SG89359A1 - Projection electron-beam lithography masks using advanced materials and membrane size - Google Patents

Projection electron-beam lithography masks using advanced materials and membrane size

Info

Publication number
SG89359A1
SG89359A1 SG200006572A SG200006572A SG89359A1 SG 89359 A1 SG89359 A1 SG 89359A1 SG 200006572 A SG200006572 A SG 200006572A SG 200006572 A SG200006572 A SG 200006572A SG 89359 A1 SG89359 A1 SG 89359A1
Authority
SG
Singapore
Prior art keywords
beam lithography
advanced materials
lithography masks
projection electron
membrane size
Prior art date
Application number
SG200006572A
Other languages
English (en)
Inventor
J Brooks Cameron
J Lercel Michael
A Powers Lynn
Original Assignee
Ibm
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ibm filed Critical Ibm
Publication of SG89359A1 publication Critical patent/SG89359A1/en

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/50—Mask blanks not covered by G03F1/20 - G03F1/34; Preparation thereof
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/20—Masks or mask blanks for imaging by charged particle beam [CPB] radiation, e.g. by electron beam; Preparation thereof
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/54—Absorbers, e.g. of opaque materials
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/62—Pellicles, e.g. pellicle assemblies, e.g. having membrane on support frame; Preparation thereof
    • G03F1/64—Pellicles, e.g. pellicle assemblies, e.g. having membrane on support frame; Preparation thereof characterised by the frames, e.g. structure or material, including bonding means therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/04—Means for controlling the discharge
    • H01J2237/045—Diaphragms
    • H01J2237/0451—Diaphragms with fixed aperture
    • H01J2237/0453—Diaphragms with fixed aperture multiple apertures
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/30—Electron or ion beam tubes for processing objects
    • H01J2237/317—Processing objects on a microscale
    • H01J2237/3175—Lithography
    • H01J2237/31793—Problems associated with lithography
    • H01J2237/31794—Problems associated with lithography affecting masks

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Electron Beam Exposure (AREA)
SG200006572A 1999-12-06 2000-11-13 Projection electron-beam lithography masks using advanced materials and membrane size SG89359A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US09/455,570 US6261726B1 (en) 1999-12-06 1999-12-06 Projection electron-beam lithography masks using advanced materials and membrane size

Publications (1)

Publication Number Publication Date
SG89359A1 true SG89359A1 (en) 2002-06-18

Family

ID=23809373

Family Applications (1)

Application Number Title Priority Date Filing Date
SG200006572A SG89359A1 (en) 1999-12-06 2000-11-13 Projection electron-beam lithography masks using advanced materials and membrane size

Country Status (5)

Country Link
US (1) US6261726B1 (ja)
JP (1) JP3470963B2 (ja)
KR (1) KR100426249B1 (ja)
SG (1) SG89359A1 (ja)
TW (1) TW457543B (ja)

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* Cited by examiner, † Cited by third party
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JP2000206675A (ja) * 1999-01-12 2000-07-28 Nikon Corp 転写マスク用ブランクスおよび転写マスク
JP3339477B2 (ja) * 1999-10-04 2002-10-28 日本電気株式会社 ステンシルマスク及びステンシルマスクの形成方法
US6576529B1 (en) * 1999-12-07 2003-06-10 Agere Systems Inc. Method of forming an alignment feature in or on a multilayered semiconductor structure
JP4434440B2 (ja) * 2000-06-19 2010-03-17 Ｎｅｃエレクトロニクス株式会社 電子線露光用マスクの検査方法および電子線露光方法
US6555297B1 (en) * 2000-07-25 2003-04-29 International Business Machines Corporation Etch stop barrier for stencil mask fabrication
US6855467B2 (en) * 2000-09-05 2005-02-15 Hoya Corporation Transfer mask, method of dividing pattern or transfer mask, and method of manufacturing transfer mask
US6528215B1 (en) * 2000-11-07 2003-03-04 International Business Machines Corporation Substrate for diamond stencil mask and method for forming
JP2002226290A (ja) * 2000-11-29 2002-08-14 Japan Fine Ceramics Center ダイヤモンド加工体の製造方法、及び、ダイヤモンド加工体
US6749968B2 (en) 2001-08-09 2004-06-15 Freescale Semiconductor, Inc. Method for fabricating a thin-membrane stencil mask and method for making a semiconductor device using the same
US20040119163A1 (en) * 2002-12-23 2004-06-24 Lawrence Wong Method of making semiconductor devices using carbon nitride, a low-dielectric-constant hard mask and/or etch stop
KR100555503B1 (ko) * 2003-06-27 2006-03-03 삼성전자주식회사 메인 스트럿과 보조 스트럿을 가지는 스텐실 마스크 및 그제조 방법
JP2005340835A (ja) * 2004-05-28 2005-12-08 Hoya Corp 電子線露光用マスクブランクおよびマスク
US6974772B1 (en) * 2004-08-19 2005-12-13 Intel Corporation Integrated low-k hard mask
WO2008010959A2 (en) * 2006-07-14 2008-01-24 The Trustees Of The University Of Pennsylvania Beam ablation lithography
US7863563B2 (en) * 2007-03-08 2011-01-04 International Business Machines Corporation Carbon tube for electron beam application
WO2016171754A1 (en) * 2015-04-21 2016-10-27 Intel Corporation Fine alignment system for electron beam exposure system
US10418243B2 (en) 2015-10-09 2019-09-17 Applied Materials, Inc. Ultra-high modulus and etch selectivity boron-carbon hardmask films
JP7096031B2 (ja) * 2017-06-26 2022-07-05 日本特殊陶業株式会社 基板保持部材
CN113740034B (zh) * 2021-08-19 2024-04-30 中国科学院合肥物质科学研究院 基于光学干涉的薄膜均匀性检测系统

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4260670A (en) 1979-07-12 1981-04-07 Western Electric Company, Inc. X-ray mask
US4436797A (en) 1982-06-30 1984-03-13 International Business Machines Corporation X-Ray mask
JP3171590B2 (ja) 1990-08-28 2001-05-28 住友電気工業株式会社 Ｘ線マスクとその製造方法
JP3071876B2 (ja) 1991-01-08 2000-07-31 株式会社東芝 Ｘ線マスク、その製造方法、及びこれを用いた露光方法
JPH0562888A (ja) 1991-08-30 1993-03-12 Fujitsu Ltd Ｘ線マスクおよびそれを用いたパターン転写方法
JPH0562889A (ja) 1991-09-04 1993-03-12 Seiko Epson Corp エツクス線露光マスク
US5260151A (en) 1991-12-30 1993-11-09 At&T Bell Laboratories Device manufacture involving step-and-scan delineation
US5674413A (en) 1993-12-23 1997-10-07 International Business Machines Corporation Scattering reticle for electron beam systems
JPH0934103A (ja) 1995-05-17 1997-02-07 Nikon Corp 荷電粒子線転写用マスク
JPH0992616A (ja) 1995-07-18 1997-04-04 Canon Inc メンブレン及びマスク、これを用いた露光装置やデバイス生産方法
JPH10106943A (ja) * 1996-06-04 1998-04-24 Nikon Corp マスク用基板の製造方法
US5781607A (en) 1996-10-16 1998-07-14 Ibm Corporation Membrane mask structure, fabrication and use
JPH10135103A (ja) 1996-10-25 1998-05-22 Nikon Corp 荷電粒子線転写用マスクまたはｘ線転写用マスクの製造方法
JPH10199802A (ja) 1997-01-13 1998-07-31 Mitsubishi Materials Corp 照射ｘ線によるメンブレンの経時的位置ずれの発生が少ないｘ線リソグラフィー用マスク
JPH10198024A (ja) 1997-01-13 1998-07-31 Mitsubishi Materials Corp 照射ｘ線によるメンブレンの経時的位置ずれの発生が少ないｘ線リソグラフィー用マスク
JPH10208999A (ja) * 1997-01-17 1998-08-07 Hitachi Ltd 露光方法および露光装置
US5942760A (en) 1997-11-03 1999-08-24 Motorola Inc. Method of forming a semiconductor device utilizing scalpel mask, and mask therefor
US5899728A (en) 1997-12-22 1999-05-04 Motorola, Inc. Method of forming a lithographic mask
JPH11219899A (ja) * 1998-01-30 1999-08-10 Hoya Corp Ｘ線マスクブランク及びその製造方法並びにｘ線マスクの製造方法
US6140020A (en) * 1998-11-30 2000-10-31 Motorola, Inc. Method for manufacturing a semiconductor wafer using a mask that has several regions with different scattering ability

Also Published As

Publication number Publication date
KR100426249B1 (ko) 2004-04-08
JP2001189271A (ja) 2001-07-10
US6261726B1 (en) 2001-07-17
JP3470963B2 (ja) 2003-11-25
TW457543B (en) 2001-10-01
KR20010062033A (ko) 2001-07-07

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