TW200643434A - Inspection device, and conductive pattern inspection method - Google Patents

Inspection device, and conductive pattern inspection method

Info

Publication number
TW200643434A
TW200643434A TW095113874A TW95113874A TW200643434A TW 200643434 A TW200643434 A TW 200643434A TW 095113874 A TW095113874 A TW 095113874A TW 95113874 A TW95113874 A TW 95113874A TW 200643434 A TW200643434 A TW 200643434A
Authority
TW
Taiwan
Prior art keywords
probe
pattern
sensor unit
conductive pattern
inspection
Prior art date
Application number
TW095113874A
Other languages
English (en)
Inventor
Hiroshi Hamori
Shuji Yamaoka
Shogo Ishioka
Original Assignee
Oht Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oht Inc filed Critical Oht Inc
Publication of TW200643434A publication Critical patent/TW200643434A/zh

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2801Testing of printed circuits, backplanes, motherboards, hybrid circuits or carriers for multichip packages [MCP]
    • G01R31/281Specific types of tests or tests for a specific type of fault, e.g. thermal mapping, shorts testing
    • G01R31/2812Checking for open circuits or shorts, e.g. solder bridges; Testing conductivity, resistivity or impedance
    • GPHYSICS
    • G09EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09GARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G3/00Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
    • G09G3/006Electronic inspection or testing of displays and display drivers, e.g. of LED or LCD displays

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Theoretical Computer Science (AREA)
  • Testing Of Short-Circuits, Discontinuities, Leakage, Or Incorrect Line Connections (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
TW095113874A 2005-04-19 2006-04-19 Inspection device, and conductive pattern inspection method TW200643434A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005121410A JP2006300665A (ja) 2005-04-19 2005-04-19 検査装置および導電パターン検査方法

Publications (1)

Publication Number Publication Date
TW200643434A true TW200643434A (en) 2006-12-16

Family

ID=37115239

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095113874A TW200643434A (en) 2005-04-19 2006-04-19 Inspection device, and conductive pattern inspection method

Country Status (3)

Country Link
JP (1) JP2006300665A (zh)
TW (1) TW200643434A (zh)
WO (1) WO2006112543A1 (zh)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102472788A (zh) * 2009-08-17 2012-05-23 Fcom株式会社 导电图检查装置及检查方法
TWI401452B (zh) * 2009-08-04 2013-07-11 Oht Inc Circuit pattern inspection device and inspection method
TWI478018B (zh) * 2011-01-21 2015-03-21 Egalax Empia Technology Inc 觸控面板感測器斷線檢測方法及裝置
CN106370967A (zh) * 2016-09-12 2017-02-01 京东方科技集团股份有限公司 一种触控结构、其测试方法、触摸屏及显示装置
TWI712317B (zh) * 2019-02-22 2020-12-01 興城科技股份有限公司 用於檢查玻璃基板的開路/短路檢查機及其檢查方法
CN113554960A (zh) * 2020-04-23 2021-10-26 兴城科技股份有限公司 玻璃基板检测方法

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011029271A (ja) * 2009-07-22 2011-02-10 Micronics Japan Co Ltd 薄膜特性測定装置及び方法、並びに、薄膜加工装置及び方法
JP5533169B2 (ja) * 2010-04-13 2014-06-25 日本電産リード株式会社 検査装置
JP5580247B2 (ja) * 2011-04-27 2014-08-27 株式会社ユニオンアロー・テクノロジー パターン検査装置
CN102760020B (zh) * 2012-06-29 2015-12-02 华为终端有限公司 一种检测电容式触摸屏的方法、装置和移动终端
CN103197192B (zh) * 2013-03-15 2016-05-18 深圳市华星光电技术有限公司 短路检测方法及装置
KR101896224B1 (ko) * 2016-08-18 2018-09-11 스템코 주식회사 연성 회로 기판
CN108919023A (zh) * 2018-05-15 2018-11-30 北京航空航天大学 一种高密度封装键合丝瞬时触碰加电检测方法
WO2020059014A1 (ja) * 2018-09-18 2020-03-26 国立大学法人東北大学 容量検出エリアセンサ及び、その容量検出エリアセンサを有する導電パターン検査装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06273468A (ja) * 1993-03-18 1994-09-30 Oputo Syst:Kk 導電膜検査装置
JP2660497B2 (ja) * 1995-02-21 1997-10-08 オカノハイテック株式会社 基板検査用給電制御素子及び基板検査における給電方法並びに基板検査装置
JPH08105926A (ja) * 1994-10-05 1996-04-23 Fujitsu Ltd 配線パターン検査装置及び配線パターン検査方法
WO2004051290A1 (ja) * 2002-11-30 2004-06-17 Oht Inc. 回路パターン検査装置及び回路パターン検査方法

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI401452B (zh) * 2009-08-04 2013-07-11 Oht Inc Circuit pattern inspection device and inspection method
CN102472788A (zh) * 2009-08-17 2012-05-23 Fcom株式会社 导电图检查装置及检查方法
TWI478018B (zh) * 2011-01-21 2015-03-21 Egalax Empia Technology Inc 觸控面板感測器斷線檢測方法及裝置
CN106370967A (zh) * 2016-09-12 2017-02-01 京东方科技集团股份有限公司 一种触控结构、其测试方法、触摸屏及显示装置
CN106370967B (zh) * 2016-09-12 2019-06-28 京东方科技集团股份有限公司 一种触控结构、其测试方法、触摸屏及显示装置
TWI712317B (zh) * 2019-02-22 2020-12-01 興城科技股份有限公司 用於檢查玻璃基板的開路/短路檢查機及其檢查方法
CN113554960A (zh) * 2020-04-23 2021-10-26 兴城科技股份有限公司 玻璃基板检测方法

Also Published As

Publication number Publication date
WO2006112543A1 (ja) 2006-10-26
JP2006300665A (ja) 2006-11-02

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