375603B (zh
Inventor
Yoneta Tanaka
Original Assignee
Ushio Electric Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ushio Electric Inc filed Critical Ushio Electric Inc
Publication of TW200730293A publication Critical patent/TW200730293A/zh
Application granted granted Critical
Publication of TWI375603B publication Critical patent/TWI375603B/zh

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K5/00—Casings; Enclosures; Supports
    • H02K5/04—Casings or enclosures characterised by the shape, form or construction thereof
    • H02K5/16—Means for supporting bearings, e.g. insulating supports or means for fitting bearings in the bearing-shields
    • H02K5/167—Means for supporting bearings, e.g. insulating supports or means for fitting bearings in the bearing-shields using sliding-contact or spherical cap bearings
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K5/00—Casings; Enclosures; Supports
    • H02K5/04—Casings or enclosures characterised by the shape, form or construction thereof
    • H02K5/16—Means for supporting bearings, e.g. insulating supports or means for fitting bearings in the bearing-shields
    • H02K5/173—Means for supporting bearings, e.g. insulating supports or means for fitting bearings in the bearing-shields using bearings with rolling contact, e.g. ball bearings
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K5/00—Casings; Enclosures; Supports
    • H02K5/04—Casings or enclosures characterised by the shape, form or construction thereof
    • H02K5/20—Casings or enclosures characterised by the shape, form or construction thereof with channels or ducts for flow of cooling medium
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K7/00—Arrangements for handling mechanical energy structurally associated with dynamo-electric machines, e.g. structural association with mechanical driving motors or auxiliary dynamo-electric machines
    • H02K7/08—Structural association with bearings
    • H02K7/085—Structural association with bearings radially supporting the rotary shaft at only one end of the rotor

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Electromagnetism (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Microscoopes, Condenser (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Machine Tool Units (AREA)
TW095142082A 2006-02-10 2006-11-14 XYθ moving carrier TW200730293A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006034071A JP4702083B2 (ja) 2006-02-10 2006-02-10 ＸＹθ移動ステージ

Publications (2)

Publication Number Publication Date
TW200730293A true TW200730293A (en) 2007-08-16
TWI375603B TWI375603B (zh) 2012-11-01

Family

ID=38492597

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095142082A TW200730293A (en) 2006-02-10 2006-11-14 XYθ moving carrier

Country Status (4)

Country Link
JP (1) JP4702083B2 (zh)
KR (1) KR101004828B1 (zh)
CN (1) CN101017331B (zh)
TW (1) TW200730293A (zh)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4853836B2 (ja) * 2007-09-19 2012-01-11 株式会社安川電機 精密微動位置決め装置およびそれを備えた微動位置決めステージ
US20110042874A1 (en) * 2009-08-20 2011-02-24 Nikon Corporation Object processing apparatus, exposure apparatus and exposure method, and device manufacturing method
US20110053092A1 (en) * 2009-08-20 2011-03-03 Nikon Corporation Object processing apparatus, exposure apparatus and exposure method, and device manufacturing method
KR101017626B1 (ko) * 2009-08-27 2011-02-28 (주)유비프리시젼 Ｌｃｄ검사 장비용 얼라인먼트 스테이지
CN106075879B (zh) * 2016-07-12 2019-04-12 石家庄学院 一种残疾人下围棋装置及辅助残疾人下围棋方法
CN107885037B (zh) 2016-09-30 2020-01-24 上海微电子装备（集团）股份有限公司 一种工件台移入移出装置
CN109482976B (zh) * 2018-10-29 2020-05-08 武汉华电工程装备有限公司 一种金属板材的切割加工系统
CN109500624B (zh) * 2018-10-29 2020-01-10 武汉华电工程装备有限公司 一种h型长梁上用板的加工工艺
CN111761375A (zh) * 2020-05-27 2020-10-13 刘斌兴 一种模型制造专用可调式分切设备
CN113419405B (zh) * 2021-04-28 2022-06-03 厦门理工学院 一种卷对卷铜箔精密ldi曝光机
KR102549372B1 (ko) * 2021-09-01 2023-06-29 심재만 그립력이 향상된 그리퍼 및 경량화 구조를 가지는 링타입 자동 공구 교환장치

Family Cites Families (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5254108A (en) * 1975-10-30 1977-05-02 Nippon Telegr & Teleph Corp <Ntt> Surface pulse motor
US4706007A (en) * 1985-06-25 1987-11-10 Kabushiki Kaisha Yaskawa Denki Seisakusho Surface pulse motor
JPS62100161A (ja) * 1985-10-23 1987-05-09 Shin Etsu Chem Co Ltd 平面モ−タ
JPH0348557Y2 (zh) * 1986-06-13 1991-10-16
JPH03112393A (ja) * 1989-09-21 1991-05-13 Kao Corp 搬送装置
JP2691672B2 (ja) * 1992-12-29 1997-12-17 株式会社三協精機製作所 直進電機
JPH0731126A (ja) * 1993-07-09 1995-01-31 Yaskawa Electric Corp 平面ステップモータの脱調復帰装置と方法
JPH10256356A (ja) * 1997-03-17 1998-09-25 Nikon Corp 位置決め装置及び該装置を備えた露光装置
JP3829335B2 (ja) * 1997-07-18 2006-10-04 株式会社ニコン 励磁ユニットおよびそれを用いた平面型モータ、およびそれを用いたステージ装置、およびそれを用いた露光装置
JPH11195578A (ja) * 1997-12-26 1999-07-21 Nikon Corp 定盤支持装置および露光装置
JP2000137055A (ja) * 1998-10-30 2000-05-16 Shinano Electronics:Kk Ｉｃハンドラ
JP2002112526A (ja) * 2000-06-26 2002-04-12 Nikon Corp 平面モータ、ステージ位置決めシステム、露光装置
JP4335425B2 (ja) 2000-08-28 2009-09-30 住友重機械工業株式会社 ステージ装置
JP2003023764A (ja) * 2001-07-06 2003-01-24 Canon Inc リニアパルスモータ、ステージ装置及び露光装置
JP3732763B2 (ja) 2001-07-13 2006-01-11 住友重機械工業株式会社 ステージ装置
JP2003229350A (ja) * 2002-02-01 2003-08-15 Nikon Corp ステージ装置及び露光装置
JP4122922B2 (ja) * 2002-10-18 2008-07-23 ウシオ電機株式会社 平面ステージ装置
EP1510867A1 (en) * 2003-08-29 2005-03-02 ASML Netherlands B.V. Lithographic apparatus and device manufacturing method
JP2006014391A (ja) * 2004-06-22 2006-01-12 Yaskawa Electric Corp リニアモータ電機子、リニアモータおよび平面モータ
JP2006020478A (ja) 2004-07-05 2006-01-19 Neomax Co Ltd ステージ装置
US7148590B1 (en) * 2004-07-23 2006-12-12 Lampson Clark E Polyphase sawyer motor forcer
JP4413826B2 (ja) * 2005-07-13 2010-02-10 住友重機械工業株式会社 平面ステージ装置及びその制御方法
JP4899469B2 (ja) * 2005-12-22 2012-03-21 ウシオ電機株式会社 平面ステージ装置

Also Published As

Publication number Publication date
CN101017331B (zh) 2010-09-22
JP4702083B2 (ja) 2011-06-15
CN101017331A (zh) 2007-08-15
JP2007214449A (ja) 2007-08-23
KR101004828B1 (ko) 2010-12-28
KR20070081419A (ko) 2007-08-16
TWI375603B (zh) 2012-11-01

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees