TW200728729A - Probing apparatus - Google Patents
Probing apparatusInfo
- Publication number
- TW200728729A TW200728729A TW095141825A TW95141825A TW200728729A TW 200728729 A TW200728729 A TW 200728729A TW 095141825 A TW095141825 A TW 095141825A TW 95141825 A TW95141825 A TW 95141825A TW 200728729 A TW200728729 A TW 200728729A
- Authority
- TW
- Taiwan
- Prior art keywords
- screws
- circuit board
- printed circuit
- outer circumferential
- retainer plate
- Prior art date
Links
- 239000000523 sample Substances 0.000 abstract 2
- 125000006850 spacer group Chemical group 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
- G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
- G01R1/07364—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with provisions for altering position, number or connection of probe tips; Adapting to differences in pitch
- G01R1/07371—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with provisions for altering position, number or connection of probe tips; Adapting to differences in pitch using an intermediate card or back card with apertures through which the probes pass
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005327462A JP4860242B2 (ja) | 2005-11-11 | 2005-11-11 | プローブ装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200728729A true TW200728729A (en) | 2007-08-01 |
TWI317019B TWI317019B (zh) | 2009-11-11 |
Family
ID=37716047
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW095141825A TW200728729A (en) | 2005-11-11 | 2006-11-10 | Probing apparatus |
Country Status (5)
Country | Link |
---|---|
US (1) | US8063652B2 (zh) |
EP (1) | EP1785733A1 (zh) |
JP (1) | JP4860242B2 (zh) |
KR (1) | KR101337843B1 (zh) |
TW (1) | TW200728729A (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105102990A (zh) * | 2013-04-09 | 2015-11-25 | 泰克诺探头公司 | 电子器件的测试头 |
Families Citing this family (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2008123076A1 (ja) * | 2007-03-26 | 2008-10-16 | Advantest Corporation | 接続用ボード、プローブカード及びそれを備えた電子部品試験装置 |
DE102007027380A1 (de) * | 2007-06-11 | 2008-12-18 | Micronas Gmbh | Nadelkartenanordnung |
JP5046764B2 (ja) * | 2007-07-09 | 2012-10-10 | 株式会社日本マイクロニクス | プローブ組立体 |
KR100911660B1 (ko) * | 2007-07-11 | 2009-08-10 | (주)엠투엔 | 프로브 카드의 기판 조립체 및 이를 포함하는 프로브 카드 |
KR101328082B1 (ko) | 2007-08-07 | 2013-11-08 | (주) 미코에스앤피 | 프로브 카드 |
US7791361B2 (en) | 2007-12-10 | 2010-09-07 | Touchdown Technologies, Inc. | Planarizing probe card |
KR101045671B1 (ko) * | 2008-02-05 | 2011-07-01 | 윌테크놀러지(주) | 공간 변환기를 포함하는 프로브 카드 |
JP5406464B2 (ja) * | 2008-04-17 | 2014-02-05 | 日本電子材料株式会社 | プローブカード |
US20090277670A1 (en) * | 2008-05-10 | 2009-11-12 | Booth Jr Roger A | High Density Printed Circuit Board Interconnect and Method of Assembly |
DE102008034918B4 (de) * | 2008-07-26 | 2012-09-27 | Feinmetall Gmbh | Elektrische Prüfeinrichtung für die Prüfung eines elektrischen Prüflings sowie elektrisches Prüfverfahren |
KR101016383B1 (ko) * | 2008-12-19 | 2011-02-21 | 주식회사 에이엠에스티 | 평탄화 모듈을 구비한 프로브 카드 |
KR101583000B1 (ko) | 2009-03-09 | 2016-01-19 | 삼성전자주식회사 | 반도체 디바이스 테스트 장치 및 방법 |
JP5826466B2 (ja) * | 2010-06-25 | 2015-12-02 | 東京エレクトロン株式会社 | プローブカードの平行調整機構及び検査装置 |
KR101270036B1 (ko) * | 2011-06-08 | 2013-06-10 | 수도 겐조 | 칩 검사용 프로브 장치 |
KR101703688B1 (ko) * | 2012-05-02 | 2017-02-07 | 리노공업주식회사 | 테스트 소켓 |
JP2014027020A (ja) * | 2012-07-24 | 2014-02-06 | Toshiba Corp | 回路基板、電子機器、および回路基板の製造方法 |
TWI484191B (zh) * | 2012-09-28 | 2015-05-11 | Hermes Epitek Corp | 電路測試探針卡 |
TWI479158B (zh) * | 2013-01-28 | 2015-04-01 | Mpi Corp | 晶圓測試探針卡 |
CN110573888B (zh) * | 2017-04-12 | 2021-11-23 | 凯觅科技股份有限公司 | 低插入力连接器组件及半导体部件试验装置 |
KR101922848B1 (ko) | 2018-11-05 | 2018-11-27 | 김재길 | 탄성체가 설치된 프로브카드 |
KR102388033B1 (ko) * | 2020-07-15 | 2022-04-20 | (주)엠투엔 | 프로브 카드 |
CN114389122B (zh) * | 2022-01-28 | 2023-05-26 | 强一半导体(苏州)有限公司 | 一种垂直式弯形mems探针插针装置及其插针方法 |
Family Cites Families (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05264589A (ja) | 1991-12-17 | 1993-10-12 | Matsushita Electron Corp | 半導体集積回路の検査装置 |
JPH06124982A (ja) * | 1992-01-14 | 1994-05-06 | Mitsubishi Electric Corp | 半導体試験装置 |
JP3135378B2 (ja) * | 1992-08-10 | 2001-02-13 | ローム株式会社 | 半導体試験装置 |
JPH06163656A (ja) | 1992-11-26 | 1994-06-10 | Sony Corp | 半導体測定装置 |
US5640100A (en) | 1994-10-22 | 1997-06-17 | Tokyo Electron Limited | Probe apparatus having probe card exchanging mechanism |
KR100324059B1 (ko) | 1994-11-15 | 2002-04-17 | 이고르 와이. 칸드로스 | 초소형 전자 부품용 상호 접속 요소 |
JP2834076B2 (ja) | 1996-05-30 | 1998-12-09 | 九州日本電気株式会社 | ウェハプローバ |
JPH1026635A (ja) | 1996-07-11 | 1998-01-27 | Advantest Corp | プローブカード |
US7382142B2 (en) * | 2000-05-23 | 2008-06-03 | Nanonexus, Inc. | High density interconnect system having rapid fabrication cycle |
US6917525B2 (en) * | 2001-11-27 | 2005-07-12 | Nanonexus, Inc. | Construction structures and manufacturing processes for probe card assemblies and packages having wafer level springs |
US6799976B1 (en) * | 1999-07-28 | 2004-10-05 | Nanonexus, Inc. | Construction structures and manufacturing processes for integrated circuit wafer probe card assemblies |
JP2002184823A (ja) | 2000-12-13 | 2002-06-28 | Sony Corp | プローブ装置 |
KR100863114B1 (ko) * | 2001-06-18 | 2008-10-13 | 가부시키가이샤 어드밴티스트 | 평면 조정 기구를 갖는 프로우브 콘택트 시스템 |
US6762612B2 (en) * | 2001-06-20 | 2004-07-13 | Advantest Corp. | Probe contact system having planarity adjustment mechanism |
JP4123408B2 (ja) * | 2001-12-13 | 2008-07-23 | 東京エレクトロン株式会社 | プローブカード交換装置 |
JP3621938B2 (ja) * | 2002-08-09 | 2005-02-23 | 日本電子材料株式会社 | プローブカード |
JP2004205487A (ja) * | 2002-11-01 | 2004-07-22 | Tokyo Electron Ltd | プローブカードの固定機構 |
TWI232938B (en) * | 2004-02-11 | 2005-05-21 | Star Techn Inc | Probe card |
US7230437B2 (en) * | 2004-06-15 | 2007-06-12 | Formfactor, Inc. | Mechanically reconfigurable vertical tester interface for IC probing |
JP2006010629A (ja) * | 2004-06-29 | 2006-01-12 | Tokyo Electron Ltd | 平行調整機構を備えたプローブカード |
TWI294523B (en) * | 2004-07-28 | 2008-03-11 | Microelectonics Technology Inc | Integrated circuit probe card |
US7368930B2 (en) * | 2006-08-04 | 2008-05-06 | Formfactor, Inc. | Adjustment mechanism |
-
2005
- 2005-11-11 JP JP2005327462A patent/JP4860242B2/ja not_active Expired - Fee Related
-
2006
- 2006-10-02 US US11/542,759 patent/US8063652B2/en not_active Expired - Fee Related
- 2006-11-09 EP EP06023352A patent/EP1785733A1/en not_active Withdrawn
- 2006-11-10 KR KR1020060110919A patent/KR101337843B1/ko not_active IP Right Cessation
- 2006-11-10 TW TW095141825A patent/TW200728729A/zh unknown
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105102990A (zh) * | 2013-04-09 | 2015-11-25 | 泰克诺探头公司 | 电子器件的测试头 |
Also Published As
Publication number | Publication date |
---|---|
US8063652B2 (en) | 2011-11-22 |
KR20070050841A (ko) | 2007-05-16 |
EP1785733A1 (en) | 2007-05-16 |
JP4860242B2 (ja) | 2012-01-25 |
KR101337843B1 (ko) | 2013-12-06 |
JP2007132846A (ja) | 2007-05-31 |
TWI317019B (zh) | 2009-11-11 |
US20070108996A1 (en) | 2007-05-17 |
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