SI3296703T1 - Mrežna plošča za optični dajalnik in metoda izdelave mrežne plošče za optični dajalnik - Google Patents

Mrežna plošča za optični dajalnik in metoda izdelave mrežne plošče za optični dajalnik

Info

Publication number
SI3296703T1
SI3296703T1 SI201631216T SI201631216T SI3296703T1 SI 3296703 T1 SI3296703 T1 SI 3296703T1 SI 201631216 T SI201631216 T SI 201631216T SI 201631216 T SI201631216 T SI 201631216T SI 3296703 T1 SI3296703 T1 SI 3296703T1
Authority
SI
Slovenia
Prior art keywords
grid plate
optical encoder
manufacturing
encoder
manufacturing grid
Prior art date
Application number
SI201631216T
Other languages
English (en)
Inventor
Takeo Fujii
Original Assignee
Meltec Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Meltec Corporation filed Critical Meltec Corporation
Publication of SI3296703T1 publication Critical patent/SI3296703T1/sl

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34707—Scales; Discs, e.g. fixation, fabrication, compensation
SI201631216T 2015-05-13 2016-05-11 Mrežna plošča za optični dajalnik in metoda izdelave mrežne plošče za optični dajalnik SI3296703T1 (sl)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2015097864A JP5925365B1 (ja) 2015-05-13 2015-05-13 光学式エンコーダ用格子板および光学式エンコーダ用格子板の製造方法
PCT/JP2016/064064 WO2016182005A1 (ja) 2015-05-13 2016-05-11 光学式エンコーダ用格子板および光学式エンコーダ用格子板の製造方法
EP16792730.0A EP3296703B1 (en) 2015-05-13 2016-05-11 Grid plate for optical encoder, and method for manufacturing grid plate for optical encoder

Publications (1)

Publication Number Publication Date
SI3296703T1 true SI3296703T1 (sl) 2021-09-30

Family

ID=56069578

Family Applications (1)

Application Number Title Priority Date Filing Date
SI201631216T SI3296703T1 (sl) 2015-05-13 2016-05-11 Mrežna plošča za optični dajalnik in metoda izdelave mrežne plošče za optični dajalnik

Country Status (7)

Country Link
EP (1) EP3296703B1 (sl)
JP (1) JP5925365B1 (sl)
CN (1) CN106461424B (sl)
MY (1) MY192930A (sl)
SI (1) SI3296703T1 (sl)
TW (1) TWI679402B (sl)
WO (1) WO2016182005A1 (sl)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106197490A (zh) * 2016-07-25 2016-12-07 哈尔滨工业大学 一种绝对式方位角光电编码器
CN106248116A (zh) * 2016-07-25 2016-12-21 哈尔滨工业大学 一种绝对式高度角光电编码器

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61212727A (ja) * 1985-03-18 1986-09-20 Mitsutoyo Mfg Co Ltd 光学式変位検出装置
JPH01113615A (ja) * 1987-10-27 1989-05-02 Tokyo Seimitsu Co Ltd 光学式スケールの製造方法
JP2585449B2 (ja) * 1990-03-27 1997-02-26 株式会社 ミツトヨ 光電型エンコーダ
IT1245008B (it) * 1991-01-25 1994-09-13 Lamsweerde Edoardo Van Elemento graduato per lettura ottica a riflessione e procedimento per la sua fabbricazione
JPH0599695A (ja) * 1991-10-08 1993-04-23 Mitsutoyo Corp 光学格子の製造方法
JP2006250784A (ja) * 2005-03-11 2006-09-21 Mitsutoyo Corp ボールレンズ、及び、これを用いた光電式エンコーダ
JP2006337321A (ja) * 2005-06-06 2006-12-14 Mitsutoyo Corp 光学スケール、及び、その製造方法
US7903336B2 (en) * 2005-10-11 2011-03-08 Gsi Group Corporation Optical metrological scale and laser-based manufacturing method therefor
EP2051047B1 (en) * 2007-06-01 2019-12-25 Mitutoyo Corporation Reflective encoder, scale thereof, and method for manufacturing scale
CN101836089B (zh) * 2007-09-05 2013-06-05 株式会社尼康 光学编码器用反射板及其制造方法、以及光学编码器
JP5308059B2 (ja) * 2008-04-25 2013-10-09 株式会社ミツトヨ 光電式エンコーダ用スケール
JP5562076B2 (ja) * 2010-03-10 2014-07-30 キヤノン株式会社 光学式エンコーダおよび変位計測装置
JP5443452B2 (ja) * 2011-09-12 2014-03-19 株式会社大山光学 光学スケール、および、これを備える光学ユニット
TWI479125B (zh) * 2011-11-09 2015-04-01 Zygo Corp 干涉式編碼器系統的密接式編碼頭
JP5846686B2 (ja) * 2011-11-22 2016-01-20 株式会社ミツトヨ 光電式エンコーダのスケールの製造方法
JP2013221818A (ja) * 2012-04-16 2013-10-28 Wavelock Advanced Technology Co Ltd 表面反射型エンコーダ用スケール、その製造方法、及び、表面反射型エンコーダ
TWI516746B (zh) * 2012-04-20 2016-01-11 賽格股份有限公司 在干涉編碼系統中執行非諧循環錯誤補償的方法、裝置及計算機程式產品，以及微影系統
JP6291156B2 (ja) * 2012-04-23 2018-03-14 マクセル株式会社 樹脂製エンコーダスケール、エンコーダ、樹脂製エンコーダスケールの製造方法およびエンコーダの製造方法

Also Published As

Publication number Publication date
CN106461424B (zh) 2022-03-22
EP3296703A1 (en) 2018-03-21
TWI679402B (zh) 2019-12-11
TW201643378A (zh) 2016-12-16
JP2016212027A (ja) 2016-12-15
CN106461424A (zh) 2017-02-22
MY192930A (en) 2022-09-15
WO2016182005A1 (ja) 2016-11-17
JP5925365B1 (ja) 2016-05-25
EP3296703B1 (en) 2021-03-03
EP3296703A4 (en) 2018-12-19

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