TW200727737A - Liquid material applying apparatus and liquid material applying method - Google Patents

Liquid material applying apparatus and liquid material applying method

Info

Publication number
TW200727737A
TW200727737A TW095135084A TW95135084A TW200727737A TW 200727737 A TW200727737 A TW 200727737A TW 095135084 A TW095135084 A TW 095135084A TW 95135084 A TW95135084 A TW 95135084A TW 200727737 A TW200727737 A TW 200727737A
Authority
TW
Taiwan
Prior art keywords
liquid material
material applying
liquid
area
organic
Prior art date
Application number
TW095135084A
Other languages
English (en)
Chinese (zh)
Inventor
Satoshi Suzuki
Original Assignee
Dainippon Screen Mfg
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dainippon Screen Mfg filed Critical Dainippon Screen Mfg
Publication of TW200727737A publication Critical patent/TW200727737A/zh

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/10Deposition of organic active material
    • H10K71/12Deposition of organic active material using liquid deposition, e.g. spin coating
    • H10K71/13Deposition of organic active material using liquid deposition, e.g. spin coating using printing techniques, e.g. ink-jet printing or screen printing
    • H10K71/135Deposition of organic active material using liquid deposition, e.g. spin coating using printing techniques, e.g. ink-jet printing or screen printing using ink-jet printing
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/10Deposition of organic active material
    • H10K71/191Deposition of organic active material characterised by provisions for the orientation or alignment of the layer to be deposited

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Coating Apparatus (AREA)
  • Electroluminescent Light Sources (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
TW095135084A 2005-11-24 2006-09-22 Liquid material applying apparatus and liquid material applying method TW200727737A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005338065A JP2007144240A (ja) 2005-11-24 2005-11-24 塗布装置および塗布方法

Publications (1)

Publication Number Publication Date
TW200727737A true TW200727737A (en) 2007-07-16

Family

ID=38111298

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095135084A TW200727737A (en) 2005-11-24 2006-09-22 Liquid material applying apparatus and liquid material applying method

Country Status (4)

Country Link
JP (1) JP2007144240A (ko)
KR (1) KR100754577B1 (ko)
CN (1) CN1970168B (ko)
TW (1) TW200727737A (ko)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI395067B (zh) * 2008-09-19 2013-05-01 Dms Co Ltd 感光液塗敷裝置

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102135320B1 (ko) 2013-07-17 2020-07-20 삼성디스플레이 주식회사 유기 발광 표시 장치의 제조 장치 및 유기 발광 표시 장치의 제조 방법
KR101597044B1 (ko) * 2013-09-06 2016-02-23 가부시키가이샤 스크린 홀딩스 도포 장치 및 도포 방법
JP7321801B2 (ja) * 2019-07-05 2023-08-07 キヤノン株式会社 インクジェット装置、有機el素子の形成方法、機能素子の形成方法、表示装置の製造方法

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1227753A (ko) * 1967-07-13 1971-04-07
US5181962A (en) * 1992-01-06 1993-01-26 Commercial Resins Company Liquid spray machine for coating interior of pipes
US6582875B1 (en) 2002-01-23 2003-06-24 Eastman Kodak Company Using a multichannel linear laser light beam in making OLED devices by thermal transfer
JP4852224B2 (ja) 2002-07-30 2012-01-11 セイコーエプソン株式会社 有機el装置の製造装置
JP2004146651A (ja) * 2002-10-25 2004-05-20 Tokyo Electron Ltd レジスト塗布方法及びレジスト塗布装置
JP2005129257A (ja) 2003-10-21 2005-05-19 Seiko Epson Corp デバイスの製造方法及びデバイスの製造装置及びデバイス及び電子機器
JP4315787B2 (ja) * 2003-11-18 2009-08-19 大日本スクリーン製造株式会社 基板処理装置、並びに被充填体における液体充填度および気体混入度判定構造
JP4239890B2 (ja) * 2004-04-26 2009-03-18 セイコーエプソン株式会社 有機el装置、電子機器

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI395067B (zh) * 2008-09-19 2013-05-01 Dms Co Ltd 感光液塗敷裝置

Also Published As

Publication number Publication date
KR100754577B1 (ko) 2007-09-05
KR20070055328A (ko) 2007-05-30
CN1970168B (zh) 2012-08-29
JP2007144240A (ja) 2007-06-14
CN1970168A (zh) 2007-05-30

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