TW200615056A - Substrate edge part cleaning apparatus and substrate edge part cleaning method - Google Patents

Substrate edge part cleaning apparatus and substrate edge part cleaning method

Info

Publication number
TW200615056A
TW200615056A TW094126582A TW94126582A TW200615056A TW 200615056 A TW200615056 A TW 200615056A TW 094126582 A TW094126582 A TW 094126582A TW 94126582 A TW94126582 A TW 94126582A TW 200615056 A TW200615056 A TW 200615056A
Authority
TW
Taiwan
Prior art keywords
edge part
cleaning
substrate
substrate edge
part cleaning
Prior art date
Application number
TW094126582A
Other languages
English (en)
Inventor
Ryouichirou Katano
Shinjiro Tsuji
Original Assignee
Matsushita Electric Ind Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Ind Co Ltd filed Critical Matsushita Electric Ind Co Ltd
Publication of TW200615056A publication Critical patent/TW200615056A/zh

Links

Classifications

    • B08B1/30—
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1316—Methods for cleaning the liquid crystal cells, or components thereof, during manufacture: Materials therefor
TW094126582A 2004-09-03 2005-08-04 Substrate edge part cleaning apparatus and substrate edge part cleaning method TW200615056A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004257553 2004-09-03

Publications (1)

Publication Number Publication Date
TW200615056A true TW200615056A (en) 2006-05-16

Family

ID=35134664

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094126582A TW200615056A (en) 2004-09-03 2005-08-04 Substrate edge part cleaning apparatus and substrate edge part cleaning method

Country Status (5)

Country Link
US (1) US7803231B2 (zh)
JP (1) JP4456125B2 (zh)
CN (1) CN101010151B (zh)
TW (1) TW200615056A (zh)
WO (1) WO2006027919A1 (zh)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101052820B1 (ko) * 2008-11-21 2011-07-29 세메스 주식회사 기판 검사 장치 및 이를 이용한 기판 검사 방법
CN101893424A (zh) * 2010-03-18 2010-11-24 苏州工业园区高登威科技有限公司 一种用于光学检测设备摄像台的自动清洁装置
CN103170481A (zh) * 2011-12-26 2013-06-26 财团法人金属工业研究发展中心 放电加工模具表面清洁方法
US10515833B2 (en) * 2014-01-24 2019-12-24 Taiwan Semiconductor Manufacturing Co., Ltd Wafer cleaning system and method
CN205484080U (zh) * 2016-01-05 2016-08-17 鄂尔多斯市源盛光电有限责任公司 一种密封胶检测及超声清洗装置
CN107321718A (zh) * 2017-08-14 2017-11-07 惠科股份有限公司 显示面板置放架传送装置
CN107362994A (zh) * 2017-08-21 2017-11-21 浙江大学 倾斜面上的作业装置及其应用在光伏电站的清扫方法
US10875059B2 (en) 2017-11-21 2020-12-29 Automatic Spring Products Corp. Method and apparatus for automated particulate extraction from solid parts
CN108769530B (zh) * 2018-06-19 2020-10-20 朱炳强 图像采集处理设备和图像采集处理方法
CN108906766B (zh) * 2018-07-04 2023-02-24 中建材凯盛机器人（上海）有限公司 Cigs玻璃基板镀膜清洗系统
CN108971174A (zh) * 2018-08-30 2018-12-11 山东淄博汉能薄膜太阳能有限公司 清洗装置及方法
CN112096445B (zh) * 2020-09-30 2022-09-02 重庆建工建筑产业技术研究院有限公司 一种用于隧道的移动灭火机器人系统
CN112859400B (zh) * 2021-02-26 2023-05-30 深圳市华星光电半导体显示技术有限公司 检测系统及检测方法
CN115351007B (zh) * 2022-10-20 2023-01-24 歌尔股份有限公司 一种屏幕清洁系统及屏幕组装设备

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07263394A (ja) 1994-03-17 1995-10-13 Dainippon Screen Mfg Co Ltd 基板端縁処理装置
JP3158966B2 (ja) 1995-06-19 2001-04-23 松下電器産業株式会社 バンプ付電子部品の製造装置および製造方法
JPH09153526A (ja) 1995-09-27 1997-06-10 Toshiba Corp Ｔｃｐの搬送装置およびその搬送方法並びに平面表示装置の製造方法
JP3445709B2 (ja) 1996-01-22 2003-09-08 松下電器産業株式会社 液晶パネル端子クリーニング装置
JPH09314814A (ja) 1996-05-28 1997-12-09 Matsushita Electric Ind Co Ltd クリーニング装置およびクリーニング方法
KR100257279B1 (ko) * 1996-06-06 2000-06-01 이시다 아키라 주변노광장치 및 방법
JP3439932B2 (ja) * 1996-10-28 2003-08-25 大日本スクリーン製造株式会社 周辺露光装置
JP3935572B2 (ja) 1997-09-18 2007-06-27 松下電器産業株式会社 液晶パネル端子クリーニング方法及び装置
JP3999986B2 (ja) 2002-03-13 2007-10-31 京セラ株式会社 洗浄装置および洗浄方法ならびに液晶表示装置の製法
JP3995236B2 (ja) * 2002-07-01 2007-10-24 株式会社アドバンスト・ディスプレイ 基板端面洗浄装置、基板端面洗浄方法及び半導体装置の製造方法

Also Published As

Publication number Publication date
JP4456125B2 (ja) 2010-04-28
CN101010151B (zh) 2012-01-11
US7803231B2 (en) 2010-09-28
CN101010151A (zh) 2007-08-01
JP2008503762A (ja) 2008-02-07
US20070181152A1 (en) 2007-08-09
WO2006027919A1 (en) 2006-03-16

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