TW200621604A - Workpiece conveyer - Google Patents
Workpiece conveyerInfo
- Publication number
- TW200621604A TW200621604A TW094138573A TW94138573A TW200621604A TW 200621604 A TW200621604 A TW 200621604A TW 094138573 A TW094138573 A TW 094138573A TW 94138573 A TW94138573 A TW 94138573A TW 200621604 A TW200621604 A TW 200621604A
- Authority
- TW
- Taiwan
- Prior art keywords
- cleaning
- side magnets
- driving
- shafts
- workpiece conveyer
- Prior art date
Links
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Cleaning By Liquid Or Steam (AREA)
- Cleaning In General (AREA)
- Rollers For Roller Conveyors For Transfer (AREA)
- Non-Mechanical Conveyors (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004379056A JP2006186146A (ja) | 2004-12-28 | 2004-12-28 | ワーク搬送装置 |
Publications (1)
Publication Number | Publication Date |
---|---|
TW200621604A true TW200621604A (en) | 2006-07-01 |
Family
ID=36739035
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW094138573A TW200621604A (en) | 2004-12-28 | 2005-11-03 | Workpiece conveyer |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP2006186146A (zh) |
KR (1) | KR20060076715A (zh) |
CN (1) | CN1799963A (zh) |
TW (1) | TW200621604A (zh) |
Families Citing this family (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100904451B1 (ko) | 2005-03-18 | 2009-06-24 | 세메스 주식회사 | 컨베이어 장치 및 컨베이어 방법 |
KR100761535B1 (ko) * | 2006-01-17 | 2007-09-27 | 세메스 주식회사 | 기판 처리 장치 |
KR100767038B1 (ko) | 2006-07-28 | 2007-10-12 | 세메스 주식회사 | 기판 이송 장치 |
JP2008056471A (ja) * | 2006-09-04 | 2008-03-13 | Tokyo Ohka Kogyo Co Ltd | 搬送ローラ及び基板搬送装置 |
KR100785403B1 (ko) * | 2006-11-27 | 2007-12-13 | 세메스 주식회사 | 기판 처리 장치 및 방법 |
KR101368146B1 (ko) * | 2007-05-25 | 2014-03-03 | 엘지디스플레이 주식회사 | 기판 이송 장치 |
KR100914531B1 (ko) * | 2007-10-10 | 2009-09-02 | 세메스 주식회사 | 기판 이송용 마그네틱 기어 및 그 제조 방법 |
CN101254859B (zh) * | 2007-11-30 | 2012-12-12 | 无锡尚德太阳能电力有限公司 | 一种传送薄基板的滚轮组及使用其进行化学处理的方法 |
JP5133428B2 (ja) * | 2009-02-02 | 2013-01-30 | シャープ株式会社 | 基板処理装置 |
BRPI1006473B1 (pt) * | 2009-03-16 | 2019-10-22 | Laitram Llc | transportador, correia transportadora e método para conduzir artigos |
CN101580179B (zh) * | 2009-06-04 | 2011-07-27 | 东莞宏威数码机械有限公司 | 基片传输机构 |
KR101033959B1 (ko) | 2009-12-16 | 2011-05-11 | 삼성전기주식회사 | 기판 이송장치 |
CN102774609A (zh) * | 2011-05-12 | 2012-11-14 | 佶新科技股份有限公司 | 直接传动式平板运送装置 |
CN102642716B (zh) * | 2012-04-11 | 2014-04-02 | 深圳市华星光电技术有限公司 | 玻璃基板的取放装置 |
CN106429291A (zh) * | 2016-11-08 | 2017-02-22 | 天奇自动化工程股份有限公司 | 磁性积放辊筒 |
CN107600965A (zh) * | 2017-08-18 | 2018-01-19 | 武汉华星光电半导体显示技术有限公司 | 一种基板传送设备 |
CN109368157B (zh) * | 2018-09-25 | 2020-07-03 | 江苏森蓝智能系统有限公司 | 一种自动双层真空罐对接转运设备 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05190519A (ja) * | 1992-01-17 | 1993-07-30 | Hitachi Ltd | 洗浄装置 |
JPH0727290U (ja) * | 1993-10-29 | 1995-05-19 | 大日本スクリーン製造株式会社 | 駆動力伝達装置 |
JP4307876B2 (ja) * | 2003-03-19 | 2009-08-05 | 大日本スクリーン製造株式会社 | 基板搬送装置 |
-
2004
- 2004-12-28 JP JP2004379056A patent/JP2006186146A/ja active Pending
-
2005
- 2005-11-03 TW TW094138573A patent/TW200621604A/zh unknown
- 2005-11-30 CN CNA2005101258365A patent/CN1799963A/zh active Pending
- 2005-12-27 KR KR1020050130517A patent/KR20060076715A/ko not_active Application Discontinuation
Also Published As
Publication number | Publication date |
---|---|
CN1799963A (zh) | 2006-07-12 |
JP2006186146A (ja) | 2006-07-13 |
KR20060076715A (ko) | 2006-07-04 |
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