JPS5254108A - Surface pulse motor - Google Patents
Surface pulse motorInfo
- Publication number
- JPS5254108A JPS5254108A JP50129795A JP12979575A JPS5254108A JP S5254108 A JPS5254108 A JP S5254108A JP 50129795 A JP50129795 A JP 50129795A JP 12979575 A JP12979575 A JP 12979575A JP S5254108 A JPS5254108 A JP S5254108A
- Authority
- JP
- Japan
- Prior art keywords
- pulse motor
- surface pulse
- highthrust
- magnetic attraction
- effectively utilizing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50129795A JPS5254108A (en) | 1975-10-30 | 1975-10-30 | Surface pulse motor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50129795A JPS5254108A (en) | 1975-10-30 | 1975-10-30 | Surface pulse motor |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5254108A true JPS5254108A (en) | 1977-05-02 |
Family
ID=15018407
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP50129795A Pending JPS5254108A (en) | 1975-10-30 | 1975-10-30 | Surface pulse motor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5254108A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6259174B1 (en) | 1997-08-21 | 2001-07-10 | Nikon Corporation | Positioning apparatus, drive unit and exposure apparatus incorporating the positioning apparatus |
JP2002112526A (en) * | 2000-06-26 | 2002-04-12 | Nikon Corp | Flat motor, stage-positioning system, and aligner |
JP2007214449A (en) * | 2006-02-10 | 2007-08-23 | Ushio Inc | XYtheta MOVING STAGE |
JP2008514175A (en) * | 2004-09-22 | 2008-05-01 | シーメンス アクチエンゲゼルシヤフト | Electric machine |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4836611A (en) * | 1971-09-08 | 1973-05-30 |
-
1975
- 1975-10-30 JP JP50129795A patent/JPS5254108A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4836611A (en) * | 1971-09-08 | 1973-05-30 |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6259174B1 (en) | 1997-08-21 | 2001-07-10 | Nikon Corporation | Positioning apparatus, drive unit and exposure apparatus incorporating the positioning apparatus |
JP2002112526A (en) * | 2000-06-26 | 2002-04-12 | Nikon Corp | Flat motor, stage-positioning system, and aligner |
JP2008514175A (en) * | 2004-09-22 | 2008-05-01 | シーメンス アクチエンゲゼルシヤフト | Electric machine |
JP2008514168A (en) * | 2004-09-22 | 2008-05-01 | シーメンス アクチエンゲゼルシヤフト | Secondary parts of electrical machines |
US7800256B2 (en) | 2004-09-22 | 2010-09-21 | Siemens Aktiengesellschaft | Electric machine |
JP2007214449A (en) * | 2006-02-10 | 2007-08-23 | Ushio Inc | XYtheta MOVING STAGE |
JP4702083B2 (en) * | 2006-02-10 | 2011-06-15 | ウシオ電機株式会社 | XYθ moving stage |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
A131 | Notification of reasons for refusal |
Effective date: 20040330 Free format text: JAPANESE INTERMEDIATE CODE: A131 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20040630 |
|
A602 | Written permission of extension of time |
Effective date: 20040816 Free format text: JAPANESE INTERMEDIATE CODE: A602 |
|
A521 | Written amendment |
Effective date: 20040929 Free format text: JAPANESE INTERMEDIATE CODE: A523 |
|
A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20050621 |