AU2002221049A1 - X-ray projection exposure device, x-ray projection exposure method, and semiconductor device - Google Patents

X-ray projection exposure device, x-ray projection exposure method, and semiconductor device

Info

Publication number
AU2002221049A1
AU2002221049A1 AU2002221049A AU2104902A AU2002221049A1 AU 2002221049 A1 AU2002221049 A1 AU 2002221049A1 AU 2002221049 A AU2002221049 A AU 2002221049A AU 2104902 A AU2104902 A AU 2104902A AU 2002221049 A1 AU2002221049 A1 AU 2002221049A1
Authority
AU
Australia
Prior art keywords
projection exposure
ray projection
semiconductor device
exposure method
ray
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002221049A
Inventor
Tetsuya Oshino
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp filed Critical Nikon Corp
Publication of AU2002221049A1 publication Critical patent/AU2002221049A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70233—Optical aspects of catoptric systems, i.e. comprising only reflective elements, e.g. extreme ultraviolet [EUV] projection systems
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • G03F9/7088—Alignment mark detection, e.g. TTR, TTL, off-axis detection, array detector, video detection
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • G03F9/7096—Arrangement, mounting, housing, environment, cleaning or maintenance of apparatus

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Multimedia (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
AU2002221049A 2000-12-06 2001-12-05 X-ray projection exposure device, x-ray projection exposure method, and semiconductor device Abandoned AU2002221049A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2000371052 2000-12-06
JP2000-371052 2000-12-06
PCT/JP2001/010615 WO2002047132A1 (en) 2000-12-06 2001-12-05 X-ray projection exposure device, x-ray projection exposure method, and semiconductor device

Publications (1)

Publication Number Publication Date
AU2002221049A1 true AU2002221049A1 (en) 2002-06-18

Family

ID=18840835

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2002221049A Abandoned AU2002221049A1 (en) 2000-12-06 2001-12-05 X-ray projection exposure device, x-ray projection exposure method, and semiconductor device

Country Status (7)

Country Link
US (1) US6816568B2 (en)
EP (1) EP1265271A4 (en)
JP (1) JPWO2002047132A1 (en)
KR (1) KR20020074232A (en)
AU (1) AU2002221049A1 (en)
TW (1) TW573235B (en)
WO (1) WO2002047132A1 (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4492538B2 (en) * 2003-08-29 2010-06-30 株式会社ニコン Exposure equipment
US7695688B2 (en) * 2003-09-19 2010-04-13 Applied Biosystems, Llc High density plate filler
US7929114B2 (en) * 2007-01-17 2011-04-19 Carl Zeiss Smt Gmbh Projection optics for microlithography
TW201248336A (en) 2011-04-22 2012-12-01 Mapper Lithography Ip Bv Lithography system for processing a target, such as a wafer, and a method for operating a lithography system for processing a target, such as a wafer
KR101780089B1 (en) 2011-04-22 2017-09-19 마퍼 리쏘그라피 아이피 비.브이. Position determination in a lithography system using a substrate having a partially reflective position mark
JP5932023B2 (en) 2011-05-13 2016-06-08 マッパー・リソグラフィー・アイピー・ビー．ブイ． Lithographic system for processing at least part of a target
JP6412163B2 (en) 2014-05-13 2018-10-24 エーエスエムエル ネザーランズ ビー．ブイ． Substrate and patterning device used in metrology, metrology method, and device manufacturing method

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3752388T2 (en) * 1986-07-11 2006-10-19 Canon K.K. Reduction X-ray reflection type projection exposure system
US5243195A (en) 1991-04-25 1993-09-07 Nikon Corporation Projection exposure apparatus having an off-axis alignment system and method of alignment therefor
KR100300618B1 (en) 1992-12-25 2001-11-22 오노 시게오 EXPOSURE METHOD, EXPOSURE DEVICE, AND DEVICE MANUFACTURING METHOD USING THE DEVICE
US6118515A (en) 1993-12-08 2000-09-12 Nikon Corporation Scanning exposure method
CN1244018C (en) 1996-11-28 2006-03-01 株式会社尼康 Expoure method and equipment producing method
WO1999026278A1 (en) * 1997-11-14 1999-05-27 Nikon Corporation Exposure apparatus and method of manufacturing the same, and exposure method
US6240158B1 (en) * 1998-02-17 2001-05-29 Nikon Corporation X-ray projection exposure apparatus with a position detection optical system
JPH11345761A (en) 1998-05-29 1999-12-14 Nikon Corp Scanning type aligner
JP2000173910A (en) * 1998-12-02 2000-06-23 Canon Inc Projection exposure device

Also Published As

Publication number Publication date
WO2002047132A1 (en) 2002-06-13
EP1265271A4 (en) 2006-03-15
US20030179849A1 (en) 2003-09-25
TW573235B (en) 2004-01-21
KR20020074232A (en) 2002-09-28
EP1265271A1 (en) 2002-12-11
US6816568B2 (en) 2004-11-09
JPWO2002047132A1 (en) 2004-04-08

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