AU2001296428A1 - Dynamic mask projection stereo micro lithography - Google Patents
Dynamic mask projection stereo micro lithographyInfo
- Publication number
- AU2001296428A1 AU2001296428A1 AU2001296428A AU9642801A AU2001296428A1 AU 2001296428 A1 AU2001296428 A1 AU 2001296428A1 AU 2001296428 A AU2001296428 A AU 2001296428A AU 9642801 A AU9642801 A AU 9642801A AU 2001296428 A1 AU2001296428 A1 AU 2001296428A1
- Authority
- AU
- Australia
- Prior art keywords
- dynamic mask
- mask projection
- micro lithography
- projection stereo
- stereo micro
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0037—Production of three-dimensional images
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C64/00—Additive manufacturing, i.e. manufacturing of three-dimensional [3D] objects by additive deposition, additive agglomeration or additive layering, e.g. by 3D printing, stereolithography or selective laser sintering
- B29C64/10—Processes of additive manufacturing
- B29C64/106—Processes of additive manufacturing using only liquids or viscous materials, e.g. depositing a continuous bead of viscous material
- B29C64/124—Processes of additive manufacturing using only liquids or viscous materials, e.g. depositing a continuous bead of viscous material using layers of liquid which are selectively solidified
- B29C64/129—Processes of additive manufacturing using only liquids or viscous materials, e.g. depositing a continuous bead of viscous material using layers of liquid which are selectively solidified characterised by the energy source therefor, e.g. by global irradiation combined with a mask
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70216—Mask projection systems
- G03F7/70283—Mask effects on the imaging process
- G03F7/70291—Addressable masks, e.g. spatial light modulators [SLMs], digital micro-mirror devices [DMDs] or liquid crystal display [LCD] patterning devices
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70416—2.5D lithography
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C64/00—Additive manufacturing, i.e. manufacturing of three-dimensional [3D] objects by additive deposition, additive agglomeration or additive layering, e.g. by 3D printing, stereolithography or selective laser sintering
- B29C64/10—Processes of additive manufacturing
- B29C64/106—Processes of additive manufacturing using only liquids or viscous materials, e.g. depositing a continuous bead of viscous material
- B29C64/124—Processes of additive manufacturing using only liquids or viscous materials, e.g. depositing a continuous bead of viscous material using layers of liquid which are selectively solidified
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B33—ADDITIVE MANUFACTURING TECHNOLOGY
- B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
- B33Y10/00—Processes of additive manufacturing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B33—ADDITIVE MANUFACTURING TECHNOLOGY
- B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
- B33Y30/00—Apparatus for additive manufacturing; Details thereof or accessories therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B33—ADDITIVE MANUFACTURING TECHNOLOGY
- B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
- B33Y80/00—Products made by additive manufacturing
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US23579900P | 2000-09-27 | 2000-09-27 | |
US60/235,799 | 2000-09-27 | ||
PCT/US2001/030604 WO2002027408A2 (en) | 2000-09-27 | 2001-09-27 | Dynamic mask projection stereo micro lithography |
Publications (1)
Publication Number | Publication Date |
---|---|
AU2001296428A1 true AU2001296428A1 (en) | 2002-04-08 |
Family
ID=22886956
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AU2001296428A Abandoned AU2001296428A1 (en) | 2000-09-27 | 2001-09-27 | Dynamic mask projection stereo micro lithography |
Country Status (3)
Country | Link |
---|---|
US (1) | US7088432B2 (en) |
AU (1) | AU2001296428A1 (en) |
WO (1) | WO2002027408A2 (en) |
Families Citing this family (68)
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US6643001B1 (en) * | 1998-11-20 | 2003-11-04 | Revco, Inc. | Patterned platelets |
US7235195B2 (en) * | 2002-09-06 | 2007-06-26 | Novartis Ag | Method for making opthalmic devices |
FR2859543B1 (en) * | 2003-09-08 | 2005-12-09 | Pascal Joffre | SYSTEM FOR MANUFACTURING A THREE-DIMENSIONAL OBJECT IN A POLYMERIZABLE PHOTO MATERIAL |
DE102004022961B4 (en) * | 2004-05-10 | 2008-11-20 | Envisiontec Gmbh | Method for producing a three-dimensional object with resolution improvement by means of pixel shift |
JP5184080B2 (en) | 2004-05-10 | 2013-04-17 | エンビジョンテク・ゲゼルシャフト・ミット・ベシュレンクテル・ハフツング | 3D object manufacturing process with resolution improvement by pixel shift |
DE102004064131B4 (en) * | 2004-05-10 | 2015-07-16 | Envisiontec Gmbh | Method for generating a bitmap and device for producing a three-dimensional object |
US7568904B2 (en) * | 2005-03-03 | 2009-08-04 | Laser Solutions Co., Ltd. | Stereolithography apparatus |
US7758799B2 (en) * | 2005-04-01 | 2010-07-20 | 3D Systems, Inc. | Edge smoothness with low resolution projected images for use in solid imaging |
DE102006019963B4 (en) | 2006-04-28 | 2023-12-07 | Envisiontec Gmbh | Device and method for producing a three-dimensional object by layer-by-layer solidifying a material that can be solidified under the influence of electromagnetic radiation using mask exposure |
DE102006019964C5 (en) | 2006-04-28 | 2021-08-26 | Envisiontec Gmbh | Device and method for producing a three-dimensional object by means of mask exposure |
US9415544B2 (en) * | 2006-08-29 | 2016-08-16 | 3D Systems, Inc. | Wall smoothness, feature accuracy and resolution in projected images via exposure levels in solid imaging |
DE102006041875A1 (en) * | 2006-09-01 | 2008-03-13 | Seereal Technologies S.A. | Holographic projection system with micromirrors for light modulation |
US20090015922A1 (en) * | 2007-06-29 | 2009-01-15 | Allview Research Llc | Writing a diffractive structure |
DE102007041489A1 (en) * | 2007-08-31 | 2009-03-05 | Deltamed Gmbh | Flexible medical-technical molded body and method for its production |
US20110033887A1 (en) * | 2007-09-24 | 2011-02-10 | Fang Nicholas X | Three-Dimensional Microfabricated Bioreactors with Embedded Capillary Network |
DK2052693T4 (en) † | 2007-10-26 | 2021-03-15 | Envisiontec Gmbh | Process and free-form manufacturing system to produce a three-dimensional object |
DE102008006438B4 (en) * | 2008-01-28 | 2011-08-25 | Carl Zeiss SMT GmbH, 73447 | Method and device for structuring a radiation-sensitive material |
US20090199392A1 (en) * | 2008-02-11 | 2009-08-13 | General Electric Company | Ultrasound transducer probes and system and method of manufacture |
US8048359B2 (en) | 2008-10-20 | 2011-11-01 | 3D Systems, Inc. | Compensation of actinic radiation intensity profiles for three-dimensional modelers |
DE102008043324B4 (en) | 2008-10-30 | 2010-11-11 | Carl Zeiss Smt Ag | Optical arrangement for the three-dimensional structuring of a material layer |
CN101464619B (en) * | 2008-12-26 | 2011-03-16 | 顾金昌 | Digital stereo puzzle projection imaging lighting equipment and its operation method |
DE102009037815B4 (en) * | 2009-08-18 | 2016-06-09 | Sintermask Gmbh | Method and device for producing a three-dimensional object |
IT1397457B1 (en) * | 2010-01-12 | 2013-01-10 | Dws Srl | MODELING PLATE FOR A STEREOLITHOGRAPHIC MACHINE, A STEREOLITHOGRAPHIC MACHINE USING SUCH A MODELING AND TOOL PLATE FOR CLEANING SUCH A MODELING PLATE. |
US20140093690A1 (en) * | 2011-05-31 | 2014-04-03 | Nanoptics, Incorporated | Method and apparatus for lithographic manufacture of multi-component polymeric fiber plates |
US8853918B2 (en) * | 2011-09-22 | 2014-10-07 | General Electric Company | Transducer structure for a transducer probe and methods of fabricating same |
US8691476B2 (en) | 2011-12-16 | 2014-04-08 | Taiwan Semiconductor Manufacturing Company, Ltd. | EUV mask and method for forming the same |
WO2014033027A1 (en) * | 2012-08-28 | 2014-03-06 | Ivoclar Vivadent Ag | Method for constructing a shaped body |
FR3000698B1 (en) * | 2013-01-09 | 2015-02-06 | Phidias Technologies | FABRICATION OF A VOLUME OBJECT BY LITHOGRAPHY, WITH IMPROVED SPATIAL RESOLUTION |
US9308583B2 (en) | 2013-03-05 | 2016-04-12 | Lawrence Livermore National Security, Llc | System and method for high power diode based additive manufacturing |
US9128385B2 (en) | 2013-08-19 | 2015-09-08 | Apple Inc. | Adaptive photomasks and methods for using the same |
US9738013B1 (en) | 2013-12-19 | 2017-08-22 | Hrl Laboratories, Llc | Multi-chemistry microlattice structures and methods of manufacturing the same |
US9527244B2 (en) | 2014-02-10 | 2016-12-27 | Global Filtration Systems | Apparatus and method for forming three-dimensional objects from solidifiable paste |
US9771998B1 (en) | 2014-02-13 | 2017-09-26 | Hrl Laboratories, Llc | Hierarchical branched micro-truss structure and methods of manufacturing the same |
US10464307B2 (en) | 2014-05-20 | 2019-11-05 | The Regents Of The University Of California | Layerless bioprinting via dynamic optical projection and uses thereof |
DE102014215218A1 (en) * | 2014-08-01 | 2016-02-04 | BEGO Bremer Goldschlägerei Wilh. Herbst GmbH & Co. KG | Stereolithography unit with homogenized beam path |
US9733429B2 (en) | 2014-08-18 | 2017-08-15 | Hrl Laboratories, Llc | Stacked microlattice materials and fabrication processes |
WO2016063996A1 (en) * | 2014-10-20 | 2016-04-28 | (주)아이투스 인터내셔날 | Three-dimensional printer |
DE102015103389A1 (en) * | 2015-03-09 | 2016-09-15 | Schultheiss Gmbh | Method and device for correcting an inhomogeneous intensity distribution of a radiation field generated by a radiation source |
US11919229B2 (en) | 2015-04-16 | 2024-03-05 | Lawrence Livermore National Security, Llc | Large area projection micro stereolithography |
GB201508178D0 (en) * | 2015-05-13 | 2015-06-24 | Photocentric Ltd | Method for making an object |
US10843415B1 (en) * | 2015-08-07 | 2020-11-24 | University Of South Florida | Projection material processing system and associated method of use |
US10221498B2 (en) | 2015-08-11 | 2019-03-05 | Lawrence Livermore National Security, Llc | Method of manufacturing a micro heatsink by an additive process |
WO2017052237A1 (en) * | 2015-09-22 | 2017-03-30 | 주식회사 캐리마 | Photocurable 3d forming method and photocurable 3d forming apparatus |
US10003059B2 (en) | 2015-10-13 | 2018-06-19 | Lawrence Livermore National Security, Llc | Ion conductive inks and solutions for additive manufacturing of lithium microbatteries |
US20180290380A1 (en) * | 2015-10-15 | 2018-10-11 | Saint-Gobain Ceramics & Plastics, Inc. | Method for forming a three dimensional body from a mixture with a high content of solid particles |
US10286600B2 (en) | 2015-10-21 | 2019-05-14 | Lawrence Livermore National Security, Llc | Microporous membrane for stereolithography resin delivery |
EP3368227B1 (en) | 2015-10-30 | 2021-12-08 | Seurat Technologies, Inc. | Additive manufacturing system and method |
US11701819B2 (en) | 2016-01-28 | 2023-07-18 | Seurat Technologies, Inc. | Additive manufacturing, spatial heat treating system and method |
EP3995277A1 (en) | 2016-01-29 | 2022-05-11 | Seurat Technologies, Inc. | System for additive manufacturing |
US10747033B2 (en) | 2016-01-29 | 2020-08-18 | Lawrence Livermore National Security, Llc | Cooler for optics transmitting high intensity light |
US10500796B1 (en) * | 2016-04-20 | 2019-12-10 | Isac Lazarovits | Dynamic tissue microfabrication through digital photolithography system and methods |
US10875247B2 (en) | 2016-07-15 | 2020-12-29 | Lawrence Livermore National Securitv. LLC | Multi-beam resin curing system and method for whole-volume additive manufacturing |
US11072160B2 (en) * | 2016-08-23 | 2021-07-27 | Lawrence Livermore National Security, Llc | System and method for stimulated emission depletion projection stereolithography |
US10919286B2 (en) * | 2017-01-13 | 2021-02-16 | GM Global Technology Operations LLC | Powder bed fusion system with point and area scanning laser beams |
KR102453653B1 (en) | 2017-05-11 | 2022-10-11 | 쇠라 테크널러지스 인코포레이티드 | Switchyard Beam Routing of Patterned Light for Additive Manufacturing |
CN108943695A (en) * | 2017-05-27 | 2018-12-07 | 三纬国际立体列印科技股份有限公司 | The 3D Method of printing of binary photocuring 3D printer |
KR102636194B1 (en) | 2017-07-21 | 2024-02-19 | 생-고뱅 퍼포먼스 플라스틱스 코포레이션 | Method of forming a three-dimensional body |
CN109664502A (en) * | 2017-10-16 | 2019-04-23 | 三纬国际立体列印科技股份有限公司 | Three-dimensional printing device |
WO2019089007A1 (en) * | 2017-10-31 | 2019-05-09 | Lawrence Livermore National Security, Llc | System and method for depth resolved parallel two-photon polymerization for scalable submicron additive manufacturing |
US11130288B2 (en) * | 2018-06-27 | 2021-09-28 | Lawrence Livermore National Security, Llc | Dual wavelength negative imaging DLP-SLA system |
US11376795B1 (en) | 2018-09-21 | 2022-07-05 | University Of South Florida | Sintering monitoring method |
CN116021031A (en) | 2018-12-19 | 2023-04-28 | 速尔特技术有限公司 | Additive manufacturing system using pulsed laser for two-dimensional printing |
ES2916577T3 (en) * | 2019-02-27 | 2022-07-01 | Ivoclar Vivadent Ag | Stereolithography device and a method for adjusting a stereolithography device |
WO2020176855A1 (en) * | 2019-02-28 | 2020-09-03 | 3D Systems, Inc. | High resolution three-dimensional printing system |
CN109822891B (en) * | 2019-03-13 | 2023-09-08 | 重庆摩方科技有限公司 | High-precision large-format stereoscopic projection 3D printing system and printing method thereof |
CN110239085B (en) * | 2019-05-09 | 2021-07-23 | 上海天马微电子有限公司 | Three-dimensional printing device |
US11667521B2 (en) | 2019-08-26 | 2023-06-06 | City University Of Hong Kong | Method of constructing a micromechanical device |
US11833742B2 (en) | 2020-06-26 | 2023-12-05 | The Regents Of The University Of California | High-fidelity 3D printing using flashing photopolymerization |
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US5236637A (en) * | 1984-08-08 | 1993-08-17 | 3D Systems, Inc. | Method of and apparatus for production of three dimensional objects by stereolithography |
US5523193A (en) * | 1988-05-31 | 1996-06-04 | Texas Instruments Incorporated | Method and apparatus for patterning and imaging member |
US5198159A (en) * | 1990-10-09 | 1993-03-30 | Matsushita Electric Works, Ltd. | Process of fabricating three-dimensional objects from a light curable resin liquid |
US5677107A (en) * | 1991-10-02 | 1997-10-14 | Spectra Group Limited, Inc. | Production of three-dimensional objects |
US5545367A (en) * | 1992-04-15 | 1996-08-13 | Soane Technologies, Inc. | Rapid prototype three dimensional stereolithography |
DE4302418A1 (en) * | 1993-01-28 | 1994-08-11 | Eos Electro Optical Syst | Method and device for producing a three-dimensional object |
US5870176A (en) * | 1996-06-19 | 1999-02-09 | Sandia Corporation | Maskless lithography |
WO1998004950A1 (en) * | 1996-07-25 | 1998-02-05 | Anvik Corporation | Seamless, maskless lithography system using spatial light modulator |
WO1998006560A1 (en) | 1996-08-08 | 1998-02-19 | Sri International | Apparatus for automated fabrication of three-dimensional objects, and associated methods of use |
JP3825506B2 (en) * | 1996-09-02 | 2006-09-27 | Jsr株式会社 | Liquid curable resin composition |
US6295153B1 (en) * | 1998-06-04 | 2001-09-25 | Board Of Regents, The University Of Texas System | Digital optical chemistry micromirror imager |
US6200646B1 (en) * | 1999-08-25 | 2001-03-13 | Spectra Group Limited, Inc. | Method for forming polymeric patterns, relief images and colored polymeric bodies using digital light processing technology |
-
2001
- 2001-09-27 AU AU2001296428A patent/AU2001296428A1/en not_active Abandoned
- 2001-09-27 US US10/380,229 patent/US7088432B2/en not_active Expired - Lifetime
- 2001-09-27 WO PCT/US2001/030604 patent/WO2002027408A2/en active Application Filing
Also Published As
Publication number | Publication date |
---|---|
US7088432B2 (en) | 2006-08-08 |
WO2002027408A3 (en) | 2003-01-09 |
US20050259785A1 (en) | 2005-11-24 |
WO2002027408A2 (en) | 2002-04-04 |
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