TW200615056A - Substrate edge part cleaning apparatus and substrate edge part cleaning method - Google Patents

Substrate edge part cleaning apparatus and substrate edge part cleaning method

Info

Publication number
TW200615056A
TW200615056A TW094126582A TW94126582A TW200615056A TW 200615056 A TW200615056 A TW 200615056A TW 094126582 A TW094126582 A TW 094126582A TW 94126582 A TW94126582 A TW 94126582A TW 200615056 A TW200615056 A TW 200615056A
Authority
TW
Taiwan
Prior art keywords
edge part
cleaning
substrate
substrate edge
part cleaning
Prior art date
Application number
TW094126582A
Other languages
Chinese (zh)
Inventor
Ryouichirou Katano
Shinjiro Tsuji
Original Assignee
Matsushita Electric Ind Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Ind Co Ltd filed Critical Matsushita Electric Ind Co Ltd
Publication of TW200615056A publication Critical patent/TW200615056A/en

Links

Classifications

    • B08B1/30—
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1316—Methods for cleaning the liquid crystal cells, or components thereof, during manufacture: Materials therefor

Abstract

A substrate edge part cleaning apparatus that judges cleaning degree of each glass substrate when cleaning the edge part of the glass substrate used for liquid crystal display. The substrate edge part cleaning apparatus 100 has a cleaning head which cleans by wiping an edge part of a substrate for display A while moving rectilinearly, the apparatus including a camera 117 which captures images of the proximity of an edge of a color filter which is placed on the substrate, by moving together with the cleaning head. The camera 117 obtains surface status information of the substrate edge part cleaning apparatus 100 further includes a cleaning degree judgment unit 306 which judges cleaning degree based on the surface status information.
TW094126582A 2004-09-03 2005-08-04 Substrate edge part cleaning apparatus and substrate edge part cleaning method TW200615056A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004257553 2004-09-03

Publications (1)

Publication Number Publication Date
TW200615056A true TW200615056A (en) 2006-05-16

Family

ID=35134664

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094126582A TW200615056A (en) 2004-09-03 2005-08-04 Substrate edge part cleaning apparatus and substrate edge part cleaning method

Country Status (5)

Country Link
US (1) US7803231B2 (en)
JP (1) JP4456125B2 (en)
CN (1) CN101010151B (en)
TW (1) TW200615056A (en)
WO (1) WO2006027919A1 (en)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101052820B1 (en) * 2008-11-21 2011-07-29 세메스 주식회사 Substrate inspection device and substrate inspection method using same
CN101893424A (en) * 2010-03-18 2010-11-24 苏州工业园区高登威科技有限公司 Automatic cleaning device for camera-shooting table of optical detection equipment
CN103170481A (en) * 2011-12-26 2013-06-26 财团法人金属工业研究发展中心 Surface cleaning method of electric discharge machining mold
US10515833B2 (en) * 2014-01-24 2019-12-24 Taiwan Semiconductor Manufacturing Co., Ltd Wafer cleaning system and method
CN205484080U (en) * 2016-01-05 2016-08-17 鄂尔多斯市源盛光电有限责任公司 Sealed glue is detected and ultrasonic cleaning device
CN107321718A (en) * 2017-08-14 2017-11-07 惠科股份有限公司 Display panel holder conveyer
CN107362994A (en) * 2017-08-21 2017-11-21 浙江大学 Apparatus for work in inclined plane and its apply cleaning method in photovoltaic plant
US10875059B2 (en) 2017-11-21 2020-12-29 Automatic Spring Products Corp. Method and apparatus for automated particulate extraction from solid parts
CN108769530B (en) * 2018-06-19 2020-10-20 朱炳强 Image acquisition processing device and image acquisition processing method
CN108906766B (en) * 2018-07-04 2023-02-24 中建材凯盛机器人（上海）有限公司 CIGS glass substrate coating film cleaning system
CN108971174A (en) * 2018-08-30 2018-12-11 山东淄博汉能薄膜太阳能有限公司 Cleaning device and method
CN112096445B (en) * 2020-09-30 2022-09-02 重庆建工建筑产业技术研究院有限公司 Mobile fire-extinguishing robot system for tunnel
CN112859400B (en) * 2021-02-26 2023-05-30 深圳市华星光电半导体显示技术有限公司 Detection system and detection method
CN115351007B (en) * 2022-10-20 2023-01-24 歌尔股份有限公司 Screen cleaning system and screen assembling equipment

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07263394A (en) * 1994-03-17 1995-10-13 Dainippon Screen Mfg Co Ltd Substrate edge processor
JP3158966B2 (en) * 1995-06-19 2001-04-23 松下電器産業株式会社 Manufacturing apparatus and manufacturing method of electronic component with bump
JPH09153526A (en) * 1995-09-27 1997-06-10 Toshiba Corp Carrier device and method of tcp as well as manufacturing method of plane displayer
JP3445709B2 (en) * 1996-01-22 2003-09-08 松下電器産業株式会社 LCD panel terminal cleaning device
JPH09314814A (en) * 1996-05-28 1997-12-09 Matsushita Electric Ind Co Ltd Cleaning device and cleaning method
KR100257279B1 (en) * 1996-06-06 2000-06-01 이시다 아키라 Apparatus and method for exposing periphery
JP3439932B2 (en) * 1996-10-28 2003-08-25 大日本スクリーン製造株式会社 Peripheral exposure equipment
JP3935572B2 (en) * 1997-09-18 2007-06-27 松下電器産業株式会社 Liquid crystal panel terminal cleaning method and apparatus
JP3999986B2 (en) 2002-03-13 2007-10-31 京セラ株式会社 Cleaning device, cleaning method, and manufacturing method of liquid crystal display device
JP3995236B2 (en) * 2002-07-01 2007-10-24 株式会社アドバンスト・ディスプレイ Substrate end face cleaning apparatus, substrate end face cleaning method, and semiconductor device manufacturing method

Also Published As

Publication number Publication date
WO2006027919A1 (en) 2006-03-16
US7803231B2 (en) 2010-09-28
JP2008503762A (en) 2008-02-07
US20070181152A1 (en) 2007-08-09
CN101010151B (en) 2012-01-11
JP4456125B2 (en) 2010-04-28
CN101010151A (en) 2007-08-01

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