AU2001250703A1 - Device for x-ray lithography - Google Patents

Device for x-ray lithography

Info

Publication number
AU2001250703A1
AU2001250703A1 AU2001250703A AU2001250703A AU2001250703A1 AU 2001250703 A1 AU2001250703 A1 AU 2001250703A1 AU 2001250703 A AU2001250703 A AU 2001250703A AU 2001250703 A AU2001250703 A AU 2001250703A AU 2001250703 A1 AU2001250703 A1 AU 2001250703A1
Authority
AU
Australia
Prior art keywords
ray lithography
lithography
ray
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
AU2001250703A
Other versions
AU2001250703B2 (en
Inventor
Muradin Abubekirovich Kumakhov
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from RU2000133040/06A external-priority patent/RU2187160C1/en
Application filed by Individual filed Critical Individual
Publication of AU2001250703A1 publication Critical patent/AU2001250703A1/en
Application granted granted Critical
Publication of AU2001250703B2 publication Critical patent/AU2001250703B2/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

AU2001250703A 2000-12-29 2001-04-03 Device for x-ray lithography Ceased AU2001250703B2 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
RU2000133040 2000-12-29
RU2000133040/06A RU2187160C1 (en) 2000-12-29 2000-12-29 X-ray lithographer
PCT/RU2001/000134 WO2002054413A1 (en) 2000-12-29 2001-04-03 Device for x-ray lithography

Publications (2)

Publication Number Publication Date
AU2001250703A1 true AU2001250703A1 (en) 2003-01-23
AU2001250703B2 AU2001250703B2 (en) 2004-06-24

Family

ID=20244173

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001250703A Ceased AU2001250703B2 (en) 2000-12-29 2001-04-03 Device for x-ray lithography

Country Status (11)

Country Link
US (1) US6865251B2 (en)
EP (1) EP1347461A4 (en)
JP (1) JP3640657B2 (en)
KR (1) KR100466444B1 (en)
CN (1) CN1166987C (en)
AU (1) AU2001250703B2 (en)
CA (1) CA2399878C (en)
HK (1) HK1052577B (en)
RU (1) RU2187160C1 (en)
UA (1) UA73569C2 (en)
WO (1) WO2002054413A1 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7609362B2 (en) * 2004-11-08 2009-10-27 Asml Netherlands B.V. Scanning lithographic apparatus and device manufacturing method
US7742566B2 (en) * 2007-12-07 2010-06-22 General Electric Company Multi-energy imaging system and method using optic devices
US8587768B2 (en) 2010-04-05 2013-11-19 Media Lario S.R.L. EUV collector system with enhanced EUV radiation collection
JP6397690B2 (en) * 2014-08-11 2018-09-26 株式会社日立ハイテクノロジーズ X-ray transmission inspection apparatus and foreign object detection method

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4969169A (en) * 1986-04-15 1990-11-06 Hampshire Instruments, Inc. X-ray lithography system
SU1639313A1 (en) 1989-05-16 1998-04-20 В.Е. Кованцев Quasi-parallel x-ray beam shaping device
DE9117302U1 (en) * 1990-10-31 1999-10-21 X Ray Optical Sys Inc Device for controlling rays of particles, X-rays and gamma rays and applications thereof
US5175755A (en) * 1990-10-31 1992-12-29 X-Ray Optical System, Inc. Use of a kumakhov lens for x-ray lithography
US5497008A (en) * 1990-10-31 1996-03-05 X-Ray Optical Systems, Inc. Use of a Kumakhov lens in analytic instruments
US6271534B1 (en) * 1994-07-08 2001-08-07 Muradin Abubekirovich Kumakhov Device for producing the image of an object using a flux of neutral or charged particles, and an integrated lens for converting such flux of neutral or charged particles
US5570408A (en) * 1995-02-28 1996-10-29 X-Ray Optical Systems, Inc. High intensity, small diameter x-ray beam, capillary optic system
US5745547A (en) * 1995-08-04 1998-04-28 X-Ray Optical Systems, Inc. Multiple channel optic
US5682415A (en) * 1995-10-13 1997-10-28 O'hara; David B. Collimator for x-ray spectroscopy
CN1069136C (en) * 1996-02-17 2001-08-01 北京师范大学 Integral X-ray lens and manufacturing method thereof and equipment using the same
RU2122757C1 (en) 1996-03-06 1998-11-27 Артюков Игорь Анатольевич X-ray lens
RU2109358C1 (en) * 1996-05-17 1998-04-20 Московский государственный институт электроники и математики X-ray flux control device and its manufacturing process
JP2003528333A (en) * 1999-07-21 2003-09-24 ジェイ エム エー アール テクノロジー、インク Collimator and focus optics

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