TW200621604A - Workpiece conveyer - Google Patents

Workpiece conveyer

Info

Publication number
TW200621604A
TW200621604A TW094138573A TW94138573A TW200621604A TW 200621604 A TW200621604 A TW 200621604A TW 094138573 A TW094138573 A TW 094138573A TW 94138573 A TW94138573 A TW 94138573A TW 200621604 A TW200621604 A TW 200621604A
Authority
TW
Taiwan
Prior art keywords
cleaning
side magnets
driving
shafts
workpiece conveyer
Prior art date
Application number
TW094138573A
Other languages
English (en)
Inventor
Yoshiki Kobayashi
Original Assignee
Xevios Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Xevios Corp filed Critical Xevios Corp
Publication of TW200621604A publication Critical patent/TW200621604A/zh

Links

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Cleaning By Liquid Or Steam (AREA)
  • Cleaning In General (AREA)
  • Rollers For Roller Conveyors For Transfer (AREA)
  • Non-Mechanical Conveyors (AREA)
TW094138573A 2004-12-28 2005-11-03 Workpiece conveyer TW200621604A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004379056A JP2006186146A (ja) 2004-12-28 2004-12-28 ワーク搬送装置

Publications (1)

Publication Number Publication Date
TW200621604A true TW200621604A (en) 2006-07-01

Family

ID=36739035

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094138573A TW200621604A (en) 2004-12-28 2005-11-03 Workpiece conveyer

Country Status (4)

Country Link
JP (1) JP2006186146A (zh)
KR (1) KR20060076715A (zh)
CN (1) CN1799963A (zh)
TW (1) TW200621604A (zh)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100904451B1 (ko) 2005-03-18 2009-06-24 세메스 주식회사 컨베이어 장치 및 컨베이어 방법
KR100761535B1 (ko) * 2006-01-17 2007-09-27 세메스 주식회사 기판 처리 장치
KR100767038B1 (ko) 2006-07-28 2007-10-12 세메스 주식회사 기판 이송 장치
JP2008056471A (ja) * 2006-09-04 2008-03-13 Tokyo Ohka Kogyo Co Ltd 搬送ローラ及び基板搬送装置
KR100785403B1 (ko) * 2006-11-27 2007-12-13 세메스 주식회사 기판 처리 장치 및 방법
KR101368146B1 (ko) * 2007-05-25 2014-03-03 엘지디스플레이 주식회사 기판 이송 장치
KR100914531B1 (ko) * 2007-10-10 2009-09-02 세메스 주식회사 기판 이송용 마그네틱 기어 및 그 제조 방법
CN101254859B (zh) * 2007-11-30 2012-12-12 无锡尚德太阳能电力有限公司 一种传送薄基板的滚轮组及使用其进行化学处理的方法
JP5133428B2 (ja) * 2009-02-02 2013-01-30 シャープ株式会社 基板処理装置
BRPI1006473B1 (pt) * 2009-03-16 2019-10-22 Laitram Llc transportador, correia transportadora e método para conduzir artigos
CN101580179B (zh) * 2009-06-04 2011-07-27 东莞宏威数码机械有限公司 基片传输机构
KR101033959B1 (ko) 2009-12-16 2011-05-11 삼성전기주식회사 기판 이송장치
CN102774609A (zh) * 2011-05-12 2012-11-14 佶新科技股份有限公司 直接传动式平板运送装置
CN102642716B (zh) * 2012-04-11 2014-04-02 深圳市华星光电技术有限公司 玻璃基板的取放装置
CN106429291A (zh) * 2016-11-08 2017-02-22 天奇自动化工程股份有限公司 磁性积放辊筒
CN107600965A (zh) * 2017-08-18 2018-01-19 武汉华星光电半导体显示技术有限公司 一种基板传送设备
CN109368157B (zh) * 2018-09-25 2020-07-03 江苏森蓝智能系统有限公司 一种自动双层真空罐对接转运设备

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05190519A (ja) * 1992-01-17 1993-07-30 Hitachi Ltd 洗浄装置
JPH0727290U (ja) * 1993-10-29 1995-05-19 大日本スクリーン製造株式会社 駆動力伝達装置
JP4307876B2 (ja) * 2003-03-19 2009-08-05 大日本スクリーン製造株式会社 基板搬送装置

Also Published As

Publication number Publication date
CN1799963A (zh) 2006-07-12
JP2006186146A (ja) 2006-07-13
KR20060076715A (ko) 2006-07-04

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