JPS62100161A - 平面モ−タ - Google Patents

平面モ−タ

Info

Publication number
JPS62100161A
JPS62100161A JP23711685A JP23711685A JPS62100161A JP S62100161 A JPS62100161 A JP S62100161A JP 23711685 A JP23711685 A JP 23711685A JP 23711685 A JP23711685 A JP 23711685A JP S62100161 A JPS62100161 A JP S62100161A
Authority
JP
Japan
Prior art keywords
mover
permanent magnet
electromagnets
electromagnet
arrow
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP23711685A
Other languages
English (en)
Other versions
JPH0574305B2 (ja
Inventor
Daiki Ebihara
大樹 海老原
Kiyoutarou Shinpo
新保 恭太郎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Chemical Co Ltd
Original Assignee
Shin Etsu Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Chemical Co Ltd filed Critical Shin Etsu Chemical Co Ltd
Priority to JP23711685A priority Critical patent/JPS62100161A/ja
Publication of JPS62100161A publication Critical patent/JPS62100161A/ja
Publication of JPH0574305B2 publication Critical patent/JPH0574305B2/ja
Granted legal-status Critical Current

Links

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。

Description

【発明の詳細な説明】 (産業上の利用分野) 本発明は、物体を平面上の任意位置に移動できる平面モ
ータに関するものである。
(従来の技術) テーブル上の物体を任意位置に移動させる装置としては
、らせんの送りねじを利用したものが従来使用されてい
る。
たとえば第7図に示すように、Xテーブル1の裏面に固
定したナツト2にらせんを刻んだX送りねじ3を嵌合さ
せ、X駆動モータ4によりX送りねじ3を回転させると
、Xテーブル1は矢印X方向に往復させることができる
。このXテーブル1を同様の構造のYテーブル5の上に
載置し、YテーブルのY送りねじ6の方向をX送りねじ
3に対し直角方向に向けると、Y駆動モータ7の回転に
よりXテーブル1を矢印Yの方向に往復させることがで
きる。駆動モータ4.7を同時に回転させれば、Xテー
ブル上の物体8を平面上で任意の位置に移動させ得る。
(発明が解決しようとする問題点) しかしながら、上記従来の方法には、 1)駆動モータ、送りねじ等の機構が複雑で装置が大型
となり、a整も困菫である。
2)給油等の保守が面倒である。
という欠点があった。
(問題点を解決するための手段) 本発明は上記問題点を解決するため、永久磁石と電磁石
の相互作用を利用し、物体を2次元平面の広がり内に移
動できる装置を完成したもので、これはそれぞれ平面上
に密接配設した電磁石のステータと、永久磁石のムーバ
とよりなり、該電磁石の鉄心の上下端面はそれぞれ長方
形または正方形をなし、上端面を縦横に分割して形成し
た横の長さx、縦の長さyの小長方形または辺の長さ2
の小正方形を、交互に突極部と凹部となし、下端面は上
端面よりそれぞれx X 3 / 4、yg3/4゜z
X3/4だけ外方に張出し、該永久磁石は断面が該小長
方形または小正方形と同じ形状の平板であり、かつ隣り
あう永久磁石は磁化軸の方向が常に逆であることを特徴
とする平面モータである。
以下に本発明を、例示する図面によって詳細に説明する
が、本発明はこれに限定されるものではない。
第1図において、ステータ旦は電磁5旦を平面上に密接
して配設したものである。電磁石は第2図(a)に拡大
して示すように、鉄心12の上端面が長方形をなし、第
2図(b)に示すように、縦横に分割して形成した横の
長さx、縦の長さyの小長方形(図面では35個)を、
縦横に交互に突極部と凹部とする(図面では突極部18
個、凹部17個)。第3図は工作上の便のため内部の突
極部6個を省略した場合のものである。鉄心の下端面は
上端面より横縦の長さがそれぞれx X 3 / 4、
yx3/4だけ長い長方形をなす。
ステータ、叫上に載置するムーバ、口は、断面が電磁石
上端面の小長方形と等しい長方形である平板の永久磁石
を、平面上に密接して配設し、全表面を補助材14で被
覆してなるが、隣りあう磁石は磁化軸の方向を常に逆方
向とするため、ムーバの表面は、第4図に示すように、
常に異種の磁極が隣接している(当然裏面も異種の磁極
が隣接している)、かかるムーバ貝をステータ赳の上に
、第1図に示すように載置する。第1図のA−A’線を
通る断面図である第5図(a)において、電磁石の鉄心
の下端面は上端面より横の長さがxX3/4だけ長い長
方形であるため、各電磁石の上端面間の隙間はxx3/
2となる。したがって奇数番目の電磁石Eよ0、E i
)、ELl、・・・の突極部に対してはムーバ旦の各永
久磁石−個が正対しているが、偶数番目の電磁石E13
、E i、、 Ei、、・・・の突極部に対しては二つ
の永久磁石が半分づつ各突極部に対向している。したが
って奇数番目の電磁石E11. E□1、E工9.・・
・のみを励磁すると、これらの電磁石は一つおきに励磁
コイルが逆方向に巻かれているので、奇数番目のすべて
の電磁石E工8.E工1、Els、・・・の突極部が、
これに正対するムーバ旦の永久磁石を吸引し、ムーバは
安定して静止保持される。
つぎに第5図(b)に示すように、奇数番目の電磁石E
工いE iff、Elい ・・・の励磁を止め。
偶数番目の電磁石E 1.2+ E、、、ElS、・・
・を励磁すると、これらの電磁石の励磁コイルも一つお
きに逆方向に巻かれているので、各突極部とこれに対向
するムーバの永久磁石との間に図面のX矢印方向の力が
働き、ムーバ旦はx X 1 / 2だけ移動して第5
図(c)の状態となって静止保持される。
つぎに偶数番目の電磁石E12. Ei、、E□い ・
・・の励磁を止め、奇数番目の電磁石E1□、El、。
E16.・・・を第5図(d)のように励磁すると、ム
ーバはふたたびX矢印方向の力を受けx×1/2だけ移
動して静止する。
以上はステータの選手前行の電磁石E、1、E42、E
l3、E工いE工いElい ・・・・により生じたX方
向の力であるが、2行目の電磁石E2i、 E、□、E
23、E2いE2いE2い ・・・・、3行目の電磁石
E31、E32、E3m、Eo、E35、E3い ・・
・・によっても同様にしてX矢印の方向の力を生ずる。
すなわち第6図に示すように、ステータ赳の各位置の電
磁5旦が一つおきに磁化され(これは第5図(a)の場
合で、突極部の極性をS、Nで示す)、選手前行以外の
行の電磁石もムーバを吸引保持して静止させる。第S図
(b)の場合は、励磁される電磁石が実線矢印の方向に
変り、選手前行の電磁石と同様にムーバをX矢印の方向
にx×172ステップだけ移動して静止させる。
第6図のX矢印の方向の移動も、点線矢印の方向に励磁
される電磁石を変えることにより、ムーバをX矢印の方
向にx X 1 / 2ステツプだけ移動して静止させ
る。
したがって前記x、Y方向の移動の操作を繰り返すこと
によって、ムーバ圏をステータ川の面上で横にx/2.
縦にy / 2のステップで移動静止させることが可能
である。
上下端面および永久磁石の断面が正方形の場合も同様に
してz / 2のステップで縦横に移動させることがで
きる。
またムーバを構成する永久磁石としては希土類永久磁石
を使用することにより、小型で強力な移動力、保持力を
もつモータを得ることができる。
(発明の効果) 本発明によれば、従来法に比べ装置が小型かつ簡単とな
り、動作が迅速なうえ取り扱い易く、給油等の保守作業
が簡単化されるという効果が得られる。
【図面の簡単な説明】
第1図は本発明のモータの斜視図を、第2図(a)は本
発明のモータの電磁石の斜視図を、(b)は本発明のモ
ータの電磁石の平面図を、第3図は本発明のモータの他
の例の電磁石の平面図を、第4図は本発明のムーバの平
面図の一部を、第5[1(a)、 (b)、(c)、(
d)は第1図のA−A’線を通る断面図を、第6図はス
テータを構成する電磁石の配置図を、第7図は従来の物
体移動装置の斜視図を示す。 1・・・Xテーブル、  2・・・ナツト、3・・・X
送りねじ、 4・・・X駆動モータ、5・・・Yテーブ
ル、 6・・・Y送りねじ。 7・・・Y駆動モータ、 8・・・物体、10−・・ス
テータ、  11−・・電磁石、12・・・鉄心、13
−・・ムーバ、14・・・補助材。 第1図 第2図 (a)             (b)第3図 第6図 第7図

Claims (1)

  1. 【特許請求の範囲】 1)それぞれ平面上に密接配設した電磁石のステータと
    、永久磁石のムーバとよりなり、該電磁石の鉄心の上下
    端面はそれぞれ長方形または正方形をなし、上端面を縦
    横に分割して形成した横の長さx、縦の長さyの小長方
    形または辺の長さzの小正方形を、交互に突極部と凹部
    となし、下端面は上端面よりそれぞれx×3/4、y×
    3/4、z×3/4だけ外方に張出し、該永久磁石は断
    面が該小長方形または小正方形と同じ形状の平板であり
    、かつ隣りあう永久磁石は磁化軸の方向が常に逆である
    ことを特徴とする平面モータ。 2)該永久磁石が希土類永久磁石である特許請求の範囲
    第1項記載の平面モータ。
JP23711685A 1985-10-23 1985-10-23 平面モ−タ Granted JPS62100161A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP23711685A JPS62100161A (ja) 1985-10-23 1985-10-23 平面モ−タ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP23711685A JPS62100161A (ja) 1985-10-23 1985-10-23 平面モ−タ

Publications (2)

Publication Number Publication Date
JPS62100161A true JPS62100161A (ja) 1987-05-09
JPH0574305B2 JPH0574305B2 (ja) 1993-10-18

Family

ID=17010647

Family Applications (1)

Application Number Title Priority Date Filing Date
JP23711685A Granted JPS62100161A (ja) 1985-10-23 1985-10-23 平面モ−タ

Country Status (1)

Country Link
JP (1) JPS62100161A (ja)

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Cited By (95)

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Publication number Priority date Publication date Assignee Title
JPH02133060A (ja) * 1988-11-14 1990-05-22 Shinko Electric Co Ltd パルスモータ
JPH06205575A (ja) * 1991-06-04 1994-07-22 Megamation Inc リニアモーターシステムのステータ
US6147421A (en) * 1998-11-16 2000-11-14 Nikon Corporation Platform positionable in at least three degrees of freedom by interaction with coils
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