SG10201510271QA - Wafer producing method - Google Patents

Wafer producing method

Info

Publication number
SG10201510271QA
SG10201510271QA SG10201510271QA SG10201510271QA SG10201510271QA SG 10201510271Q A SG10201510271Q A SG 10201510271QA SG 10201510271Q A SG10201510271Q A SG 10201510271QA SG 10201510271Q A SG10201510271Q A SG 10201510271QA SG 10201510271Q A SG10201510271Q A SG 10201510271QA
Authority
SG
Singapore
Prior art keywords
wafer producing
wafer
producing
Prior art date
Application number
SG10201510271QA
Inventor
Kazuya Hirata
Kunimitsu Takahashi
Yoko Nishino
Original Assignee
Disco Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to JP2015001039A priority Critical patent/JP6395613B2/en
Application filed by Disco Corp filed Critical Disco Corp
Publication of SG10201510271QA publication Critical patent/SG10201510271QA/en

Links

Classifications

    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/18Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/322Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to modify their internal properties, e.g. to produce internal imperfections
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/0006Working by laser beam, e.g. welding, cutting or boring taking account of the properties of the material involved
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/50Working by transmitting the laser beam through or within the workpiece
    • B23K26/53Working by transmitting the laser beam through or within the workpiece for modifying or reforming the material inside the workpiece, e.g. for producing break initiation cracks
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B28WORKING CEMENT, CLAY, OR STONE
    • B28DWORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0005Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by breaking, e.g. dicing
    • B28D5/0011Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by breaking, e.g. dicing with preliminary treatment, e.g. weakening by scoring
    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL-GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/10Inorganic compounds or compositions
    • C30B29/40AIIIBV compounds wherein A is B, Al, Ga, In or Tl and B is N, P, As, Sb or Bi
    • C30B29/403AIII-nitrides
    • C30B29/406Gallium nitride
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/18Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00Materials to be soldered, welded or cut
    • B23K2103/50Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26
    • B23K2103/56Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26 semiconducting
SG10201510271QA 2015-01-06 2015-12-15 Wafer producing method SG10201510271QA (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2015001039A JP6395613B2 (en) 2015-01-06 2015-01-06 Wafer generation method

Publications (1)

Publication Number Publication Date
SG10201510271QA true SG10201510271QA (en) 2016-08-30

Family

ID=56133278

Family Applications (1)

Application Number Title Priority Date Filing Date
SG10201510271QA SG10201510271QA (en) 2015-01-06 2015-12-15 Wafer producing method

Country Status (7)

Country Link
US (1) US9517530B2 (en)
JP (1) JP6395613B2 (en)
KR (1) KR20160084799A (en)
CN (1) CN105750742B (en)
DE (1) DE102016200027A1 (en)
SG (1) SG10201510271QA (en)
TW (1) TWI673785B (en)

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6358941B2 (en) * 2014-12-04 2018-07-18 株式会社ディスコ Wafer generation method
JP6399913B2 (en) 2014-12-04 2018-10-03 株式会社ディスコ Wafer generation method
JP6391471B2 (en) * 2015-01-06 2018-09-19 株式会社ディスコ Wafer generation method
JP6395633B2 (en) 2015-02-09 2018-09-26 株式会社ディスコ Wafer generation method
JP6395632B2 (en) 2015-02-09 2018-09-26 株式会社ディスコ Wafer generation method
JP6429715B2 (en) 2015-04-06 2018-11-28 株式会社ディスコ Wafer generation method
JP6494382B2 (en) 2015-04-06 2019-04-03 株式会社ディスコ Wafer generation method
JP6425606B2 (en) 2015-04-06 2018-11-21 株式会社ディスコ Wafer production method
JP6472333B2 (en) 2015-06-02 2019-02-20 株式会社ディスコ Wafer generation method
JP6478821B2 (en) * 2015-06-05 2019-03-06 株式会社ディスコ Wafer generation method
JP6482423B2 (en) * 2015-07-16 2019-03-13 株式会社ディスコ Wafer generation method
JP6472347B2 (en) 2015-07-21 2019-02-20 株式会社ディスコ Thinning method of wafer
JP6482425B2 (en) 2015-07-21 2019-03-13 株式会社ディスコ Thinning method of wafer
JP6690983B2 (en) 2016-04-11 2020-04-28 株式会社ディスコ Wafer generation method and actual second orientation flat detection method
JP6698468B2 (en) * 2016-08-10 2020-05-27 株式会社ディスコ Wafer generation method
JP6773506B2 (en) * 2016-09-29 2020-10-21 株式会社ディスコ Wafer generation method
JP2018093046A (en) * 2016-12-02 2018-06-14 株式会社ディスコ Wafer production method
JP6781639B2 (en) * 2017-01-31 2020-11-04 株式会社ディスコ Wafer generation method
JP2018133485A (en) 2017-02-16 2018-08-23 株式会社ディスコ Wafer production method
JP2019067944A (en) 2017-10-02 2019-04-25 株式会社ディスコ Ingot and processing method of wafer
JP2020031134A (en) 2018-08-22 2020-02-27 株式会社ディスコ Facet region detection method and detection device
US10562130B1 (en) 2018-12-29 2020-02-18 Cree, Inc. Laser-assisted method for parting crystalline material
US10576585B1 (en) 2018-12-29 2020-03-03 Cree, Inc. Laser-assisted method for parting crystalline material
US10611052B1 (en) 2019-05-17 2020-04-07 Cree, Inc. Silicon carbide wafers with relaxed positive bow and related methods

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0152616A3 (en) * 1983-12-23 1986-03-19 International Paper Company Method and apparatus to achieve raw edge protection
TW350095B (en) * 1995-11-21 1999-01-11 Daido Hoxan Inc Cutting method and apparatus for semiconductor materials
JP2000094221A (en) 1998-09-24 2000-04-04 Toyo Advanced Technologies Co Ltd Electric discharge wire saw
TWI520269B (en) * 2002-12-03 2016-02-01 Hamamatsu Photonics Kk Cutting method of semiconductor substrate
JP4753628B2 (en) 2004-06-11 2011-08-24 昭和電工株式会社 Method for manufacturing compound semiconductor device wafer
JP4183093B2 (en) * 2005-09-12 2008-11-19 コバレントマテリアル株式会社 Silicon wafer manufacturing method
JP2009266892A (en) * 2008-04-22 2009-11-12 Sumitomo Electric Ind Ltd Method for manufacturing compound semiconductor crystalline substrate
US8338218B2 (en) 2008-06-26 2012-12-25 Semiconductor Energy Laboratory Co., Ltd. Photoelectric conversion device module and manufacturing method of the photoelectric conversion device module
JP6004338B2 (en) * 2011-02-10 2016-10-05 信越ポリマー株式会社 Single crystal substrate manufacturing method and internal modified layer forming single crystal member
JP2012238746A (en) * 2011-05-12 2012-12-06 Disco Abrasive Syst Ltd Division method of optical device wafer
JP5917862B2 (en) * 2011-08-30 2016-05-18 浜松ホトニクス株式会社 Processing object cutting method
JP6002982B2 (en) 2011-08-31 2016-10-05 株式会社フジシール Pouch container
JP6026222B2 (en) * 2012-10-23 2016-11-16 株式会社ディスコ Wafer processing method
JP5836998B2 (en) * 2013-04-23 2015-12-24 株式会社豊田中央研究所 Crack generation method, laser cutting method and crack generation apparatus
JP6399914B2 (en) * 2014-12-04 2018-10-03 株式会社ディスコ Wafer generation method

Also Published As

Publication number Publication date
KR20160084799A (en) 2016-07-14
US20160193690A1 (en) 2016-07-07
US9517530B2 (en) 2016-12-13
DE102016200027A1 (en) 2016-07-07
JP6395613B2 (en) 2018-09-26
JP2016127186A (en) 2016-07-11
TWI673785B (en) 2019-10-01
TW201635364A (en) 2016-10-01
CN105750742B (en) 2019-11-29
CN105750742A (en) 2016-07-13

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